WO2009033914A1 - Ressort micromécanique - Google Patents

Ressort micromécanique Download PDF

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Publication number
WO2009033914A1
WO2009033914A1 PCT/EP2008/060801 EP2008060801W WO2009033914A1 WO 2009033914 A1 WO2009033914 A1 WO 2009033914A1 EP 2008060801 W EP2008060801 W EP 2008060801W WO 2009033914 A1 WO2009033914 A1 WO 2009033914A1
Authority
WO
WIPO (PCT)
Prior art keywords
spring
deflection
micromechanical
beam sections
stiffness
Prior art date
Application number
PCT/EP2008/060801
Other languages
German (de)
English (en)
Inventor
Stefan GÜNTHNER
Original Assignee
Continental Teves Ag & Co. Ohg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Continental Teves Ag & Co. Ohg filed Critical Continental Teves Ag & Co. Ohg
Priority to US12/677,133 priority Critical patent/US9920808B2/en
Priority to EP08787284.2A priority patent/EP2191162B1/fr
Publication of WO2009033914A1 publication Critical patent/WO2009033914A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs
    • F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/025—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant characterised by having a particular shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs
    • F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/18—Leaf springs
    • F16F1/185—Leaf springs characterised by shape or design of individual leaves
    • F16F1/187—Leaf springs characterised by shape or design of individual leaves shaped into an open profile, i.e. C- or U-shaped

Definitions

  • the invention relates to a micromechanical spring according to the O-term of claim 1, a method for their production from a semiconductor material and the use of the micromechanical spring in micromechanical systems.
  • meandering micromechanical springs it is known to use meandering micromechanical springs to achieve a reasonably linear deflection behavior of an oscillator, such as a spring suspended seismic mass.
  • meandering springs each have relatively large dimensions or a relatively large area in the substrate plane, which is why more substrate area is required and the springs have a relatively large mass, in comparison to simple bar springs.
  • Meander-shaped springs also have the disadvantage that the linearity of their deflection behavior depends essentially on the number of turns, so that meander-shaped springs with particularly pronounced, linear deflection behavior have the disadvantages described above to a greater extent.
  • the object of the present invention is to propose a micromechanical spring which has a substantially adjustable, in particular linear, deflection behavior within a defined deflection interval and which in particular has relatively small dimensions.
  • micromechanical A chanical spring according to claim 1 and the method according to claim 12.
  • the invention is based on the idea of a micromechanical spring, comprising at least two beam sections, which are aligned in the undeflected state of the spring substantially parallel to each other or have an angular width of less than 45 ° to each other, and one or more connecting portions, which the beam sections connect each other, to propose, wherein the beam sections relative to each other in relation to their longitudinal displacement or relative to each other are deflectable, and that the spring in the direction of its beam sections a substantially adjustable, in particular linear, force deflection behavior or a substantially constant spring stiffness within having a defined deflection interval.
  • the invention particularly relates to a micromechanical spring, comprising at least two beam sections, which are aligned in the undeflected state of the spring substantially parallel to each other or have an angular width of less than 45 ° to each other, and one or more connecting portions connecting the beam sections with each other the beam sections are displaceable relative to each other with respect to their longitudinal direction, and that the spring has a force deflection characteristic with a negative second order nonlinearity coefficient of the spring stiffness, at least with respect to a deflection of its beam sections, which special corresponds to a softening of the spring stiffness with increasing deflection.
  • This is particularly advantageous for compensation purposes of the behavior of conventional springs, which have an increasing hardening with increasing deflection.
  • micromechanical spring according to the invention has the advantage over previously known micromechanical springs that the deflection interval within which the spring has a substantially adjustable, in particular linear, deflection behavior is relatively large and that the spring has relatively small dimensions.
  • the micromechanical spring preferably has at least two beam sections, which are arranged essentially directly opposite one another and are connected to one another by means of a connecting section.
  • a beam section differs from a connecting section in particular at least in that the beam section is significantly longer, particularly preferably at least twice as long as the at least one adjoining connecting section, wherein these two sections can merge into one another, in particular in the form of at least one rounding.
  • the beam sections of meander-shaped springs are not displaced relative to each other with respect to their longitudinal direction in the course of a deflection. - A -
  • deflection is expediently the deflection path or the deflection distance meant.
  • a spring is preferably understood to mean a spring system and / or an oscillator which comprises one or more spring segments or elements and in particular additionally one or more seismic masses.
  • this spring or this micromechanical oscillator is particularly preferably deflected at least in the direction of substantially its at least two beam sections and has in this direction a substantially adjustable, in particular linear, deflection behavior.
  • a substantially linear deflection behavior of a spring is preferably understood as meaning a substantially linear relationship between the deflection path and the restoring force, in particular a substantially constant spring rigidity.
  • the non-linearity coefficient of the second order of the spring stiffness is preferably understood to mean the parameter or factor ⁇ [l / m 2 ] in the following equation of the standardized spring stiffness as a function of the deflection x 0 :
  • the spring stiffness is expediently the same Ratio of the restoring force or the deflection force divided by the deflection path.
  • An essentially linear spring and / or a linear spring is preferably understood to mean a micromechanical spring according to the invention and / or a possible, further embodiment.
  • the beam sections and connecting sections are preferably rigidly connected to each other.
  • the spring preferably couples two micromechanical elements to each other or is at least coupled to a substrate, wherein the spring for coupling in each case has a coupling region and / or a coupling element, which in particular comprises at least one additional micromechanical spring element, wherein the at least one additional spring element with the rest of the Spring is coupled substantially rigid.
  • the spring has one or more micromechanical spring elements with which it is coupled via a seismic mass.
  • the entire spring has a substantially adjustable, in particular linear, deflection behavior in the direction of the beam sections.
  • the deflection or vibration properties of a spring comprising a seismic mass, at least one, in particular three, simple spring elements, in particular beam spring elements, by an appropriate design of the beam sections and of the at least one connection section are set.
  • substantially linear deflection or vibration properties of the spring are preferably set essentially in the direction of their beam sections.
  • This embodiment is particularly suitable to form a suspended on simple spring elements, with essentially not set and in particular non-linear properties, oscillator by coupling or additional suspension means of the beam and the at least one connecting portion to form an overall spring whose deflection or Vibration characteristics are substantially adjustable, in particular linear, are.
  • two or more micromechanical springs are coupled together by means of a seismic mass, in particular rigidly.
  • the manufacturing parameters of the spring comprising preferably at least the spatial dimensions and / or the material parameters of the beam sections and the at least one connecting section and in particular the coupling areas and / or the coupling elements, have, in particular respectively, such values or are designed such that the spring in the direction of its beam sections has a substantially adjustable or linear deflection behavior, at least within a defined Auslenkintervalls having.
  • the beam sections and / or the connecting section / s of the spring in the undeflected state are substantially U-shaped, V-shaped or S-shaped and are arranged.
  • the substantially adjustable or linear deflection behavior of the spring is preferably determined at least by the formation of the beam sections with defined lengths and widths and by the arrangement of the at least two beam sections with a defined distance from each other.
  • the spring consists essentially of monocrystalline silicon or is manufactured.
  • the crystal structure of the material of the micromechanical spring is preferably oriented so that the normal of the crystal lattice plane is aligned at substantially 45 ° to the normal of the substrate from which the spring is made. This corresponds in particular to Miller indices of ⁇ 1, 1, 0>.
  • the amount of the second order nonlinearity coefficient of the spring stiffness of the spring is preferably less than 2000000 l / m 2 , in particular less than 300000 l / m 2, with respect to a deflection substantially in the direction of its beam sections.
  • the spring has a negative second order nonlinearity coefficient of spring stiffness with respect to its deflection or the deflection of at least one of its beam portions in the direction of the beam portions. This corresponds in particular to a softening of the spring stiffness with increasing deflection, resulting in compensation tion purposes of Auslenk s conventional spring elements may be advantageous, which have an increasing hardening with increasing deflection.
  • the spring preferably has at least one coupling element comprising at least one additional spring element whose spring stiffness changes within a defined deflection interval, wherein the entire spring is designed so that this changing spring stiffness of the at least one additional spring element is compensated for in its entirety and the spring stiffness of the entire spring is substantially constant with respect to a deflection substantially in the direction of its beam sections within the defined Auslenkungsintervalls.
  • the invention relates to a method for producing the micromechanical spring made of a semiconductor, in particular monocrystalline silicon.
  • the invention also relates to the use of the micromechanical chanical spring in a micromechanical system, especially in micromechanical sensors.
  • the micromechanical spring according to the invention is intended for use in micromechanical systems, preferably in micromechanical sensors.
  • the micromechanical spring is provided for use in acceleration sensors, because there is a linear relationship between acting on a spring suspended mass mass acceleration and the evaluated deflection of the mass is desirable, to which springs with the most linear deflection behavior are useful.
  • the use of the spring according to the invention in micromechanical rotation rate sensors is preferred, in particular for suspending the seismic masses and particularly preferably in order to enable linear deflections with regard to the primary or drive mode.
  • a designated as quadrature disturbance can be avoided, which corresponds to a noise signal of the readout mode, which usually arises due to manufacturing inaccuracies of the springs.
  • relatively large, linear deflections in the drive mode can be realized by the use of the spring according to the invention in a rotation rate sensor.
  • Fig. 7 shows the dependence of the nonlinearity coefficient second order ß the spring constant of a spring embodiment of its dimensions d and 1,
  • FIG. 11 shows a micromechanical spring, which comprises 3 additional spring elements, which are coupled via a seismic mass,
  • Fig. 12 shows an exemplary meander-shaped spring for direct comparison with a in
  • Fig. 13 shown exemplary linear spring
  • Fig. 14 shows the comparative courses of the normalized spring stiffness as a function of the deflection of these two embodiments.
  • a simple rotation rate sensor is exemplified with a seismic mass 1, which is suspended on two beam springs 2an a substrate, not shown.
  • the drive mode of the rotation rate sensor is illustrated, which includes deflections of seismic mass 1 and the beam springs 2.
  • Fig. 1 c) shows a section through Fig. 1 a) in the xz plane, wherein seismic mass 1 is deflected in the z direction and oscillates example in its readout mode.
  • Fig. 2 shows exemplary, feathers with meander structure 3 to which seismic mass 1 of an exemplary, simple rotation rate sensor is suspended.
  • the use of such meander-shaped springs 3 reduces the dependence normalized
  • the gray curve shows an exemplary, typical course of the normal m investigating spring stiffness of an oscillator with meandering Balkenfedern depending on the deflection, which has the same primary frequency as the oscillator with the original beam geometries, which is shown in Fig. 1.
  • FIG. 5 illustrates an exemplary spring element which has the advantage of being insensitive to certain process variations, which in particular cause unwanted, not shown, deflections in the direction perpendicular to the actual, desired deflection.
  • spring element 10 when suitably dimensioned, has the property of being arbitrarily linear.
  • Spring element 10 includes, for example, two mutually substantially parallel beam sections 11 in the undeflected state, as shown in Fig. 5 b), which are connected by a connecting portion 12. As part of a deflection, as illustrated in FIGS. 5 a) and c), beam sections 11 are displaced relative to one another.
  • this structure can be designed so that with increasing deflection, a relaxation of the spring stiffness is achieved, instead of experiencing a hardening of the spring stiffness, as is known from conventional springs.
  • Fig. 7 illustrates for a certain spring geometry by way of example the relationship between the dimensions d and 1, according to the embodiment of Fig. 5, and the nonlinearity coefficient ß. It was ensured that for all combinations d and / the spring stiffness k 0 is identical. This makes it possible for a desired spring stiffness in certain conditions to set the non-linearity positive, negative or as small as possible.
  • Fig. 8 shows some embodiments of substantially linear springs, which differ in the number and configuration of the beam sections, the connecting sections and the coupling areas or coupling elements of each other.
  • FIGS. 9 d) and e) respectively comprises a seismic mass 1.
  • the rigidity along the deflection direction is given primarily by the substantially linear springs 20.
  • FIG. 10 illustrates, by way of example, a seismic mass 1 which is suspended from four linear springs 10 and, thus, can be deflected in a substantially linear, rotational manner, for example.
  • FIG. 11 shows an exemplary embodiment of a micromechanical spring, as a linear spring 20, which is an oscillator at the same time and comprises seismic mass 1 and beam spring elements 22 and is suspended from substrate 30.
  • the linear properties of linear spring 20 are based essentially on the exemplary embodiment of the beam sections 11 and the connecting portion 12 with which the nonlinear deflection properties of the beam spring elements 22 are compensated in the direction of the beam sections.
  • the finite element method opens up the possibility of computer-aided description of spring properties of a beam arrangement made of a specific material whose elastic properties are known.
  • the spring stiffnesses in all spatial directions or around all spatial axes can be described.
  • the location of the spring which corresponds to an assumed as fixed or clamped end of the spring, provided with a corresponding boundary condition and the point corresponding to an assumed as free or deflectable end, by way of example by a certain amount in a spatial direction, or deflected around a spatial axis. From the result of the analysis, for example by determining the reaction force on the deflection path, the stiffness of the spring can be calculated.
  • the spring stiffness can be determined using other known methods, such as the effect of a force on the free end or an acceleration on an attached mass.
  • other known methods can be used, such as the effect of a force on the free end or an acceleration on an attached mass.
  • non-linear material properties, as well as geometric non-linearities can be completely mapped.
  • the deflection-dependent spring stiffness and thus the linearity behavior can be determined. The following describes a method with which the desired deflection behavior can be achieved or set.
  • the parameters ⁇ r have certain limitations on the values they can assume. They can lie approximately within an interval with the limit values a ⁇ Si and b ⁇ :
  • Geometry dimensioning corresponds.
  • the desired simulations can now be performed for each individual geometry dimensioning.
  • To determine the deflection behavior for example, at least three simulations are necessary for this purpose, in which the free end is at least three different values JC I; X 2 , ... x p (p ⁇ 3) into the desired deflection direction is shifted.
  • the result is at least three reaction forces on the deflected free end against the deflection direction: F (X 1 ), F (X 2 ), ... F [x p ].
  • the parameter sets and / or spring designs which can be used to select the desired properties with respect to the stiffness and the spring properties can be selected
  • Non-linearity coefficient ß etc. have.
  • an analytic model can be designed according to the bar theory describing the desired properties.
  • the adjustment of the nonlinearity coefficient can be done by parameter optimization of the geometric dimensions within the analytic model.
  • micromechanical linear spring is described in more detail and contrasted with a conventional, micromechanical, linearity-optimized, meander-shaped spring. As boundary conditions are given:
  • the structure height h is 100 microns.
  • the material used is monocrystalline silicon, the coordinate system given by the crystal directions being rotated 45 degrees about the wafer normal against the coordinate system of the element.
  • the spring stiffness in the deflection direction should be 400 Nm -1 . If a mass of two ⁇ g is held by two springs, then a natural frequency in the deflection direction at 20 kHz is established.
  • the silicon surface occupied by the meandering structure amounts to 0.024 mm 2 .
  • a meandering spring A meandering spring.
  • the dimensions have been selected such that the nonlinearity coefficient beta as small precipitates.
  • the area occupied by the spring structure silicon area amounts to only 0.014 mm 2.
  • FIG. 14 The different linearity behavior of these two different springs from FIGS. 12 and 13 is shown in FIG. 14. Again, the normalized spring constant k (x 0 ) was plotted against the deflection in the deflection direction. While the meandering spring has a nonlinearity coefficient of 1.3 10 6 in the illustrated deflection range, the nonlinearity coefficient of the novel spring structure is smaller than 300 000. In particular, in the new spring structure shown, the nonlinearity coefficient is negative, so that spring-stiffening non-linearities occurring due to additional effects are compensated could.
  • An oscillator with the meandering structure can be operated without instability ranges only up to about 9 microns amplitude, with the novel spring structure stable oscillations up to amplitudes of 23 microns are possible. Furthermore, by comparison with the exemplary embodiment Nearfeder required surface area at the meander structure considerably larger.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

L'invention concerne un ressort micromécanique (10, 20) comportant deux sections de poutre (11) orientées essentiellement parallèles l'une à l'autre dans l'état non-dévié du ressort, ou formant un angle inférieur à 45°, et une ou plusieurs sections de connexion (12) connectant les sections de poutre (11). Les sections de poutre (11) peuvent coulisser l'une par rapport à l'autre dans leur direction longitudinale, et le ressort (10, 20) présente un comportement de déviation de force essentiellement réglable, notamment linéaire, dans la direction de ses sections de poutre (11).
PCT/EP2008/060801 2007-09-10 2008-08-18 Ressort micromécanique WO2009033914A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/677,133 US9920808B2 (en) 2007-09-10 2008-08-18 Micromechanical spring
EP08787284.2A EP2191162B1 (fr) 2007-09-10 2008-08-18 Ressort micromecanique

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007042683.8 2007-09-10
DE102007042683 2007-09-10
DE102007057044.0A DE102007057044B4 (de) 2007-09-10 2007-11-27 Mikromechanische Feder
DE102007057044.0 2007-11-27

Publications (1)

Publication Number Publication Date
WO2009033914A1 true WO2009033914A1 (fr) 2009-03-19

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PCT/EP2008/060801 WO2009033914A1 (fr) 2007-09-10 2008-08-18 Ressort micromécanique

Country Status (4)

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US (1) US9920808B2 (fr)
EP (1) EP2191162B1 (fr)
DE (1) DE102007057044B4 (fr)
WO (1) WO2009033914A1 (fr)

Cited By (3)

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DE102015209030A1 (de) 2015-05-18 2016-11-24 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zum Herstellen einer mikromechanischen Vorrichtung
EP2943158B1 (fr) 2013-01-08 2020-02-26 Medtronic Inc. Prothèse de valve
US11744699B2 (en) 2015-10-09 2023-09-05 Medtronic Vascular, Inc. Heart valve prostheses and methods for percutaneous heart valve replacement

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DE102009002702B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
DE102009045393B4 (de) * 2009-10-06 2017-08-24 Robert Bosch Gmbh Mikromechanisches Bauelement
DE102009046388A1 (de) * 2009-11-04 2011-05-05 Robert Bosch Gmbh Mikromechanisches Bauelement, Vorrichtung zur Strahlablenkung monochromatischen Lichts und Spektrometer
DE102013208699B4 (de) 2013-05-13 2022-10-06 Robert Bosch Gmbh Feder für eine mikromechanische Sensorvorrichtung
DE102014223329A1 (de) * 2014-11-14 2016-05-19 Robert Bosch Gmbh Mikromechanische Feder für Inertialsensor
DE102016203036A1 (de) * 2016-02-26 2017-08-31 Robert Bosch Gmbh Sensorvorrichtung und Herstellungsverfahren für eine Sensorvorrichtung
KR101906038B1 (ko) * 2017-03-08 2018-10-10 현대자동차주식회사 차량의 시트 진동 저감 장치
DE102020208667A1 (de) 2020-07-10 2022-01-13 Robert Bosch Gesellschaft mit beschränkter Haftung Feder, mikromechanisches System, Verfahren zur Herstellung eines mikromechanischen Systems, Verfahren zum Betreiben eines mikromechanischen Systems
DE102020209355A1 (de) 2020-07-24 2022-01-27 Robert Bosch Gesellschaft mit beschränkter Haftung Feder zur Aufhängung einer Masse für ein mikromechanisches System, mikromechanisches System

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Publication number Priority date Publication date Assignee Title
EP2943158B1 (fr) 2013-01-08 2020-02-26 Medtronic Inc. Prothèse de valve
US11833038B2 (en) 2013-01-08 2023-12-05 Medtronic, Inc. Valve prosthesis and method for delivery
DE102015209030A1 (de) 2015-05-18 2016-11-24 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zum Herstellen einer mikromechanischen Vorrichtung
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DE102015209030B4 (de) 2015-05-18 2023-06-07 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zum Herstellen einer mikromechanischen Vorrichtung
US11744699B2 (en) 2015-10-09 2023-09-05 Medtronic Vascular, Inc. Heart valve prostheses and methods for percutaneous heart valve replacement

Also Published As

Publication number Publication date
US20100194008A1 (en) 2010-08-05
DE102007057044B4 (de) 2021-08-05
DE102007057044A1 (de) 2009-03-12
US9920808B2 (en) 2018-03-20
EP2191162B1 (fr) 2021-03-31
EP2191162A1 (fr) 2010-06-02

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