WO2009025261A1 - マルチビーム走査装置 - Google Patents

マルチビーム走査装置 Download PDF

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Publication number
WO2009025261A1
WO2009025261A1 PCT/JP2008/064719 JP2008064719W WO2009025261A1 WO 2009025261 A1 WO2009025261 A1 WO 2009025261A1 JP 2008064719 W JP2008064719 W JP 2008064719W WO 2009025261 A1 WO2009025261 A1 WO 2009025261A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
optical
optical element
inputted
source unit
Prior art date
Application number
PCT/JP2008/064719
Other languages
English (en)
French (fr)
Inventor
Shohei Matsuoka
Original Assignee
Hoya Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corporation filed Critical Hoya Corporation
Priority to JP2009529029A priority Critical patent/JP5384350B2/ja
Priority to EP08827916.1A priority patent/EP2189833B1/en
Priority to US12/674,652 priority patent/US8248679B2/en
Priority to CN200880103799XA priority patent/CN101784939B/zh
Priority to KR1020107005969A priority patent/KR101120487B1/ko
Publication of WO2009025261A1 publication Critical patent/WO2009025261A1/ja
Priority to US13/560,840 priority patent/US8441704B2/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • G02B26/125Details of the optical system between the polygonal mirror and the image plane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/47Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
    • B41J2/471Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
    • B41J2/473Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror using multiple light beams, wavelengths or colours
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • G02B26/123Multibeam scanners, e.g. using multiple light sources or beam splitters
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H04N1/1135Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors for the main-scan only

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)

Abstract

 マルチビーム走査装置は、非平行光が射出される光源部と、所定のパワーを有し、該光源部から射出された光に対して作用する光学素子と、を有する第一光学系を複数組備えるとともに、各第一光学系の後段に配設され、各第一光学系から射出された複数のレーザー光全てが共通に入射し、該レーザー光を偏向する第一偏向器と、該レーザー光の発散度を変更する共通光学系と、を有する第二光学系と、光源部から射出されたレーザー光が光学素子に入射するときの入射光路を平行移動させる光路シフト手段と、を有し、第一偏向器に入射する全ての光は、該第一偏向器の略同一位置に入射するとともに、各光学素子は、当該光学素子の焦点距離だけ当該光学素子から離れた位置で、各光学素子の光軸が交差するように配設されている構成にした。
PCT/JP2008/064719 2007-08-21 2008-08-19 マルチビーム走査装置 WO2009025261A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2009529029A JP5384350B2 (ja) 2007-08-21 2008-08-19 マルチビーム走査装置
EP08827916.1A EP2189833B1 (en) 2007-08-21 2008-08-19 Multibeam scanning device
US12/674,652 US8248679B2 (en) 2007-08-21 2008-08-19 Multibeam scanning device
CN200880103799XA CN101784939B (zh) 2007-08-21 2008-08-19 多光束扫描装置
KR1020107005969A KR101120487B1 (ko) 2007-08-21 2008-08-19 멀티빔 주사 장치
US13/560,840 US8441704B2 (en) 2007-08-21 2012-07-27 Multibeam scanning device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-214398 2007-08-21
JP2007214398 2007-08-21

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/674,652 A-371-Of-International US8248679B2 (en) 2007-08-21 2008-08-19 Multibeam scanning device
US13/560,840 Division US8441704B2 (en) 2007-08-21 2012-07-27 Multibeam scanning device

Publications (1)

Publication Number Publication Date
WO2009025261A1 true WO2009025261A1 (ja) 2009-02-26

Family

ID=40378163

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064719 WO2009025261A1 (ja) 2007-08-21 2008-08-19 マルチビーム走査装置

Country Status (7)

Country Link
US (2) US8248679B2 (ja)
EP (1) EP2189833B1 (ja)
JP (1) JP5384350B2 (ja)
KR (1) KR101120487B1 (ja)
CN (1) CN101784939B (ja)
RU (1) RU2430390C1 (ja)
WO (1) WO2009025261A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7410625B2 (ja) 2021-09-28 2024-01-10 キヤノン株式会社 照明装置、計測装置、基板処理装置、および物品の製造方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITFI20120001A1 (it) * 2012-01-11 2013-07-12 Selex Galileo Spa Modulo di scansione continua, sistema di scansione comprendente detto modulo e relativo metodo di scansione
CN105518509B (zh) 2013-09-05 2020-06-05 麦克马斯特大学 通过调节性折射介质进行聚焦阵列扫描的设备和方法
KR102013050B1 (ko) * 2015-01-23 2019-10-21 코벨코 겐키 가부시키가이샤 제어 수단 및 이것을 구비한 차량 탑재 프로그램의 재기입 장치 그리고 차량 탑재 프로그램의 재기입 방법
EP3259615B1 (en) * 2015-02-20 2019-11-20 Apple Inc. Actuated optical element for light beam scanning device
DE102017215671A1 (de) * 2017-09-06 2019-03-07 Robert Bosch Gmbh Scansystem und Sende- und Empfangsvorrichtung für ein Scansystem
CN108309452A (zh) * 2018-02-28 2018-07-24 重庆西山科技股份有限公司 用于手术导航的激光扫描注册仪
US11277689B2 (en) 2020-02-24 2022-03-15 Logitech Europe S.A. Apparatus and method for optimizing sound quality of a generated audible signal
US11445155B1 (en) * 2021-03-22 2022-09-13 Google Llc Display system with angularly separated lasers
CN114594575A (zh) * 2022-03-31 2022-06-07 歌尔光学科技有限公司 一种光学投影系统以及电子设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002174785A (ja) * 2000-12-08 2002-06-21 Ricoh Opt Ind Co Ltd マルチビーム走査装置における光ビーム調整方法およびマルチビーム走査装置および画像形成装置
JP2005037502A (ja) * 2003-07-16 2005-02-10 Ricoh Co Ltd 光走査装置、画像形成装置および光ビーム位置調整方法
JP2005055793A (ja) * 2003-08-07 2005-03-03 Brother Ind Ltd 画像表示装置
JP2005127852A (ja) * 2003-10-23 2005-05-19 Pentax Corp 走査光学素子検査装置
JP2007133320A (ja) * 2005-11-14 2007-05-31 Sharp Corp 光走査装置及び画像形成装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3088153B2 (ja) * 1991-10-31 2000-09-18 旭光学工業株式会社 走査式描画装置
JP3499359B2 (ja) * 1996-02-14 2004-02-23 株式会社リコー 多ビーム書込光学系
JP3542481B2 (ja) 1997-12-16 2004-07-14 キヤノン株式会社 マルチビーム走査光学系及びそれを用いた画像形成装置
JP4774157B2 (ja) * 2000-04-13 2011-09-14 株式会社リコー マルチビーム光源装置及び光走査装置
JP4148688B2 (ja) 2001-03-07 2008-09-10 株式会社リコー マルチビーム走査装置
US7206014B2 (en) * 2001-07-24 2007-04-17 Ricoh Company, Ltd. Multi-beam pitch adjusting apparatus and image forming apparatus
JP2003295112A (ja) * 2002-04-05 2003-10-15 Canon Inc 走査型画像表示光学系、走査型画像表示装置および画像表示システム
KR100449729B1 (ko) * 2002-06-29 2004-09-22 삼성전자주식회사 주사 광학장치
JP4136616B2 (ja) * 2002-11-14 2008-08-20 キヤノン株式会社 マルチビーム走査光学装置及びそれを用いた画像形成装置
JP4260539B2 (ja) 2003-05-07 2009-04-30 株式会社リコー 光走査装置および画像形成装置
US7450274B2 (en) * 2003-05-07 2008-11-11 Ricoh Company, Ltd. Optical scanning apparatus, image forming apparatus, and beam positioning method
JP4378193B2 (ja) * 2003-09-04 2009-12-02 キヤノン株式会社 マルチビーム光走査光学装置及びそれを用いた画像形成装置
JP2005227669A (ja) 2004-02-16 2005-08-25 Ricoh Co Ltd マルチビーム走査装置および画像形成装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002174785A (ja) * 2000-12-08 2002-06-21 Ricoh Opt Ind Co Ltd マルチビーム走査装置における光ビーム調整方法およびマルチビーム走査装置および画像形成装置
JP2005037502A (ja) * 2003-07-16 2005-02-10 Ricoh Co Ltd 光走査装置、画像形成装置および光ビーム位置調整方法
JP2005055793A (ja) * 2003-08-07 2005-03-03 Brother Ind Ltd 画像表示装置
JP2005127852A (ja) * 2003-10-23 2005-05-19 Pentax Corp 走査光学素子検査装置
JP2007133320A (ja) * 2005-11-14 2007-05-31 Sharp Corp 光走査装置及び画像形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7410625B2 (ja) 2021-09-28 2024-01-10 キヤノン株式会社 照明装置、計測装置、基板処理装置、および物品の製造方法

Also Published As

Publication number Publication date
KR20100055493A (ko) 2010-05-26
JP5384350B2 (ja) 2014-01-08
US20130003154A1 (en) 2013-01-03
EP2189833B1 (en) 2017-05-03
EP2189833A4 (en) 2012-09-12
US8248679B2 (en) 2012-08-21
US20100302610A1 (en) 2010-12-02
US8441704B2 (en) 2013-05-14
CN101784939A (zh) 2010-07-21
KR101120487B1 (ko) 2012-04-17
JPWO2009025261A1 (ja) 2010-11-25
RU2430390C1 (ru) 2011-09-27
EP2189833A1 (en) 2010-05-26
CN101784939B (zh) 2012-11-21

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