WO2009022644A1 - ネガ型感光性樹脂組成物、スペーサー及び液晶表示装置 - Google Patents

ネガ型感光性樹脂組成物、スペーサー及び液晶表示装置 Download PDF

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Publication number
WO2009022644A1
WO2009022644A1 PCT/JP2008/064294 JP2008064294W WO2009022644A1 WO 2009022644 A1 WO2009022644 A1 WO 2009022644A1 JP 2008064294 W JP2008064294 W JP 2008064294W WO 2009022644 A1 WO2009022644 A1 WO 2009022644A1
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WO
WIPO (PCT)
Prior art keywords
resin composition
photosensitive resin
negative photosensitive
spacer
liquid crystal
Prior art date
Application number
PCT/JP2008/064294
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English (en)
French (fr)
Inventor
Yoshihiro Hosaka
Tsuneaki Maesawa
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Wako Pure Chemical Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Wako Pure Chemical Industries, Ltd. filed Critical Wako Pure Chemical Industries, Ltd.
Priority to JP2009528111A priority Critical patent/JPWO2009022644A1/ja
Priority to CN200880017670A priority patent/CN101689022A/zh
Publication of WO2009022644A1 publication Critical patent/WO2009022644A1/ja

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

　スペーサー用の感光性材料として好適なネガ型感光性樹脂組成物で、さらに詳しくは、高い収縮率と高い弾性回復率を有するスペーサーを作製しうる現像性に優れたネガ型感光性樹脂組成物、これを用いて作製されたスペーサー及び液晶表示装置を提供することを目的とし、本発明は、［Ａ］（ａ）不飽和カルボン酸由来のモノマー単位とラジカル重合性不飽和化合物由来のモノマー単位からなるアルカリ可溶性樹脂及び（ｂ）不飽和カルボン酸由来のモノマー単位とエポキシ基含有ラジカル重合性不飽和化合物由来のモノマー単位からなるアルカリ可溶性樹脂、［Ｂ］多官能性（メタ）アクリレート、並びに［Ｃ］光重合開始剤を含有することを特徴とするネガ型感光性樹脂組成物、該組成物から作製されたスペーサー、更には当該スペーサーを具備することを特徴とする液晶表示装置の発明である。
PCT/JP2008/064294 2007-08-10 2008-08-08 ネガ型感光性樹脂組成物、スペーサー及び液晶表示装置 WO2009022644A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009528111A JPWO2009022644A1 (ja) 2007-08-10 2008-08-08 ネガ型感光性樹脂組成物、スペーサー及び液晶表示装置
CN200880017670A CN101689022A (zh) 2007-08-10 2008-08-08 负型感光性树脂组合物、间隔体及液晶显示装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-209443 2007-08-10
JP2007209443 2007-08-10

Publications (1)

Publication Number Publication Date
WO2009022644A1 true WO2009022644A1 (ja) 2009-02-19

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PCT/JP2008/064294 WO2009022644A1 (ja) 2007-08-10 2008-08-08 ネガ型感光性樹脂組成物、スペーサー及び液晶表示装置

Country Status (5)

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JP (1) JPWO2009022644A1 (ja)
KR (1) KR20100039275A (ja)
CN (1) CN101689022A (ja)
TW (1) TW200919086A (ja)
WO (1) WO2009022644A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010134444A (ja) * 2008-10-30 2010-06-17 Sumitomo Chemical Co Ltd 感光性樹脂組成物
JP2010237465A (ja) * 2009-03-31 2010-10-21 Tokyo Ohka Kogyo Co Ltd 感光性樹脂組成物及び液晶パネル

Families Citing this family (12)

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KR20160111805A (ko) * 2015-03-17 2016-09-27 동우 화인켐 주식회사 감광성 수지 조성물, 이로부터 형성된 광경화 패턴 및 이를 포함하는 화상 표시 장치
KR101931449B1 (ko) * 2017-11-09 2018-12-20 동우 화인켐 주식회사 착색 감광성 수지 조성물, 이를 이용하여 제조되는 컬러필터 및 상기 컬러필터를 포함하는 표시장치
CN111670121B (zh) * 2018-01-31 2022-05-13 富士胶片株式会社 平版印刷版原版及平版印刷版的制作方法
KR102177312B1 (ko) * 2019-12-31 2020-11-11 코오롱인더스트리 주식회사 감광성 수지 조성물 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치
CN114761874A (zh) * 2019-12-31 2022-07-15 可隆工业株式会社 光敏树脂层和使用该光敏树脂层的干膜光致抗蚀剂、光敏元件
KR102253140B1 (ko) * 2020-07-30 2021-05-14 코오롱인더스트리 주식회사 감광성 수지층, 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치
KR102253141B1 (ko) * 2020-07-30 2021-05-14 코오롱인더스트리 주식회사 감광성 수지층, 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치
KR102250827B1 (ko) * 2020-07-30 2021-05-10 코오롱인더스트리 주식회사 감광성 수지층, 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치
KR102177311B1 (ko) * 2019-12-31 2020-11-11 코오롱인더스트리 주식회사 감광성 수지 조성물 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치
KR102253142B1 (ko) * 2020-07-30 2021-05-14 코오롱인더스트리 주식회사 감광성 수지층, 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치
KR102177313B1 (ko) * 2019-12-31 2020-11-16 코오롱인더스트리 주식회사 감광성 수지 조성물 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치
KR102177310B1 (ko) * 2019-12-31 2020-11-10 코오롱인더스트리 주식회사 감광성 수지 조성물 및 이를 이용한 드라이 필름 포토레지스트, 감광성 엘리먼트, 회로기판, 및 디스플레이 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06100663A (ja) * 1992-09-22 1994-04-12 Chisso Corp 紫外線硬化性樹脂組成物及びそれを用いたカラーフィルター保護膜
JPH07134411A (ja) * 1993-11-10 1995-05-23 Japan Synthetic Rubber Co Ltd 感光性樹脂組成物
JP2006079064A (ja) * 2004-08-09 2006-03-23 Mitsubishi Chemicals Corp 感光性樹脂組成物、カラーフィルタ及び液晶表示装置
JP2007199532A (ja) * 2006-01-27 2007-08-09 Fujifilm Corp パターン形成方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06100663A (ja) * 1992-09-22 1994-04-12 Chisso Corp 紫外線硬化性樹脂組成物及びそれを用いたカラーフィルター保護膜
JPH07134411A (ja) * 1993-11-10 1995-05-23 Japan Synthetic Rubber Co Ltd 感光性樹脂組成物
JP2006079064A (ja) * 2004-08-09 2006-03-23 Mitsubishi Chemicals Corp 感光性樹脂組成物、カラーフィルタ及び液晶表示装置
JP2007199532A (ja) * 2006-01-27 2007-08-09 Fujifilm Corp パターン形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010134444A (ja) * 2008-10-30 2010-06-17 Sumitomo Chemical Co Ltd 感光性樹脂組成物
JP2010237465A (ja) * 2009-03-31 2010-10-21 Tokyo Ohka Kogyo Co Ltd 感光性樹脂組成物及び液晶パネル

Also Published As

Publication number Publication date
CN101689022A (zh) 2010-03-31
TW200919086A (en) 2009-05-01
KR20100039275A (ko) 2010-04-15
JPWO2009022644A1 (ja) 2010-11-18

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