WO2009017071A1 - 石英ガラスルツボの製造方法 - Google Patents

石英ガラスルツボの製造方法 Download PDF

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Publication number
WO2009017071A1
WO2009017071A1 PCT/JP2008/063443 JP2008063443W WO2009017071A1 WO 2009017071 A1 WO2009017071 A1 WO 2009017071A1 JP 2008063443 W JP2008063443 W JP 2008063443W WO 2009017071 A1 WO2009017071 A1 WO 2009017071A1
Authority
WO
WIPO (PCT)
Prior art keywords
mold
glass crucible
quartz powder
quartz glass
wall surface
Prior art date
Application number
PCT/JP2008/063443
Other languages
English (en)
French (fr)
Inventor
Takeshi Fujita
Minoru Kanda
Original Assignee
Japan Super Quartz Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Super Quartz Corporation filed Critical Japan Super Quartz Corporation
Priority to US12/304,154 priority Critical patent/US8047020B2/en
Priority to KR1020087029173A priority patent/KR101331180B1/ko
Priority to JP2009525380A priority patent/JP5245129B2/ja
Priority to EP08791687A priority patent/EP2174917A4/en
Publication of WO2009017071A1 publication Critical patent/WO2009017071A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

　この石英ガラスルツボの製造方法では、有底円筒状のモールドを回転させつつ、石英粉をモールドの内壁面に堆積させる堆積工程と、前記モールドの内壁面に堆積させた石英粉を加熱溶融してガラス化することにより、石英ガラスルツボを得る溶融工程とを具備し、前記堆積工程において、石英粉の静電帯電量を絶対値で１.０kV以下の範囲に制御した状態で、前記石英粉をモールドの内壁面に供給することによって、モールドの内壁面の石英粉堆積層の密度を一定範囲に維持し、石英ガラスルツボの肉厚を制御する。
PCT/JP2008/063443 2007-07-27 2008-07-25 石英ガラスルツボの製造方法 WO2009017071A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/304,154 US8047020B2 (en) 2007-07-27 2008-07-25 Method of producing vitreous silica crucible
KR1020087029173A KR101331180B1 (ko) 2007-07-27 2008-07-25 석영 유리 도가니 제조 방법 및 제조 장치
JP2009525380A JP5245129B2 (ja) 2007-07-27 2008-07-25 石英ガラスルツボの製造方法
EP08791687A EP2174917A4 (en) 2007-07-27 2008-07-25 PROCESS FOR PRODUCING A QUARTZ GLASS CUP

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-196649 2007-07-27
JP2007196649 2007-07-27

Publications (1)

Publication Number Publication Date
WO2009017071A1 true WO2009017071A1 (ja) 2009-02-05

Family

ID=40304302

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/063443 WO2009017071A1 (ja) 2007-07-27 2008-07-25 石英ガラスルツボの製造方法

Country Status (6)

Country Link
US (1) US8047020B2 (ja)
EP (1) EP2174917A4 (ja)
JP (1) JP5245129B2 (ja)
KR (1) KR101331180B1 (ja)
TW (1) TW200911722A (ja)
WO (1) WO2009017071A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2128098A1 (en) * 2008-05-28 2009-12-02 Japan Super Quartz Corporation Silica glass crucible and method for manufacturing the same
WO2011071178A1 (ja) * 2009-12-11 2011-06-16 ジャパンスーパークォーツ株式会社 シリカガラスルツボ
US8347650B2 (en) 2008-06-30 2013-01-08 Heraeus Quarzglas Gmbh & Co. Kg Method of producing a quartz glass crucible

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4922355B2 (ja) * 2009-07-15 2012-04-25 信越石英株式会社 シリカ容器及びその製造方法
JP4951040B2 (ja) * 2009-08-05 2012-06-13 信越石英株式会社 シリカ容器及びその製造方法
JP5777880B2 (ja) * 2010-12-31 2015-09-09 株式会社Sumco シリカガラスルツボの製造方法
JP5781303B2 (ja) * 2010-12-31 2015-09-16 株式会社Sumco シリカガラスルツボ製造方法およびシリカガラスルツボ製造装置
US20120272687A1 (en) * 2011-04-27 2012-11-01 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
JP7157932B2 (ja) * 2019-01-11 2022-10-21 株式会社Sumco シリカガラスルツボの製造装置および製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000072594A (ja) * 1998-08-28 2000-03-07 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用大口径石英ガラスるつぼ 及びその製造方法
JP2001348240A (ja) * 2000-05-31 2001-12-18 Shinetsu Quartz Prod Co Ltd 石英ガラスルツボの製造方法
JP2004262690A (ja) * 2003-02-28 2004-09-24 Shinetsu Quartz Prod Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法および該製造方法で製造された石英ガラスルツボ
JP2007196649A (ja) 2005-11-28 2007-08-09 Brother Ind Ltd インクカートリッジ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3014311C2 (de) * 1980-04-15 1982-06-16 Heraeus Quarzschmelze Gmbh, 6450 Hanau Verfahren zur Herstellung von Quarzglastiegeln und Vorrichtung zur Durchführung dieses Verfahrens
JPS5934659A (ja) 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置
JP2933404B2 (ja) * 1990-06-25 1999-08-16 信越石英 株式会社 シリコン単結晶引き上げ用石英ガラスルツボとその製造方法
DE19962449C2 (de) * 1999-12-22 2003-09-25 Heraeus Quarzglas Quarzglastiegel und Verfahren für seine Herstellung
JP4447738B2 (ja) * 2000-05-31 2010-04-07 信越石英株式会社 多層構造の石英ガラスルツボの製造方法
JP4994647B2 (ja) * 2005-11-30 2012-08-08 ジャパンスーパークォーツ株式会社 結晶化し易い石英ガラス部材とその用途
EP2172432A4 (en) * 2007-07-28 2014-04-16 Japan Super Quartz Corp METHOD FOR PRODUCING A QUARTZ GLASS TAIL AND DEVICE FOR PRODUCING THE QUARTZ GLASS TIEGEL
US8172942B2 (en) * 2008-10-17 2012-05-08 Japan Super Quartz Corporation Arc discharge apparatus, apparatus and method for manufacturing vitreous silica glass crucible, and method for pulling up silicon single crystal
US20100095880A1 (en) * 2008-10-17 2010-04-22 Japan Super Quartz Corporation Arc melting high-purity carbon electrode and application thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000072594A (ja) * 1998-08-28 2000-03-07 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用大口径石英ガラスるつぼ 及びその製造方法
JP2001348240A (ja) * 2000-05-31 2001-12-18 Shinetsu Quartz Prod Co Ltd 石英ガラスルツボの製造方法
JP2004262690A (ja) * 2003-02-28 2004-09-24 Shinetsu Quartz Prod Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法および該製造方法で製造された石英ガラスルツボ
JP2007196649A (ja) 2005-11-28 2007-08-09 Brother Ind Ltd インクカートリッジ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2174917A4 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2128098A1 (en) * 2008-05-28 2009-12-02 Japan Super Quartz Corporation Silica glass crucible and method for manufacturing the same
JP2009286651A (ja) * 2008-05-28 2009-12-10 Japan Siper Quarts Corp 石英ガラスルツボとその製造方法
US8347650B2 (en) 2008-06-30 2013-01-08 Heraeus Quarzglas Gmbh & Co. Kg Method of producing a quartz glass crucible
WO2011071178A1 (ja) * 2009-12-11 2011-06-16 ジャパンスーパークォーツ株式会社 シリカガラスルツボ
US9416463B2 (en) 2009-12-11 2016-08-16 Sumco Corporation Vitreous silica crucible

Also Published As

Publication number Publication date
KR101331180B1 (ko) 2013-11-20
EP2174917A1 (en) 2010-04-14
TW200911722A (en) 2009-03-16
EP2174917A4 (en) 2012-08-15
JPWO2009017071A1 (ja) 2010-10-21
KR20100051765A (ko) 2010-05-18
US8047020B2 (en) 2011-11-01
JP5245129B2 (ja) 2013-07-24
US20100162760A1 (en) 2010-07-01

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