WO2009005061A1 - Ｘ線計測装置及びｘ線計測方法 - Google Patents

Ｘ線計測装置及びｘ線計測方法 Download PDF

Info

Publication number
WO2009005061A1
WO2009005061A1 PCT/JP2008/061906 JP2008061906W WO2009005061A1 WO 2009005061 A1 WO2009005061 A1 WO 2009005061A1 JP 2008061906 W JP2008061906 W JP 2008061906W WO 2009005061 A1 WO2009005061 A1 WO 2009005061A1
Authority
WO
WIPO (PCT)
Prior art keywords
ray
laser beam
detected
data
ray metering
Prior art date
Application number
PCT/JP2008/061906
Other languages
English (en)
French (fr)
Inventor
Hiroyuki Nose
Daisuke Ishida
Namio Kaneko
Yasuo Sakai
Mitsuru Uesaka
Fumito Sakamoto
Katsuhiro Dobashi
Original Assignee
Ihi Corporation
The University Of Tokyo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation, The University Of Tokyo filed Critical Ihi Corporation
Priority to US12/667,500 priority Critical patent/US8345824B2/en
Priority to EP08790769A priority patent/EP2164308B1/en
Priority to AT08790769T priority patent/ATE555638T1/de
Publication of WO2009005061A1 publication Critical patent/WO2009005061A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

　Ｘ線検出データのうち、衝突点９においてＸ線４が発生している時に対応する検出データを有効化し、その他のデータを無効化して、Ｘ線波形を生成する。例えば、レーザ光３がパルスレーザ光であり、電子ビーム１が連続状又はパルスレーザ光のパルス幅と同じかそれより長いパルス幅をもつパルス状の電子ビームである場合は、レーザ光３を検出し、Ｘ線検出データとレーザ光検出データとを、衝突点９に関して時間軸を一致させて乗算して、Ｘ線波形を生成する。
PCT/JP2008/061906 2007-07-04 2008-07-01 Ｘ線計測装置及びｘ線計測方法 WO2009005061A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/667,500 US8345824B2 (en) 2007-07-04 2008-07-01 X-ray metering apparatus, and X-ray metering method
EP08790769A EP2164308B1 (en) 2007-07-04 2008-07-01 X-ray metering apparatus, and x-ray metering method
AT08790769T ATE555638T1 (de) 2007-07-04 2008-07-01 Röntgenmessvorrichtung und röntgenmessverfahren

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-175739 2007-07-04
JP2007175739A JP4879102B2 (ja) 2007-07-04 2007-07-04 Ｘ線計測装置及びｘ線計測方法

Publications (1)

Publication Number Publication Date
WO2009005061A1 true WO2009005061A1 (ja) 2009-01-08

Family

ID=40226106

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061906 WO2009005061A1 (ja) 2007-07-04 2008-07-01 Ｘ線計測装置及びｘ線計測方法

Country Status (5)

Country Link
US (1) US8345824B2 (ja)
EP (1) EP2164308B1 (ja)
JP (1) JP4879102B2 (ja)
AT (1) ATE555638T1 (ja)
WO (1) WO2009005061A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7421564B2 (ja) * 2019-02-22 2024-01-24 アリゾナ ボード オブ リージェンツ オン ビハーフ オブ アリゾナ ステート ユニバーシティ 荷電粒子パルスを光パルスと同期させる方法および装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001338796A (ja) * 2000-05-29 2001-12-07 Sumitomo Heavy Ind Ltd Ｘ線発生装置及び発生方法
JP2001345503A (ja) * 2000-05-31 2001-12-14 Toshiba Corp レーザ逆コンプトン光生成装置
JP2006318745A (ja) 2005-05-12 2006-11-24 Ishikawajima Harima Heavy Ind Co Ltd 診断・治療用ｘ線切換え発生装置
JP2006344731A (ja) * 2005-06-08 2006-12-21 Ishikawajima Harima Heavy Ind Co Ltd レーザー光周回装置及びレーザー光周回方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2528622B2 (ja) 1993-08-19 1996-08-28 財団法人レーザー技術総合研究所 高輝度Ｘ線又はγ線の発生方法及び装置
JPH11142786A (ja) 1997-11-13 1999-05-28 Nippon Laser:Kk レーザー光路分配装置
US6687333B2 (en) * 1999-01-25 2004-02-03 Vanderbilt University System and method for producing pulsed monochromatic X-rays
US6377651B1 (en) 1999-10-11 2002-04-23 University Of Central Florida Laser plasma source for extreme ultraviolet lithography using a water droplet target
JP2001176694A (ja) * 1999-12-15 2001-06-29 Sumitomo Heavy Ind Ltd 光パルスビーム発生装置及びｘ線発生装置
JP3463281B2 (ja) 2000-06-28 2003-11-05 住友重機械工業株式会社 多軸レーザ加工装置及びレーザ加工方法
US7372056B2 (en) 2005-06-29 2008-05-13 Cymer, Inc. LPP EUV plasma source material target delivery system
JP2004226271A (ja) 2003-01-23 2004-08-12 Sumitomo Heavy Ind Ltd Ｘ線発生装置及び発生方法
JP4174331B2 (ja) 2003-01-23 2008-10-29 住友重機械工業株式会社 Ｘ線発生装置及び発生方法
US7016470B2 (en) 2004-03-29 2006-03-21 General Electric Company System and method for X-ray generation
US7277526B2 (en) * 2004-04-09 2007-10-02 Lyncean Technologies, Inc. Apparatus, system, and method for high flux, compact compton x-ray source
JP4674802B2 (ja) 2005-05-12 2011-04-20 株式会社Ｉｈｉ 多色ｘ線発生装置
US7382861B2 (en) 2005-06-02 2008-06-03 John M. J. Madey High efficiency monochromatic X-ray source using an optical undulator
JP4590653B2 (ja) * 2007-03-23 2010-12-01 株式会社Ｉｈｉ 荷電粒子ビーム減速装置および方法とこれを用いたｘ線発生装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001338796A (ja) * 2000-05-29 2001-12-07 Sumitomo Heavy Ind Ltd Ｘ線発生装置及び発生方法
JP2001345503A (ja) * 2000-05-31 2001-12-14 Toshiba Corp レーザ逆コンプトン光生成装置
JP2006318745A (ja) 2005-05-12 2006-11-24 Ishikawajima Harima Heavy Ind Co Ltd 診断・治療用ｘ線切換え発生装置
JP2006344731A (ja) * 2005-06-08 2006-12-21 Ishikawajima Harima Heavy Ind Co Ltd レーザー光周回装置及びレーザー光周回方法

Also Published As

Publication number Publication date
JP4879102B2 (ja) 2012-02-22
EP2164308B1 (en) 2012-04-25
EP2164308A4 (en) 2011-10-05
US20110026679A1 (en) 2011-02-03
US8345824B2 (en) 2013-01-01
ATE555638T1 (de) 2012-05-15
JP2009016147A (ja) 2009-01-22
EP2164308A1 (en) 2010-03-17

Similar Documents

Publication Publication Date Title
WO2010111089A3 (en) Laser micromachining with tailored bursts of short laser pulses
WO2003089948A3 (en) Constructing a waveform from multiple threshold samples
WO2011163550A3 (en) Method and apparatus for reliably laser marking articles
WO2010030665A3 (en) Method for detection of radar signals
WO2008011255A3 (en) Systems and methods for laser processing during periods having non-constant velocities
WO2008033909A3 (en) Apparatus, probe and method for providing depth assessment in an anatomical structure
WO2011035156A3 (en) Advertisee-history-based bid generation system and method for multi-channel advertising
WO2007038306A3 (en) Methods, systems, and computer program products for multiplexing computed tomography
ATE512768T1 (de) Positionsermittlung eines objektes
WO2009018456A3 (en) Systems and methods for providing beam scan patterns for high speed doppler optical frequency domain imaging
WO2006031450A3 (en) System and method for hybrid spreading for risk management
ATE431936T1 (de) Verfahren zur verfolgung von objekten
WO2005086780A3 (en) Cotdr arrangement with swept frequency pulse generator for an optical transmission system
EP4016292A4 (en) DETECTION METHOD AND DEVICE USING LASER RADAR, AND COMPUTER-READABLE RECORDING MEDIA
WO2008013598A3 (en) Real-time, on-line and offline treatment dose tracking and feedback process for volumetric image guided adaptive radiotherapy
BR112012020889A2 (pt) motor a laser, e, métodos para gerar um feixe de laser e para operar um motor a laser
WO2009093243A3 (en) System for generating a customized financial trade article
ATE417245T1 (de) System und verfahren zum vermessen eines körpers und zum überwachen von dessen oberfläche
WO2009138912A3 (en) Security system comprising a self-mixing laser sensor and method of driving such a security system
WO2009139837A3 (en) Long-range lightning detection and characterization system and method
WO2009087639A3 (en) Multiple beam drilling system
WO2020136044A3 (en) Pulsed charged-particle beam system
GB2573970A (en) System and method for detecting network topology
WO2006023406A3 (en) Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry
WO2021252075A3 (en) High pulse repetition frequency lidar

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08790769

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2008790769

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 12667500

Country of ref document: US