WO2008146722A1 - 揺動装置、同装置を用いた光走査装置、映像表示装置、及び揺動装置の制御方法 - Google Patents

揺動装置、同装置を用いた光走査装置、映像表示装置、及び揺動装置の制御方法 Download PDF

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Publication number
WO2008146722A1
WO2008146722A1 PCT/JP2008/059506 JP2008059506W WO2008146722A1 WO 2008146722 A1 WO2008146722 A1 WO 2008146722A1 JP 2008059506 W JP2008059506 W JP 2008059506W WO 2008146722 A1 WO2008146722 A1 WO 2008146722A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable plate
oscillating
duty ratio
oscillations
pulse voltage
Prior art date
Application number
PCT/JP2008/059506
Other languages
English (en)
French (fr)
Inventor
Kiyohiko Kawano
Hiroshi Noge
Hideki Ueda
Original Assignee
Panasonic Electric Works Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US12/600,916 priority Critical patent/US8325407B2/en
Application filed by Panasonic Electric Works Co., Ltd. filed Critical Panasonic Electric Works Co., Ltd.
Priority to CN2008800171402A priority patent/CN101682274B/zh
Priority to EP08764552A priority patent/EP2157686A4/en
Priority to KR1020097025774A priority patent/KR101196179B1/ko
Publication of WO2008146722A1 publication Critical patent/WO2008146722A1/ja

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

　揺動装置において、簡易な構成により可動板の揺動角や位相を容易に調整可能にする。揺動装置としての光走査装置１０は、ミラー膜２ａを有する可動板を揺動させるミラー素子１、デュティ比調整部１７を有しパルス電圧のデュティ比を変更する機能を有し、ミラー素子１の垂直コムにパルス電圧を印加し駆動させる制御回路１４、可動板の揺動を検出する揺動検出部１９を備えている。制御回路１４は、揺動検出部１９により検出された可動板の揺動に基づいて、デュティ比調整部１７を制御しパルス電圧のデュティ比を変更させる。デュティ比が変更されたパルス電圧がミラー素子１に印加されると、可動板の揺動時の垂直コムへの電圧印加期間が変わり、可動板の揺動の位相や揺動角が変化する。可動板の揺動に応じたデュティ比のフィードバック制御により、可動板が適正な位相や揺動角で揺動するよう制御することができる。
PCT/JP2008/059506 2007-05-23 2008-05-23 揺動装置、同装置を用いた光走査装置、映像表示装置、及び揺動装置の制御方法 WO2008146722A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/600,916 US8325407B2 (en) 2007-05-23 2008-03-23 Oscillating device, optical scanning device using the same, image display apparatus, and control method of the oscillating device
CN2008800171402A CN101682274B (zh) 2007-05-23 2008-05-23 振动设备、使用该振动设备的光学扫描设备、图像显示装置、和该振动设备的控制方法
EP08764552A EP2157686A4 (en) 2007-05-23 2008-05-23 OSCILLATING DEVICE, LUMINOUS SCANNING DEVICE USING THE PREVIOUS DEVICE, IMAGE DISPLAY APPARATUS, AND CONTROL METHOD FOR THE OSCILLATING DEVICE
KR1020097025774A KR101196179B1 (ko) 2007-05-23 2008-05-23 요동장치, 상기 요동장치를 이용한 광스캐닝장치, 영상표시장치 및 요동장치의 제어방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007137195A JP2008295174A (ja) 2007-05-23 2007-05-23 揺動装置、同装置を用いた光走査装置、映像表示装置、及び揺動装置の制御方法
JP2007-137195 2007-05-23

Publications (1)

Publication Number Publication Date
WO2008146722A1 true WO2008146722A1 (ja) 2008-12-04

Family

ID=40074975

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059506 WO2008146722A1 (ja) 2007-05-23 2008-05-23 揺動装置、同装置を用いた光走査装置、映像表示装置、及び揺動装置の制御方法

Country Status (7)

Country Link
US (1) US8325407B2 (ja)
EP (1) EP2157686A4 (ja)
JP (1) JP2008295174A (ja)
KR (1) KR101196179B1 (ja)
CN (1) CN101682274B (ja)
TW (1) TW200910751A (ja)
WO (1) WO2008146722A1 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5104776B2 (ja) * 2009-02-18 2012-12-19 株式会社デンソー 走査装置、二次元走査装置及び二次元光走査装置
JP2011095561A (ja) * 2009-10-30 2011-05-12 Kyocera Mita Corp 光走査装置及びこれを備えた画像形成装置
JP5392106B2 (ja) * 2010-01-20 2014-01-22 株式会社デンソー 光走査装置
JP5640741B2 (ja) * 2010-12-29 2014-12-17 株式会社リコー ２次元光走査装置及び光走査型画像表示装置
JP2013160953A (ja) * 2012-02-06 2013-08-19 Panasonic Corp 揺動装置、同装置を用いた光走査装置、映像表示装置、及び揺動装置の制御方法
JPWO2015146146A1 (ja) * 2014-03-28 2017-04-13 住友精密工業株式会社 駆動装置
JPWO2015146145A1 (ja) * 2014-03-28 2017-04-13 住友精密工業株式会社 駆動装置
CN104184192B (zh) * 2014-08-25 2016-11-16 北京航盛新能科技有限公司 一种锂离子动力电池组充放电主动均衡电路
JP6461445B1 (ja) * 2017-07-06 2019-01-30 浜松ホトニクス株式会社 光学デバイス
CN107966810A (zh) * 2017-12-19 2018-04-27 无锡英菲感知技术有限公司 一种二维扫描微镜
CN108803011A (zh) * 2018-03-15 2018-11-13 成都理想境界科技有限公司 一种图像矫正方法及光纤扫描成像设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004020975A (ja) * 2002-06-18 2004-01-22 Hitachi Displays Ltd 液晶表示装置
JP2005202321A (ja) * 2004-01-19 2005-07-28 Ricoh Co Ltd 偏向ミラー、光走査装置および画像形成装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3011144B2 (ja) * 1997-07-31 2000-02-21 日本電気株式会社 光スキャナとその駆動方法
US6612029B2 (en) * 2000-03-24 2003-09-02 Onix Microsystems Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
JP4803892B2 (ja) 2001-03-29 2011-10-26 株式会社ニコン・トリンブル 測量機
JP4212305B2 (ja) 2002-06-14 2009-01-21 日本信号株式会社 レーザ照射装置
JP2005024722A (ja) 2003-06-30 2005-01-27 Ricoh Co Ltd 振動ミラー、光走査装置および画像形成装置
US7468824B2 (en) 2004-01-19 2008-12-23 Ricoh Company, Ltd. Imaging apparatus including optical scanning device with deflecting mirror module, and method of deflecting with the mirror module
JP2005345866A (ja) * 2004-06-04 2005-12-15 Ricoh Co Ltd 偏向ミラー、光走査装置および画像形成装置
JP2005237094A (ja) * 2004-02-18 2005-09-02 Mitsubishi Heavy Ind Ltd モータ駆動装置及びモータ起動方法
JP2006195181A (ja) * 2005-01-13 2006-07-27 Ricoh Co Ltd 光偏向器・画像形成装置
JP4534952B2 (ja) * 2005-10-25 2010-09-01 パナソニック電工株式会社 チルトミラー素子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004020975A (ja) * 2002-06-18 2004-01-22 Hitachi Displays Ltd 液晶表示装置
JP2005202321A (ja) * 2004-01-19 2005-07-28 Ricoh Co Ltd 偏向ミラー、光走査装置および画像形成装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2157686A4 *

Also Published As

Publication number Publication date
KR20100022038A (ko) 2010-02-26
EP2157686A4 (en) 2012-05-09
US20100171744A1 (en) 2010-07-08
EP2157686A1 (en) 2010-02-24
CN101682274B (zh) 2012-07-04
TW200910751A (en) 2009-03-01
KR101196179B1 (ko) 2012-11-01
US8325407B2 (en) 2012-12-04
JP2008295174A (ja) 2008-12-04
CN101682274A (zh) 2010-03-24

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