WO2008132903A1 - パターン形成方法およびパターン形成装置 - Google Patents

パターン形成方法およびパターン形成装置 Download PDF

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Publication number
WO2008132903A1
WO2008132903A1 PCT/JP2008/055319 JP2008055319W WO2008132903A1 WO 2008132903 A1 WO2008132903 A1 WO 2008132903A1 JP 2008055319 W JP2008055319 W JP 2008055319W WO 2008132903 A1 WO2008132903 A1 WO 2008132903A1
Authority
WO
WIPO (PCT)
Prior art keywords
pattern formation
resin composition
pattern
formation method
light
Prior art date
Application number
PCT/JP2008/055319
Other languages
English (en)
French (fr)
Inventor
Satoshi Moriyama
Iwao Hotta
Masatsugu Komai
Original Assignee
Kyowa Hakko Chemical Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyowa Hakko Chemical Co., Ltd. filed Critical Kyowa Hakko Chemical Co., Ltd.
Publication of WO2008132903A1 publication Critical patent/WO2008132903A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/14—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of indefinite length
    • B29C39/148—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of indefinite length characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0822—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using IR radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0888—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

　本発明の目的は、プラスチックモールドおよび可視光硬化性樹脂組成物を用いる、パターン形成方法およびパターン形成装置を提供することにある。 　所定パターンを有するプラスチックモールドを、可視光硬化性樹脂組成物に押し付けて該所定パターンを転写したパターンを成形し、光を照射して該樹脂組成物を硬化させることを特徴とするパターン形成方法等を提供する。
PCT/JP2008/055319 2007-04-12 2008-03-21 パターン形成方法およびパターン形成装置 WO2008132903A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-105106 2007-04-12
JP2007105106A JP2010137358A (ja) 2007-04-12 2007-04-12 パターン形成方法およびパターン形成装置

Publications (1)

Publication Number Publication Date
WO2008132903A1 true WO2008132903A1 (ja) 2008-11-06

Family

ID=39925366

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055319 WO2008132903A1 (ja) 2007-04-12 2008-03-21 パターン形成方法およびパターン形成装置

Country Status (2)

Country Link
JP (1) JP2010137358A (ja)
WO (1) WO2008132903A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014010516A1 (ja) * 2012-07-10 2014-01-16 旭硝子株式会社 インプリント方法、及びインプリント装置
WO2015072364A1 (ja) * 2013-11-12 2015-05-21 株式会社シンク・ラボラトリー 非電導性抗菌シート及びその製造方法並びに抗菌方法
WO2018012339A1 (ja) * 2016-07-12 2018-01-18 シャープ株式会社 光学部材の製造方法
EP2926333B1 (en) * 2012-11-27 2018-01-31 E Ink California, LLC Microcup compositions
JP2018080309A (ja) * 2016-11-18 2018-05-24 株式会社ダイセル レプリカモールド形成用樹脂組成物、レプリカモールド、及び前記レプリカモールドを用いたパターン形成方法
JP2019041719A (ja) * 2017-09-06 2019-03-22 大日本印刷株式会社 細胞培養用構造体、細胞培養容器及び細胞培養用構造体の製造方法

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JP2009010271A (ja) * 2007-06-29 2009-01-15 Showa Denko Kk 微細パターンの形成方法および微細パターン形成用組成物
JP5408649B2 (ja) * 2008-02-20 2014-02-05 学校法人東京理科大学 無端状パターンの作製方法
JP5822446B2 (ja) * 2010-08-16 2015-11-24 有限会社協和ラミコート ホログラムシート材の製造方法
JP2012061832A (ja) * 2010-09-17 2012-03-29 Sony Corp 積層体の製造方法、原盤および転写装置
JP5895335B2 (ja) * 2010-10-22 2016-03-30 ソニー株式会社 積層体、成型素子、および光学素子
JP2012220918A (ja) * 2011-04-14 2012-11-12 Kyowa Lamicoat:Kk アルミホイル製ホログラムシート材の製造方法、及び、アルミホイル製ホログラムシート材
JP2013035243A (ja) * 2011-08-10 2013-02-21 Hoya Corp ローラーモールド、ローラーモールド用基材及びパターン転写方法
TWI501861B (zh) * 2011-12-06 2015-10-01 私立中原大學 滾輪式壓印系統
KR101806806B1 (ko) * 2011-12-20 2017-12-11 삼성전자주식회사 전자 소자 탑재용 기판의 제조방법
JP2013180516A (ja) * 2012-03-02 2013-09-12 Teijin Dupont Films Japan Ltd ソフトモールド基板用フィルムおよびそれからなるソフトモールドフィルム
JP2013219334A (ja) * 2012-03-16 2013-10-24 Jx Nippon Oil & Energy Corp フィルム状モールドを用いた基板の製造方法及び製造装置
JP2013237157A (ja) * 2012-05-11 2013-11-28 Kuraray Co Ltd 樹脂成形体の製造方法、樹脂成形体、およびモールド
JP5912996B2 (ja) 2012-08-23 2016-04-27 東芝機械株式会社 転写装置
JP6056305B2 (ja) * 2012-09-14 2017-01-11 大日本印刷株式会社 個体認証用構造体の製造方法
JP2014130955A (ja) * 2012-12-28 2014-07-10 Dainippon Printing Co Ltd 印刷方法、前記印刷方法を用いて、複数の導電性配線が形成された導電性基材を製造する方法、印刷装置、および導電性基材
US20140335304A1 (en) * 2013-05-09 2014-11-13 Toyo Gosei Co., Ltd. Resin, method for fabricating resin, and composition
JP6343173B2 (ja) * 2014-04-30 2018-06-13 旭化成株式会社 微細パターンの形成方法、成型体の製造方法、ワイヤグリッド偏光子の製造方法、及び転写装置
JP2015229132A (ja) * 2014-06-04 2015-12-21 株式会社イシモク・コーポレーション 鏡面塗装方法、鏡面加工材の製造方法および鏡面塗装装置
JP6967832B2 (ja) 2014-10-28 2021-11-17 デクセリアルズ株式会社 エンボスフィルム、枚葉フィルム、転写物、およびエンボスフィルムの製造方法
US9843024B2 (en) * 2014-12-03 2017-12-12 Universal Display Corporation Methods for fabricating OLEDs
KR102460612B1 (ko) * 2015-11-04 2022-10-28 엘지이노텍 주식회사 유기발광소자 및 그 제조에 사용되는 롤몰딩장치
JP2019140171A (ja) * 2018-02-07 2019-08-22 株式会社ディスコ パターン形成方法及びウェーハの加工方法
KR102400656B1 (ko) * 2021-02-17 2022-05-23 (주)제이비필름디자인 다중패턴 필름 제조방법 및 이에 의해 제조된 다중패턴 필름

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JP2007047701A (ja) * 2005-08-12 2007-02-22 Ricoh Co Ltd 光学素子
JP2007083628A (ja) * 2005-09-26 2007-04-05 Nikon Corp 型の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0270412A (ja) * 1988-09-07 1990-03-09 Hitachi Ltd 合成樹脂成形品の製造用スタンパ
JPH05189815A (ja) * 1992-01-13 1993-07-30 Canon Inc 光記録媒体用基板製造用ローラーの製造方法
JP2005041164A (ja) * 2003-07-24 2005-02-17 Kuraray Co Ltd 成形用樹脂型および成形用樹脂型の製造方法並びに成形用樹脂型を用いたレンズシートの製造方法
WO2006059580A1 (ja) * 2004-11-30 2006-06-08 Asahi Glass Company, Limited モールド、および転写微細パターンを有する基材の製造方法
JP2006172760A (ja) * 2004-12-13 2006-06-29 Sekisui Chem Co Ltd パターンを備えた基板の製造方法及びプラズマディスプレイパネルの製造方法
JP2006201647A (ja) * 2005-01-24 2006-08-03 Sakamoto Yakuhin Kogyo Co Ltd 高分子分散型液晶表示素子
JP2006235195A (ja) * 2005-02-24 2006-09-07 Matsushita Electric Ind Co Ltd 反射防止構造体を有する部材の製造方法
JP2006272947A (ja) * 2005-03-29 2006-10-12 Lee Bing Huan ナノシートの製造方法
JP2007047701A (ja) * 2005-08-12 2007-02-22 Ricoh Co Ltd 光学素子
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014010516A1 (ja) * 2012-07-10 2014-01-16 旭硝子株式会社 インプリント方法、及びインプリント装置
EP2926333B1 (en) * 2012-11-27 2018-01-31 E Ink California, LLC Microcup compositions
WO2015072364A1 (ja) * 2013-11-12 2015-05-21 株式会社シンク・ラボラトリー 非電導性抗菌シート及びその製造方法並びに抗菌方法
JPWO2015072364A1 (ja) * 2013-11-12 2017-03-16 株式会社シンク・ラボラトリー 非電導性抗菌シート及びその製造方法並びに抗菌方法
WO2018012339A1 (ja) * 2016-07-12 2018-01-18 シャープ株式会社 光学部材の製造方法
JPWO2018012339A1 (ja) * 2016-07-12 2019-04-04 シャープ株式会社 光学部材の製造方法
JP2018080309A (ja) * 2016-11-18 2018-05-24 株式会社ダイセル レプリカモールド形成用樹脂組成物、レプリカモールド、及び前記レプリカモールドを用いたパターン形成方法
WO2018092848A1 (ja) * 2016-11-18 2018-05-24 株式会社ダイセル レプリカモールド形成用樹脂組成物、レプリカモールド、及び前記レプリカモールドを用いたパターン形成方法
CN109963912A (zh) * 2016-11-18 2019-07-02 株式会社大赛璐 复制模具形成用树脂组合物、复制模具、以及使用了该复制模具的图案形成方法
JP2019041719A (ja) * 2017-09-06 2019-03-22 大日本印刷株式会社 細胞培養用構造体、細胞培養容器及び細胞培養用構造体の製造方法

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