WO2008130002A1 - 磁気式回転角検出器 - Google Patents

磁気式回転角検出器 Download PDF

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Publication number
WO2008130002A1
WO2008130002A1 PCT/JP2008/057474 JP2008057474W WO2008130002A1 WO 2008130002 A1 WO2008130002 A1 WO 2008130002A1 JP 2008057474 W JP2008057474 W JP 2008057474W WO 2008130002 A1 WO2008130002 A1 WO 2008130002A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotating angle
magnetic sensor
angle detector
sensor elements
magnetic
Prior art date
Application number
PCT/JP2008/057474
Other languages
English (en)
French (fr)
Inventor
Hiroshi Nishizawa
Hajime Nakajima
Takeshi Musha
Yoichi Ohmura
Original Assignee
Mitsubishi Electric Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corporation filed Critical Mitsubishi Electric Corporation
Priority to CN200880012853XA priority Critical patent/CN101663564B/zh
Priority to JP2009510855A priority patent/JP5064492B2/ja
Priority to DE112008001024T priority patent/DE112008001024B4/de
Priority to US12/596,729 priority patent/US8134359B2/en
Publication of WO2008130002A1 publication Critical patent/WO2008130002A1/ja

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451Incremental encoders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D1/00Measuring arrangements giving results other than momentary value of variable, of general application
    • G01D1/02Measuring arrangements giving results other than momentary value of variable, of general application giving mean values, e.g. root means square values
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03FAMPLIFIERS
    • H03F3/00Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/45Differential amplifiers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

 本発明は、回転体の位置および回転角度を高精度で検出可能な、磁気式回転角検出器を提供する。該磁気式回転角検出器は、n次の高調波成分を互いに打ち消して相殺するように配置した複数の磁気センサ素子からなる素子群(51、52)を備える。素子群間で、対応する磁気センサ素子どおしの配置距離は(2m+1)λであり、全磁気センサ素子の配置、及び電源端子と接地端子との方向は、回転ドラム(1)の径方向に沿う直線上に位置する全磁気センサ素子の重心位置(59)を通る直線(2b)に対して線対称とする。
PCT/JP2008/057474 2007-04-20 2008-04-17 磁気式回転角検出器 WO2008130002A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN200880012853XA CN101663564B (zh) 2007-04-20 2008-04-17 磁式旋转角检测器
JP2009510855A JP5064492B2 (ja) 2007-04-20 2008-04-17 磁気式回転角検出器
DE112008001024T DE112008001024B4 (de) 2007-04-20 2008-04-17 Magnetischer Drehwinkeldetektor
US12/596,729 US8134359B2 (en) 2007-04-20 2008-04-17 Magnetic rotational-angle detector

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007111145 2007-04-20
JP2007-111145 2007-04-20

Publications (1)

Publication Number Publication Date
WO2008130002A1 true WO2008130002A1 (ja) 2008-10-30

Family

ID=39875530

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057474 WO2008130002A1 (ja) 2007-04-20 2008-04-17 磁気式回転角検出器

Country Status (7)

Country Link
US (1) US8134359B2 (ja)
JP (1) JP5064492B2 (ja)
KR (1) KR101078078B1 (ja)
CN (1) CN101663564B (ja)
DE (1) DE112008001024B4 (ja)
TW (1) TWI393867B (ja)
WO (1) WO2008130002A1 (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011136054A1 (ja) * 2010-04-26 2011-11-03 Tdk株式会社 位置検出装置
WO2013024830A1 (ja) * 2011-08-12 2013-02-21 日立金属株式会社 エンコーダ
WO2013094236A1 (ja) * 2011-12-20 2013-06-27 三菱電機株式会社 回転角度検出装置
WO2015008439A1 (ja) * 2013-07-17 2015-01-22 株式会社デンソー 回転センサ
WO2015087726A1 (ja) * 2013-12-10 2015-06-18 日本電産サンキョー株式会社 磁気センサ装置、磁気式エンコーダ装置、および磁気センサ
WO2015087725A1 (ja) * 2013-12-10 2015-06-18 日本電産サンキョー株式会社 磁気センサ装置、および磁気式エンコーダ装置
US20150253162A1 (en) * 2014-03-10 2015-09-10 Dmg Mori Seiki Co., Ltd. Position detecting device
WO2019221132A1 (ja) * 2018-05-18 2019-11-21 株式会社東海理化電機製作所 磁気センサ装置
WO2024090254A1 (ja) * 2022-10-27 2024-05-02 株式会社デンソー 位置検出装置

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GB0903550D0 (en) * 2009-03-02 2009-04-08 Rls Merilna Tehnika D O O Position encoder apparatus
EP2413154B1 (en) * 2010-07-30 2013-04-17 Nxp B.V. Magnetoresistive Sensor
KR101657952B1 (ko) 2010-11-15 2016-09-20 주식회사 고영테크놀러지 기판 검사방법
CN103221790B (zh) * 2010-11-18 2016-02-03 三菱电机株式会社 旋转角度检测装置
JP5215370B2 (ja) * 2010-11-22 2013-06-19 三菱電機株式会社 磁気式位置検出装置
JP5660381B2 (ja) * 2011-03-09 2015-01-28 株式会社ジェイテクト 回転角検出装置
JP5798824B2 (ja) * 2011-07-22 2015-10-21 株式会社ミツトヨ 目盛誤差算出装置、目盛誤差校正装置、及び目盛誤差算出方法
GB201204066D0 (en) * 2012-03-08 2012-04-18 Renishaw Plc Magnetic encoder apparatus
KR101428971B1 (ko) 2013-03-21 2014-08-13 숭실대학교산학협력단 변위 측정 장치
US9982989B2 (en) * 2013-07-17 2018-05-29 Infineon Technologies Ag Angle sensors, systems and methods
US9574906B2 (en) 2013-10-28 2017-02-21 Hitachi Metals, Ltd. Magnetic medium for magnetic encoder, magnetic encoder and method for manufacturing magnetic medium
KR101449873B1 (ko) 2013-11-29 2014-10-13 숭실대학교산학협력단 변위 측정 장치
US10082527B2 (en) * 2015-06-03 2018-09-25 Texas Instruments Incorporated Removal of higher order magnetic interference in magnetic field based current sensors
JP2017058328A (ja) * 2015-09-18 2017-03-23 日本電産サンキョー株式会社 直動回転検出器
JP6656958B2 (ja) * 2016-03-10 2020-03-04 日本電産サンキョー株式会社 ロータリエンコーダ及びロータリエンコーダの角度補正方法
JP6430565B2 (ja) 2016-03-23 2018-11-28 アナログ・デヴァイシズ・グローバル 磁界検出器
JP6555289B2 (ja) * 2017-03-13 2019-08-07 株式会社デンソー 回転センサ
JP6331177B1 (ja) * 2017-03-24 2018-05-30 Tdk株式会社 角度センサシステム
US10739165B2 (en) 2017-07-05 2020-08-11 Analog Devices Global Magnetic field sensor

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JPS62247213A (ja) * 1986-10-20 1987-10-28 Hitachi Ltd 磁気エンコーダ
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JPS62192615A (ja) 1986-02-20 1987-08-24 Nippon Kogaku Kk <Nikon> 磁気エンコ−ダ用磁気ヘツド
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JPS62247213A (ja) * 1986-10-20 1987-10-28 Hitachi Ltd 磁気エンコーダ
JPH08204252A (ja) * 1995-01-31 1996-08-09 Canon Electron Inc 磁気抵抗効果センサ
JP2001012967A (ja) * 1999-04-28 2001-01-19 Asahi Optical Co Ltd エンコーダおよび磁気式エンコーダを搭載した測量機
JP2001124554A (ja) * 1999-10-22 2001-05-11 Asahi Optical Co Ltd 磁気式エンコーダを備えた測量機

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5761181B2 (ja) * 2010-04-26 2015-08-12 Tdk株式会社 位置検出装置
WO2011136054A1 (ja) * 2010-04-26 2011-11-03 Tdk株式会社 位置検出装置
JPWO2013024830A1 (ja) * 2011-08-12 2015-03-05 日立金属株式会社 エンコーダ
WO2013024830A1 (ja) * 2011-08-12 2013-02-21 日立金属株式会社 エンコーダ
US9250301B2 (en) 2011-08-12 2016-02-02 Hitachi Metals, Ltd. Encoder
JP5762567B2 (ja) * 2011-12-20 2015-08-12 三菱電機株式会社 回転角度検出装置
JPWO2013094236A1 (ja) * 2011-12-20 2015-12-10 三菱電機株式会社 回転角度検出装置
WO2013094236A1 (ja) * 2011-12-20 2013-06-27 三菱電機株式会社 回転角度検出装置
WO2015008439A1 (ja) * 2013-07-17 2015-01-22 株式会社デンソー 回転センサ
JP2015021795A (ja) * 2013-07-17 2015-02-02 株式会社デンソー 回転センサ
WO2015087726A1 (ja) * 2013-12-10 2015-06-18 日本電産サンキョー株式会社 磁気センサ装置、磁気式エンコーダ装置、および磁気センサ
WO2015087725A1 (ja) * 2013-12-10 2015-06-18 日本電産サンキョー株式会社 磁気センサ装置、および磁気式エンコーダ装置
JPWO2015087725A1 (ja) * 2013-12-10 2017-03-16 日本電産サンキョー株式会社 磁気センサ装置、および磁気式エンコーダ装置
US20150253162A1 (en) * 2014-03-10 2015-09-10 Dmg Mori Seiki Co., Ltd. Position detecting device
US9733317B2 (en) * 2014-03-10 2017-08-15 Dmg Mori Seiki Co., Ltd. Position detecting device
US10024691B2 (en) 2014-03-10 2018-07-17 Dmg Mori Seiki Co., Ltd. Position detecting device
US10048093B2 (en) 2014-03-10 2018-08-14 Dmg Mori Seiki Co., Ltd. Position detecting device
WO2019221132A1 (ja) * 2018-05-18 2019-11-21 株式会社東海理化電機製作所 磁気センサ装置
WO2024090254A1 (ja) * 2022-10-27 2024-05-02 株式会社デンソー 位置検出装置

Also Published As

Publication number Publication date
TWI393867B (zh) 2013-04-21
CN101663564B (zh) 2011-11-30
US20100052664A1 (en) 2010-03-04
DE112008001024B4 (de) 2011-06-09
KR101078078B1 (ko) 2011-10-28
JPWO2008130002A1 (ja) 2010-07-22
DE112008001024T5 (de) 2010-02-11
US8134359B2 (en) 2012-03-13
JP5064492B2 (ja) 2012-10-31
TW200902944A (en) 2009-01-16
KR20090122299A (ko) 2009-11-26
CN101663564A (zh) 2010-03-03

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