WO2008120511A1 - 液中物質検出センサー - Google Patents

液中物質検出センサー Download PDF

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Publication number
WO2008120511A1
WO2008120511A1 PCT/JP2008/053386 JP2008053386W WO2008120511A1 WO 2008120511 A1 WO2008120511 A1 WO 2008120511A1 JP 2008053386 W JP2008053386 W JP 2008053386W WO 2008120511 A1 WO2008120511 A1 WO 2008120511A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric substrate
sensor
main surface
channel
saw elements
Prior art date
Application number
PCT/JP2008/053386
Other languages
English (en)
French (fr)
Inventor
Hajime Yamada
Naoko Aizawa
Yoshihiro Koshido
Koji Fujimoto
Toru Yabe
Michio Kadota
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to EP08720934A priority Critical patent/EP2131192A1/en
Priority to JP2009507432A priority patent/JP5229220B2/ja
Publication of WO2008120511A1 publication Critical patent/WO2008120511A1/ja
Priority to US12/555,894 priority patent/US8256275B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/022—Liquids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

Abstract

　小型化と検出精度の向上が容易である、液中物質検出センサーを提供する。 　ａ）圧電基板１２と、ｂ）圧電基板１２の一方主面１２ａに形成されており、センシング部を構成している少なくとも１つのＩＤＴ電極を有する、少なくとも２つのＳＡＷ素子１６，１７と、ｃ）圧電基板１２の他方主面１２ｂに形成されており、圧電基板１２を貫通したビア１３を介してＳＡＷ素子１６，１７に電気的に接続されている、外部電極１５と、ｄ）圧電基板１２の一方主面１２ａにおいて、ＳＡＷ素子１６，１７及びＳＡＷ素子１６，１７間を接続する部分のまわりに配置され、流路３０の側壁を形成する、流路形成用部材１９と、ｅ）圧電基板１２の一方主面１２ａ側に流路形成用部材１９を介して接合されて流路３０を塞ぎ、流路３０に連通する少なくとも２つの貫通孔２２，２４を有する、保護部材２０と、を備える。
PCT/JP2008/053386 2007-03-29 2008-02-27 液中物質検出センサー WO2008120511A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08720934A EP2131192A1 (en) 2007-03-29 2008-02-27 Sensor for detecting substance in liquid
JP2009507432A JP5229220B2 (ja) 2007-03-29 2008-02-27 液中物質検出センサー
US12/555,894 US8256275B2 (en) 2007-03-29 2009-09-09 In-liquid-substance detection sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-089317 2007-03-29
JP2007089317 2007-03-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/555,894 Continuation US8256275B2 (en) 2007-03-29 2009-09-09 In-liquid-substance detection sensor

Publications (1)

Publication Number Publication Date
WO2008120511A1 true WO2008120511A1 (ja) 2008-10-09

Family

ID=39808096

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053386 WO2008120511A1 (ja) 2007-03-29 2008-02-27 液中物質検出センサー

Country Status (4)

Country Link
US (1) US8256275B2 (ja)
EP (1) EP2131192A1 (ja)
JP (1) JP5229220B2 (ja)
WO (1) WO2008120511A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012516439A (ja) * 2009-01-30 2012-07-19 バイオセンサー、アプリケーションズ、スエーデン、アクチボラグ 液体サンプル中の各種標的抗原の分析
JP2013152209A (ja) * 2011-12-27 2013-08-08 Kyocera Corp 弾性表面波センサおよびその製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2817283C (en) * 2010-10-05 2020-07-14 Anpac Bio-Medical Science Co., Ltd. Micro-devices for disease detection
JP2012217136A (ja) * 2011-03-30 2012-11-08 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法、およびこの方法で製造した圧電デバイス
US10976326B2 (en) * 2013-12-26 2021-04-13 Kyocera Corporation Sensor
EP3252462B1 (en) * 2015-02-27 2020-05-06 Kyocera Corporation Liquid sample sensor based on surface acoustic wave elements
WO2017212742A1 (ja) 2016-06-09 2017-12-14 株式会社村田製作所 弾性波装置
US11581870B2 (en) * 2019-09-27 2023-02-14 Skyworks Solutions, Inc. Stacked acoustic wave resonator package with laser-drilled VIAS

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201951A (ja) * 1998-01-08 1999-07-30 Sumitomo Electric Ind Ltd 表面弾性波センサ
JP2003502616A (ja) * 1998-11-04 2003-01-21 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 液体の濃度及び粘性を検出するセンサ装置及び方法
JP2003267184A (ja) * 2002-03-18 2003-09-25 Suzuki Motor Corp シートベルト装置におけるシートベルト連結具の収納構造
JP2004129222A (ja) * 2002-07-31 2004-04-22 Murata Mfg Co Ltd 圧電部品およびその製造方法
JP2005038946A (ja) * 2003-07-16 2005-02-10 Murata Mfg Co Ltd 多層配線構造およびそれを用いた電子部品
WO2005066621A1 (en) * 2003-12-30 2005-07-21 3M Innovative Properties Company Surface acoustic wave sensor assemblies
WO2005120130A1 (ja) * 2004-06-03 2005-12-15 Olympus Corporation 静電容量型超音波振動子とその製造方法、静電容量型超音波プローブ
WO2006006343A1 (ja) * 2004-07-14 2006-01-19 Murata Manufacturing Co., Ltd. 圧電デバイス
WO2006008940A1 (ja) * 2004-07-20 2006-01-26 Murata Manufacturing Co., Ltd. 圧電フィルタ
WO2006027945A1 (ja) 2004-09-10 2006-03-16 Murata Manufacturing Co., Ltd. 液中物質検出センサ及びそれを用いた液中物質検出装置
JP2006173557A (ja) * 2004-11-22 2006-06-29 Toshiba Corp 中空型半導体装置とその製造方法
JP2006184011A (ja) * 2004-12-24 2006-07-13 Seiko Epson Corp 弾性表面波センサ
WO2006114829A1 (ja) * 2005-04-06 2006-11-02 Murata Manufacturing Co., Ltd. 表面波センサ装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3206345B2 (ja) * 1994-12-22 2001-09-10 株式会社明電舎 弾性表面波素子
JP2005181292A (ja) * 2003-11-27 2005-07-07 Kyocera Corp 圧力センサ
WO2005052534A1 (ja) * 2003-11-27 2005-06-09 Kyocera Corporation 圧力センサ装置
JP2005208055A (ja) * 2003-12-25 2005-08-04 Kyocera Corp 圧力センサモジュール
JP2005208043A (ja) * 2003-12-25 2005-08-04 Kyocera Corp 圧力センサ装置
JP4628075B2 (ja) * 2004-12-03 2011-02-09 日本無線株式会社 センサ
JP2006267184A (ja) * 2005-03-22 2006-10-05 Fuji Xerox Co Ltd 用紙トレーおよび画像形成装置
CN101151802B (zh) * 2005-04-01 2010-08-25 松下电器产业株式会社 弹性表面波装置及其制造方法
WO2008038506A1 (fr) * 2006-09-27 2008-04-03 Murata Manufacturing Co., Ltd. Dispositif d'onde acoustique limite
WO2008078481A1 (ja) * 2006-12-25 2008-07-03 Murata Manufacturing Co., Ltd. 弾性境界波装置

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201951A (ja) * 1998-01-08 1999-07-30 Sumitomo Electric Ind Ltd 表面弾性波センサ
JP2003502616A (ja) * 1998-11-04 2003-01-21 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 液体の濃度及び粘性を検出するセンサ装置及び方法
JP2003267184A (ja) * 2002-03-18 2003-09-25 Suzuki Motor Corp シートベルト装置におけるシートベルト連結具の収納構造
JP2004129222A (ja) * 2002-07-31 2004-04-22 Murata Mfg Co Ltd 圧電部品およびその製造方法
JP2005038946A (ja) * 2003-07-16 2005-02-10 Murata Mfg Co Ltd 多層配線構造およびそれを用いた電子部品
WO2005066621A1 (en) * 2003-12-30 2005-07-21 3M Innovative Properties Company Surface acoustic wave sensor assemblies
WO2005120130A1 (ja) * 2004-06-03 2005-12-15 Olympus Corporation 静電容量型超音波振動子とその製造方法、静電容量型超音波プローブ
WO2006006343A1 (ja) * 2004-07-14 2006-01-19 Murata Manufacturing Co., Ltd. 圧電デバイス
WO2006008940A1 (ja) * 2004-07-20 2006-01-26 Murata Manufacturing Co., Ltd. 圧電フィルタ
WO2006027945A1 (ja) 2004-09-10 2006-03-16 Murata Manufacturing Co., Ltd. 液中物質検出センサ及びそれを用いた液中物質検出装置
JP2006173557A (ja) * 2004-11-22 2006-06-29 Toshiba Corp 中空型半導体装置とその製造方法
JP2006184011A (ja) * 2004-12-24 2006-07-13 Seiko Epson Corp 弾性表面波センサ
WO2006114829A1 (ja) * 2005-04-06 2006-11-02 Murata Manufacturing Co., Ltd. 表面波センサ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012516439A (ja) * 2009-01-30 2012-07-19 バイオセンサー、アプリケーションズ、スエーデン、アクチボラグ 液体サンプル中の各種標的抗原の分析
JP2013152209A (ja) * 2011-12-27 2013-08-08 Kyocera Corp 弾性表面波センサおよびその製造方法

Also Published As

Publication number Publication date
JPWO2008120511A1 (ja) 2010-07-15
US8256275B2 (en) 2012-09-04
EP2131192A1 (en) 2009-12-09
JP5229220B2 (ja) 2013-07-03
US20090320574A1 (en) 2009-12-31

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