WO2008102848A1 - 陽極接合用ガラス - Google Patents

陽極接合用ガラス Download PDF

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Publication number
WO2008102848A1
WO2008102848A1 PCT/JP2008/052977 JP2008052977W WO2008102848A1 WO 2008102848 A1 WO2008102848 A1 WO 2008102848A1 JP 2008052977 W JP2008052977 W JP 2008052977W WO 2008102848 A1 WO2008102848 A1 WO 2008102848A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass
anodic bonding
thermal expansion
expansion coefficient
mole
Prior art date
Application number
PCT/JP2008/052977
Other languages
English (en)
French (fr)
Inventor
Masanori Shojiya
Hirotaka Koyo
Koichi Sakaguchi
Satoshi Jibiki
Original Assignee
Nippon Sheet Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Company, Limited filed Critical Nippon Sheet Glass Company, Limited
Priority to US12/527,308 priority Critical patent/US20100029460A1/en
Priority to JP2009500235A priority patent/JP5318748B2/ja
Publication of WO2008102848A1 publication Critical patent/WO2008102848A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/02—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing by fusing glass directly to metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C03C3/093—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/095—Glass compositions containing silica with 40% to 90% silica, by weight containing rare earths

Abstract

　本発明は、低い熱膨張係数を持ち、レーザ光による微細加工が可能な陽極接合用ガラスを提供する。本発明は、Ｌｉ2Ｏ＋Ｎａ2Ｏ＋Ｋ2Ｏ：１～６モル％を含む基本ガラス組成を有し、室温から４５０°Cにおける平均線膨張係数が、３２×１０-7～３９×１０-7Ｋ-1である陽極接合用ガラスであって、着色剤である金属酸化物を、前記基本ガラス組成に対して０．０１～５モル％含み、５３５ｎｍ以下の特定の波長における吸収係数が０．５～５０ｃｍ-1である陽極接合用ガラスである。
PCT/JP2008/052977 2007-02-22 2008-02-21 陽極接合用ガラス WO2008102848A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/527,308 US20100029460A1 (en) 2007-02-22 2008-02-21 Glass for anodic bonding
JP2009500235A JP5318748B2 (ja) 2007-02-22 2008-02-21 陽極接合用ガラス

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007042621 2007-02-22
JP2007-042621 2007-02-22

Publications (1)

Publication Number Publication Date
WO2008102848A1 true WO2008102848A1 (ja) 2008-08-28

Family

ID=39710120

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/052977 WO2008102848A1 (ja) 2007-02-22 2008-02-21 陽極接合用ガラス

Country Status (3)

Country Link
US (1) US20100029460A1 (ja)
JP (1) JP5318748B2 (ja)
WO (1) WO2008102848A1 (ja)

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US20130005560A1 (en) * 2009-10-28 2013-01-03 Abengoa Solar New Technologies, S.A. Novel glass compositions and method for producing a glass/metal join
WO2017217496A1 (ja) * 2016-06-17 2017-12-21 日本板硝子株式会社 レーザ加工用ガラス
US11062986B2 (en) 2017-05-25 2021-07-13 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US11114309B2 (en) 2016-06-01 2021-09-07 Corning Incorporated Articles and methods of forming vias in substrates
US11130701B2 (en) 2016-09-30 2021-09-28 Corning Incorporated Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
US11148225B2 (en) 2013-12-17 2021-10-19 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US11345625B2 (en) 2013-01-15 2022-05-31 Corning Laser Technologies GmbH Method and device for the laser-based machining of sheet-like substrates
US11542190B2 (en) 2016-10-24 2023-01-03 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US11648623B2 (en) 2014-07-14 2023-05-16 Corning Incorporated Systems and methods for processing transparent materials using adjustable laser beam focal lines
US11697178B2 (en) 2014-07-08 2023-07-11 Corning Incorporated Methods and apparatuses for laser processing materials
US11713271B2 (en) 2013-03-21 2023-08-01 Corning Laser Technologies GmbH Device and method for cutting out contours from planar substrates by means of laser
US11774233B2 (en) 2016-06-29 2023-10-03 Corning Incorporated Method and system for measuring geometric parameters of through holes
US11773004B2 (en) 2015-03-24 2023-10-03 Corning Incorporated Laser cutting and processing of display glass compositions
US11972993B2 (en) 2021-05-14 2024-04-30 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same

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US9302937B2 (en) 2010-05-14 2016-04-05 Corning Incorporated Damage-resistant glass articles and method
TWI572480B (zh) 2011-07-25 2017-03-01 康寧公司 經層壓及離子交換之強化玻璃疊層
IN2014DN07444A (ja) * 2012-02-29 2015-04-24 Corning Inc
US9359251B2 (en) 2012-02-29 2016-06-07 Corning Incorporated Ion exchanged glasses via non-error function compressive stress profiles
WO2014079478A1 (en) 2012-11-20 2014-05-30 Light In Light Srl High speed laser processing of transparent materials
US11079309B2 (en) 2013-07-26 2021-08-03 Corning Incorporated Strengthened glass articles having improved survivability
US9676167B2 (en) 2013-12-17 2017-06-13 Corning Incorporated Laser processing of sapphire substrate and related applications
US20150165560A1 (en) 2013-12-17 2015-06-18 Corning Incorporated Laser processing of slots and holes
US9815730B2 (en) 2013-12-17 2017-11-14 Corning Incorporated Processing 3D shaped transparent brittle substrate
US9850160B2 (en) 2013-12-17 2017-12-26 Corning Incorporated Laser cutting of display glass compositions
US10442719B2 (en) 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
US9701563B2 (en) 2013-12-17 2017-07-11 Corning Incorporated Laser cut composite glass article and method of cutting
US9517968B2 (en) 2014-02-24 2016-12-13 Corning Incorporated Strengthened glass with deep depth of compression
TWI697403B (zh) 2014-06-19 2020-07-01 美商康寧公司 無易碎應力分布曲線的玻璃
CN208586209U (zh) 2014-07-14 2019-03-08 康宁股份有限公司 一种用于在工件中形成限定轮廓的多个缺陷的系统
JP6788571B2 (ja) 2014-07-14 2020-11-25 コーニング インコーポレイテッド 界面ブロック、そのような界面ブロックを使用する、ある波長範囲内で透過する基板を切断するためのシステムおよび方法
EP3169479B1 (en) 2014-07-14 2019-10-02 Corning Incorporated Method of and system for arresting incident crack propagation in a transparent material
JP6889106B2 (ja) 2014-10-07 2021-06-18 コーニング インコーポレイテッド 決定された応力プロファイルを有するガラス物品、およびその製造方法
KR20200126017A (ko) 2014-10-08 2020-11-05 코닝 인코포레이티드 금속 산화물 농도 구배를 포함한 유리 및 유리 세라믹
US10150698B2 (en) 2014-10-31 2018-12-11 Corning Incorporated Strengthened glass with ultra deep depth of compression
CN115536270A (zh) 2014-11-04 2022-12-30 康宁股份有限公司 深层非易碎应力曲线及其制造方法
US10047001B2 (en) 2014-12-04 2018-08-14 Corning Incorporated Glass cutting systems and methods using non-diffracting laser beams
JP2018507154A (ja) 2015-01-12 2018-03-15 コーニング インコーポレイテッド マルチフォトン吸収方法を用いた熱強化基板のレーザー切断
KR102444204B1 (ko) * 2015-02-10 2022-09-19 옵토멕 인코포레이티드 에어로졸의 비행 중 경화에 의해 3차원 구조를 제조하는 방법
US20170348903A1 (en) * 2015-02-10 2017-12-07 Optomec, Inc. Fabrication of Three-Dimensional Materials Gradient Structures by In-Flight Curing of Aerosols
JP2018516215A (ja) 2015-03-27 2018-06-21 コーニング インコーポレイテッド 気体透過性窓、および、その製造方法
JP7082042B2 (ja) 2015-07-10 2022-06-07 コーニング インコーポレイテッド 可撓性基体シートに孔を連続形成する方法およびそれに関する製品
US11613103B2 (en) 2015-07-21 2023-03-28 Corning Incorporated Glass articles exhibiting improved fracture performance
US9701569B2 (en) 2015-07-21 2017-07-11 Corning Incorporated Glass articles exhibiting improved fracture performance
WO2017066243A1 (en) * 2015-10-14 2017-04-20 Corning Incorporated Laminated glass article with determined stress profile and method for forming the same
KR102029948B1 (ko) 2015-12-11 2019-10-08 코닝 인코포레이티드 금속 산화물 농도 구배를 포함하는 융합-형성가능한 유리계 제품
US10150140B2 (en) * 2016-02-09 2018-12-11 King Fahd University Of Petroleum And Minerals Superhydrophobic and self-cleaning substrate and a method of coating
KR20240033166A (ko) 2016-04-08 2024-03-12 코닝 인코포레이티드 금속 산화물 농도 구배를 포함하는 유리-계 제품
US10271442B2 (en) 2016-04-08 2019-04-23 Corning Incorporated Glass-based articles including a stress profile comprising two regions, and methods of making
CN109311725B (zh) 2016-05-06 2022-04-26 康宁股份有限公司 从透明基材激光切割及移除轮廓形状
JP7090594B2 (ja) 2016-07-29 2022-06-24 コーニング インコーポレイテッド レーザ加工するための装置および方法
EP3507057A1 (en) 2016-08-30 2019-07-10 Corning Incorporated Laser processing of transparent materials
US10752534B2 (en) 2016-11-01 2020-08-25 Corning Incorporated Apparatuses and methods for laser processing laminate workpiece stacks
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
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US11591255B2 (en) 2018-05-22 2023-02-28 Corning Incorporated Low temperature moldable sheet forming glass compositions

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JP2005067908A (ja) * 2003-08-22 2005-03-17 Nippon Sheet Glass Co Ltd レーザ加工用ガラス
JP2006184184A (ja) * 2004-12-28 2006-07-13 Alps Electric Co Ltd ガラス基板及びその製造方法
JP2006216882A (ja) * 2005-02-07 2006-08-17 Seiko Instruments Inc 力学量センサ及び電子機器並びに力学量センサの製造方法

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8937026B2 (en) * 2009-10-28 2015-01-20 Abengoa Solar New Technologies, S.A. Glass compositions and method for producing a glass/metal join
US20130005560A1 (en) * 2009-10-28 2013-01-03 Abengoa Solar New Technologies, S.A. Novel glass compositions and method for producing a glass/metal join
US11345625B2 (en) 2013-01-15 2022-05-31 Corning Laser Technologies GmbH Method and device for the laser-based machining of sheet-like substrates
US11713271B2 (en) 2013-03-21 2023-08-01 Corning Laser Technologies GmbH Device and method for cutting out contours from planar substrates by means of laser
US11148225B2 (en) 2013-12-17 2021-10-19 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US11697178B2 (en) 2014-07-08 2023-07-11 Corning Incorporated Methods and apparatuses for laser processing materials
US11648623B2 (en) 2014-07-14 2023-05-16 Corning Incorporated Systems and methods for processing transparent materials using adjustable laser beam focal lines
US11773004B2 (en) 2015-03-24 2023-10-03 Corning Incorporated Laser cutting and processing of display glass compositions
US11114309B2 (en) 2016-06-01 2021-09-07 Corning Incorporated Articles and methods of forming vias in substrates
WO2017217496A1 (ja) * 2016-06-17 2017-12-21 日本板硝子株式会社 レーザ加工用ガラス
US11774233B2 (en) 2016-06-29 2023-10-03 Corning Incorporated Method and system for measuring geometric parameters of through holes
US11130701B2 (en) 2016-09-30 2021-09-28 Corning Incorporated Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
US11542190B2 (en) 2016-10-24 2023-01-03 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US11062986B2 (en) 2017-05-25 2021-07-13 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
US11972993B2 (en) 2021-05-14 2024-04-30 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same

Also Published As

Publication number Publication date
US20100029460A1 (en) 2010-02-04
JPWO2008102848A1 (ja) 2010-05-27
JP5318748B2 (ja) 2013-10-16

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