WO2008087852A1 - 原子力顕微鏡及び原子力顕微鏡を用いた相互作用力測定方法 - Google Patents

原子力顕微鏡及び原子力顕微鏡を用いた相互作用力測定方法 Download PDF

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Publication number
WO2008087852A1
WO2008087852A1 PCT/JP2008/000001 JP2008000001W WO2008087852A1 WO 2008087852 A1 WO2008087852 A1 WO 2008087852A1 JP 2008000001 W JP2008000001 W JP 2008000001W WO 2008087852 A1 WO2008087852 A1 WO 2008087852A1
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WO
WIPO (PCT)
Prior art keywords
curve
interactive force
force
short distance
shortened
Prior art date
Application number
PCT/JP2008/000001
Other languages
English (en)
French (fr)
Inventor
Masahiro Ota
Noriaki Oyabu
Masayuki Abe
Oscar Custance
Yoshiaki Sugimoto
Seizo Morita
Original Assignee
Osaka University
Shimadzu Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka University, Shimadzu Corporation filed Critical Osaka University
Priority to JP2008554000A priority Critical patent/JP4834817B2/ja
Priority to CN2008800020614A priority patent/CN101606051B/zh
Priority to US12/523,661 priority patent/US7975316B2/en
Publication of WO2008087852A1 publication Critical patent/WO2008087852A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

　ＦＭ－ＡＦＭで得られる周波数シフトΔｆは、遠距離相互作用力に由来するΔｆLRと短距離相互作用力に由来するΔｆSRとの単純な線形結合で表すことができる。そこで、試料表面の原子欠陥上でのΔｆカーブと目的原子上でのΔｆカーブをそれぞれ比較的短い距離範囲についてのみ測定し（Ｓ１、Ｓ２）、両者の差分Δｆカーブを求める（Ｓ３）。差分Δｆカーブは短距離相互作用力のみに由来するものであるから、これに公知の変換処理を適用して力と距離Ｚとの関係を示すＦカーブを求め、そこから目的原子上の短距離相互作用力を得る（Ｓ４）。Δｆカーブ測定時の距離範囲を狭くできるので測定時間が短縮でき、Δｆカーブ→Ｆカーブの変換が１回で済むので演算時間も短縮できる。これにより、試料表面の原子と探針との間に働く短距離相互作用力を求める際に、Δｆカーブの測定に要する時間及び演算時間を短縮化し、精度向上を図るとともにスループットを向上させることができる。
PCT/JP2008/000001 2007-01-17 2008-01-07 原子力顕微鏡及び原子力顕微鏡を用いた相互作用力測定方法 WO2008087852A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008554000A JP4834817B2 (ja) 2007-01-17 2008-01-07 原子間力顕微鏡及び原子間力顕微鏡を用いた相互作用力測定方法
CN2008800020614A CN101606051B (zh) 2007-01-17 2008-01-07 原子间力显微镜以及采用原子间力显微镜的相互作用力测定方法
US12/523,661 US7975316B2 (en) 2007-01-17 2008-01-07 Atomic force microscope and interaction force measurement method using atomic force microscope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-007580 2007-01-17
JP2007007580 2007-01-17

Publications (1)

Publication Number Publication Date
WO2008087852A1 true WO2008087852A1 (ja) 2008-07-24

Family

ID=39635857

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000001 WO2008087852A1 (ja) 2007-01-17 2008-01-07 原子力顕微鏡及び原子力顕微鏡を用いた相互作用力測定方法

Country Status (4)

Country Link
US (1) US7975316B2 (ja)
JP (1) JP4834817B2 (ja)
CN (1) CN101606051B (ja)
WO (1) WO2008087852A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139238A1 (ja) * 2008-05-12 2009-11-19 独立行政法人科学技術振興機構 ダイナミックモードａｆｍ装置
JP2011033482A (ja) * 2009-07-31 2011-02-17 Kyoto Univ 制御装置、原子間力顕微鏡、制御方法およびプログラム

Families Citing this family (6)

* Cited by examiner, † Cited by third party
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CN102495043B (zh) * 2011-12-14 2013-10-30 中国科学院苏州纳米技术与纳米仿生研究所 半导体材料表面缺陷测量装置及表面缺陷测量方法
GB2519808A (en) * 2013-10-31 2015-05-06 Ibm Determation of local contact potential difference by noncontact atomic force microscopy
US9395387B1 (en) * 2015-06-19 2016-07-19 Shimadzu Corporation Scanning probe microscope
US10884022B2 (en) * 2017-01-10 2021-01-05 Osaka University Scanner and scanning probe microscope
CN110487225B (zh) * 2019-08-27 2020-10-23 上海交通大学 原子尺度应变计算方法和原子尺度应变计算装置
CN111381075B (zh) * 2020-04-16 2020-12-11 华中科技大学 一种利用预拟合锁相频差值获取频率偏移量的方法及装置

Citations (1)

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JP2006289542A (ja) * 2005-04-08 2006-10-26 Osaka Univ 原子位置固定装置、原子位置固定方法及び原子操作方法

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WO1996032623A1 (en) * 1995-04-10 1996-10-17 International Business Machines Corporation Apparatus and method for controlling a mechanical oscillator
JP4472863B2 (ja) * 1999-12-20 2010-06-02 セイコーインスツル株式会社 近視野光プローブおよびその近視野光プローブを用いた近視野光装置
JP2001266317A (ja) * 2000-03-23 2001-09-28 Toshiba Corp 磁気記録ヘッド測定装置及び同装置に適用する測定方法
US7155964B2 (en) * 2002-07-02 2007-01-02 Veeco Instruments Inc. Method and apparatus for measuring electrical properties in torsional resonance mode
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JP2007232596A (ja) * 2006-03-01 2007-09-13 Jeol Ltd 磁気共鳴力顕微鏡
JP4851375B2 (ja) * 2007-03-23 2012-01-11 日本電子株式会社 位相フィードバックａｆｍの制御方法及び位相フィードバックａｆｍ

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Publication number Priority date Publication date Assignee Title
JP2006289542A (ja) * 2005-04-08 2006-10-26 Osaka Univ 原子位置固定装置、原子位置固定方法及び原子操作方法

Non-Patent Citations (2)

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ABE M. ET AL.: "Room-temperature reproducible spatial force spectroscopy using room-tracking technique", APPLIED PHYSICS LETTERS, vol. 87, 19 October 2005 (2005-10-19), pages 173503-1 - 173503-3 *
LANTZ M.A. ET AL.: "Site-specific force-distance characteristics on NaCl(001): Measurements versus atomistic simulations", PHYSICAL REVIEW B, vol. 74, 22 December 2006 (2006-12-22), pages 245426-1 - 245426-9 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139238A1 (ja) * 2008-05-12 2009-11-19 独立行政法人科学技術振興機構 ダイナミックモードａｆｍ装置
JP4913242B2 (ja) * 2008-05-12 2012-04-11 独立行政法人科学技術振興機構 ダイナミックモードａｆｍ装置
JP2011033482A (ja) * 2009-07-31 2011-02-17 Kyoto Univ 制御装置、原子間力顕微鏡、制御方法およびプログラム

Also Published As

Publication number Publication date
CN101606051B (zh) 2011-12-28
US20100071099A1 (en) 2010-03-18
CN101606051A (zh) 2009-12-16
JPWO2008087852A1 (ja) 2010-05-06
JP4834817B2 (ja) 2011-12-14
US7975316B2 (en) 2011-07-05

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