WO2008038498A1 - Dispositif de filtre d'onde acoustique équilibré - Google Patents

Dispositif de filtre d'onde acoustique équilibré Download PDF

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Publication number
WO2008038498A1
WO2008038498A1 PCT/JP2007/067185 JP2007067185W WO2008038498A1 WO 2008038498 A1 WO2008038498 A1 WO 2008038498A1 JP 2007067185 W JP2007067185 W JP 2007067185W WO 2008038498 A1 WO2008038498 A1 WO 2008038498A1
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WO
WIPO (PCT)
Prior art keywords
wave filter
acoustic wave
balanced
idt
filter device
Prior art date
Application number
PCT/JP2007/067185
Other languages
English (en)
Japanese (ja)
Inventor
Kazumasa Haruta
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to JP2008536315A priority Critical patent/JP4873010B2/ja
Publication of WO2008038498A1 publication Critical patent/WO2008038498A1/fr

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023—Balance-unbalance or balance-balance networks
    • H03H9/0028—Balance-unbalance or balance-balance networks using surface acoustic wave devices
    • H03H9/0033—Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only
    • H03H9/0042—Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only the balanced terminals being on opposite sides of the track
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02874—Means for compensation or elimination of undesirable effects of direct coupling between input and output transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02913—Measures for shielding against electromagnetic fields
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/058—Holders; Supports for surface acoustic wave devices
    • H03H9/059—Holders; Supports for surface acoustic wave devices consisting of mounting pads or bumps

Definitions

  • the present invention relates to an elastic wave filter device using an elastic wave such as a boundary acoustic wave or a surface acoustic wave, and more specifically, a balanced elastic wave filter having a balance-unbalance conversion function. Relates to the device.
  • a surface acoustic wave filter device has been widely used for a band filter of an RF stage of a mobile phone.
  • various boundary acoustic wave filter devices using boundary acoustic waves have been proposed in place of surface acoustic wave filter devices.
  • Patent Document 1 An example of a surface acoustic wave filter device having a balance-unbalance conversion function used for such applications is disclosed in Patent Document 1 below.
  • a surface acoustic wave filter device 1001 described in Patent Document 1 has an unbalanced terminal 1002 and first and second balanced terminals 1003 and 1004.
  • a longitudinally coupled resonator-type surface acoustic wave filter unit 1007 is connected to the unbalanced terminal 1002 through 1-port inertial surface acoustic wave resonators 1005 and 1006.
  • the second and third IDTs 1009 and 1010 are provided on both sides J of the first IDT 1008 disposed in the center. Further, reflectors 1011 and 1012 are arranged on both sides of the surface wave propagation direction in the region where the first to third IDTs 1008 to 1010 are provided.
  • One ends of the second and third IDTs 1009 and 1010 are connected in common and connected to the unbalanced terminal 1002 via surface acoustic wave resonators 1005 and 1006.
  • the other ends of IDT1009 and 1010 are connected to the ground potential!
  • One end of the first IDT 1008 is connected to the first balanced terminal 1003, and the other end is connected to the second Connected to balanced terminal 1004.
  • the polarity of the third IDT 1010 is inverted with respect to the polarity of the second IDT 1009.
  • the number of electrode fingers of the first IDT 1008 is an even number. Therefore, a balanced-unbalanced conversion function is realized.
  • a ground pattern 1013 is provided in order to improve the balance.
  • this ground pattern 1013 is shown in a floating state in FIG. 14, specifically, in the space occupying the input side of the longitudinally coupled resonator-type surface acoustic wave filter unit 1007, the unbalanced terminal 1002 and the second It is provided in a region between the input signal line 1014 connecting the IDTs 1009 and 1010 of 2 and 3 and the first balanced terminal 1003.
  • the earth line 1013 is formed in a U-shape or the like so as to surround the balance terminal 1003 formed on the electrode pad. You will be shown! /!
  • Patent Document 1 Japanese Patent No. 3384403
  • the ground line 1013 is provided between the input signal line 1014 and the first balanced terminal 1003 in a configuration having a balance-unbalance conversion function.
  • the phase balance and the amplitude balance were supposed to be improved.
  • the phase balance and the amplitude balance are still not sufficient and further improvement is strongly demanded.
  • a longitudinally coupled resonator type surface acoustic wave filter device and boundary acoustic wave filter device having a balanced-unbalanced conversion function that is not a float type but a midpoint grounding type are also known. There is also a strong demand for improving the balance of the grounded-point type elastic wave filter device.
  • the first and second balances from the first and second IDTs located on both sides of the center first IDT are balanced. Since it is connected to the terminal, the above earth line 10 13 could not be applied as it is.
  • An object of the present invention is a longitudinally coupled resonator-type elastic wave filter device having a balance-unbalance conversion function in view of the above-described current state of the prior art, in which the degree of balance is further improved.
  • An object of the present invention is to provide a resonator type acoustic wave filter device.
  • a balanced filter device having a balance-unbalance conversion function, comprising: a piezoelectric body; and an electrode structure provided on the piezoelectric body.
  • the IDT and the first IDT are disposed on both sides of the elastic wave propagation direction of the first IDT, the first and second IDTs disposed on both sides of the elastic wave propagation direction, and the first to third IDTs.
  • the electrode structure comprising an unbalanced terminal, first and second balanced terminals, And further comprising an input signal line connected to the unbalanced terminal and the longitudinally coupled resonator type acoustic wave filter unit, and one end of the first IDT is connected to the unbalanced terminal by the input signal line.
  • One end of each of the second and third IDTs is connected to the first and second balanced terminals, respectively.
  • the structure further includes a shield pattern disposed between the input signal line and the second balanced terminal, and connected to a ground potential.
  • the first IDT and the third IDT are connected to each other.
  • the fourth and fifth IDTs may be further arranged on both sides of the elastic wave propagation direction where the first to third IDTs are provided.
  • the first and second reflectors are arranged on both sides of the portion where the first to fifth IDTs are provided, and the balance is further improved according to the present invention.
  • a balanced type acoustic wave filter device including a 5IDT type longitudinally coupled resonator type acoustic wave filter unit can be provided.
  • one end of the fourth and fifth IDTs connected only by the first IDT is connected to the unbalanced terminal by the input signal line, and the third IDT and the first IDT
  • the polarities of the outermost electrode fingers that are adjacent to each other at the positions adjacent to each other and the polarities of the outermost electrode fingers that are adjacent to each other at the positions where the third IDT and the fifth IDT are adjacent to each other are different.
  • a dielectric laminated on a piezoelectric body may be further provided.
  • an elastic boundary wave may be used as the elastic wave.
  • a boundary acoustic wave filter device can be provided.
  • the balanced acoustic wave filter device preferably further includes an earth line provided on the dielectric.
  • the earth line is opposed to the shield pattern. In this case, since the ground line is further provided, the balance can be further improved.
  • the ground line is electrically connected to the shield pattern by a via-hole conductor provided so as to penetrate the dielectric, whereby the shield pattern can be reliably electrically connected to the ground potential. It is possible to further improve the balance.
  • the balanced elastic wave filter device may use a surface acoustic wave as the elastic wave, and in that case, according to the present invention, the balanced elastic wave with improved balance is provided.
  • a filter device can be provided.
  • the first IDT is connected to the unbalanced terminal, and the second and third IDT forces are connected to the first and second balanced terminals, respectively.
  • the balance-unbalance conversion function is realized. Since the shield pattern is provided between the input signal line and the second balanced terminal, as will be apparent from the embodiment described later, the first balanced signal taken out from the first balanced terminal; It is possible to effectively improve the degree of balance with the second balanced signal extracted from the second balanced terminal.
  • an elastic wave filter device having a balance-unbalance conversion function suitable for, for example, a bandpass filter used in an RF stage of a mobile phone, etc.
  • FIG. 1 is a plan view of a boundary acoustic wave filter device according to a first embodiment of the present invention. It is a top view which shows typically the position of the bump formed on a terminal in order to connect with an electrode structure and the exterior.
  • FIG. 2 is a schematic front sectional view for explaining the boundary acoustic wave filter device of the first embodiment.
  • FIG. 3 is a schematic plan view showing an electrode structure of the boundary acoustic wave filter device of the first embodiment.
  • FIG. 4 is a diagram showing amplitude balance characteristics of the boundary acoustic wave filter devices of the first embodiment and the first comparative example.
  • FIG. 5 is a diagram showing phase balance characteristics of the boundary acoustic wave filter devices of the first embodiment and the first comparative example.
  • Fig. 6 is a diagram showing a common-mode attenuation-one-frequency characteristic of the boundary acoustic wave filter devices of the first embodiment and the first comparative example.
  • FIG. 7 is a diagram showing amplitude balance characteristics of the boundary acoustic wave filter devices of the first embodiment and the second comparative example.
  • FIG. 8 is a diagram showing phase balance characteristics of the boundary acoustic wave filter devices of the first embodiment and the second comparative example.
  • FIG. 9 is a diagram showing a common-mode attenuation amount-one-frequency characteristic of the boundary acoustic wave filter devices of the first embodiment and the second comparative example.
  • FIG. 10 is a front sectional view schematically showing a boundary acoustic wave filter device according to a second embodiment.
  • FIG. 11 is a diagram showing the amplitude balance characteristics of the boundary acoustic wave filter devices of the second embodiment and the first comparative example.
  • FIG. 12 is a diagram showing the phase balance characteristics of the boundary acoustic wave filter devices of the second embodiment and the first comparative example.
  • FIG. 13 is a schematic plan view showing an electrode structure of a boundary acoustic wave filter device of a second comparative example.
  • FIG. 14 is a schematic plan view showing an electrode structure of a conventional surface acoustic wave filter device. Explanation of symbols
  • FIGS. 1 to 3 a balanced boundary acoustic wave filter device according to an embodiment of the present invention will be described.
  • the balanced boundary acoustic wave filter device 1 of the present embodiment has a structure in which a dielectric 3 is laminated on a piezoelectric 2. LiNbO is used as the piezoelectric body 2
  • the electrode structure 4 is formed. A plurality of openings 3a, 3b are formed in the dielectric 3
  • a plurality of electrode pads 5 a and 5 b connected to the electrode structure 4 are formed on the piezoelectric body 2.
  • the openings 3a and 3b are formed so as to expose the electrode pads 5a and 5b.
  • Conductive patterns 7a and 7b are formed so as to reach the top surface of the dielectric 3 outside the openings 3a and 3b and the openings 3a and 3b.
  • a resin layer 8 is provided so as to cover the dielectric 3.
  • the resin layer 8 is made of an appropriate synthetic resin such as silicon resin or epoxy resin, and absorbs sound when the boundary acoustic wave generated at the boundary between the piezoelectric body 2 and the dielectric body 3 leaks to the upper surface side. works. As a result, it is possible to suppress unwanted and spurious noises!
  • the resin layer 8 is provided with openings that are continuous with the openings 3a and 3b.
  • the openings are filled with conductive bonding materials 9a and 9b made of Cu, and metal bumps 10a and 10b made of solder are passed through the conductive patterns 7a and 7b by the conductive bonding materials 9a and 9b. Electrically connected to 5a and 5b. That is, since the boundary acoustic wave filter device 1 has the bumps 10a and 10b as described above, it can be surface-mounted on the printed circuit board or the like from the bumps 10a and 10b side.
  • FIG. 3 is a plan view schematically showing the electrode structure and the electrode pad, and FIG. 3 is a schematic plan view for clarifying the electrical connection of the electrode structure.
  • the boundary acoustic wave filter device 1 of the present embodiment includes an unbalanced terminal 11, first and second balanced terminals 12 and 13, and first to third ground terminals 14. ⁇ ; Imbalance The terminal 11 and the first and second balanced terminals 12 and 13 and the first to third ground terminals 14 to 16 correspond to the portion that electrically connects the electrode structure to the outside, and the electrode shown in FIG. It is configured to have a pad 5a.
  • a longitudinally coupled resonator type boundary acoustic wave filter unit 18 is connected to an unbalanced terminal 11 as an input terminal via a one-port type boundary acoustic wave resonator 17.
  • the 1-port boundary acoustic wave resonator 17 includes an IDT and reflectors disposed on both sides of the IDT in the boundary wave propagation direction.
  • the longitudinally coupled resonator-type boundary acoustic wave filter unit 18 includes a first IDT 21 disposed in the center and second and third IDTs 22, 23 disposed on both sides of the first IDT 21 in the boundary wave propagation direction. And fourth and fifth IDTs 24 and 25 and reflectors 26 and 27 arranged on both sides of the boundary wave propagation direction of the portion where the first to third IDTs are provided. That is, the longitudinally coupled resonator type boundary acoustic wave filter unit 18 is a 5IDT type longitudinally coupled resonator type boundary acoustic wave filter.
  • One end of each of the first IDT 21, the fourth IDT 24, and the fifth IDT 25 is commonly connected, and is connected to the unbalanced terminal 11 via the one-port boundary acoustic wave resonator 17! .
  • the other ends of the first ID T21, the fourth IDT 24, and the fifth IDT 25 are connected in common on the dielectric 3, and are electrically connected to the third ground terminal 16.
  • one end of the second IDT 22 is connected to the first ground terminal 14, and the other end is connected to the first balanced terminal 12.
  • one end of the third IDT 23 is commonly connected to one end of the second IDT 22 on the dielectric, and is connected to the first ground terminal 14, and the other end of the third IDT 23 is It is electrically connected to the second balanced terminal 13.
  • the polarity of the third IDT 23 is inverted with respect to the polarity of the second IDT 22. Accordingly, the phase of the signal flowing from the second IDT 22 to the first balanced terminal 12 and the third IDT 22 The IDT23 force and the phase of the signal flowing through the second balanced terminal 13 are 180 ° different from each other. Thereby, the balance-unbalance conversion function is realized.
  • a 1-port boundary acoustic wave resonator 19 is connected between the first and second balanced terminals 12 and 13.
  • An additional capacitor 20 is connected between the first balanced terminal 12 and the third ground terminal 16.
  • the unbalanced terminal 11 side serves as an input terminal. Therefore, on the input side of the longitudinally coupled resonator type boundary acoustic wave filter unit 18, the unbalanced terminal 11 is connected to one end of the first, fourth and fifth IDTs 21, 21 and 24, 25.
  • the input signal lines 31 constitute the signal lines that are present. That is, the input signal line 31 includes a portion connecting the unbalanced terminal 11 and the boundary acoustic wave resonator 17, and the boundary acoustic wave resonator 17, the first IDT 21, the fourth IDT 24, and the fifth boundary. Including the signal line part connecting IDT25.
  • the feature of this embodiment is that the input signal line 31 is connected to the ground potential between the second balanced terminal 13 provided at the subsequent stage of the longitudinally coupled resonator-type boundary acoustic wave filter unit 18.
  • the shield pattern 32 is provided. As shown in FIG. 3, the shield pattern 32 is electrically connected to the first and second ground terminals 14 and 15.
  • the piezoelectric body 2 has a rectangular planar shape having a pair of long sides 2a, 2b and a pair of short sides 2c, 2d.
  • the first and second ground terminals 14 and 15 are arranged at the corner portions located on both sides of the one long side 2a, and the first and second ground terminals 14 and 15 are disposed at the corner portions on both sides of the other long side 2b.
  • the balanced terminals 12 and 13 are arranged.
  • the unbalanced terminal 11 is arranged in the vicinity of the long side 2a and in the central part in the length direction of the long side 2a, and the third ground terminal 16 is arranged in the vicinity of the central part of the other long side 2b. It has been done.
  • the unbalanced terminal 11 and the first and second balanced terminals 12, 13 and the first to third ground terminals 14 to 16 are indicated by circles. This corresponds to the bumps 10a and 10b shown in Fig. 2. That is, taking the unbalanced terminal 11 as an example, the unbalanced terminal 11 is a portion that is electrically connected to the outside, and is therefore disposed below as shown by the bump 10a shown in FIG. By providing a bump on the electrode pad via a conductive bonding material, the electrode pad can be electrically connected to the outside.
  • the terminal portion electrically connected to the outside is originally formed above, and the shape of the bump (not shown) and the electrode pad positioned below the bump are schematically shown. Show. That is, in practice, circular bumps are formed on the dielectric 3 and the resin layer 8, in order to facilitate understanding of the force, in FIG. 1, the bumps on each terminal are indicated by circles. To do.
  • an electrode pad to which the bump is bonded is formed below each bump.
  • Type boundary acoustic wave resonator 17 is arranged, and the input signal line 31 on the input side of the longitudinally coupled resonator type boundary acoustic wave filter unit 18 is connected to the longitudinally coupled resonator type boundary acoustic wave filter unit 18 and the unbalanced terminal 11. It is considered to be a conductive pattern to connect with!
  • output signal lines 33 and 34 are formed of a conductive pattern.
  • the output signal lines 33 and 34 are electrically connected to the first and second balanced terminals 12 and 13, respectively.
  • each IDT of the boundary acoustic wave filter unit 18 is connected to a rectangular ground electrode pad!
  • the dielectric 3 on the ground electrode pad is removed to form an opening 3a!
  • Five ground electrode pads are connected in common by the conductive pattern 7a through the opening 3a, and are connected to the ground terminal 14 by the conductive pattern 7a.
  • the conductive bonding material 9a and the bump 10a are not formed on the ground electrode pad.
  • the shield pattern 32 is provided so as to be positioned between the input signal line 31 and the second balanced terminal 13.
  • the output signal line 34 connecting the input end of the longitudinally coupled resonator-type boundary acoustic wave filter unit 18 and the second balanced terminal 13 and the input signal line 31 are electrically separated by the shield pattern 32.
  • a shield pattern 32 is provided. This makes it possible to further improve the balance. This will be described based on a specific experimental example.
  • the longitudinally coupled resonator type boundary acoustic wave filter unit 18 was designed with the following specifications.
  • Wavelength of the first to fifth IDTs 3.5 m.
  • the electrode structures 17 and 19 were formed by depositing a metal made of Au to a thickness of 120 nm.
  • the additional capacitor 20 is composed of a pair of interdigital electrodes, and the capacitance is 0.05 pF.
  • the comb electrode constituting the additional capacitor 20 was formed using the same material at the same time when the electrode structure such as the longitudinally coupled resonator type boundary acoustic wave filter unit 18 was formed.
  • the shield pattern 32 was formed of the same material as that of the electrodes constituting the longitudinally coupled resonator-type boundary acoustic wave filter unit 18 at the same time.
  • the input signal line 31, the output signal lines 33, 34, and the like were also formed by patterning using the same electrode material when forming the longitudinally coupled resonator type boundary acoustic wave filter unit 18. .
  • the electrode pads 5a and 5b formed in the portion electrically connected to the outside such as the unbalanced terminal 11 were formed by separately forming A1 with a thickness of 1600 nm.
  • the thickness of the dielectric 3 made of SiO force is 6 m, and the resin layer 8 is made of 6 ⁇ m of polyimide resin.
  • the film was formed to a thickness of m.
  • the shield pattern 32 is provided! /, NA! /, Except that! / In the same way
  • the boundary acoustic wave filter device of 1 comparative example was produced.
  • FIG. 4 and FIG. 5 show the amplitude balance characteristics and phase balance characteristics of the boundary acoustic wave filter devices of the embodiment and the first comparative example obtained as described above.
  • Fig. 6 shows the frequency characteristics of the common mode attenuation of the boundary acoustic wave filter device of this embodiment and the first comparative example.
  • the boundary acoustic wave filter device of the present embodiment reduces the influence of the direct wave and reduces the common mode.
  • the amplitude balance and the phase balance are compared with those in the first comparative example. The power that can be greatly improved.
  • FIG. 13 is a schematic plan view showing the electrode structure of the elastic boundary wave filter device of the second comparative example.
  • the shield pattern 102 is an output signal line 33 connecting the first balanced terminal and the longitudinally coupled resonator boundary acoustic wave filter section 33. And the input signal line 31.
  • amplitude balance characteristic, phase balance characteristic, and attenuation frequency characteristic of the longitudinally coupled resonator type boundary acoustic wave filter device of the second comparative example prepared in this way are shown by solid lines in Figs. It shows with.
  • FIGS. 7 to 9 for ease of comparison, the amplitude balance characteristic, the phase balance characteristic, and the attenuation-one frequency characteristic of the boundary acoustic wave filter device of the first comparative example are shown together with a broken line. Show.
  • the shield pattern 31 is preferably provided between the input signal line 31 and the second balanced terminal 13.
  • the shield pattern 32 By providing the shield pattern 32 only on the output signal line side on the second balanced terminal side, a capacitance is generated between the output signal line 34 on the second balanced terminal side and the ground potential. As a result, the balance may be slightly deteriorated. However, the capacitance generated between the output signal line 34 and the ground potential can be canceled by the additional capacitor 20 between the output signal line 33 on the first balancing terminal 12 side and the ground line. Therefore, the provision of the additional capacitor 20 is desirable because the deterioration of the balance can be further suppressed.
  • the shield pattern 32 is three-dimensionally electrically connected to a bump disposed above and opposed to a ground pattern provided above the dielectric 3, thereby The yield effect can be further enhanced and the balance can be improved.
  • FIG. 10 is a schematic front cross-sectional view for explaining a main part of the boundary acoustic wave filter device 41 according to the second embodiment of the present invention.
  • an earth line 42 is provided on the dielectric 3 made of SiO.
  • the source line 42 is opposed to the shield pattern 32 which is positioned below the dielectric 3!
  • the balance can be further improved.
  • the ground line 42 is electrically connected to the shield pattern 32 positioned below and the via-hole conductor 43, and the ground line 42 is electrically connected to the ground potential. Connected. Therefore, it is possible to strengthen the ground by the shield pattern 32, thereby further reducing the influence of the direct wave and further improving the balance. This will be described with reference to FIGS. 11 and 12 based on specific experimental results.
  • the piezoelectric body may be formed of a piezoelectric single crystal other than LiNbO.
  • the force S described for the 5IDT type longitudinally coupled resonator type boundary acoustic wave filter device having the first to fifth IDTs can also be applied to a 3IDT type longitudinally coupled resonator type acoustic wave filter device in which only the third IDT is provided. Furthermore, the present invention can be applied not only to a boundary acoustic wave filter device but also to a surface acoustic wave filter device using a surface acoustic wave.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'invention concerne un dispositif de filtre d'onde acoustique équilibré présentant un équilibrage amélioré. Le dispositif (1) de filtre d'onde acoustique équilibré ayant un filtre (18) d'onde acoustique de type résonateur à couplage longitudinal formé sur un corps piézoélectrique (2), comprend une borne non équilibrée (11), des première et seconde bornes équilibrées (12, 13), et une ligne de signal d'entrée (31) connectant la borne non équilibrée (11) et le filtre (18) d'onde acoustique résonateur à couplage longitudinal couplé. Le dispositif de filtre d'onde acoustique équilibré comprend en outre un motif de blindage (32) connecté au potentiel de terre et disposé entre la ligne de signal d'entrée (31) et la seconde borne équilibrée (13) de façon à isoler la ligne de signal d'entrée (31) du second terminal équilibré (13).
PCT/JP2007/067185 2006-09-28 2007-09-04 Dispositif de filtre d'onde acoustique équilibré WO2008038498A1 (fr)

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JP2008536315A JP4873010B2 (ja) 2006-09-28 2007-09-04 バランス型弾性波フィルタ装置

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JP2006-265611 2006-09-28
JP2006265611 2006-09-28

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
WO2009153916A1 (fr) * 2008-06-16 2009-12-23 株式会社村田製作所 Dispositif à onde limite élastique
WO2010029657A1 (fr) * 2008-09-09 2010-03-18 株式会社村田製作所 Dispositif à ondes élastiques
US7944329B2 (en) * 2008-03-27 2011-05-17 Murata Manufacturing Co., Ltd. Acoustic wave filter device with branched ground wiring sandwiching the IDT area
US10298199B2 (en) 2016-03-30 2019-05-21 Samsung Electro-Mechanics Co., Ltd. Acoustic wave device and method for manufacturing the same
US11309868B2 (en) 2018-08-24 2022-04-19 Taiyo Yuden Co., Ltd. Multiplexer

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JP2003204243A (ja) * 2001-10-29 2003-07-18 Matsushita Electric Ind Co Ltd 弾性表面波フィルタ素子、弾性表面波フィルタ、及びそれを用いた通信機器
JP2003209456A (ja) * 2002-01-16 2003-07-25 Toyo Commun Equip Co Ltd Ｓａｗフィルタ
JP2006254410A (ja) * 2005-02-10 2006-09-21 Murata Mfg Co Ltd バランス型弾性波フィルタ

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US7944329B2 (en) * 2008-03-27 2011-05-17 Murata Manufacturing Co., Ltd. Acoustic wave filter device with branched ground wiring sandwiching the IDT area
WO2009153916A1 (fr) * 2008-06-16 2009-12-23 株式会社村田製作所 Dispositif à onde limite élastique
EP2290817A1 (fr) * 2008-06-16 2011-03-02 Murata Manufacturing Co. Ltd. Dispositif à onde limite élastique
CN102067447A (zh) * 2008-06-16 2011-05-18 株式会社村田制作所 弹性边界波装置
EP2290817A4 (fr) * 2008-06-16 2011-08-24 Murata Manufacturing Co Dispositif à onde limite élastique
US8013692B2 (en) 2008-06-16 2011-09-06 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
JP4894927B2 (ja) * 2008-06-16 2012-03-14 株式会社村田製作所 弾性境界波装置
KR101238869B1 (ko) 2008-06-16 2013-03-04 가부시키가이샤 무라타 세이사쿠쇼 탄성 경계파 장치
WO2010029657A1 (fr) * 2008-09-09 2010-03-18 株式会社村田製作所 Dispositif à ondes élastiques
US8723624B2 (en) 2008-09-09 2014-05-13 Murata Manufacturing Co., Ltd. Elastic wave device having an insulating film with wiring thereon not arranged over the IDT electrodes
US10298199B2 (en) 2016-03-30 2019-05-21 Samsung Electro-Mechanics Co., Ltd. Acoustic wave device and method for manufacturing the same
US11309868B2 (en) 2018-08-24 2022-04-19 Taiyo Yuden Co., Ltd. Multiplexer

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