WO2008013049A1 - Capteur de contrainte et système de capteur de contrainte - Google Patents

Capteur de contrainte et système de capteur de contrainte Download PDF

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Publication number
WO2008013049A1
WO2008013049A1 PCT/JP2007/063663 JP2007063663W WO2008013049A1 WO 2008013049 A1 WO2008013049 A1 WO 2008013049A1 JP 2007063663 W JP2007063663 W JP 2007063663W WO 2008013049 A1 WO2008013049 A1 WO 2008013049A1
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WO
WIPO (PCT)
Prior art keywords
strain
sensor
thin film
film substrate
detection
Prior art date
Application number
PCT/JP2007/063663
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English (en)
Japanese (ja)
Inventor
Hiroshi Sugiura
Kouji Michiba
Tatsuaki Sawai
Osamu Muragishi
Original Assignee
Kawasaki Jukogyo Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Jukogyo Kabushiki Kaisha filed Critical Kawasaki Jukogyo Kabushiki Kaisha
Priority to JP2008526721A priority Critical patent/JP5004955B2/ja
Publication of WO2008013049A1 publication Critical patent/WO2008013049A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/06—Measuring force or stress, in general by measuring the permanent deformation of gauges, e.g. of compressed bodies

Definitions

  • the present invention includes a simple and inexpensive strain detection device that is used by being attached to a measurement object in order to determine whether there is an excessive load by monitoring strain acting on a structure or the like.
  • the present invention relates to a strain detection system.
  • Japanese Patent Application Laid-Open No. 9-005175 discloses a stress measurement sensor for grasping the magnitude of stress received by a structure.
  • this stress measurement sensor both ends of a wire made of a material that breaks with a smaller strain than the object to be measured are fixed to the object to be measured, and the presence / absence of the fracture of the wire is determined by the stress acting on the object to be measured. It is used to determine whether or not the power is greater than the value.
  • This stress measurement sensor is formed by fixing a fixing base to a thin film serving as a base and fixing both ends of the wire to the fixing base with an adhesive or the like.
  • a material with a low breaking strain for example, nickel, titanium, carbon steel, etc.
  • a non-conductive polymer material, a ceramic material, a non-ferrous metal material, or the like is selected. Since this stress measurement sensor is formed by adhering a detection wire to a base fixed on a thin film to be attached to a measurement object, it is difficult to ensure the reproducibility of the shape and dimensions in the manufacturing process. It is difficult to make reliable measurements.
  • Japanese Patent Application Laid-Open No. 2001-281120 discloses a crack type fatigue sensor in which a fracture piece having a crack propagation portion is formed at the center of a metal foil substrate.
  • a slit with a sharp tip is also formed at the crack propagation part, and the side end force is also formed, and a crack occurs at the tip of the slit depending on the degree of repeated stress generated on the measurement object, and the crack progresses.
  • an object of the present invention is to make it possible to detect a distortion generated in a measurement object without error with a simple and inexpensive configuration.
  • a strain detection apparatus includes a thin film substrate that is attached to a measurement object and is distorted together with the measurement object, and the thin film substrate.
  • a pair of strain transmitting pieces which are opposed to each other across a small gap and fixed to the thin film substrate at at least one force point, are pasted on the pair of strain transmitting pieces, and the strain is placed at a position corresponding to the gap.
  • a sectional area smaller than the position affixed to the transmission piece, and a sensor foil having a bridge portion, and one of the pair of strain transmission pieces has a stress that tends to warp in a direction in which the thin film substrate force is also separated. It is characterized by having The stress is an inherent stress given in advance to the strain transmission piece, and the stress transmission piece is constrained to each other via a sensor foil. The distortion caused by is something that does not appear.
  • the sensor foil is stuck across the pair of strain transmission pieces, and the bridge portion having a small cross-sectional area is provided between the pair of strain transmission pieces.
  • the stress when the strain is generated concentrates on the bridge portion of the sensor foil.
  • this strain detector has a strain expansion function.
  • the sensor foil has a predetermined breaking elongation characteristic, and when the local strain of the bridge portion exceeds the breaking elongation, the bridge portion, which is the minimum cross-sectional portion, breaks. When the bridge part breaks, it can be estimated that a strain greater than a predetermined strain determined from the breaking strength of the sensor foil and the concentration of strain has occurred in the measurement target site.
  • the sensor foil is integrally connected until it breaks, if the bridge portion breaks at the position of the flat force gap, the potential stress inherent in one strain transmitting piece becomes obvious.
  • the strain transmitting piece, along with the broken end of the sensor foil warps in a direction away from the thin film substrate, and does not return. For this reason, the operator can know the breakage of the sensor foil easily and accurately without misunderstanding by visually observing the warping of the broken end of the sensor foil.
  • a strain detection sensor which is a combination of a strain transmission piece and a sensor foil that determines the sensitivity of the strain detection device, is formed in advance on the thin film substrate, the strain detection device is attached to the measurement object.
  • the breaking strain of the sensor foil does not change, and the sensor foil can be used as a sensor having sensitivity as designed, improving reliability.
  • the strain detection device is adjusted so that the sensor foil is broken by the strain of the measurement object that occurs when the stress at the application position reaches a predetermined value when it is applied to the measurement object.
  • the sensor foil breakage is controlled by the strain of the thin film substrate affixed to the object to be measured. Varies with load. Therefore, it is preferable to adjust the sensitivity based on the object to be measured and the purpose of the measurement so that the correct damage strength can be detected.
  • the difference in thickness is adjusted as much as possible to ensure accuracy.
  • the measurement range of the maximum strain value can be adjusted.
  • the strain that appears on the sensor foil due to the occurrence of strain on the object to be measured increases as the distance between the bonding positions of the pair of strain transmitting pieces to the thin film substrate increases. Sensitivity can be adjusted.
  • the narrowed portion of the sensor foil can also be accurately formed.
  • the thickness of the sensor foil can be accurately controlled by a two-stage electrical method.
  • the thin film substrate may be formed of stainless steel, and the sensor foil may be formed of rolled copper or electrolytic copper.
  • the thin film substrate may be formed of invar, and the sensor foil may be formed of nickel.
  • the sensor foil has a smaller elongation at break, it can constitute a strain detection device that detects even a small strain of the measurement object.
  • Nickel is sufficiently hard and is suitable for sensor foil because it has accumulated information and technology using fatigue sensors.
  • the back side of the thin film substrate should be a rough surface by etching a number of shallow thin wires, etc., and the adhesion should be improved when it is fixed to the surface of the object to be measured with an adhesive.
  • the sensor foil may include a plurality of the bridge portions in a portion crossing the gap.
  • the strain transmitting piece is subjected to the stress, that is, inherently, by heat input to a portion between the position of the gap and the position fixed to the thin film substrate so as not to be bonded to the thin film substrate. Stress may be applied.
  • the strain transmitting piece is melt-bonded at a portion where the strain transmitting piece is fixed to the thin film substrate by being heated by a local heating device from the thin film substrate side.
  • the stress is applied to the position between the position of the gap and the position fixed to the thin film substrate by heat input to the extent that the strain transmission piece does not join the thin film substrate with a local heating device.
  • the strain transmission piece and the sensor foil are made of metal, and the strain transmission piece and the sensor foil.
  • An insulating adhesive layer is interposed between the sensor foil and it's okay!
  • the strain transmitting piece is integrally connected to a part of the strain transmitting piece, surrounds the strain transmitting piece, and the reinforcing frame having the same material force as that of the strain transmitting piece is removed. It may be formed by.
  • the reinforcing frame and the strain transmitting piece may be formed from a single plate by etching or electroplating.
  • a folding line is provided in which elongated holes partitioned by a thin connecting portion are arranged, and the reinforcing frame is removed by folding the connecting portion. It may be.
  • the connecting frame when the strain detection device is attached to the measurement object, the connecting frame can be broken and the reinforcing frame can be removed, which facilitates handling before installation on the measurement object. In addition, it is possible to prevent damage and the like during product transportation.
  • a plurality of strain detection sensors which are a combination of the pair of strain transmission pieces and the sensor foil, are arranged on the thin film substrate, and one of the pair of strain transmission pieces to the thin film substrate.
  • a distance between the fixed position and the fixed position of the pair of strain transmitting pieces to the other thin film substrate may be different for each of the plurality of strain detection sensors.
  • the plurality of strain detection sensors may be arranged such that detection axes that coincide with the direction in which the pair of strain transmission pieces are aligned are substantially parallel to each other.
  • a strain detection sensor force that is a combination of the pair of strain transmitting pieces and the sensor foil.
  • a plurality of strain detecting sensors are arranged on the thin film substrate, and one of the pair of strain transmitting pieces is fixed to the thin film substrate. The distance between the fixed position of the pair of strain transmission pieces to the other thin film substrate may be the same among the plurality of strain detection sensors.
  • the plurality of strain detection sensors may be arranged such that detection axes that coincide with the direction in which the pair of strain transmission pieces are aligned are substantially parallel.
  • the detection accuracy of the strain detection device is based on the fracture characteristics of the material, and it is impossible to avoid variations in detection accuracy due to material variations and manufacturing variations. Therefore, the detection accuracy can be improved by using a plurality of strain detection sensors of the same type together as in the above configuration.
  • the variation in detection accuracy is the root mean square of the accuracy variation of each strain detection sensor, so reliability is improved by using multiple strain detection sensors.
  • the plurality of strain detection sensors may be arranged such that detection axes that coincide with an arrangement direction of the pair of strain transmission pieces intersect each other.
  • the strain detection device needs to be installed with the detection axis aligned in the direction in which the largest strain is generated in the measurement object.
  • multiple strain detection sensors are used.
  • strain detection devices that are arranged so that the detection axes of the sensors point in different directions (for example, radially), it is possible to detect without overlooking the maximum strain generated in the measurement object. it can.
  • a strain detection sensor which is a combination of the pair of strain transmission pieces and the sensor foil, may be surrounded by a protective cover.
  • the protective cover is a lid made of grease material, matt steel plate, painted steel plate, etc., and covers the entire strain detection sensor so that the operation of the detection sensor is not hindered, and the hem part is bonded or welded with grease. It may be fixed to the thin film substrate with airtightness by screwing or screwing. When connecting one end of an electric wire to an electrode terminal to be described later, the other end of the electric wire should be pulled out of the protective cover.
  • a grease coating may be applied to the pair of strain transmitting pieces and the strain detection sensor of the sensor foil.
  • the weather resistance and corrosion resistance of the sensor can be maintained even when monitoring by the strain detection device is performed over a long period of time.
  • the resin coating should not be so strong and strong that it does not interfere with the operation of the strain detection sensor.
  • the hardness of the resin coating is high, it is preferable to form a space under the coating so as not to prevent the sensor foil from breaking.
  • the sensor foil may have a pair of electrode terminals which have a conductive force and are conducted through the bridge portion.
  • the sensor foil may include a plurality of the bridge portions at a portion crossing the gap, and the electrode terminals may be gathered on one side of the pair of strain transmitting pieces.
  • the electrode terminal may be provided on the opposite side of the bridge portion across the bonding position of the strain transmitting piece and the thin film substrate.
  • the sensor foil has a plurality of the bridge portions at a portion crossing the gap, and the electrode terminal is formed at an end portion of the sensor foils connected in series. May be.
  • a pair of electrode terminals corresponding to the plurality of bridge portions is sufficient, and the pair of electrode terminals is in a non-conducting state. It can be detected that one breaks.
  • a strain detection system includes the above-described strain detection device, a detection circuit that is connected to the electrode terminal of the strain detection device and detects breakage of the bridge portion, and the detection circuit.
  • a transmission circuit that transmits a detection signal when a break is detected, and a reception device that receives the detection signal of the transmission circuit force are provided.
  • the detection circuit transmits a detection signal to the receiving device. Therefore, even if the operator does not look at the sensor foil, the receiving device can know that the sensor foil is broken.
  • the strain detection device can use any material as a measurement object, and is attached to the surface of the measurement object by an adhesive, welding, or the like. Therefore, for example, a strain detection device is affixed to the stress generating part in the steel materials of structures, transportation equipment, buildings, machinery, such as cranes, bridges, railway vehicles, airplanes, automobiles, construction steel frames, reinforcing bars, rotating machinery, etc. Then, the detection signal generated when the load or displacement acting on the part to be measured exceeds a predetermined value is converted into an electrical signal and transmitted to the receiving device, so that the occurrence of an abnormal load condition is monitored by the receiving device. be able to.
  • the strain detection device can be applied to stress generating members other than steel such as non-ferrous materials, polymer materials, composite materials, concrete, asphalt, and wood. A normal load can also be detected.
  • the transmission circuit may transmit the detection signal wirelessly to the receiving device.
  • the transmission circuit takes in the detection signal from the detection circuit, converts it into a radio wave signal, and transmits it wirelessly.
  • the receiving device receives the radio signal and detects the breakage of the sensor foil. If the transmitter circuit and receiver are separated and the radio signal is strong, the signal is received by a receiver installed in a central control room at a remote location, and whether or not the measurement object has received an excessive load. Remote monitoring is also possible.
  • no connection is required between the transmitting circuit and the receiving device, it can also be applied to the case where the object to be measured with a force is a moving body if construction is easy.
  • An independent power supply for supplying power to the detection circuit and the transmission circuit may be further provided.
  • the detection circuit and the transmission circuit are used by being connected to the electrode terminal of the strain detection device, and therefore are installed close to the measurement object. Therefore, in order to take advantage of the use without connecting the transmission circuit and the reception device, it is preferable that the power source for supplying power to the detection circuit and the transmission circuit is an independent power source that does not depend on the power supply line such as a dry cell or a solar cell.
  • the detection circuit and the transmission circuit are part of an IC tag
  • the IC tag includes a storage unit that stores information on whether or not a break is detected by the detection circuit
  • the reception device includes:
  • the IC tag reader may also be capable of reading information from the storage unit of the IC tag.
  • the IC tag is attached to the strain detection device in a state where the IC tag terminal is connected to the electrode terminal of the sensor foil, and the operator attaches the IC tag reading device to the IC tag.
  • the sensor foil break information is transmitted to the IC tag reader as well. Note that it is preferable to use a non-power supply type that uses non-contact power supply when an IC tag is read by an IC tag reader, because an independent power supply is unnecessary.
  • the strain detection device includes a plurality of strain detection sensors of the pair of strain transmission pieces and the sensor foil on the thin film substrate, and one of the pair of strain transmission pieces is fixed to the thin film substrate. And the distance between the fixed position of the pair of strain transmission pieces to the other thin film substrate differs for each of the plurality of strain detection sensors, and the measurement A state sensor that detects a state other than the strain of the object, and a determination circuit that selects one of the plurality of strain detection sensors to be used for strain detection based on the output of the state sensor. .
  • the state quantity of the measurement object detected by the state sensor includes the temperature of the measurement object, the acceleration of the measurement object, angular velocity, vibration, There are things related to movement such as displacement.
  • a strain detection device in which a plurality of strain detection sensors having different fracture strain values are arranged on the thin film substrate;
  • the judgment circuit selects a strain detection sensor with an appropriate breaking strain value according to the output of the temperature sensor for strain detection, so that detection errors due to large temperature changes can be prevented. it can.
  • the sensor foil of a highly sensitive strain detection sensor when the temperature sensor indicates room temperature If the sensor foil of the strain detection sensor for room temperature does not break even if it breaks, it may be determined that there is no overload.
  • the temperature sensor shows a very low temperature
  • the fracture state in the strain detection sensor has a sensor foil that breaks with a slight strain. If you decide overload,
  • An alarm device may be further provided that generates an alarm when the detection circuit detects a break of the bridge portion.
  • this alarm device When this alarm device receives a detection signal that the bridge portion of the sensor foil is broken, it generates an electrical signal such as generation or interruption of current, performs color display, or outputs sound. It is preferable to generate radio waves. For example, if a strain sensing device is used that is adjusted to operate before a mechanical device such as a crane reaches a limit load, if the sensor is activated during operation, the mechanical device is stopped immediately. Safety can be ensured. Instead of making an emergency stop directly due to the operation of the sensor, an alarm may be issued to complain that an emergency stop is necessary.
  • FIG. 1 is a plan view of a strain detection device according to a first embodiment of the present invention.
  • 2 is a cross-sectional view taken along line II-II in FIG.
  • FIG. 3 is a bottom view of the strain detection device shown in FIG. 1.
  • FIG. 4 is an enlarged plan view of a bridge portion of the strain detection device shown in FIG.
  • FIG. 5 is a cross-sectional view taken along line V—V in FIG.
  • FIG. 6 is a plan view of the strain detection device shown in FIG. 1 before removal of the reinforcing frame.
  • FIG. 7B is an explanatory diagram regarding the application of stress in the strain detection apparatus shown in FIG.
  • FIG. 8 is a perspective view for explaining an excessive strain detection mechanism of the strain detection device shown in FIG. 1.
  • FIG. 9 is a perspective view of a strain detection device according to a second embodiment of the present invention.
  • FIG. 10 is a perspective view of the strain detection device shown in FIG. 9 when the sensor foil is broken.
  • FIG. 11 is a perspective view of a strain sensing device according to a third embodiment of the present invention.
  • FIG. 12 is a perspective view of the strain detection device shown in FIG. 11 when the sensor foil is broken. 13] A perspective view of a strain sensing device according to a fourth embodiment of the present invention.
  • FIG. 14 is a perspective view of the strain detection device shown in FIG. 13 when the sensor foil is broken.
  • FIG. 15 is a plan view of a strain sensing device according to a fifth embodiment of the present invention.
  • FIG. 16 A plan view of a strain sensing device according to a sixth embodiment of the present invention.
  • FIG. 17 is an explanatory diagram of a method for specifying a detected stress range using the strain detection apparatus shown in FIG.
  • FIG. 20 is a plan view of a strain sensing device according to a ninth embodiment of the present invention.
  • FIG. 21 is a block diagram of a strain detection system according to a tenth embodiment of the present invention.
  • FIG. 22 is a block diagram of a strain detection system according to an eleventh embodiment of the present invention.
  • FIG. 23 is a block diagram of a strain detection system according to a twelfth embodiment of the present invention.
  • FIG. 24 is a block diagram of a strain detection system according to a thirteenth embodiment of the present invention.
  • FIG. 25 is a block diagram of a strain detection system according to a fourteenth embodiment of the present invention.
  • FIG. 26 is an explanatory diagram for explaining functions of the strain detection system shown in FIG. 25.
  • FIG. 27 is a schematic view showing a first usage example of the strain detection apparatus of the present invention.
  • FIG. 28 is a schematic view showing a second usage example of the strain detection apparatus of the present invention.
  • FIG. 29 is a schematic view showing a third usage example of the strain detection apparatus of the present invention.
  • FIG. 30 is a schematic view showing a fourth usage example of the strain detection apparatus of the present invention.
  • FIG. 31 is a plan view of a strain detection device of a modified example in which shear stress is detected for application to the rotating shaft and the like shown in FIG. 30.
  • FIG. 32 is a schematic view showing a fifth usage example of the strain detection apparatus of the present invention.
  • FIG. 33 is a plan view of the strain detection unit used in FIG. 32.
  • FIG. 34 is a schematic view showing a sixth usage example of the strain detection apparatus of the present invention.
  • FIG. 35A is a side view of the sensor plate shown in FIG. 34.
  • FIG. 35B is a plan view of the sensor plate shown in FIG. 34.
  • FIG. 36 is a schematic view showing a seventh example of use of the strain detection apparatus of the present invention.
  • FIG. 37 is an enlarged view of the main part of FIG.
  • FIG. 1 is a plan view of a strain sensing device 1 according to the first embodiment of the present invention.
  • Fig. 2 is a cross-sectional view taken along line II-II in Fig. 1.
  • the strain detection device 1 includes a thin film substrate 2 attached to the measurement object 10 and a pair of strain transmission pieces placed on the thin film substrate 2 with a small gap G interposed therebetween. 3A and 3B, and a sensor foil 4 stuck on the pair of strain transmitting pieces 3A and 3B.
  • the strain transmitting pieces 3A and 3B and the sensor foil 4 are bonded and fixed to each other through an insulating adhesive layer 5. That is, a three-layer thin film structure is formed by the strain transmitting pieces 3A and 3B, the insulating adhesive layer 5 and the sensor foil 4, and one unit of the three-layer thin film structure is referred to as a strain detection sensor 6.
  • the thin film substrate 2 is adhered to the surface of the measurement object 10 with an adhesive, and the distortion of the measurement object 10 is faithfully transmitted to the strain transmitting pieces 3A and 3B.
  • the strain transmission pieces 3A and 3B are made of a metal thin film.
  • the pair of strain transmission pieces 3A and 3B are separated by a very narrow gap G.
  • Spot welds Swl and Sw2 joined to the thin film substrate 2 are formed at the other end where the forces are matched and the gap G force is also separated.
  • the spot welds Swl and Sw2 are formed by performing side force spot welding of the thin film substrate 2.
  • the strain transmitting pieces 3A and 3B are not restrained by the thin film substrate 2 except for the spot welds Swl and Sw2.
  • the strain detection device 1 when the strain detection device 1 is attached to the measurement object 10, the measurement object generated between the spot welded part Sw1 of one strain transmission piece 3A and the spot welded part Sw2 of the other strain transmission piece 3B. Ten strains are measured. That is, the detection region of the strain detection device 1 corresponds to the length L between the spot welds Swl and Sw2. Therefore, the detection area can be adjusted by changing the position of the spot welds Swl and Sw2.
  • the sensor foil 4 has electrode terminals 4e and 4f formed on the strain transmission piece 3B via thin connecting portions 4c and 4d at end portions away from the bridge portions 4a and 4b.
  • the connecting portions 4c and 4d are provided so that heat does not adversely affect the bridge portions 4a and 4b when an electric wire is soldered to the electrode terminals 4e and 4f.
  • the electrode terminals 4e and 4f are located outside the detection area of the length L (see Fig. 4) so that the stress transmitted through the wires does not adversely affect the measurement results. 1 is preferably provided on the right side of spot welded part Sw2.
  • FIG. 3 is a bottom view of the strain detection device 1 shown in FIG.
  • the thin film substrate 2 is bonded to the back side by forming a number of thin wires 7 that are shallow recesses perpendicular to the detection axis that coincides with the alignment direction (tensile direction) of the strain transmission pieces 3A and 3B.
  • An uneven surface is formed. The uneven surface for bonding improves the adhesion of the strain detector 1 to the measurement object 10.
  • FIG. 4 is an enlarged plan view of the bridge portions 4a and 4b of the strain detection device 1 shown in FIG. Fig. 5 is a cross-sectional view taken along line V-V in Fig. 4.
  • the sensor foil 4 is a metal thin film that is thinner than the strain transfer pieces 3A and 3B, and the bridge portions 4a and 4b are formed at positions corresponding to the gaps G of the strain transfer pieces 3A and 3B.
  • stress concentrates corresponding to the cross-sectional area ratio between the strain transmitting pieces 3A and 3B and the bridge portions 4a and 4b, so that the strain generated in the measurement object 10 expands and the bridge portion 4a , 4b has the effect of gathering.
  • Blitz The narrow portion d with a narrower width is formed in the flange portions 4a and 4b, and the strain generated in the detection area of the measurement object 10 is concentrated on the narrow portion d to increase the strain.
  • the strain expansion rate depends on the material of the sensor foil 4 'shape, the material of the strain transmission 3A, 3B', the shape, and the length L of the detection region. Therefore, by adjusting these parameters, the strain expansion rate can be selected as appropriate, and the breaking strain of the strain detector 1 corresponding to the strain value of the measurement object 10 can be determined.
  • the thickness' shape, gap G amount, etc. of each thin film are appropriately designed according to the strain to be detected of the measurement object.
  • the thicknesses of the strain transmitting pieces 3A and 3B, the insulating adhesive layer 5 and the sensor foil 4 are 10 ⁇ m to several 100 ⁇ m, respectively, which is convenient for application to many measurement points.
  • the gap G amount can also be adjusted according to the measurement conditions, and values of several tens of meters to several millimeters are used.
  • the strain transmission pieces 3A and 3B may be made of invar, and the sensor foil 4 may be made of nickel. Regarding the characteristics and manufacturing method of nickel, it is possible to utilize the technology accumulated through the manufacture and use of fatigue sensors.
  • the strain detector 1 can be formed by an etching method.
  • the strain detection device 1 is made by bonding a polyimide film with a thickness of 35 m to be the insulating adhesive layer 5 on a stainless steel (SUS304) thin film with a thickness of 100 m to be the strain transmission pieces 3A and 3B.
  • a three-layer structure to be the strain detection sensor 6 is formed by adhering a 50 m thick copper foil to be the sensor foil 4. Such a three-layer structure is similar to that used for hard disk drives and can also be supplied from the factory.
  • the stainless steel thin film and polyimide film of this three-layer structure are etched, for example, strain transmission pieces 3A and 3B with a gap of 140 m, a width of 6 mm and a total length of 46 mm, and a reinforcement frame 8 (described later). 6) and the copper foil is etched from the opposite side to form the shape of the sensor foil 4 including the bridge portions 4a and 4b and the electrode terminals 4e and 4f.
  • FIG. 6 is a plan view before removal of the reinforcing frame 8 of the strain detection device 1 shown in FIG.
  • the reinforcement frame 8 is made of the same thickness and the same material as the strain transmission pieces 3A and 3B, and is connected correctly to the strain transmission pieces 3A and 3B, which may be separated. Maintain the positional relationship, and protect the bridge parts 4a and 4b of the sensor foil 4 before applying to the measurement object 10. It has a function.
  • the reinforcing frame 8 can be used as a fixing allowance when the strain transmitting pieces 3A and 3B are fixed to the thin film substrate 2 by spot welding or the like.
  • the reinforcing frame 8 can be provided with a marker M for spot welding.
  • the reinforcing frame 8 is a force formed by surrounding the strain transmission pieces 3A and 3B. Between the strain transmission pieces 3A and 3B, elongated holes H separated by a thin connecting portion 9 are arranged to form a crease line. After the detection device 1 is attached to the measurement object 10, the connecting portion 9 is broken and the reinforcing frame 8 is removed, and only the inner strain detection device 1 is attached to the measurement object 10 with an adhesive.
  • the reinforcing frame 8 and the strain transmitting pieces 3A and 3B have the same material force.
  • the reinforcing frame 8 and the strain transmitting pieces 3A and 3B are simultaneously formed by etching. Can be formed.
  • the sensor foil 4 may be directly formed on the strain transmission pieces 3A and 3B by an electric method. Since the shape reproducibility of the electroplating method is extremely high, the strain detection device 1 formed by the electroplating method can obtain an accurate measurement result.
  • the shape of the sensor foil 4 can also be formed by die cutting.
  • the strain detection device 1 is easily handled and the strain detection device 1 is measured. It can be easily applied to the object 10 and the reproducibility of the measurement can be improved.
  • the thin film substrate 2 is formed of the same metal as the strain transmission pieces 3A and 3B, the strain transmission pieces 3A and 3B and the thin film substrate 2 can be firmly bonded by spot welding.
  • the thin film substrate 2 may be formed of resin.
  • the strain transmitting pieces 3A and 3B are fixed to the thin film substrate 2 by several spot welds Swl and Sw2, which are arranged perpendicularly to the strain direction, for example, at one force point, and the length L of the detection region is L. Is decided. Since the thin film substrate 2 is firmly attached to the surface of the measurement object 10, the spot welds Swl and Sw2 of the strain transmitting pieces 3A and 3B can be substantially fixed to the measurement object 10.
  • the elongation ⁇ generated in the detection region of length L due to the extension of the measurement object 10 is distributed to the strain transmission pieces 3 ⁇ , 3 ⁇ and the sensor foil 4 of the strain detection device 1.
  • the distribution rate is influenced by the Young's modulus ⁇ of the material, but it is greatly influenced by the stress concentration related to the cross-sectional area ⁇ of the part, and most of the elongation ⁇ generated in the detection region of length L is at the position of the gap G.
  • a bridge 4a, 4b Distributed to sensor foil 4.
  • E is the Young's modulus of sensor foil 4
  • A is the average cross-sectional area of bridges 4a and 4b
  • E is the Young's modulus of strain transfer pieces 3A and 3B
  • A is the gap of sensor foil 4.
  • the strain transmission pieces 3A and 3B are made of stainless steel foil with Young's modulus of 168GPa and sensor foil 4 with copper foil with Young's modulus of 1 lOGPa
  • the detection area length L is 40mm and the gap G is Measured when the width is 0.14 mm
  • the cross-sectional area of the strain transmitting pieces 3A and 3B is 0.6 mm 2
  • the average cross-sectional area of the two bridge parts 4a and 4b of the sensor foil 4 is 0.009 mm 2
  • the ratio ⁇ / ⁇ of the strain ⁇ in the bridge portions 4a and 4b to the strain ⁇ in the object 10, that is, the strain expansion ratio is about 81 times.
  • the substantial length of the bridge portions 4a and 4b is further shortened, and the strain ⁇ in the bridge portions 4a and 4b is larger than the strain ⁇ of the measurement object 10.
  • the sensitivity as a sensor is improved.
  • the strain ⁇ at the bridge portions 4a and 4b of the sensor foil 4 is the breaking strain ⁇ of the sensor foil 4.
  • sensor foil 4 will break. When the sensor foil 4 is broken, it can be said that the strain ⁇ of the measuring object 10 corresponding to the fracture strain ⁇ of the sensor foil 4 is exceeded. Fracture f
  • ⁇ is the material of the sensor foil 4, the shape and size of the bridge parts 4a and 4b, the stress intensity factor K, the turtle f
  • the sensor function is also impaired. Further, the amount of warping of the strain transmitting piece 3A is sufficient if the broken bridge portions 4a and 4b do not recover and the person can easily visually recognize the fracture, and need not be too large.
  • FIG. 7A is an explanatory diagram relating to the application of stress in the strain detection device 1 shown in FIG.
  • the spot welded portion Sw for joining the strain transmitting pieces 3A, 3B and the thin film substrate 2 is formed by applying a spot welder from the back side (lower side) of the thin film substrate 2.
  • the heat input portion Sh for warping is formed by applying a spot welder from the upper side of the strain transmitting piece 3A. Then, the strain transmitting piece 3A warps only by an appropriate amount on the gap G side from the position of the heat input portion Sh.
  • FIG. 7B is an explanatory diagram relating to the application of stress in a modification. As shown in Fig.
  • FIG. 7C is an explanatory diagram relating to the application of stress in still another modification.
  • heat is input from the upper side (sensor foil 4 side) for one strain transfer piece 3A, and heat input from the back side (thin film substrate 2 side) for the other strain transfer piece 3B. Even if it carries out, the recontact of the fracture
  • the warping of the strain transmission piece 3A is not as significant as in Figs. 7A and 7B.
  • FIG. 8 is a perspective view for explaining an excessive strain detection mechanism of the strain detection device 1 shown in FIG.
  • the strain detection device 1 is in the same plane with the pair of strain transmission pieces 3A and 3B being coupled to the bridge portions 4a and 4b until the force is broken after being applied to the measurement object 10.
  • the state of the bridge parts 4a and 4b can be reliably confirmed electrically by bringing the probe of the conduction tester T into contact with the electrode terminals 4e and 4f provided at the ends of the sensor foil 4. At the same time, it can be easily confirmed visually.
  • strain detection device 1 of the present embodiment two bridge portions 4a and 4b are provided in the gap G. Since strain detector 1 has a structure that is vertically long in the direction of the detection axis, there is a risk that it may break during manufacturing or construction if there is only one bridge. Strength against bending by providing two bridges 4a and 4b Has improved and prevented accidents. [0088] In addition, since the bridge portions 4a and 4b are provided vigorously and the pair of electrode terminals 4e and 4f are provided on one end side of the strain detection device 1, the strain detection device T is used when inspecting with the energization tester T. If the probe is applied to one end of 1, the workability of the inspection can be improved.
  • the strain detection device 1 concentrates the amount of displacement generated in the detection region of a length L of several mm force and several hundred mm on the bridge portions 4a and 4b to break the sensor foil 4, and visually or energized tester. Since it is detected by a portable simple instrument such as T, the measurement object 10 can be diagnosed as a whole by setting a large number of measurement points. Furthermore, the strain detection device 1 can be formed in a small size with a length of 200 mm or less, and since there is no need for wiring to connect to the monitor by simply attaching it to the surface of the measurement object 10, the number of measurement points increases. However, the measurement cost does not increase.
  • the strain detection device 1 of the present invention can be used for long-term monitoring for monitoring the stress generated in the product structure throughout the service period. It is possible to detect excessive strain that occurs rarely during a long operation period. Long-term monitoring is possible because no measurement equipment is required. It can also be used for strain measurement in environments where measurement devices cannot be used, such as rotating objects, moving objects, and underwater objects. Furthermore, due to the simplicity and economy of the strain detection device, it is possible to extract the approximate distribution of generated strain and the location of the overstrain when applied to a wide measurement area or a large number of measurement points.
  • FIG. 9 is a perspective view of a strain detection apparatus 201 according to the second embodiment of the present invention. Note that portions common to the first embodiment are denoted by the same reference numerals, and the following description is omitted.
  • the thin film substrate 202 has a protrusion 202a that protrudes upward at a position corresponding to one strain transmission piece 3A.
  • the protrusion 202a is formed between the bridge portions 4a and 4b and the spot welded portion Swl. It is formed by folding the plate 202 into a mountain shape, and extends in a direction perpendicular to the detection axis that coincides with the arrangement direction (tensile direction) of the strain transmitting pieces 3A and 3B.
  • the strain transmitting piece 3A is applied with a force to warp upward, but the strain transmitting piece 3A is coupled to the other strain transmitting piece 3B by the sensor foil 4, so that deformation is prevented. Therefore, potential stress is inherent in the strain transmitting piece 3A.
  • FIG. 10 is a perspective view of the strain detection device 201 shown in FIG. 9 when the sensor foil 4 is broken.
  • the bridge portions 4a and 4b are broken, the strain transmitting piece 3A is not restrained by the sensor foil 4, so the stress inherent in the strain transmitting piece 3A becomes obvious, and the strain transmitting piece 3A bridges.
  • the end portions on the side of the parts 4a and 4b are deformed so as to be lifted from the thin film substrate 2. Therefore, the broken state of the sensor foil 4 can be detected easily and reliably.
  • FIG. 11 is a perspective view of a strain detection device 301 according to the third embodiment of the present invention. Note that portions common to the first embodiment are denoted by the same reference numerals, and the following description is omitted.
  • a spacer 310 such as a thin plate is sandwiched between one strain transmission piece 3A and the thin film substrate 2. Spacer 310 is disposed between bridge portions 4a and 4b and spot welded portion Swl, and extends in a direction perpendicular to the detection axis that coincides with the direction in which strain transmitting pieces 3A and 3B are arranged (tensile direction). And As a result, a force is applied to the strain transmission piece 3A to warp upward.
  • the strain transmission piece 3A is coupled to the other strain transmission piece 3B by the sensor foil 4, and therefore, deformation is prevented. It is held in a flat state, and potential stress is inherent in the strain transmitting piece 3A.
  • FIG. 12 is a perspective view of the strain detector 301 shown in FIG. 11 when the sensor foil 4 is broken.
  • the bridge portions 4a and 4b are broken, the strain transmitting piece 3A is not restrained by the sensor foil 4, so that the stress inherent in the strain transmitting piece 3A becomes obvious, and the bridge portion of the strain transmitting piece 3A It is deformed so that the ends on the 4a and 4b sides are lifted from the thin film substrate 2. Therefore, the broken state of the sensor foil 4 can be detected easily and reliably.
  • the protrusions 202a and the spacers 310 described above may be elastic bodies. If it is an elastic body, the broken state of the sensor foil 4 can be detected more reliably. [0095] (Fourth Embodiment)
  • FIG. 13 is a perspective view of the strain detection apparatus 1 according to the fourth embodiment of the present invention. Note that portions common to the first embodiment are denoted by the same reference numerals, and the following description is omitted.
  • the strain detection device 1 of the fourth embodiment is the same as that of the first embodiment, but the installation mode on the measurement object is different. Specifically, the strain detection device 1 is affixed to the curved surface portion of the measurement object, and at least a part 2a of the thin film substrate 2 on the strain transmission piece 3A side is convex toward the upper side (strain transmission piece 3A side). It is used in a curved state.
  • the strain transmitting piece 3A is applied with a force to warp upward, but the strain transmitting piece 3A is coupled to the other strain transmitting piece 3B by the sensor foil 4, thereby preventing deformation.
  • the curved shape along the thin film substrate 2 is held, and potential stress is inherent in the strain transmitting piece 3A.
  • FIG. 14 is a perspective view of the strain sensing device 1 shown in FIG. 13 when the sensor foil 4 is broken.
  • FIG. 15 is a plan view of a strain detection apparatus according to the fifth embodiment of the present invention.
  • strain detection is formed by arranging three sets of strain detection sensors 6 having the same configuration as that used in the first embodiment on one thin film substrate 2. It is device 11. Since the detection characteristics of the strain detector 11 are based on the fracture characteristics of the material, there are variations in detection accuracy due to material variations and manufacturing variations. The variation in detection accuracy is the square root of the root mean square of the accuracy variation of each sensor when multiple sensors are used, so the detection accuracy can be improved by providing multiple strain detection sensors 6. .
  • the strain transmission pieces 3A and 3B are fixed to the thin film substrate 2 at predetermined positions Swl and Sw2 by spot welding, respectively.
  • one strain transmission piece 3B receives heat at an intermediate position Sh between the bridge portion and the fixed position Sw2 to such an extent that it is not welded by a spot welder. Yes.
  • a stress is applied to the strain transmitting piece 3B such that it breaks in the vicinity of the intermediate position Sh and the broken end tends to jump upward.
  • the strain detector 11 is adhered to the surface of the object to be measured, and the fracture state is observed after an appropriate time has elapsed.
  • the sensor foils 4 of the plurality of strain detection sensors 6 are broken, it can be determined that the object to be measured has generated a stress larger than the detection stress ⁇ of the sensor. If the sensor 6 is not broken, it can be determined that no stress greater than the detected stress ⁇ of the sensor has occurred.
  • the variation of the detected stress ⁇ is positively used, and the hysteresis stress of the measurement object is detected by the sensor.
  • the variation range of the detected stress ⁇ that is, between the upper limit value ⁇ and the lower limit value ⁇
  • -Can be estimated to be between +.
  • the three-thread and strain-detecting sensor 6 is formed in the same shape and arranged in parallel with each other.
  • the strain transmitting piece 3 ⁇ on the left side in the figure is fixed to the thin film substrate 2 with a spot welder.
  • the Swl may be configured to be different for each of the three sets of strain detection sensors 6.
  • each strain detection sensor has a different detection stress, and can be configured to have, for example, detection stresses ⁇ ⁇ , ⁇ 2, ⁇ 3 that are different in the order of upward force in the figure.
  • a strain detection device formed so that the detection stress ⁇ is different for each of the plurality of strain detection sensors is attached to the surface of the object to be measured, and observed after an appropriate time has elapsed.
  • the approximate value of the hysteresis stress of the measurement object can be estimated by specifying the strain detection sensor that has broken. For example, when all of the strain detection sensors are not broken, it can be seen that the measurement object has received a hysteresis stress smaller than the smallest detection stress ⁇ 1.
  • FIG. 16 is a plan view of a strain detection apparatus according to the sixth embodiment of the present invention. As shown in FIG. 16, the strain detection device 21 of the present embodiment is formed by arranging two sets of strain detection sensors 6 side by side on one thin film substrate 2.
  • the strain transmitting pieces 3A and 3B are welded and fixed to the thin film substrate 2 by a spot welder at one force point Swl and Sw2, respectively.
  • the distance between the fixed positions of the pair of strain transmission pieces 3A and 3B may be different between the two sets of strain detection sensors 6.
  • the detected stress ⁇ differs for each strain detection sensor.
  • one strain transmitting piece 3 ⁇ receives heat at an intermediate position Sh between the bridge portion and the fixed position Swl to such an extent that it is not welded by a spot welder. Stress is applied to warp upward.
  • the strain detection device 21 is adhered to the surface of the object to be measured, and the fracture state is observed by an operator after an appropriate time has elapsed. The observation may be performed by detecting electrical resistance via the electrode terminals, and the warping state of the strain transmitting piece 3A may be confirmed visually. As a result of observation, if both of the two strain detection sensors 6 break, the two objects are detected by the two strain detection sensors. If neither breaks, the stress of the two strain detection sensors is less than the detected stress ⁇ 1, ⁇ 2, or when one strain detection sensor breaks and the other pair breaks Therefore, it is possible to estimate that the stress between the detected stresses ⁇ 1 and ⁇ 2 of the two sets of strain sensors was recorded.
  • FIG. 17 is an explanatory diagram of a method for specifying a detected stress range using the strain detection apparatus shown in FIG. As shown in Fig. 17, the measurement range of the first strain detection sensor S1 is between the lower limit ⁇ and the upper limit ⁇ across the detected stress design value ⁇ .
  • the range is the lower limit with a design value ⁇ of detected stress larger than that of the first strain sensor.
  • FIG. 18 is an explanatory diagram of a strain detection apparatus according to the seventh embodiment of the present invention.
  • the strain detection device 1 attached to the measurement object of this embodiment is covered with a protective cover 30.
  • the protective cover 30 is made of a resin material, a polished steel plate, a coated steel plate, or the like, and is formed in a lid shape that can cover the strain detector 1.
  • the protective cover 30 protects the strain detection device 1 by hermetically sealing the interior of the object to be measured to the surface of the object to be measured by using grease or the like. Note that the electric wire 34 connected to the electrode terminal in order to electrically detect the breakage of the sensor foil 4 is led out from the protective cover 30 in an airtight manner.
  • FIG. 19 is an explanatory view of a strain detection apparatus according to the eighth embodiment of the present invention.
  • the strain detection device 1 of the present embodiment is coated with a force-resin coating 32 to block outside air, and can be used for a long time.
  • the electric wire 34 connected to the child is led out from the resin coating 32 in an airtight manner.
  • FIG. 20 is a plan view of a strain detection apparatus according to the ninth embodiment of the present invention.
  • Fig. 20 there are multiple measurement systems for cases where the structure of the object to be measured is complex and the direction of stress cannot be determined in advance, or for earthquakes in which the maximum strain direction cannot be predicted.
  • the multi-axis strain detection device 41 in which the strain detection sensors 6 are radially arranged with the detection axis directions slightly shifted from each other, since the unknown maximum strain direction is not overlooked.
  • FIG. 21 is a block diagram of a strain detection system 50 according to the tenth embodiment of the present invention.
  • the strain detection system 50 according to the present embodiment includes a strain detection device 1, a data detection transmission device 51, an independent power source 52, and a reception device 53. Note that the strain detection device 1 described in the first embodiment is used.
  • the data detection transmission device 51 is connected to the electrode terminals 4e and 4f of the strain detection device 1 via the electric wire 34.
  • the data detection transmission device 51 is connected to the electrode terminals 4e and 4f to detect a breakage (non-conduction) of the bridge portions 4a and 4b, and receives a detection signal when the breakage is detected by the detection circuit.
  • 53 has a transmission circuit for wireless transmission.
  • the data detection transmission device 51 is installed close to the strain detection device 1, and the detection circuit detects the presence or absence of breakage of the sensor foil 4 by inspecting the current or resistance between the electrode terminals 4e and 4f, and the transmission circuit. Transmits the detection result wirelessly to the receiving device 53 in a non-contact manner.
  • the independent power supply 52 is disposed in the vicinity of the data detection transmission device 51 or installed in a form incorporated in the data detection transmission device 51, and supplies power to the data detection transmission device 51.
  • the independent power source 52 is an independent device that uses dry cells, solar cells, etc. to eliminate the need for troublesome wiring for the strain detection device 1 and to eliminate on-site wiring work by an electrician.
  • the data detection transmission device 51 electrically detects and detects that the electrode terminals 4e and 4f become non-conductive when the load acting on the measurement object exceeds a predetermined value.
  • a signal is transmitted, and the receiving device 53 receives the detection signal wirelessly and detects an abnormality.
  • Receiver At 53 when an abnormality occurs, an alarm is given to the worker, the abnormal part is displayed and notified, and measures are taken to avoid danger such as issuing an emergency evacuation order or emergency stop of equipment. be able to.
  • the strain detection device 1 and the reception device 53 may be separated from each other. Therefore, it is not necessary for an operator to directly access the strain detection device 1, and a large number of detection results are collected and measured. It can also be used to diagnose the entire object.
  • FIG. 22 is a block diagram of a strain detection system according to the eleventh embodiment of the present invention.
  • the strain detection system 60 of the present embodiment uses a personal computer 61 with a modem 62 having a signal input device PIO as corresponding to the data detection transmission device 51 in the aspect of FIG. Therefore, the detection signal received by the receiving device is transmitted to the central monitoring room 63 (not shown).
  • the detection signal received in the central monitoring room 63 is signal-processed, and when it is determined to be abnormal, an alarm or emergency stop measures can be taken.
  • FIG. 23 is a block diagram of a strain detection system 70 according to the twelfth embodiment of the present invention.
  • the strain detection system 70 of the present embodiment is one in which an IC tag 71 is connected to the strain detection device 1.
  • the IC tag 71 is provided with a detection circuit and a transmission circuit.
  • the IC tag 71 is attached to the object to be measured with its terminals connected to the electrode terminals 4e and 4f of the strain detection device 1. Then, if necessary, the IC tag reading device 72 is held over the IC tag 71, so that the IC tag reading device 72 reads out the presence / absence information of excessive strain from the IC tag 71.
  • IC tag reader 7 for each of multiple strain detectors 1 2 is provided, and the detection results are always transmitted from the IC tag reader 72 to a predetermined management location for centralized management.
  • the IC tag 71 operates in a non-contact manner by receiving energy supply from the IC tag reader 72 when the IC tag reader 72 is approached, detects the breakage state of the sensor foil, and detects the detected information as IC Since it is wirelessly transmitted to the tag reader 72, a power supply device is not required inside. Since the IC tag 71 is sufficiently small and light, it can be attached to a rotating member of a rotating machine integrally with the strain detection device 1 to detect a load state during operation.
  • the operator moves the IC tag reading device 72 held around the place where the strain detection device 1 and the IC tag 71 are installed over the IC tag 71, so that the IC tag reading device 72 becomes the IC tag 71. Since the information related to the presence or absence of sensor foil breakage is read and displayed in a non-contact manner or the information is stored in the IC tag reader 72, it is extremely labor-saving even when a lot of places scattered over a wide area are inspected. Data can be collected.
  • FIG. 24 is a block diagram of a strain detection system according to the thirteenth embodiment of the present invention.
  • the data detection transmission device 51 connected to the strain detection device 1 transmits the detection result to the determination device 81.
  • the determination device 81 determines the detection result based on a predetermined determination criterion, and drives the display device 82 based on the determination result.
  • the display device 82 is equipped with devices that appeal to the sense of sight and hearing, such as indicator lights, liquid crystal display devices, and speakers. Notify the worker by generating an audible voice.
  • the determination device 81 and the display device 82 may be placed at a position away from the measurement object, and the detection result may be transmitted wirelessly from the data detection transmission device 51, or the data detection may be performed. It may be attached to the measurement object together with the transmission device 51 to display an alarm signal or the like at the location of the measurement object.
  • the data detection transmission device 51 and the like are driven by an independent power source 52 installed in the field.
  • FIG. 25 is a block diagram of a strain detection system 90 according to the fourteenth embodiment of the present invention.
  • the strain detection system 90 of the present embodiment is a temperature sensor or the like.
  • an appropriate strain detection sensor SI, S2 is selected and the state is judged.
  • two or more forces in which two strain detection sensors are arranged may be used.
  • the strain detection device 21 includes strain detection sensors SI and S2 having different detection levels as in the sixth embodiment.
  • the data detection transmission device 51 is connected to these strain detection sensors SI and S2. Further, the data detection transmission device 51 is connected to the state sensor 91, and the measured value of the state variable that affects the measurement object is input from the state sensor 91 and transmitted to the determination device 92.
  • the determination device 92 selects an appropriate strain detection sensor based on the measurement value of the state sensor 91, determines whether or not an excessive strain state has occurred in the measurement object, and drives the display device 82.
  • a sensor that measures a state variable that affects the stress state such as a temperature sensor, an acceleration sensor, an angular velocity sensor, a vibration sensor, or a displacement sensor, is selected.
  • a state variable that affects the stress state such as a temperature sensor, an acceleration sensor, an angular velocity sensor, a vibration sensor, or a displacement sensor.
  • a plurality of strain detection sensors SI and S2 with different breaking strains of the sensor foil are arranged, and an appropriate strain detection sensor is selected based on information from the state sensor 91.
  • FIG. 26 is an explanatory diagram for explaining the function of the strain detection system 90 shown in FIG.
  • the first strain detection sensor S1 is adjusted so that the sensor foil breaks when a predetermined load W1 is applied to the measurement object.
  • the second strain detection sensor S2 is adjusted so as to be broken when a load W2 larger than W1 is applied.
  • strain detection sensors S3, S4, S5, and S6 are arranged so as to detect appropriate loads W3, W4, W5, and W6 in sequence.
  • the judgment device 92 selects the strain detection sensor S3, and whether the sensor foil breaks or not is also necessary to alarm. Determine. In this case, even if the low-temperature strain detection sensors S1 and S2 prepared for the higher temperature region are broken, they are ignored.
  • a vibration sensor When a vibration sensor is used as the state sensor 91, when the vibration is large, a highly sensitive strain detection sensor is selected and the presence or absence of the sensor foil is checked. When the vibration is small, the sensitivity is low and the strain is low. When the detection sensor is selected and the presence or absence of sensor foil breakage is observed, it is possible to change the detection level for sudden overload by judging the operating status of the equipment. Further, when an acceleration sensor, an angular velocity sensor, a displacement sensor, or the like is used as the state sensor 91, it can be used to select a strain detection sensor corresponding to the measured value by the determination device as described above.
  • Figs. 27 to 37 are diagrams for explaining examples of use of the strain detection device of the present invention. By devising the position and method of applying the strain detection device for various measurement objects, The advantages of the present invention can be fully exhibited.
  • FIG. 27 is a schematic diagram showing a first usage example of the strain detection device of the present invention.
  • a strain detector is used for the falling bridge warning in the bridge 100.
  • Alarms can be issued by detecting abnormal loads and abnormal displacements of expansion and contraction devices and falling bridge prevention devices that occur during an earthquake.
  • a long bridge 100 having a plurality of bridge girders 101 is provided with bridge piers 103 at appropriate intervals between the abutments 102 built at both ends of the bridge, and the bridge girders 101 are hung between the abutment 102 and the pier 103 or between the piers 103. It is formed by connecting.
  • the bridge girder 101 expands and contracts mainly due to temperature, it cannot be completely fixed to the abutment 102 or the pier 103. Further, at both ends of the bridge girder 101, an expansion / contraction device 104 is interposed in order to prevent the bridge girder 101 from expanding and contracting due to a temperature change and generating a gap between the bridge beams 101.
  • the telescopic device 104 can be configured, for example, by forming comb-shaped protrusions at the end of the bridge beam 101 and arranging the teeth of the combs on both sides to face each other.
  • the bridge girder 101 at both ends is equipped with the abutment 102, and the bridge girder 101 is also connected with a falling bridge prevention device 105, 106 that couples the beam girder 101 with beams or cables.
  • the strain detection device 1 adjusted so that the sensor foil breaks in the vicinity of the strain corresponding to the limit state where the bridge can be safely bridged is attached to the beam of the fall prevention device 105, 106, the support of the cable, etc. If a warning is issued when a strong force is received, appropriate measures can be taken to ensure safety before a serious accident occurs. Alarms can be displayed at the location of the bridge 100, or the management office can be notified to take appropriate measures.
  • FIG. 28 is a schematic view showing a second usage example of the strain detection apparatus of the present invention.
  • the pier 112 on which the bridge 111 is placed is made of reinforced concrete, and the foundation pile 114 is driven and fixed to a sufficient depth underground.
  • the sturdy pier 112 will also be damaged in the event of a major earthquake. For this reason, it is required to design and construct exactly knowing what kind of structure and how much earthquake it can withstand. It is economically difficult to constantly monitor the stresses generated using expensive measuring instruments, and it is difficult to systematically collect actual data for rare earthquakes. Therefore, it is reasonable to collect data after an earthquake has occurred by attaching an inexpensive strain detector 1 to the part to be measured.
  • strain detection devices 1 with different break strain settings are installed in advance, and the strain detection device 1 that breaks after an earthquake occurs and the strain detection device 1 that does not break. By dividing, the actually generated stress can be estimated.
  • the strain detection system 70 having the IC tag 71 as in the twelfth embodiment the surface force of the strain detection device 1 and the IC tag 71 sensor embedded inside can be searched to know the detection result. it can.
  • Damaged columns and reinforcing bars may not be observed from the outside.
  • a large number of strain detectors 1 with different set breaking strains are attached to the reinforcing bars 113 inside the concrete.
  • the pier 112 may be formed by covering with concrete. After the earthquake occurs, the strain detecting device 1 that has broken and the strain detecting device 1 that has not broken can be examined to accurately estimate the maximum stress applied to the reinforcing bar 113. Based on this result, it is possible to judge the availability of service after the earthquake and the necessity for repair. Also, damaged part and sound By analyzing the maximum stress in the part, valuable design data can be obtained.
  • the stress received by each foundation pile 114 cannot be easily known. However, according to this use example, it is also detected from the buried strain detection device. Since the data can be acquired, the stress received by the foundation pile 114 can be estimated, which is extremely effective for earthquake analysis.
  • FIG. 29 is a schematic view showing a third usage example of the strain detection apparatus of the present invention.
  • a strain detector is used to estimate the stress application state in the expansion joint arranged in the pipe.
  • the expansion joint 120 having a bellows pipe is provided in the middle of the pipe, and absorbs the expansion / contraction allowance of the pipe based on changes in temperature and fluid pressure.
  • the strain detection device of the present invention can be used as a method for detecting an abnormality in the expansion joint 120.
  • strain detector 1 is attached to the surface of the bent portion 121 of the bellows tube, or the strain detector 1 is attached to the bolt 122 with the bellows portion sandwiched between flanges and tightened between the flanges, An abnormality can be easily detected and an alarm can be issued.
  • FIG. 30 is a schematic view showing a fourth example of use of the strain sensing device of the present invention.
  • the torsional load on the rotating shaft in the rotating equipment is monitored by a strain detector.
  • the rotating shaft 130 connecting the drive unit and the load unit generates a shearing force due to a torsional load, and the maximum strain direction generated on the surface of the rotating shaft 130 is inclined by approximately 45 ° to the shaft. . Therefore, the strain detector 1 must be attached with the detection axis inclined at 45 ° to the direction of the rotation axis, and the maximum strain must be accurately detected.
  • FIG. 31 is a plan view of a strain detector 140 of a modified example in which shear stress is detected for application to the rotating shaft 130 and the like shown in FIG.
  • the direction of the maximum strain on the surface of the measurement object has a predetermined inclination with respect to the direction of the force. Therefore, if the detection axis direction of the strain detection sensor 6 of the strain detection device 140 is adjusted to the maximum strain direction from the beginning, there is no need to adjust the angle when the strain detection device 140 is attached to the measurement object. Convenient.
  • FIG. 1 is a plan view of a strain detector 140 of a modified example in which shear stress is detected for application to the rotating shaft 130 and the like shown in FIG.
  • the strain detecting sensor 6 is formed with an inclination of 45 ° with respect to the axial direction of the rotating shaft. That is, the strain transmitting pieces 3A and 3B (see FIG. 1) are arranged at the center position of the rectangular thin film substrate 2 so as to have a detection axis in a direction inclined by 45 ° with respect to the side.
  • the detection axis direction of the strain detection sensor 6 is the maximum strain on the surface of the rotation axis. This is convenient because the maximum stress is detected in accordance with the direction of the peak.
  • FIG. 32 is a schematic view showing a fifth usage example of the strain detection apparatus of the present invention.
  • the strain detection device 21 is applied to a crane.
  • a strain detection unit 155 with a strain detection device 1 for detecting an abnormal load is interposed in a portion where the wire 152 for hanging the pulley 151 of the crane 1 50 is fixed to the crane body.
  • the sensor foil of the strain detector 1 breaks and generates a danger signal.
  • the receiving device that receives the danger signal gives a warning to the operator and stops the operation. If the load is close to the dangerous load and the danger is imminent, an emergency stop may be automatically performed. Since the dangerous load that causes the crane 150 to fall or break varies depending on the crane angle, several strain detectors 1 and angle sensors are used in combination to switch off the strain detector 1 to be used for each measured angle range. It may be possible to make an accurate judgment of the risk level.
  • FIG. 33 is a plan view of the strain detection unit 155 used in FIG.
  • the strain detection unit 155 is formed by attaching the strain detection device 1 to a central flat portion 157 of a bar piece 158 having suspension holes 156 at both ends.
  • the material and shape of the bar piece 158 can be arbitrarily selected to suit the load detection. Further, since the strain detection unit 155 has reproducibility, the detection load can be determined experimentally and is highly reliable.
  • Such a general-purpose strain detection unit 155 can be applied to various objects such as crane abnormal load detection.
  • FIG. 34 is a schematic view showing a sixth example of use of the strain sensing device of the present invention. Shown in Figure 34 As described above, this use example uses a strain detection device as an overload warning device for a hanging wire.
  • the suspension wire 161 breaks and drops a cargo when a cargo exceeding a predetermined load is suspended. Therefore, it is preferable to confirm that an excessive load is not suspended and to alert the driver or stop the operation when an excessive load is accidentally applied.
  • a pair of guide rollers 162 is provided on the path of the suspension wire 161, and the detection roller 164 is disposed between the guide rollers 162, and the detection roller 164 is pressed by the tension of the suspension wire 161 generated by the load.
  • the sensor plate 165 is displaced, and a detection signal is generated when the displacement exceeds a predetermined value.
  • FIG. 35A is a side view of sensor plate 165 shown in FIG.
  • FIG. 35B is a plan view of the sensor plate 165 shown in FIG.
  • the sensor plate 165 is obtained by attaching the strain detection device 1 of the present invention to the back side of a strip-shaped substrate 166 provided with a stop hole 166a at both ends, and installed at an appropriate interval.
  • the fixed object 168 is fixed to the lower surface of the fixed object 168 with a stopper 167 through a stop hole 166a, and is arranged so that the detection roller 164 contacts the lower surface of the intermediate part.
  • the sensor plate 165 When the axial position of the detection roller 164 is displaced due to the tension of the hanging wire 161, the sensor plate 165 is squeezed and the thin film substrate 2 (see Fig. 1) of the strain detection device 1 is stretched to reach a preset strain.
  • the sensor foil 4 (see Fig. 1) breaks and an abnormality can be detected.
  • the detection signal is transmitted to a receiving device as shown in FIGS. 21 to 23, and is transmitted to the driver as an alarm signal, or the driving of the hanging wire 161 is controlled to stop.
  • FIG. 36 is a schematic view showing a seventh example of use of the strain sensing device of the present invention.
  • FIG. 37 is an enlarged view of the main part of FIG. As shown in Fig. 36 and Fig. 37, at the part where the bridge girder 170 engages with the abutment 171, the horizontal distance between the bridge girder 170 and the abutment 171 is monitored to detect anomalies that are larger than the predetermined distance.
  • a detection unit 155 and a sensor plate 165 that is installed in a portion where the end of the bridge girder 170 is placed and detects an abnormal load are provided.
  • the strain detection unit 155 is the same as that described in Fig. 33, and is adjusted so that the sensor foil breaks when the distance between the bridge girder 170 and the abutment 17 1 reaches a predetermined dangerous displacement amount. Yes.
  • the sensor plate 165 provided under the bridge girder 171 is the same as that described in FIGS. 35A and 35B.
  • a pressing pin 172 that pushes down the sensor plate 165 protrudes downward. That is, the pressing pin 172 moves up and down as the bridge girder 170 is displaced in the vertical direction. Since the bridge girder 170 has a fulcrum 175 on the upper surface of the abutment 173, it sinks around the fulcrum 175 when a load is applied.
  • the pressing pin 172 is formed so that its tip protrudes in a circular arc shape.
  • the sensor plate 165 of this use example detects an abnormality when an excessive load is loaded on the bridge girder 170 and issues an alarm or automatically displays a prohibition of entry. be able to.
  • the strain detection device of the present invention described above does not require an advanced instrument for measurement, and can be used for long-term monitoring to monitor strain generated in the structure of the product throughout the service period. It is possible to detect excessive strain that occurs rarely during the operation period. It can also be used for strain abnormality alarms in environments where measuring devices cannot be used, such as rotating objects, moving objects, and underwater objects. Furthermore, due to the simplicity and economy of this strain detection device, it can be applied to a wide range of measurement or a large number of measurement points to identify the approximate distribution of generated stress and the location where the overstress occurs. In addition, any load value can be measured by measuring the stress generation part of steel materials in various structures, transportation equipment, buildings, machines, etc.
  • strain detection device of the present invention can be applied to any material as long as the sensor can be adhered to the stress generating part, such as non-ferrous materials, polymer materials, composite materials, concrete, asphalt, and wood, in addition to steel materials. Is possible.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

La présente invention a pour objet de détecter une contrainte générée dans un objet de mesure sans erreur par une configuration simple et de faible coût. L'invention concerne un capteur de contrainte (1) doté d'un substrat en film mince (2) amené à adhérer à un objet de mesure (10) ; d'une paire de pièces de transmission de contrainte (3A, 3B) disposées en face l'une de l'autre sur le substrat en film mince (2) par prise en sandwich d'un petit espace (G), et dont chacune est fixée au substrat en film mince (2) sur au moins une partie ; et une feuille de détection (4) amené à adhérer à la paire de pièces de transmission de contrainte (3A, 3B) et comportant, à une position correspondant à l'espace (G), des sections de pont (4a, 4b) dont une surface, en coupe transversale, est plus petite que celle de la feuille, à une position dans laquelle elle adhère sur les pièces de transmission de contrainte (3A, 3B). Une pièce de transmission de contrainte (3A) des pièces de transmission présente une contrainte de gauchissement dans une direction devant être séparée du substrat en film mince (2).
PCT/JP2007/063663 2006-07-24 2007-07-09 Capteur de contrainte et système de capteur de contrainte WO2008013049A1 (fr)

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JP2010044007A (ja) * 2008-08-18 2010-02-25 Nippon Sharyo Seizo Kaisha Ltd 可動対象物の亀裂検知システム
JP2010281641A (ja) * 2009-06-03 2010-12-16 Denso Corp 力学量センサ、及び該力学量センサの製造方法
CN102224401A (zh) * 2008-11-17 2011-10-19 梅西耶-道提有限公司 载荷指示器
JP2012021865A (ja) * 2010-07-14 2012-02-02 Tokyo Electric Power Co Inc:The 応力解放法による鉄塔部材の応力測定方法及びその装置
JP2018112430A (ja) * 2017-01-10 2018-07-19 中国電力株式会社 ひずみ検出装置及びひずみ検出システム
JP2018154325A (ja) * 2017-03-17 2018-10-04 株式会社リコー 物品取付器具、移動体装置、物品取付方法及び物品取付器具装着方法
WO2019021981A1 (fr) * 2017-07-26 2019-01-31 株式会社村田製作所 Capteur de pression et dispositif électronique
WO2019082777A1 (fr) * 2017-10-24 2019-05-02 川崎重工業株式会社 Étiquette de détection de desserrement d'élément de fixation
CN112378371A (zh) * 2020-12-07 2021-02-19 天津吉达尔重型机械科技股份有限公司 一种拉杆应力应变在线监测装置及系统

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JP6087246B2 (ja) * 2013-09-10 2017-03-01 日本電信電話株式会社 マンホール天井劣化検知方法

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Cited By (14)

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Publication number Priority date Publication date Assignee Title
JP2010044007A (ja) * 2008-08-18 2010-02-25 Nippon Sharyo Seizo Kaisha Ltd 可動対象物の亀裂検知システム
CN102224401A (zh) * 2008-11-17 2011-10-19 梅西耶-道提有限公司 载荷指示器
JP2010281641A (ja) * 2009-06-03 2010-12-16 Denso Corp 力学量センサ、及び該力学量センサの製造方法
US8225660B2 (en) 2009-06-03 2012-07-24 Denso Corporation Dynamic quantity sensor and method of manufacturing the same
JP2012021865A (ja) * 2010-07-14 2012-02-02 Tokyo Electric Power Co Inc:The 応力解放法による鉄塔部材の応力測定方法及びその装置
JP2018112430A (ja) * 2017-01-10 2018-07-19 中国電力株式会社 ひずみ検出装置及びひずみ検出システム
JP2018154325A (ja) * 2017-03-17 2018-10-04 株式会社リコー 物品取付器具、移動体装置、物品取付方法及び物品取付器具装着方法
WO2019021981A1 (fr) * 2017-07-26 2019-01-31 株式会社村田製作所 Capteur de pression et dispositif électronique
JPWO2019021981A1 (ja) * 2017-07-26 2020-02-06 株式会社村田製作所 押圧センサ及び電子機器
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WO2019082777A1 (fr) * 2017-10-24 2019-05-02 川崎重工業株式会社 Étiquette de détection de desserrement d'élément de fixation
JP2019078611A (ja) * 2017-10-24 2019-05-23 川崎重工業株式会社 締結部材緩み検知タグ
US11499582B2 (en) 2017-10-24 2022-11-15 Kawasaki Railcar Manufacturing Co., Ltd. Fastening member loosening detection tag
CN112378371A (zh) * 2020-12-07 2021-02-19 天津吉达尔重型机械科技股份有限公司 一种拉杆应力应变在线监测装置及系统

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