Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
  • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
  • H01L21/67766—Mechanical parts of transfer devices
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
  • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
  • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
  • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
  • B65G2249/04—Arrangements of vacuum systems or suction cups
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S414/00—Material or article handling
  • Y10S414/135—Associated with semiconductor wafer handling
  • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Definitions

• the present invention relates to a transfer robot for transferring a workpiece such as a glass substrate from a storage cassette.
• the robot is a mechanism for picking up a workpiece from a storage cassette, lifting the workpiece with another hand, and transferring the workpiece to a workpiece transfer destination. Therefore, it is necessary to separately provide a hand for pulling out the workpiece from the storage cassette (hereinafter referred to as a loading hand) and a hand for transferring the workpiece to the workpiece transfer destination (hereinafter referred to as the unloading hand). Turn into. In addition, since the unloading hand needs to be large enough to support the workpiece, the transfer robot becomes large.
• the transfer robot that carries out the workpiece from a storage cassette that stores a rectangular plate-shaped workpiece in a horizontal posture
• the hand that holds the workpiece releasably, and the workpiece described above are provided.
• a placement unit that is placed; a moving unit that reciprocates the hand in a carrying-out direction of the workpiece and a direction opposite to the carrying-out direction; and a control unit that controls the hand and the moving unit.
• the control means holds the end of the work in the storage cassette on the hand so that the work moves in parallel from the storage cassette onto the placement section.
• a transfer robot is provided that is moved in a direction.
• the hand reciprocally moves the workpiece from the storage cassette to the transfer port bot and unloads the loaded workpiece to the transfer destination. Even if the transfer destination is arranged on the side opposite to the storage cassette as viewed from the transfer port bot, the transfer robot needs to turn. Therefore, the space occupied by the mouth bot can be reduced and the tact time can be shortened as much as turning is not required. Moreover, the mechanism can be simplified by carrying in and carrying out the workpiece with the same hand. During the loading and unloading of the workpiece, the workpiece is supported by the above-described mounting portion. Therefore, it is not required that the hand has a size for supporting the workpiece, and the transfer robot can be downsized.
• FIG. 1 is a layout diagram of a substrate processing system using a transfer robot A according to an embodiment of the present invention.
• FIG. 2 is a plan view of a transfer robot A and a substrate storage device B.
• FIG. 3 is a front view of a transfer robot A and a substrate storage device B.
• FIG. 4 is an exploded perspective view of transfer robot A.
• FIG. 5 is an exploded perspective view of transfer robot A.
• FIG. 6 is a perspective view of a substrate storage device B.
• FIG. 7 is a perspective view of a storage cassette for storing a substrate.
• FIG. 8 is a diagram showing a loading portion for one stage of the storage cassette.
• FIG. 9 is a perspective view of an elevating unit constituting the substrate storage device B.
• FIG. 10 is an exploded perspective view of the lifting unit.
• FIG. 11 is a perspective view of an air ejection unit constituting the substrate storage device B.
• FIG. 12 is a block diagram of control devices for transfer robot A and substrate storage device B.
• FIG. 13 is an operation explanatory diagram of the transfer robot A.
• FIG. 14 is an operation explanatory diagram of the transfer robot A.
• FIG. 15 is an explanatory diagram of the operation of transfer robot A.
• FIG. 16 is an explanatory diagram of the operation of transfer robot A.
• FIG. 17 is an explanatory diagram of the operation of transfer robot A.
• FIG. 18 is a diagram illustrating the operation of transfer robot A.
• FIG. 19 is an explanatory diagram of the operation of transfer robot A.
• FIG. 20 is a diagram illustrating the operation of transfer robot A.
• FIG. 21 is an explanatory diagram of the operation of transfer robot A.
• FIG. 22 is an explanatory diagram of the operation of transfer robot A.
• FIG. 23 is an explanatory diagram of the operation of transfer robot A.
• FIG. 24 is an explanatory diagram of the operation of transfer robot A.
• FIG. 25 is an explanatory diagram of the operation of transfer robot A.
• FIG. 26 is a plan view of transfer robot A employing another roller unit.
• FIG. 27 is an explanatory diagram of a roller unit of the transfer robot of FIG.
• FIG. 28 is a plan view of a transfer robot A ′ according to another embodiment of the present invention and a perspective view of a part of the configuration.
• FIG. 29 is an explanatory diagram of the operation of the transfer robot A ′.
• FIG. 30 is a diagram for explaining another example of the substrate storage device.
• FIG. 1 is a layout diagram of a substrate processing system using a transfer robot A according to an embodiment.
• each figure X and Y shows the horizontal direction orthogonal to each other, and Z shows the vertical direction.
• the X, Y, and ⁇ ⁇ arrow directions are the + direction, and the opposite direction is the one direction.
• This substrate processing system is a system for processing a rectangular plate-like glass substrate, and includes a transfer robot ⁇ , a substrate storage device B, and a plurality of types of processing devices C1 to C3.
• the transfer robot A takes out the glass substrate from the substrate storage device B, and transfers the glass substrate to any of the processing devices C1 to C3. Further, the transfer robot A takes out the processed glass substrate from any of the processing apparatuses C1 to C3 and transfers the processed glass substrate to the substrate storage apparatus B.
• the transfer robot A can move in the X direction along the rail 1 provided on the floor where the substrate processing system is installed, and can move to the substrate storage device B and the processing devices C1 to C3. is there.
• each of the processing apparatuses C1 to C3 has a built-in apparatus such as a conveyor that transfers the glass substrate to and from the transfer robot A.
• the transfer robot A uses a glass substrate as an example of a workpiece to be transferred.
• the transfer target is not limited to a glass substrate, and other types of workpieces are to be transferred. You can also.
• the transfer robot A transfers the workpiece between the substrate storage device B and the processing devices C1 to C3.
• the substrate storage device B and another transfer robot or a workpiece transfer device It is also possible to transfer workpieces between the two.
• FIG. 2 is a plan view of the transfer robot A and the substrate storage device B
• FIG. 3 is a transfer robot A and the substrate.
• 4 is a front view of the storage device B.
• FIG. 4 is an exploded perspective view of the transfer robot A, in particular, an exploded perspective view of the transfer unit 10 of the transfer robot A
• FIG. 5 is an exploded perspective view of the transfer robot A.
• 2 is an exploded perspective view of a traveling unit 20 of a robot A.
• the transfer robot A includes a transfer unit 10 and a traveling unit 20.
• the transfer unit 10 includes a frame 11 formed by combining a plurality of rectangular steel pipes. On a plurality of steel pipes 1 la constituting the frame 11, a plurality of roller units 12 constituting a placing portion on which a glass substrate to be transferred is placed are mounted. Each roller unit 12 includes a plurality of rollers 12a that freely rotate. The rotation axis of the roller 12a is set in the X direction. Each roller unit 12 is arranged on the same horizontal plane so that the glass substrate is placed in a horizontal posture on each roller 12a. It is desirable that each roller 12a has a material force with a small frictional resistance on its peripheral surface, for example, it is desirable to have a resin material force such as UPE (ultra high molecular weight polyethylene).
• UPE ultra high molecular weight polyethylene
• rail members 17 extending in the Y direction are provided on the side parts of the two steel pipes 11a located at both ends thereof.
• Each rail member 17 is provided with a hand unit 13 that can reciprocate in the Y direction, and the rail member 17 guides the movement of the hand unit 13.
• Two belt mechanisms 14 are mounted on the plurality of steel pipes l ib constituting the frame 11.
• Each belt mechanism 14 is a moving means for reciprocating the hand unit 13 in the Y direction, and includes a timing pulley 14a and a belt 14b wound around the timing pulley 14a.
• the timing pulleys 14a of the two belt mechanisms 14 are connected by a shaft 14c.
• one shaft 14c is connected to the output shaft of the servo motor 14d.
• a shaft 14e on the plurality of steel pipes 11c constituting the frame 11 is provided for adjusting the tension of the belt 14b.
• the hand unit 13 includes a hand 13a having suction ports Nl and N2, an actuator 13b for raising and lowering the hand 13a in the Z direction, and a connecting member 13c for connecting the node unit 13 to the benoret 14b. And comprising.
• the suction ports Nl and N2 are connected to air suction equipment (pump, control valve, hose, etc.) not shown to stop air suction.
• the glass substrate is held by the hand 13a by suction of air through the suction ports Nl and N2, and the holding of the glass substrate is released by stopping suction. That is, the suction ports Nl and N2 are glass substrate holders.
• the suction ports Nl and N2 are spaced apart from each other in the Y direction (the glass substrate loading / unloading direction).
• the glass substrate is releasably held by air suction, but other configurations may be used as long as the glass substrate can be releasably held.
• the actuator 13b is an air cylinder, and is an actuator that expands and contracts by an air supply facility (pump, control valve, hose, etc.) (not shown).
• the actuator 13b includes a rising position where the glass substrate mounting surface (hereinafter referred to as a substrate mounting surface) formed by the roller 12a of the roller unit 12 and the upper surface of the hand 13a are substantially at the same height, and the substrate mounting surface.
• the hand 13a is moved up and down between the lower position where the upper surface of the hand 13a is lower than the lower position.
• an air cylinder is employed as the actuator 13b, but other mechanisms can be employed as long as the mechanism can raise and lower the hand 13a.
• the hand unit 13 Since the hand unit 13 is coupled to the belt 14b via the coupling member 13c, the hand unit 13 is guided by the rail member 17 as the belt 14b travels and reciprocates in the Y direction. Further, since the belts 14b of the two belt mechanisms 14 run synchronously, the two hand units 13 also move synchronously.
• the belt mechanism 14 is employed as the moving means of the hand unit 13, but another mechanism (for example, a linear guide) may be employed.
• Each positioning unit 15 includes a roller 15a that is rotatable about the Z direction as a rotation axis, a support member 15b that supports the roller 15a, and an actuator 15c that is fixed to the steel pipe 11c and moves the support member 15b back and forth in the X direction.
• the actuator 15c is an air cylinder and is an actuator that expands and contracts by an air supply facility (pump, control valve, hose, etc.) not shown. In this embodiment, an air cylinder is employed, but other mechanisms can be employed.
• the four positioning units 15 are formed by pressing the opposing edges of the glass substrate placed on the plurality of roller units 12 toward the center of the glass substrate by the rollers 15a. Position the direction.
• An auxiliary moving mechanism 16 is mounted on the plurality of steel pipes l id constituting the frame 11.
• the auxiliary moving mechanism 16 is a mechanism for moving the glass substrate moved on the plurality of roller units 12 to a predetermined position (hereinafter referred to as a work position) in the ⁇ Y direction, and is hidden between the roller unit 12. It is arranged in this way.
• the auxiliary moving means is a contact member (pad) 16a that contacts the edge of the glass substrate, an actuator 16b that supports the pad 16a and moves up and down in the Z direction, and an actuator 16c that reciprocates the actuator 16b in the Y direction. And two sets.
• the actuator 16b includes a protruding position where the pad 16a protrudes on the substrate mounting surface (a high position where the glass substrate and the pad 16a interfere) and a non-projecting position where the pad 16a does not protrude on the substrate mounting surface (the glass substrate and the pad). The pad 16a is moved up and down between the lower position where it does not interfere with 16a.
• Each set of actuators 16c is connected by a shaft 16d, and the shaft 16d is supported by a bearing 16d 'so as to be movable in the Y direction.
• An actuator 16e that expands and contracts in the Y direction is attached to the shaft 16d, and the shaft 16d reciprocates in the Y direction as the actuator 16e expands and contracts.
• the actuators 16b, 16c, and 16e are air cylinders that extend and contract by an air supply facility (pump, control valve, hose, etc.) (not shown). In this embodiment, an air cylinder is employed, but other mechanisms can be employed. The function of the auxiliary movement mechanism 16 will be described later.
• the traveling unit 20 has drive wheels 21 as shown in FIG.
• the drive wheel 21 moves the travel unit 21 along the rail 1 using a servo motor (not shown) built in the travel unit 20 as a drive source.
• the traveling unit 20 is provided with a pair of lifting units 22 that lift and lower the transfer unit 10. Each lifting unit 22 is spaced apart in the X direction.
• the elevating unit 22 is reciprocated in the Z direction along the ball screw 22b by a servo motor 22a, a bore screw 22b rotated by the servo motor 22a, and the ball screw 22b.
• a support member 22e is connected to the Bonore nut 22c and moved in accordance with the Lenore talent 22d.
• an elevating member 22f is connected to the ball nut 22c and the support member 22e.
• the steel pipe 11c of the frame 11 of the transfer unit 10 is fixed to the lifting member 22f, and the transfer unit 10 is lifted and lowered in the Z direction by the lifting and lowering of the lifting member 22f.
• FIG. 6 is a perspective view of the substrate storage device B.
• the substrate storage device B is provided with an air ejection unit 110, a yarn collecting internal force set 120 disposed above the air ejection unit 110, and a lifting unit 130.
• FIG. 7 is a perspective view of the storage cassette 120.
• the storage cassette 120 is a cassette that can store glass substrates in multiple stages in the vertical direction (Z direction). 6 and 7 show a state in which the glass substrate is not accommodated.
• the storage cassette 120 forms a substantially rectangular parallelepiped frame body by the plurality of column members 12 la and 121 b and the beam members 122 a to 122 g.
• a plurality of column members 121b are arranged in the Y direction, and are arranged in the same number apart in the X direction.
• the column members 121b are arranged in the vertical direction (Z direction) between the column members 121b in the X direction and between the column members 121a.
• a plurality of wires 123 are stretched at a predetermined pitch. With this wire 123, a plurality of placement portions on which the glass substrate is placed in a horizontal posture are formed in the vertical direction.
• FIG. 8 is a diagram showing the placement part for one stage. Each stage mounting portion is formed by a plurality of wires 123 spaced apart in the Y direction at the same height, and the glass substrate W is mounted on the wires 123.
• the opening part 123a which can each pass the air ejection unit 110 mentioned later is formed.
• the mounting portion is formed of a wire, but other methods can of course be employed. However, by using the wire, the interval between the substrates to be stored can be reduced, and the storage efficiency of the storage force set 120 can be increased.
• the opposite sides of the storage cassette 120 facing each other in the Y direction are opened in a gate shape by the beam member 122a and the column member 21a, respectively, and the -Y direction side is a glass substrate. of A loading / unloading port 124 is formed.
• the bottom of the storage cassette 120 is composed of a pair of beam members 122d, a plurality of beam members 122b, and one beam member 122f, and the air ejection unit 110 between these and the vicinity of both ends of the beam member 122d will be described later. Forms an entrance 125 through which can pass.
• FIG. 9 is a perspective view of the lifting unit 130
• FIG. 10 is an exploded perspective view of the lifting unit 130.
• the lifting unit 130 is a device that moves the storage cassette 120 and the air ejection unit 110 up and down relatively.
• a structure in which the air ejection unit 110 is fixed and the storage cassette 120 is moved up and down can be fixed, and the air ejection unit 110 can be moved up and down.
• two lifting units 130 are provided, and are respectively disposed on both sides of the storage cassette 120 facing each other in the X direction so as to sandwich the storage cassette 120 therebetween.
• Each raising / lowering unit 130 cantilever-supports the storage cassette 120.
• the elevating unit 130 can be made thinner, and the installation space of the entire substrate storage device B can be further reduced. Further, it is possible to secure a wider space for the glass substrate loading / unloading port and the air ejection unit 110.
• the elevating unit 130 includes a beam member 131 on which the beam member 122d at the bottom of the storage cassette 120 is placed.
• the storage cassette 120 is moved up and down as the beam members 131 of the elevating units 130 move synchronously in the vertical direction (Z direction).
• the elevating unit 130 includes a column 132 extending in the vertical direction, and a pair of rail members 133 and a rack 134 extending in the vertical direction are fixed to the inner surface of the column 132. Between each lifting unit 130, a beam member 132 a is installed on the upper end of the column 132.
• the beam member 131 is fixed to and supported by one side surface of the support plate 135 via a bracket 135a.
• Four slide members 136 that can move along the rail member 133 are fixed to the other side surface of the support plate 135, and the beam member 131 and the support plate 135 move up and down by the guide of the rail member 133.
• the drive unit 137 includes a motor 137a and a speed reducer 137b, and is fixed to and supported by one side surface of the support plate 135.
• the output shaft of the speed reducer 137b passes through the support plate 138 and is connected to a pinion 139a disposed on the other side of the support plate 138.
• the support plate 135 and the support plate 138 are fixed to each other at a predetermined interval, and pinions 139b to 139d are disposed in the gap between the support plate 135 and the support plate 138.
• the pinions 139b to 139d are rotatably supported between the support plate 135 and the support plate 138, and the pinion 139b and the pinion 139d rotate following the rotation of the pinion 139a.
• the pinion 139c rotates following the rotation of the pinion 139b.
• the pinions 139b to 139d are pinions having the same specifications, and the two pinions 139c and 139d are in mesh with each rack 134.
• Each lifting / lowering unit 130 is provided with a sensor 131 a at the end of the beam member 131 for detecting a shift in the lifting height of the beam member 131.
• the sensor 131a is, for example, an optical sensor including a light emitting unit and a light receiving unit, and determines whether or not the light is received by mutually irradiating light in the X direction as shown in FIG.
• When light is received there is no deviation in the elevation height of the beam members 131.
• the deviation in the elevation height is detected by the sensor 131a, the deviation is eliminated by the control of the motor 137a.
• the sensor 131a By providing the sensor 131a to control the shift in the elevation height of the beam member 131, the storage cassette 120 can be prevented from tilting during the elevation and the storage cassette 120 can be raised and lowered more stably.
• each beam member 131 has one of the light emitting unit and the light receiving unit, and the other having the other of the light emitting unit and the light receiving unit. You can do it. Moreover, it is not restricted to an optical sensor, Other sensors are also employable.
• FIG. 11 is a perspective view of the air ejection unit 110.
• a plurality of air ejection units 110 are provided, and each air ejection unit 110 has an entrance 125 and an opening 123a so as not to interfere with the storage cassette 120 when the storage cassette 120 is raised and lowered.
• the size and position that can be passed are set.
• Each air ejection unit 110 has a plurality of air ejection ports 111a. It has a substantially horizontal upper surface 111 formed. Each upper surface 111 of each air ejection unit 110 is located on the same horizontal plane.
• the ejection port 111a ejects air supplied from an unillustrated air supply facility (pump, control valve, hose, etc.), and floats the glass substrate stored in the storage cassette 120 on the upper surface 111 in a horizontal posture.
• FIG. 12 is a block diagram of the control device 50 of the transfer robot A and the substrate storage device B.
• the control device 50 provides a CPU 51 for overall control of the transfer robot A and the substrate storage device B, a work area for the CPU 51, a RAM 52 for storing variable data, and a control program, control data, etc. ROM 53 in which fixed data is stored.
• the RAM 52 and ROM 53 can employ other storage means.
• the input interface (IZF) 54 is an interface between the CPU 51 and various sensors (sensor 131a, rotary encoders provided in the servo motors 14d, 22a, 137a, etc.).
• the CPU 51 is connected via the input I / F 54. Acquire the detection result of the sensor.
• the output interface (I / F) 55 is an interface between the CPU 51 and each servo motor 14d, 22a, 137a, and controls the air supply equipment for each actuator 13b, 15c, 16b, 16c, 16e and the jet outlet 111a. , And the interface with each control valve that controls the air suction equipment of the suction ports Nl and N2, and the CPU 41 controls each servo motor and control valve via the output I / F55.
• a communication interface (I / F) 56 is an interface between the host computer 6 and the CPU 51 that controls the entire substrate processing system of the present embodiment.
• the CPU 51 is a transfer robot in response to a command from the host computer 6. A and the substrate storage device B will be controlled.
• the air ejection unit 110 is collected by the lifting operation by the lifting unit 130.
• the glass substrate on the wire 123 is floated from the wire 123 by the air ejection unit 110.
• the hand unit 13 of the transfer robot A holds the glass substrate in a floating state and carries it out of the storage cassette 120 so as to be pulled out.
• the hand unit 13 of the transfer robot A is positioned at the initial position P1.
• the + Y side end of the hand 13a of the hand unit 13 does not protrude into the substrate storage device B.
• the hand 13a is in the lowered position.
• air is ejected from the ejection port 111a of each air ejection unit 110.
• the storage cassette 120 is lowered by the elevating unit 130 (not shown), and the air ejection unit 110 is moved into the storage cassette 120, and the upper surface 111 of each air ejection unit 110 is substantially the same height as the lowermost glass substrate Wt. To be located.
• the glass substrate Wt floats due to the ejection of air from the ejection port 111a and enters a floating state.
• the hand unit 13 is placed in the + Y direction so that the end of the hand 13a is positioned at the position (P2) where the end of the hand 13a is inserted below the lower surface of the glass substrate Wt in the storage cassette 120.
• the suction port N1 is located on the lower surface of the glass substrate Wt, but the suction port N2 is not located on the lower surface of the glass substrate Wt.
• the actuator 13b is extended to raise the hand 13a to the raised position. Further, air is sucked from the suction port N1, and the end of the glass substrate Wt is held by the hand 13a. That is, in the present embodiment, when the glass substrate Wt is carried out from the storage cassette 120, the glass substrate Wt is held by the suction port N1, and the suction port N2 does not hold the glass substrate Wt.
• the hand unit 13 is moved in the carry-out direction (one Y direction) of the glass substrate Wt.
• the glass substrate Wt moves in parallel onto the roller unit 12.
• the hand 13a holds only the edge of the glass substrate Wt S.
• the hand unit 13 moves to a position P3 in FIG.
• the glass substrate Wt is completely pulled out from the storage cassette 120 and positioned on the roller unit 12.
• Glass substrate Wt is completely pulled out of storage cassette 120
• the ejection of air from the ejection port 11 la of each air ejection unit 110 is stopped.
• the suction of air from the suction port N1 of the hand 13a is stopped to release the holding of the glass substrate Wt, and the hand 13a is lowered to the lowered position by the actuator 13b as shown in FIG.
• the hand unit 13 is moved in the + Y direction (the return operation of the node unit 13).
• the hand unit 13 is moved to the initial position P1 as shown in FIG.
• the glass substrate Wt is positioned by the positioning unit 15 (glass substrate positioning operation). Positioning is performed by contracting the actuator 15c and moving each of the rollers 15a toward the center of the glass substrate Wt in the + X direction or one X direction as shown in FIG. Each roller 15a moves to a predetermined position, whereby the glass substrate Wt is positioned.
• FIG. 20 shows the initial state of the auxiliary movement mechanism 16.
• the pad 16a is located at the non-projecting position.
• the actuator 16b is extended from the state shown in FIG. 20, and the pad 16a is raised to the protruding position as shown in FIG.
• the actuator 16c is contracted and the glass substrate Wt on the roller unit 12 is sandwiched between the two pads 16a.
• FIG. 22 shows a state where the glass substrate Wt is located at the workpiece position. It can be seen that the glass substrate Wt has moved in the -Y direction from the position shown in FIG. Thus, the movement of the glass substrate Wt by the auxiliary movement mechanism 16 is completed, and the auxiliary movement mechanism 16 returns to the initial state shown in FIG.
• the glass substrate Wt is transferred to one of the predetermined processing apparatuses among the processing apparatuses CI to C3.
• the actuator 13b is extended to raise the hand 13a to the raised position. Further, air is sucked from the suction port N2, and the end of the glass substrate Wt is held again by the hand 13a.
• the hand 13a holds the glass substrate Wt that has been positioned by the positioning unit 15.
• the actuator 15c for ending positioning by the positioning unit 15 is extended, and each roller 15a is retracted to the initial position away from the glass substrate Wt force.
• the position of the edge of the glass substrate Wt on the storage cassette 120 side at the work position is the suction port N1 and the suction port N2 of the hand 13a in the initial position.
• the suction port N2 is located on the lower surface of the glass substrate Wt.
• the suction port N1 is not positioned on the lower surface of the glass substrate Wt. That is, in the present embodiment, when the glass substrate Wt is transferred from the transfer robot A to the processing apparatuses C1 to C3, the glass substrate Wt is held by the suction port N2, and the suction port N1 does not hold the glass substrate Wt. .
• the elevating unit 22 is operated to transfer the glass substrate Wt.
• the glass substrate Wt is positioned at the delivery height of the glass substrate Wt set in the processing apparatuses C1 to C3. Raise the transfer unit 10 so that.
• the transfer robot A is moved in the X direction to transfer the glass substrate Wt to the processing apparatuses C1 to C3.
• Move the transfer port Bot A to the position facing the.
• the hand unit 13 is moved again in the Y direction.
• the hand unit 13 is moved to a position P4 where the end of the hand 13a protrudes toward the processing devices C1 to C3.
• the glass substrate Wt is introduced into the processing apparatus while being supported by an apparatus such as a conveyor built in each of the processing apparatuses C1 to C3. Thereafter, the suction of air from the suction port N2 is stopped, the holding of the glass substrate Wt is released, and the work of carrying out the glass substrate Wt to the processing apparatuses C1 to C3 is completed. .
• the glass substrate is transferred from the substrate storage device B to the processing devices C1 to C3 by the transfer robot A in the same procedure.
• the transfer of the glass substrate from the processing apparatuses C1 to C3 to the substrate storage apparatus B is generally the reverse of the above-described procedure.
• the hand 13a reciprocates, so that the glass substrate is transferred from the storage cassette 120 to the transfer robot A, and the transfer destination of the transferred glass substrate (processing devices C1 to C3). Carry out. Therefore, as shown in FIG. 1, even when the transfer destination (processing devices C1 to C3) is placed on the opposite side of the storage cassette 120 as viewed from the transfer robot A, I need a turn.
• the same node 13a is used.
• the mechanism can be simplified.
• the glass substrate is supported by the roller unit 12 during the loading and unloading of the glass substrate. Therefore, it is not required that the hand 13a has a size for supporting the glass substrate, and the transfer robot A can be downsized.
• the roller unit 12 is configured such that the roller 12a rotates freely, and it is not necessary to rotationally drive the central roller 12a. This leads to simplification of the mechanism of transfer robot A and cost reduction.
• the hand 13a is provided with two suction ports Nl and N2 spaced apart in the glass substrate transport direction (Y direction), and the suction port N1 carries the glass substrate out of the storage cassette 120. At this time, the glass substrate is held, and the suction port N2 is configured to hold the glass substrate when the glass substrate is transferred from the transfer robot A to the processing apparatuses C1 to C3. According to this configuration, the moving distance of the glass substrate due to the reciprocating movement of the hand 13a can be increased.
• the auxiliary movement mechanism 16 is provided to move the glass substrate in an auxiliary manner, the movement distance of the glass substrate by the reciprocating movement of the hand 13a can be further increased. Further, since the positioning unit 15 positions the glass substrate on the transfer robot A, the glass substrate can be carried out in a positioned state.
• FIG. 26 is a plan view of the transfer robot A that employs the roller unit 200 in place of the roller unit 12, and FIG. 27 is an explanatory view of the roller unit 200, and is a perspective view of the vicinity of the end of the roller unit 200.
• Each roller unit 200 includes a plurality of rollers 201 and 202 arranged in the Y direction.
• the roller 201 is connected to a wheel drive 203a, and the wheel drive 203a is rotatably supported by a pair of bearings 204.
• the roller 202 is connected to a shaft 203b having a shorter length than the shaft 203a.
• the shaft 203b is rotatably supported by a pair of bearings 204.
• the bearing 204 is fixed to a side surface of a square member 205 extending in the Y direction.
• the rollers 201 and 202 are arranged alternately shifted in the X direction perpendicular to the Y direction so as to overlap each other when viewed from the Y direction in the partial force Y on the side surfaces of the adjacent rollers 201 and 202.
• the plurality of rollers 201 constitute a roller row arranged on the same straight line (Y direction).
• the plurality of rollers 202 constitutes a row of rollers arranged on the same straight line (Y direction).
• the roller shaft IJ of the roller 201 and the roller row of the roller 202 are arranged so as to be shifted from each other in the X direction.
• the arrangement pitch of the shafts 203a and 203b in the Y direction is equal.
• the diameters of the rollers 201 and 202 are set larger than the arrangement pitch of the shafts 203a and 203b in the Y direction.
• the roller 201 and the roller 202 that are in P contact are arranged so that the overlapping side surfaces do not contact each other and are close to each other in the range.
• rollers 201 and 202 have the above-described configuration, the distance between the adjacent roller 201 and the roller 202 can be shortened, so that such a problem can be solved.
• the diameters of the rollers 201 and 202 can be increased while the distance between the adjacent rollers 201 and 202 is shortened.
• Increasing the diameter of the rollers 201 and 202 has an advantage that the rotation speed of the rollers 201 and 202 can be further reduced when the glass substrate is conveyed at the same speed.
• the low rotation speed of the rollers 201 and 202 is due to the slip between the rollers 201 and 202 and the glass substrate. There is an advantage that the glass substrate can be easily stopped at a fixed position.
• auxiliary rollers 206 a having a smaller diameter than the rollers 201 and 202 are provided at both ends of each roller unit 200 in the Y direction.
• the auxiliary roller 206 a is rotatably supported on the shaft 207, and the shaft 207 is fixed to the support portion 208.
• the support portion 208 is fixed to the side surface of the end portion of the square member 205 in the Y direction.
• the tops B201a and 202a of the rollers 201 and 202 and the top B206a of the roller 206 are located on the same horizontal plane.
• the top is the highest position in the Z direction on the peripheral surface of the roller.
• the auxiliary roller 206a is one of the countermeasures when the tip of the glass substrate stagnates downward.
• the transfer robot A is separated from the substrate storage device B and the processing device C. For this reason, when the glass substrate moves from the substrate storage device B to the transfer robot A, or when the glass substrate moves from the processing device C to the transfer port bot A, the glass substrate moves when the glass substrate moves onto the rollers 201 and 202. There is a possibility that the tip of the printed circuit board hits the peripheral surfaces of the rollers 201 and 202.
• the auxiliary roller 206a the glass substrate moves onto the auxiliary roller 206a and then onto the rollers 201 and 202. Since the tip of the glass substrate is supported earlier by the auxiliary roller 206a, it is possible to prevent the tip of the glass substrate from squeezing downward.
• the placement unit of the transfer robot A is configured by the roller unit 12, but the present invention is not limited to this, and various mechanisms can be employed.
• the glass substrate is sandwiched and moved as the auxiliary movement mechanism 16, the present invention is not limited to this, and various mechanisms can be adopted.
• FIG. 28 is a plan view of a transfer robot A ′ according to another embodiment of the present invention and a perspective view of a part of the configuration.
• the transfer robot A ′ is provided with an air ejection unit 12 ′ instead of the roller unit 12 to constitute a placement unit.
• an auxiliary movement mechanism 16 ' that holds and moves the glass substrate by air suction is employed.
• Other configurations are the same as those of transfer robot A.
• the air ejection unit 12 ' is a unit having the same configuration as the air ejection unit 110 described above, and has a horizontal upper surface on which a plurality of air ejection ports 12a' are formed, and air from the ejection port 12a '.
• the glass substrate is floated on the upper surface in a horizontal posture. While the transfer robot A ′ transfers the glass substrate, air is ejected from the air ejection unit 12 ′ to support the glass substrate in a floating state. Since the glass substrate is supported in a floating state, there is an advantage that the glass substrate is hardly damaged.
• the auxiliary movement mechanism 16 supports the suction pad 161 sucked on the lower surface of the glass substrate, the actuator 162 that supports the suction pad 161 and moves up and down, and moves the activator 162 in the unloading direction (Y direction) of the glass substrate. Actuator 163.
• the suction pad 161 has a suction port 161a on its upper surface, and holds the lower surface of the glass substrate by sucking air from the suction port 161a.
• the suction port 161a is connected to air suction equipment (pump, control valve, hose, etc.) (not shown) to stop air suction.
• the actuator 162 includes a protruding position where the suction pad 161a protrudes above the upper surface of the air ejection unit 12 '(a high position where the glass substrate and the suction pad 161 interfere), and a non-projecting position where the suction pad 161a does not protrude above the upper surface.
• the suction pad 161a is moved up and down between (a low position where the glass substrate and the suction pad 161 do not interfere).
• Actuators 162 and 163 are air cylinders that extend and contract by an air supply facility (pump, control valve, hose, etc.) (not shown). In this embodiment, an air cylinder is employed, but other mechanisms can be employed.
• the glass substrate transfer operation by the transfer robot A ′ is basically the same as that of the transfer robot A. As described above, while the transfer robot A ′ transfers the glass substrate, air is ejected from the air ejection unit 12 ′ to support the glass substrate in a floating state.
• FIG. 29 is an explanatory view of the operation of the transfer robot A ′, particularly the auxiliary movement mechanism 16 ′.
• the figure shows three modes of the auxiliary movement mechanism 16 ′.
• the uppermost mode shows the initial state of the auxiliary movement mechanism 16 ′.
• the suction pad 161 is located at the non-projecting position.
• the actuator 162 is extended to raise the suction pad 161 to the protruding position as in the middle stage, and air is sucked from the suction port 161a.
• the glass substrate Wt is held by the suction pad 161.
• the actuator 163 is contracted to move the glass substrate Wt to the above-described workpiece position. This completes the auxiliary movement by the auxiliary movement mechanism 16 '. Compared to the auxiliary movement mechanism 16, the glass substrate W There is an advantage in that there is little fear of damaging the t.
• the glass substrate that is unloaded from the storage cassette 120 and loaded can be supported by a roller unit that includes a plurality of rollers that rotate freely instead of the force using the air ejection unit 110.
• FIG. 30 is a diagram for explaining another example of the substrate storage device, and is a diagram showing an example in which a roller unit 300 is adopted instead of the air ejection unit 110 in the configuration shown in FIG.
• the roller unit 300 is a unit of the same type as the roller unit 12 of the transfer robot A.

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• 2006
  • 2006-03-14 CN CN2006800530266A patent/CN101374740B/zh not_active Expired - Fee Related
  • 2006-03-14 KR KR1020087016175A patent/KR100977870B1/ko not_active Expired - Fee Related
  • 2006-03-14 WO PCT/JP2006/305033 patent/WO2007105310A1/ja active Application Filing
  • 2006-03-14 JP JP2008504961A patent/JP4796128B2/ja not_active Expired - Fee Related
• 2007
  • 2007-03-12 TW TW096108426A patent/TW200800754A/zh not_active IP Right Cessation

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