WO2007101282A3 - Verbundwerkstoff und verfahren zu seiner herstellung - Google Patents

Verbundwerkstoff und verfahren zu seiner herstellung Download PDF

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Publication number
WO2007101282A3
WO2007101282A3 PCT/AT2007/000100 AT2007000100W WO2007101282A3 WO 2007101282 A3 WO2007101282 A3 WO 2007101282A3 AT 2007000100 W AT2007000100 W AT 2007000100W WO 2007101282 A3 WO2007101282 A3 WO 2007101282A3
Authority
WO
WIPO (PCT)
Prior art keywords
carbon
ppm
vol
expansion coefficient
thermal expansion
Prior art date
Application number
PCT/AT2007/000100
Other languages
English (en)
French (fr)
Other versions
WO2007101282A2 (de
Inventor
Erich Neubauer
Paul Angerer
Rene Nagel
Original Assignee
Arc Austrian Res Centers Gmbh
Erich Neubauer
Paul Angerer
Rene Nagel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arc Austrian Res Centers Gmbh, Erich Neubauer, Paul Angerer, Rene Nagel filed Critical Arc Austrian Res Centers Gmbh
Priority to EP07701341A priority Critical patent/EP1992015A2/de
Publication of WO2007101282A2 publication Critical patent/WO2007101282A2/de
Publication of WO2007101282A3 publication Critical patent/WO2007101282A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C26/00—Alloys containing diamond or cubic or wurtzitic boron nitride, fullerenes or carbon nanotubes
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/0084—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ carbon or graphite as the main non-metallic constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C47/00—Making alloys containing metallic or non-metallic fibres or filaments
    • C22C47/02—Pretreatment of the fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C47/00—Making alloys containing metallic or non-metallic fibres or filaments
    • C22C47/14—Making alloys containing metallic or non-metallic fibres or filaments by powder metallurgy, i.e. by processing mixtures of metal powder and fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C49/00—Alloys containing metallic or non-metallic fibres or filaments
    • C22C49/02—Alloys containing metallic or non-metallic fibres or filaments characterised by the matrix material
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C49/00—Alloys containing metallic or non-metallic fibres or filaments
    • C22C49/14—Alloys containing metallic or non-metallic fibres or filaments characterised by the fibres or filaments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3732—Diamonds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C26/00—Alloys containing diamond or cubic or wurtzitic boron nitride, fullerenes or carbon nanotubes
    • C22C2026/002—Carbon nanotubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Powder Metallurgy (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)

Abstract

Die Erfindung betrifft einen Werkstoff umfassend: eine Metall-Matrix A, die bzw. deren Material in zumindest einer Raumrichtung einen thermischen Ausdehnungskoeffizienten im Bereich von 16 bis 20 ppm/K, aufweist und von Kupfer oder einer Kupferlegierung gebildet ist und 10 bis 75 vol.%. des Werkstoffes darstellt; zumindest einen metallischen und/oder keramischen Füllstoff B, der in zumindest einer Raumrichtung einen thermischen Ausdehnungskoeffizienten im Bereich von 4 bis 6 ppm/K aufweist, von Cu2O und/oder Al2O3 und/oder AlN und/oder Mo und/oder Cr und/oder W und/oder B und/oder Ta gebildet ist und im Werkstoff in einer Menge von 1 bis 40 vol.% vorliegt; und zumindest einen auf Kohlenstoff basierenden Füllstoff C, der durch einen thermischen Ausdehnungskoeffizienten von - 2 bis +2 ppm/K in zumindest einer Raumrichtung charakterisiert ist, hohe thermische Leitfähigkeit besitzt, von Graphit und/oder Kohlefasern und/oder Kohle-Nanofasern und/oder Kohlenstoff-Nanoröhrchen und/oder Diamant gebildet ist und in einer Menge von 5 bis 65 vol.% vorliegt.
PCT/AT2007/000100 2006-03-09 2007-02-28 Verbundwerkstoff und verfahren zu seiner herstellung WO2007101282A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07701341A EP1992015A2 (de) 2006-03-09 2007-02-28 Verbundwerkstoff und verfahren zu seiner herstellung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT3892006A AT503270B1 (de) 2006-03-09 2006-03-09 Verbundwerkstoff und verfahren zu seiner herstellung
ATA389/2006 2006-03-09

Publications (2)

Publication Number Publication Date
WO2007101282A2 WO2007101282A2 (de) 2007-09-13
WO2007101282A3 true WO2007101282A3 (de) 2007-11-22

Family

ID=38093413

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AT2007/000100 WO2007101282A2 (de) 2006-03-09 2007-02-28 Verbundwerkstoff und verfahren zu seiner herstellung

Country Status (3)

Country Link
EP (1) EP1992015A2 (de)
AT (1) AT503270B1 (de)
WO (1) WO2007101282A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101706226B (zh) * 2009-11-23 2012-01-25 陈盈同 一种散热结构及其制造方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008034258B4 (de) 2008-07-17 2012-01-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gesinterter Werkstoff und Verfahren zu dessen Herstellung
DE102008034257B4 (de) * 2008-07-17 2011-12-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gesinterter schall- und schwingungsdämpfender Werkstoff und Verfahren zu dessen Herstellung
WO2011049479A1 (en) * 2009-10-21 2011-04-28 Andrey Mikhailovich Abyzov Composite material having high thermal conductivity and process of fabricating same
US8475132B2 (en) * 2011-03-16 2013-07-02 General Electric Company Turbine blade assembly
EP2606996A1 (de) * 2011-12-23 2013-06-26 EPoS S.r.L. Verfahren zum Sinter von Metallmatrixverbundmaterialien
CN104475731A (zh) * 2014-12-16 2015-04-01 深圳市东维丰电子科技股份有限公司 一种增强铜/金刚石复合散热材料及其制备方法
DE102017216290B4 (de) * 2017-09-14 2022-09-08 Freie Universität Berlin Verbundwerkstoff und Verfahren zu dessen Herstellung, Kühlkörper und elektronisches Bauteil
CN109811280A (zh) * 2019-03-13 2019-05-28 中国科学院电工研究所 一种铜/碳纳米管复合材料及其制备方法
WO2021056133A1 (zh) * 2019-09-23 2021-04-01 广东工业大学 一种新型陶瓷基金刚石复合片及其制备方法
DE102020209155A1 (de) * 2020-07-21 2021-07-15 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage mit einem Verbindungselement mit verbesserter Wärmeleitung
CN112941431B (zh) * 2021-02-01 2022-03-04 吉林大学 一种细颗粒金刚石铜基复合散热材料的粉末冶金制备方法
CN113956062B (zh) * 2021-10-25 2022-11-15 燕山大学 一种陶瓷基板AlN/Ti层状复合材料及其制备方法和应用
CN114455949B (zh) * 2022-03-03 2023-04-14 西安交通大学 一种三维氮化铝骨架增强高取向片状石墨复合材料及其制备方法
CN117025998B (zh) * 2023-10-09 2024-01-16 赣州金顺科技有限公司 一种嵌埋金刚石铜的散热基板及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1197593A (ja) * 1997-09-22 1999-04-09 Hitachi Ltd 放熱基板およびその製造方法
US6238454B1 (en) * 1993-04-14 2001-05-29 Frank J. Polese Isotropic carbon/copper composites
EP1167559A1 (de) * 1998-12-07 2002-01-02 Hitachi, Ltd. Kompositmaterial und dessen verwendung
WO2005106952A1 (de) * 2004-04-29 2005-11-10 Plansee Se Wärmesenke aus borhaltigem diamant-kupfer-verbundwerkstoff

Family Cites Families (4)

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JPS5253720A (en) * 1975-10-29 1977-04-30 Hitachi Ltd Non-orientated cu-carbon fiber compoite and its manufacturing method
JP2000012739A (ja) * 1998-06-25 2000-01-14 Furukawa Electric Co Ltd:The 半導体装置の基板用複合材料
JP2004285372A (ja) * 2003-03-19 2004-10-14 Mitsubishi Electric Corp 銅−炭素繊維複合材およびその製造方法ならびにそれを用いた半導体デバイス
JP4711165B2 (ja) * 2004-06-21 2011-06-29 日立金属株式会社 高熱伝導・低熱膨脹複合体およびその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6238454B1 (en) * 1993-04-14 2001-05-29 Frank J. Polese Isotropic carbon/copper composites
JPH1197593A (ja) * 1997-09-22 1999-04-09 Hitachi Ltd 放熱基板およびその製造方法
EP1167559A1 (de) * 1998-12-07 2002-01-02 Hitachi, Ltd. Kompositmaterial und dessen verwendung
WO2005106952A1 (de) * 2004-04-29 2005-11-10 Plansee Se Wärmesenke aus borhaltigem diamant-kupfer-verbundwerkstoff

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101706226B (zh) * 2009-11-23 2012-01-25 陈盈同 一种散热结构及其制造方法

Also Published As

Publication number Publication date
AT503270B1 (de) 2008-03-15
AT503270A1 (de) 2007-09-15
WO2007101282A2 (de) 2007-09-13
EP1992015A2 (de) 2008-11-19

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