WO2007004758A1 - Procédé de fabrication d’électrode transparente et électrode transparente fabriquée ainsi - Google Patents

Procédé de fabrication d’électrode transparente et électrode transparente fabriquée ainsi Download PDF

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Publication number
WO2007004758A1
WO2007004758A1 PCT/KR2005/002134 KR2005002134W WO2007004758A1 WO 2007004758 A1 WO2007004758 A1 WO 2007004758A1 KR 2005002134 W KR2005002134 W KR 2005002134W WO 2007004758 A1 WO2007004758 A1 WO 2007004758A1
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Prior art keywords
carbon nanotube
thin film
substrate
transparent electrode
flexible transparent
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PCT/KR2005/002134
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English (en)
Inventor
Sang-Geun Oh
Jae-Ho Kim
Young-Kwan Kim
Chang-Soo Han
Jin-Won Song
Jun-Ho Jeong
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Korea Institute Of Machinery And Materials
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Priority to PCT/KR2005/002134 priority Critical patent/WO2007004758A1/fr
Publication of WO2007004758A1 publication Critical patent/WO2007004758A1/fr

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • H05B33/26Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H05B33/28Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • H10K30/81Electrodes
    • H10K30/82Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • H10K77/111Flexible substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/311Flexible OLED
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/331Nanoparticles used in non-emissive layers, e.g. in packaging layer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221Carbon nanotubes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/615Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

Definitions

  • the present invention is directed to a method for manufacturing a transparent electrode and a transparent electrode manufactured thereby, more specifically, to a method for manufacturing a flexible transparent electrode with large area, which comprises the formation of a thin film of carbon nanotube on a flexible polymer substrate, and thus achieves excellent adhesion stability of the thin film to the substrate even after repeated bending and folding, and to a transparent electrode manufactured by the method.
  • Background Art
  • the flexibility of a display is one of the key functions basically required to an advanced display, since it makes the display portable by bending or folding it.
  • Flexible display is a display which is, like paper, bendable or rollable without making damages to the display properties, and excellent in impact resistance, therefore it can be an alternative of conventional displays using a rigid glass substrate and further can be applied to various emerging fields such as e-paper which have been impossible to achieve with conventional displays. Disclosure of Invention Technical Problem
  • ITO indium-tin oxide
  • a plastic substrate such as a polyimide, polyester or polycarbonate substrate by sputtering
  • ITO film has excellent conductivity and transparency, its intrinsic brittleness and deformation owing to differences in thermal expansion coefficient between the ITO film and a substrate cause a problem of exhibiting poor mechanical stability when being applied to a touch-screen display or being bent or folded.
  • expensive devices such as a vacuum device are required, and problems such as changes in sheet resistance owing to thermal deformation of a plastic substrate are generated since the manufacturing process includes processes conducted at high temperature.
  • the use of conducting polymers such as polyacetylene, polypyrrole, polyaniline, polythiophene and the like are vigorously researched for the purpose of finding an alternative of a transparent ITO electrode.
  • the conducting polymer electrode have advantages of better flexibility and less brittleness as compared to an ITO electrode, and accordingly, of excellent mechanical stability when being bent or folded.
  • the conducting polymer layer thick so as to obtain appropriate sheet resistance, it generates a problem of a rapid decreasing of the visible light transmittance of the electrode, since the conducting polymer itself absorbs light in the visible spectral region.
  • Carbon nanotube has a structure in which a graphene sheet, a kind of crystalline graphite, is rolled up in the shape of a tube, wherein the diameter of the tube has on the order of nanometers.
  • Carbon nanotube is a nearly flawless new material which has been researched extensively since it was found in 1991. Since the electric characteristics of carbon nanotube are sensitively changed depending on the shape and the diameter of the roll of graphite sheet, it has been reported that carbon nanotube can exhibit various properties of insulator, semiconductor, metal and the like. Specifically, metallic carbon nanotubes exhibit about 10 -10 " ⁇ cm of resistivity which means very good conductivity.
  • the present invention is to overcome those problems of prior arts, with purposes of providing a method for manufacturing a flexible transparent electrode and a flexible transparent electrode manufactured thereby, which has an excellent conductivity in spite of using very small amount of carbon nanotube, a very small percolation threshold value, and significantly improved adhesion stability owing to interdigitation at the interface between a thin film of carbon nanotube and a polymer substrate.
  • a method for manufacturing a flexible transparent electrode comprising the steps of: (1) forming a thin film of carbon nanotube on a solid substrate; (2) coating a precursor capable of forming a flexible transparent substrate on the thin film of carbon nanotube; (3) curing the precursor to make a flexible transparent substrate on which the thin film of carbon nanotube is fixed; and (4) removing the solid substrate.
  • the solid substrate used in the method of the present invention may be selected from the group consisting of a filter membrane, a metal substrate, an opaque inorganic substrate, a transparent inorganic substrate and a polymer substrate.
  • the filter membrane can be made of materials selected from the group consisting of aluminum oxide, polycarbonate, polyethylene terephthalate, cellulose esters such as cellulose nitrate or cellulose acetate, nylon, polypropylene and polyethersulphone, and the pore of the filter membrane suitably has a diameter of 0.01-10 D.
  • the carbon nanotube in the method of the present invention may be at least one selected from the group consisting of single- walled carbon nanotube, double- walled carbon nanotube, multi-walled carbon nanotube, carbon nanofiber and graphite.
  • the carbon nanotube is not specifically limited by its manufacturing method, as long as it does not obstruct the purpose of the present invention, and may be selected from those manufactured by for example, chemical vapor deposition, arc discharge or laser ablation. Commercially available carbon nanotubes can be also used in the method of the present invention.
  • the thin film of carbon nanotube is preferably formed to have a thickness of 1-100 nm.
  • the carbon nanotube also may be a carbon nanotube modified with nanoparticles of metal such as gold, silver, copper or the like, in order to improve the conductivity.
  • the precursor capable of forming a flexible transparent substrate in the method of the present invention is a precursor of a transparent and flexible polymeric materials such as polydimethylsiloxane (PDMS), polyepoxide, polyacrylate, polyimide, polyester, polycarbonate, cellulose acetate, polystyrene, polyolefin, polymethacrylate, polysulphone, polyethersulphone, polyvinyl acetate or the like, or a precursor being capable of forming a flexible glass material such as an ultra thin glass.
  • PDMS polydimethylsiloxane
  • polyepoxide polyacrylate
  • polyimide polyester
  • polyester polycarbonate
  • cellulose acetate polystyrene
  • polyolefin polymethacrylate
  • polysulphone polyethersulphone
  • polyvinyl acetate or the like or a precursor being capable of forming a flexible glass material such as an ultra thin glass.
  • the precursor is preferably a monomer capable of forming thermosetting, photocurable, or thermoplastic polymers such as PDMS, poly epoxide, polyacrylate, polyimide, polyester, polycarbonate, cellulose acetate, polystyrene, polyolefin, polymethacrylate, polysulphone, polyethersulphone or polyvinyl acetate.
  • PDMS poly epoxide, polyacrylate, polyimide, polyester, polycarbonate, cellulose acetate, polystyrene, polyolefin, polymethacrylate, polysulphone, polyethersulphone or polyvinyl acetate.
  • (1) in the method of the present invention may be conducted by using a method selected from the group consisting of vacuum filtration, self-assembly, Langmuir- Blodgett deposition, solution casting, bar coating, dip coating, spin coating, spray coating and roll-to-roll methods.
  • the coating of the precursor capable of a flexible transparent substrate on the thin film of carbon nanotube in the step (2) in the method of the present invention may be conducted by using a method selected from the group consisting of bar coating, dip coating, spin coating, spray coating and roll-to-roll methods.
  • the curing of the precursor in the step (3) in the method of the present invention may be conducted by, for example, cooling, a curing agent, heating, UV irradiation or solvent evaporation.
  • the removal of the solid substrate in the step (4) in the present invention may be carried out by mechanical peeling or dissolving the solid substrate with a suitable solvent.
  • the manufacture of the flexible transparent electrode is conducted as follows, provided that an aluminum oxide filter membrane is used as the solid substrate in the step (1) and monomer of PDMS is used as the precursor of a flexible transparent substrate.
  • carbon nanotube is added to an aqueous solution in which one or more surfactants such as Triton X-100, a sodium salt of dodecylbenzenesulphonic acid(Na-DDBS), cetyl trimethyl ammonium bromide(CTAB) or sodium dodecyl sulfate(SDS) or the like is dissolved, and to the resulting solution, ultrasonication is applied to prepare an aqueous suspension containing 0.001-0. lwt% of carbon nanotube which maintains the stable dispersion state.
  • one or more surfactants such as Triton X-100, a sodium salt of dodecylbenzenesulphonic acid(Na-DDBS), cetyl trimethyl ammonium bromide(CTAB) or sodium dodecyl sulfate(SDS) or the like is dissolved, and to the resulting solution, ultrasonication is applied to prepare an aqueous suspension containing 0.001-0. lwt% of carbon nanotube
  • organic solvents such as N- methylpyrrolidone (NMP), o-dichlorobenzene, dichloroethane, dimethylformamide (DMF), chloroform or the like, may be used for the same method to prepare an organic solution of carbon nanotube dispersed therein stably without being flocculated.
  • NMP N- methylpyrrolidone
  • DMF dimethylformamide
  • the resulting aqueous solution or organic solution of carbon nanotube dispersed therein as obtained from the above method is subjected to a vacuum filtration using a vacuum filtering device equipped with an aluminum oxide filter membrane(l) as a solid substrate, and then, a thin film(2) of carbon nanotube is uniformly formed on the filter membrane(l).
  • the thickness of the thin film(2) being formed is readily adjustable by controlling the amount of a suspension of carbon nanotube being filtered.
  • the thin film(2) formed on the filter membrane(l) is additionally washed with a sufficient amount of water to remove the residual surfactants on the thin film(2) of carbon nanotube.
  • the membrane having a thin film of carbon nanotube formed thereon is dried in a dry oven and the like.
  • the PDMS substrate the upper part of the thin film of carbon nanotube formed on the dried membrane is coated with thermally curable monomers(3) of PDMS by bar coating, and then the resultant is cured in an oven, wherein the PDMS substrate may be manufactured by any conventionally known method(for example, a method disclosed in Langmuir 1994, 10, 1498.).
  • the method of the present invention may further comprises, between the step (1) and the step (2), a step of growing a thin layer of a conducting polymer such as polyacetylene, polypyrrole, polyaniline, polythiophene or the like on the upper part of the thin film of carbon nanotube formed on a solid substrate, by using an electrochemical method.
  • a conducting polymer such as polyacetylene, polypyrrole, polyaniline, polythiophene or the like
  • the thin film of carbon nanotube which has the thin layer of conducting polymer grown on upper part thereof as described above is fixed to the flexible transparent substrate in later step.
  • a transparent electrode in which a thin film of carbon nanotube is fixed to a flexible transparent substrate, manufactured by firstly forming the thin film of carbon nanotube on a solid substrate, coating the upper part of the thin film of carbon nanotube with a precursor capable of forming a flexible transparent substrate and curing it, and then peeling the solid substrate or dissolving the solid substrate with an adequate solvent.
  • a precursor capable of forming a flexible transparent substrate and curing it, and then peeling the solid substrate or dissolving the solid substrate with an adequate solvent.
  • the present invention has an advantage that the adhesion stability of the thin film of carbon nanotube is significantly improved by interdigitation at the interface between the carbon nanotube and the flexible transparent substrate. Therefore, according to the present invention, it is possible to minimize the amount of carbon nanotube used in manufacture of a transparent carbon nanotube electrode and to prevent decrease in conductivity which occurs when carbon nanotubes are dispersed inside a polymer, thereby achieving good conductivity, even though additional coating with a conducting polymer is not carried out.
  • FIG. 1 is a schematic view showing a method for manufacturing a transparent electrode according to one embodiment of the present invention.
  • Fig. 2 is a photograph showing that the transparency of the transparent electrode can be easily adjusted by controlling the amount of a suspension of carbon nanotube.
  • FIG. 3 is a photograph showing the flexibility of the transparent electrode obtained from Example 1 of the present invention.
  • Fig. 4 is a photograph showing the patterns of carbon nanotube on the transparent electrode obtained from Example 4 of the present invention.
  • a 0.00 lwt% aqueous suspension of carbon nanotube in stable dispersion state was prepared by adding 10 mg of single- walled carbon nanotube (manufactured by Iljin Nanotech) to a IL aqueous solution in which Ig of Triton X-100 was dissolved as a surfactant, and sonicating at 60Hz.
  • PDMS were applied to the upper part of the thin film of carbon nanotube formed on the dried membrane by using a bar coating method, and then the coated membrane was cured in an oven at 65°C.
  • the aluminum oxide filter membrane was removed in 3M of an aqueous NaOH solution, and accordingly a transparent electrode in which the thin film of carbon nanotube is formed on the flexible transparent PDMS substrate was obtained.
  • the amount of carbon nanotube per unit area was 1 D/cm
  • the transparent electrode manufactured as above showed about 90% of transmittance measured by a UV- visible spectrometer.
  • the sheet resistance of the transparent electrode measured by a four point probe was less than lOO ⁇ /sq.
  • the transparent electrode manufactured by the present example is excellent in transparency, conductivity, flexibility, and adhesion stability of the thin film of carbon nanotube.
  • a transparent electrode, in which the thin film of carbon nanotube was formed, was manufactured by using the same method as in Example 1, except that the thin film of carbon nanotube was formed by the Langmuir-Blodgett method, which comprises preparing a chloroform suspension containing 0.00 lwt% of carbon nanotube dispersed therein, spreading the solution on the water surface of a Langmuir-Blodgett trough, evaporating the solvent, gradually compressing the carbon nanotube film by pushing two movable barriers to obtain a Langmuir film of carbon nanotube, and transferring the Langmuir film to a silicone or glass substrate to obtain the thin film of carbon nanotube.
  • the thin film of carbon nanotube was about 30 nm in thickness.
  • a transparent electrode, in which the thin film of carbon nanotube was formed, was manufactured by using the same method as in Example 1, except that monomers of polyacrylate were coated to the upper part of the thin film of carbon nanotube formed on the membrane by spin coating, and cured by UV light.
  • the amount of carbon nanotube per unit area of the thin film was about 1 D/cm
  • a transparent electrode, in which the thin film of carbon nanotube was formed, was manufactured by using the same method as in Example 1, except that polymethacrylate dissolved in chloroform was coated to the upper part of the thin film of carbon nanotube formed on the membrane by spin coating, and cured by solvent evaporation.
  • the amount of carbon nanotube per unit area of the thin film was about 1 D/cm
  • a transparent electrode, in which the thin film of carbon nanotube was formed, was manufactured by using the same method as in Example 1, except that the filtration of a suspension of carbon nanotube was carried out through the aluminum oxide filter membrane on which a patterned 300 mesh TEM grid was placed, for obtaining a patterned thin film of carbon nanotube on the filter membrane.
  • a transparent electrode, in which the thin film of carbon nanotube was formed, was manufactured by using the same method as in Example 1, except that a conducting polymer film of polyaniline was additionally grown, according to an electrochemical method disclosed in Diamond and Related Materials, 2004, 13, 256, on the upper part of the thin film of carbon nanotube formed on the filter membrane, and then dried.
  • a transparent electrode, in which the thin film of carbon nanotube was formed, was manufactured by using the same method as in Example 3 except that a conducting polymer film of polyaniline was additionally grown, according to an electrochemical method disclosed in Diamond and Related Materials, 2004, 13, 256, on the upper part of the thin film of carbon nanotube formed by the Langmuir-Blodgett method, and dried.
  • Carbon nanotubes were modified with gold nanoparticles by using a method disclosed in Langmuir 2000, 18, 3569.
  • the shape of the carbon nanotubes and the distribution of the nanoparticles were observed by Atomic Force Microscope (AFM).
  • AFM Atomic Force Microscope
  • a transparent electrode in which the thin film of carbon nanotube modified with metal particles was formed, was manufactured by using the same method as in Example 1.
  • Carbon nanotubes were modified with gold nanoparticles by using a method disclosed in Langmuir 2000, 18, 3569. The shape of the carbon nanotubes and the distribution of the nanoparticles were observed by AFM. By using the gold nanoparticle- modified carbon nanotubes, a transparent electrode, in which the thin film of carbon nanotube modified with metal particles was formed, was manufactured by using the same method as in Example 2.
  • the present invention can provide a flexible transparent electrode with large area and excellent optical characteristics.
  • the flexible transparent electrode according to the present invention can be advantageously used in various applications, for example, displays such as LCD, PDP, OELD, FED and the like; electronic devices such as electrostatic recording substrate, photodiode, register, thin film composite circuit and the like; sensors such as photo-sensor, IR-sensor, pressure- sensor, biochemical-sensor and the like; memory devices such as FRAM, thermoplastic recording and the like; and others including antistatic devices, electromagnetic shielding devices, battery electrodes and the like.

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Abstract

La présente invention concerne un procédé de fabrication d’une électrode transparente flexible, comprenant les phases suivantes : (1) formation d’un mince film de nanotube de carbone sur un substrat solide; (2) enduction d’un précurseur capable de former un substrat transparent flexible sur le mince film de nanotube de carbone ; (3) vulcanisation du précurseur pour réaliser un substrat transparent flexible sur lequel est fixé le mince film de nanotube de carbone ; et (4) enlèvement du substrat solide, et elle concerne également l’électrode transparente flexible fabriquée ainsi. Le procédé de la présente invention permet d’obtenir une électrode transparente flexible de large superficie, qui maintient l’adhérence stable du film de nanotube de carbone au substrat même après une torsion et un pliage répétés. L’électrode transparente flexible selon l’invention peut s’utiliser avantageusement dans diverses applications comme des affichages, des dispositifs électroniques, des capteurs, des dispositifs de mémorisation et autres.
PCT/KR2005/002134 2005-07-05 2005-07-05 Procédé de fabrication d’électrode transparente et électrode transparente fabriquée ainsi WO2007004758A1 (fr)

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WO2007035838A2 (fr) * 2005-09-21 2007-03-29 University Of Florida Research Foundation, Inc. Procede basse temperature pour la formation de films minces electroconducteurs traces, et articles traces ainsi obtenus
WO2008105804A2 (fr) * 2006-07-18 2008-09-04 The University Of Southern California Electrodes de dispositif optoélectronique organique, avec nanotubes
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US7727578B2 (en) 2007-12-27 2010-06-01 Honeywell International Inc. Transparent conductors and methods for fabricating transparent conductors
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WO2013013050A1 (fr) * 2011-07-20 2013-01-24 James Madison University Adhérence de couches minces de métal à des substrats polymères
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CN103531304A (zh) * 2013-09-18 2014-01-22 天津工业大学 一种快速制备大面积碳纳米管柔性透明导电薄膜及提高其导电性的方法
WO2014184440A1 (fr) 2013-05-14 2014-11-20 Canatu Oy Films souples d'émission et de blocage de lumière
US8987589B2 (en) 2006-07-14 2015-03-24 The Regents Of The University Of Michigan Architectures and criteria for the design of high efficiency organic photovoltaic cells
CN104464955A (zh) * 2014-11-28 2015-03-25 中国科学院金属研究所 规模化制备大面积、高性能石墨烯复合透明导电膜的方法
CN104527176A (zh) * 2015-01-23 2015-04-22 哈尔滨工业大学 一种高柔韧性碳纳米管纸/玻璃纤维阻燃复合材料的物理制备方法
CN105741918A (zh) * 2016-04-29 2016-07-06 苏州巨邦新材料科技有限公司 一种基于纳米铜的导电复合材料及其制备工艺
US9490454B2 (en) 2012-07-20 2016-11-08 The Regents Of The University Of California Method for producing a high efficiency organic light emitting device having a transparent composite electrode comprising a film of conductive nanowires, carbon nanoparticles, light scattering nanoparticles, and a polymer support
US9642253B2 (en) 2011-04-04 2017-05-02 University Of Florida Research Foundation, Inc. Nanotube dispersants and dispersant free nanotube films therefrom
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CN107525832A (zh) * 2017-08-29 2017-12-29 浙江理工大学 一种银纳米线修饰的柔性纤维传感器电极的制备方法
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CN109768164A (zh) * 2018-12-18 2019-05-17 杭州电子科技大学 一种柔性光探测器的制备方法
CN109799012A (zh) * 2019-01-23 2019-05-24 河南工程学院 一种基于纤维素的类三明治结构压力传感器及其制备方法
CN110568050A (zh) * 2019-06-27 2019-12-13 吉林化工学院 基于柔性电极的无酶催化过氧化氢电化学传感器制备方法
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