WO2006112215A1 - Plated base material - Google Patents

Plated base material Download PDF

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Publication number
WO2006112215A1
WO2006112215A1 PCT/JP2006/304881 JP2006304881W WO2006112215A1 WO 2006112215 A1 WO2006112215 A1 WO 2006112215A1 JP 2006304881 W JP2006304881 W JP 2006304881W WO 2006112215 A1 WO2006112215 A1 WO 2006112215A1
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WO
WIPO (PCT)
Prior art keywords
electroless
plating
film
less
plating film
Prior art date
Application number
PCT/JP2006/304881
Other languages
French (fr)
Japanese (ja)
Inventor
Akihiro Aiba
Kazumi Kawamura
Hirofumi Takahashi
Original Assignee
Nippon Mining & Metals Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining & Metals Co., Ltd. filed Critical Nippon Mining & Metals Co., Ltd.
Priority to JP2007521139A priority Critical patent/JP4926053B2/en
Priority to CN200680009942XA priority patent/CN101151399B/en
Publication of WO2006112215A1 publication Critical patent/WO2006112215A1/en
Priority to HK08106771.4A priority patent/HK1116838A1/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1646Characteristics of the product obtained
    • C23C18/165Multilayered product
    • C23C18/1651Two or more layers only obtained by electroless plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/42Coating with noble metals
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/244Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/072Electroless plating, e.g. finish plating or initial plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/073Displacement plating, substitution plating or immersion plating, e.g. for finish plating

Definitions

  • the present invention has an electroless nickel plating film on a substrate surface, a substitutional electroless palladium plating film as an intermediate layer, and an electroless gold plating film as an upper layer, and has corrosion resistance and solderability of a base metal.
  • the present invention relates to a base material with excellent heat resistance.
  • Electroless gold plating is applied to terminals and circuit surfaces of electronic industrial parts such as printed wiring board circuits, IC packages, ITO substrates, and IC cards. More specifically, electroless gold plating is applied to improve the corrosion resistance, solder bondability, and bondability of copper foil or copper plated wiring on a substrate!
  • Patent Document 1 In order to solve this problem in electroless gold plating, improvement in the corrosion resistance of the base metal and improvement in the solderability have been desired. Under such circumstances, it has been proposed to improve solderability by inserting electroless palladium plating between electroless nickel plating and electroless gold plating (Patent Document 1).
  • Patent Document 1 Japanese Patent Publication No. 8-28561
  • the palladium plating layer of the intermediate layer is set to 0.01 to 0.2 / ⁇ ⁇ (10 to 2 OOnm), and the palladium plating solution is a reduced type containing a reducing agent. (Self-catalytic type) is used.
  • the problem with the reduced palladium plating solution is that bath management is very complicated due to low bath stability, and bath decomposition is likely to occur.
  • the film thickness is large as described above, a large amount of palladium, which is a noble metal, is used, which causes a problem in terms of cost.
  • the present invention provides a substrate having an electroless gold plating film that is excellent in the corrosion resistance of the base metal or can improve the solderability even when the palladium plating thickness of the intermediate layer is very thin. It is intended.
  • the present inventors have found that when a substitutional electroless palladium plating layer is formed between an electroless nickel plating layer and an electroless gold plating layer provided on a substrate, The present inventors have found that even if the palladium plating layer is a thin film having a thickness of less than lOnm, it can be provided with sufficient base metal corrosion resistance and solderability, and the present invention has been achieved.
  • the present invention provides:
  • the coating amount of noradium which is a noble metal, which is expensive, can be greatly reduced. You can get results that are virtually indistinguishable from those used.
  • the base material used in the present invention is a circuit of a printed wiring board, an IC package, an ITO substrate, a terminal of an electronic industrial component such as an IC card, or a circuit surface, but there is no particular limitation. It can be applied to substrates that require sticking.
  • the electroless nickel plating solution for forming the electroless nickel plating film used in the present invention is not particularly limited, and is usually used to form a base nickel plating film during electroless gold plating. What is used can be used. It is preferable to use a plating solution that forms a Ni-P plating film. In this case, the phosphorus content in the electroless nickel plating film is 15% by weight or less, preferably 5 to: LO weight%.
  • electroless gold plating solution for forming the electroless gold plating film one that is used as a normal substitution type electroless gold plating solution is not particularly limited. However, a sulfite-based non-cyan type is preferred.
  • the electroless palladium film inserted between the base electroless nickel plating film and the electroless gold plating film used in the present invention is a substitutional electroless palladium plating. It is. When a film is formed by reducing electroless palladium plating, the film thickness needs to be about 50 nm or more in order to control the film thickness and ensure sufficient solderability. If a type electroless plating is used, it can be made very thin. In the present invention, the thickness of the substitutional electroless palladium plating film is also important. In the present invention, the thickness of the electroless palladium plating film is formed in the range of 0.2 nm or more and less than lOnm. Or it is formed by 12.
  • 160 gZcm 2 below the range 0. 2432 / z gZcm 2 or more by weight.
  • Advantage in cost due to the increased use doses of the noble metal palladium reaches the 160 GZcm 2 If 3 ⁇ 4 is small, the strength of solder joints There is also a problem of causing a decrease.
  • substitutional electroless palladium plating solution itself for forming the intermediate plating film a known plating solution can be used.
  • the thickness of the electroless nickel base coating is preferably 1 to 20 m, and the thickness of the electroless gold coating is preferably 10 to 500 nm.
  • Examples 1 to 5 and Comparative Examples 2 to 3 as shown below, the alkaline degreasing solution, the activator, and the electroless nickel plating solution were manufactured by Nikko Metal Plating, respectively.
  • Nikko Materials products were used as substitutional electroless palladium plating solutions and electroless gold plating solutions.
  • the printed wiring boards for evaluation 1) and 2) shown below were alkaline degreased for 2 min at 45 ° C and pH 12.0 using an alkaline degreasing solution (Nikko Plating, P-1000). Next, soft etching (sulfuric acid + sodium persulfate system, 25 ° C, 2 min)
  • Electroless nickel plating (Nikko Plating, KG-530 (88 ° C, pH 4.5, 25 min, P content 7%))
  • Resist opening 1 ⁇ Printed wiring board with LOmm pad
  • Comparative Example 1 was used without the substitution type electroless palladium plating, and reduced electroless palladium plating (Nippon Materials CA-400 (Pd: 0.8gZL) was used instead of the substitution type electroless palladium plating. 43 ° C, pH 7.5, 5 min)) was used as Comparative Example 4.
  • the substrate was immersed in 20 vol% nitric acid aqueous solution for lOmin, washed with water and dried. Thereafter, the gold-plated appearance of all the pads was observed with an optical microscope at 50 times.
  • the evaluation criteria were ⁇ when the discoloration was less than 1% in 500 pads, ⁇ when less than 1-10%, and X when more than 10%.
  • the substrate was heat-treated at 160 ° C. for 24 hours. After that, flux was applied to 10 pads with 3mm openings, and 0.6 ⁇ Sn— 4.
  • OAg— 0.5Cu solder balls were placed on the center of the pad and reflowed at a peak temperature of 250 ° C in a reflow oven. Solder wetting spread is 1.5 for ⁇ 1.5 ⁇ , ⁇ for less than 1.2 to 1.5mm, and X for less than 1.2mm.
  • the substrate was heat-treated at 160 ° CX for 24 hours, and then flux was applied to 20 pads of 0.48 mm ⁇ , and 0.6 ⁇ of Sn— 4.
  • OAg— 0 . 5 Cu solder balls were mounted and reflowed at a peak temperature of 250 ° C in a reflow oven.
  • Bond strength was measured by a heated pull method using a bond tester 4000 manufactured by Digi Corporation.
  • the palladium cost is a relative cost when the palladium metal price is set to 1 in the case where a reduced-type palladium plating solution is used and a 50 nm thick palladium plating film is formed (Comparative Example 4).

Abstract

Provide is a base material having an electroless plating film which is excellent in the corrosion resistance of a base metal and can improve the joinability by soldering, and further is advantageous over a conventional plating film from the view point of the production cost. A plated base material which has a base material and a multi-layer film formed thereon, characterized in that the multi-layer film comprises an electroless nickel plating film as an under layer, a substitution type of electroless palladium plating film having a thickness of not less than 0.2 nm and less than 10 nm or a weight of not less than 0.2432 μg/cm2 and less than 12.160 μg/cm2 as an intermediate film, and an electroless gold plating film as an upper layer.

Description

明 細 書  Specification
めっき基材  Plating substrate
技術分野  Technical field
[0001] 本発明は、基材表面に無電解ニッケルめっき皮膜、中間層として置換型無電解パ ラジウムめっき皮膜、上層としての無電解金めつき皮膜を有し、下地金属の耐食性、 はんだ付け性に優れためつき基材に関する。  [0001] The present invention has an electroless nickel plating film on a substrate surface, a substitutional electroless palladium plating film as an intermediate layer, and an electroless gold plating film as an upper layer, and has corrosion resistance and solderability of a base metal. The present invention relates to a base material with excellent heat resistance.
背景技術  Background art
[0002] 無電解金めつきは、プリント配線板の回路、 ICパッケージ、 ITO基板、 ICカード等 の電子工業部品の端子や回路表面に適用されている。より具体的には無電解金め つきは、基材上の銅箔又は銅めつき配線の耐食性、はんだ接合性、ボンディング性 の向上のために適用されて!/、る。  [0002] Electroless gold plating is applied to terminals and circuit surfaces of electronic industrial parts such as printed wiring board circuits, IC packages, ITO substrates, and IC cards. More specifically, electroless gold plating is applied to improve the corrosion resistance, solder bondability, and bondability of copper foil or copper plated wiring on a substrate!
[0003] 下地無電解ニッケルめっき被膜上に、所定厚の置換型無電解金めつきを行った場 合、特にめつき反応開始直後ではニッケルと金の置換反応が速ぐ無電解ニッケル 被膜における析出粒子の粒界部分を選択的に強く攻撃し、析出粒子の侵食が深く 進行し、金めつき被膜の下に欠陥部分が形成される。場合によっては、欠陥部分が 連続したり、集中したりして金めつき被膜の外観不良 (表面に孔食が生じる)さえ引き 起こす。さらに析出する金被膜の膜厚は薄いにもかかわらず、侵食の深さは深ぐこ のような置換型金めつき液による無電解ニッケルめっき被膜の脆弱化及び金めつき 被膜との密着性不足により、耐久性試験時に剥離を起したり、はんだ付けを行った際 に十分なはんだ付け強度が確保できなくなるなどの問題が指摘されていた。  [0003] When sublimation-type electroless gold plating of a predetermined thickness is performed on the underlying electroless nickel plating film, the deposition of the electroless nickel film is accelerated immediately after the start of the plating reaction. The grain boundary part of the particle is selectively and strongly attacked, and the erosion of the precipitated particle proceeds deeply, and a defective part is formed under the gold plating film. In some cases, defective parts are continuous or concentrated, causing even the appearance of the gold-coated film to be poor (pitting corrosion occurs on the surface). In addition, even though the deposited gold film is thin, the depth of erosion is deep, the electroless nickel plating film is weakened by the substitution type gold plating solution and the adhesion with the gold plating film is insufficient. As a result, problems have been pointed out such as peeling during the durability test and insufficient soldering strength when soldering.
[0004] この無電解金めつきにおける問題を解決するため、下地金属の耐食性の向上、は んだ接合性の向上が要望されていた。こうした状況の中で、無電解ニッケルめっきと 無電解金めつきの間に無電解パラジウムめっきを挿入することにより、はんだ付け性 を向上すると ヽぅ提案がされて ヽる (特許文献 1)。  [0004] In order to solve this problem in electroless gold plating, improvement in the corrosion resistance of the base metal and improvement in the solderability have been desired. Under such circumstances, it has been proposed to improve solderability by inserting electroless palladium plating between electroless nickel plating and electroless gold plating (Patent Document 1).
特許文献 1:特公平 8 - 28561号公報  Patent Document 1: Japanese Patent Publication No. 8-28561
発明の開示  Disclosure of the invention
発明が解決しょうとする課題 [0005] し力し、前記の提案では、中間層のパラジウムめっき層は 0. 01〜0.2 /ζ πι (10〜2 OOnm)とされており、かつパラジウムめっき液は還元剤を含有した還元型(自己触媒 型)のものが用いられている。還元型パラジウムめっき液の問題点は、浴安定性が低 いために浴管理が非常に煩雑であり、浴分解も起こしやすい。また、前記のように膜 厚が厚いため貴金属であるパラジウムを多く使用することとなり、コストの点で問題が 生じる。 Problems to be solved by the invention [0005] In the above proposal, the palladium plating layer of the intermediate layer is set to 0.01 to 0.2 / ζ πι (10 to 2 OOnm), and the palladium plating solution is a reduced type containing a reducing agent. (Self-catalytic type) is used. The problem with the reduced palladium plating solution is that bath management is very complicated due to low bath stability, and bath decomposition is likely to occur. In addition, since the film thickness is large as described above, a large amount of palladium, which is a noble metal, is used, which causes a problem in terms of cost.
[0006] 本発明は、中間層のパラジウムめっき厚をごく薄く形成しても、下地金属の耐食性 に優れ、またはんだ接合性も向上できる無電解金めつき皮膜を有する基材を提供す ることを目的とするものである。  [0006] The present invention provides a substrate having an electroless gold plating film that is excellent in the corrosion resistance of the base metal or can improve the solderability even when the palladium plating thickness of the intermediate layer is very thin. It is intended.
課題を解決するための手段  Means for solving the problem
[0007] 本発明者は、鋭意検討した結果、基材に設けた無電解ニッケルめっき層と無電解 金めつき層との間に、置換型無電解パラジウムめっき層を形成する場合においては、 該パラジウムめっき層を lOnm未満の薄い皮膜であっても、十分な下地金属耐食性 及びはんだ接合性を具備することができることを知見し、本発明に至った。  [0007] As a result of intensive studies, the present inventors have found that when a substitutional electroless palladium plating layer is formed between an electroless nickel plating layer and an electroless gold plating layer provided on a substrate, The present inventors have found that even if the palladium plating layer is a thin film having a thickness of less than lOnm, it can be provided with sufficient base metal corrosion resistance and solderability, and the present invention has been achieved.
[0008] すなわち、本発明は、  That is, the present invention provides:
[1] 基材上に多層膜を有するめっき基材であって、該多層膜が下層として無電解 ニッケルめっき皮膜、中間層として膜厚 0. 2nm以上 lOnm未満、または重量 0. 243 2 gZcm2以上 12. 160 gZcm2未満の置換型無電解パラジウムめっき皮膜、上 層として無電解金めつき皮膜からなることを特徴とするめつき基材、 [1] A plating substrate having a multilayer film on the substrate, the multilayer film being an electroless nickel plating film as a lower layer, and a film thickness of 0.2 nm or more and less than lOnm as an intermediate layer, or a weight of 0.243 2 gZcm 2 12. Substitutional electroless palladium plating film having a thickness of less than 160 gZcm 2 and an electroless gold plating film as an upper layer,
[2] 無電解ニッケルめっき皮膜中のリン含有率が 15重量%以下であることを特徴と する [1]に記載のめっき基材、  [2] The plating base material according to [1], wherein the phosphorus content in the electroless nickel plating film is 15% by weight or less,
[3] 無電解金めつき皮膜が亜硫酸系の非シアンタイプであることを特徴とする [1]ま たは [2]に記載のめっき基材、  [3] The plating base material according to [1] or [2], wherein the electroless gold plating film is a sulfite-based non-cyan type,
に関する。  About.
発明の効果  The invention's effect
[0009] 本発明によれば、コストの嵩む貴金属のノラジウムの被覆量を大きく低減でき、しか も下地金属の耐食性及びはんだ接合性に関しては、従来技術のパラジウム被覆量 が多量である還元型皮膜を使用した場合と実質的に遜色ない結果を得ることができ る。 [0009] According to the present invention, the coating amount of noradium which is a noble metal, which is expensive, can be greatly reduced. You can get results that are virtually indistinguishable from those used. The
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0010] 本発明に使用する基材としては、プリント配線板の回路、 ICパッケージ、 ITO基板、 ICカード等の電子工業部品の端子や回路表面などであるが、特に制限はなぐ無電 解金めつきを必要とする基材に適用することができる。  [0010] The base material used in the present invention is a circuit of a printed wiring board, an IC package, an ITO substrate, a terminal of an electronic industrial component such as an IC card, or a circuit surface, but there is no particular limitation. It can be applied to substrates that require sticking.
[0011] 本発明に使用する無電解ニッケルめっき皮膜を形成するための無電解ニッケルめ つき液は、特に制限されるものではなぐ無電解金めつきの際に下地ニッケルめっき 皮膜を形成するのに通常使用されるものを使用することができる。好ましくは、 Ni-P めっき皮膜を形成するめつき液を使用することが好ましい。この場合においては無電 解ニッケルめっき皮膜中のリン含有率が 15重量%以下、好ましくは 5〜: LO重量%の 範囲となるように形成される。  [0011] The electroless nickel plating solution for forming the electroless nickel plating film used in the present invention is not particularly limited, and is usually used to form a base nickel plating film during electroless gold plating. What is used can be used. It is preferable to use a plating solution that forms a Ni-P plating film. In this case, the phosphorus content in the electroless nickel plating film is 15% by weight or less, preferably 5 to: LO weight%.
[0012] また、無電解金めつき皮膜を形成するための無電解金めつき液についても、特に制 限はなぐ通常置換型の無電解金めつき液として使用されるものを使用することがで きるが、亜硫酸系の非シアンタイプが好ましい。  [0012] As the electroless gold plating solution for forming the electroless gold plating film, one that is used as a normal substitution type electroless gold plating solution is not particularly limited. However, a sulfite-based non-cyan type is preferred.
[0013] また、本発明に使用する、前記下地無電解ニッケルめっき皮膜と、無電解金めつき 皮膜との間に挿入される無電解パラジウム皮膜は、置換型無電解パラジウムめっきと することが重要である。これを還元型無電解パラジウムめっきにより皮膜形成する場 合、皮膜厚を制御し、かつ十分なはんだ接合性を確保するにはその皮膜厚を 50nm 程度以上とする必要があるが、本発明により置換型無電解めつきを採用する場合は 、ごく薄くすることができる。本発明においては置換型無電解パラジウムめっき皮膜の 厚みも重要である。本発明において、無電解パラジウムめっき皮膜の厚みは、 0. 2n m以上 lOnm未満の範囲で形成される。或いは、重量で 0. 2432 /z gZcm2以上 12 . 160 gZcm2未満の範囲で形成される。好ましくは、 0. 2nm以上 9nm以下、また 重量で ίま 0. 2432 /z g/cm2以上 10. 444 g/cm2以下、更に好ましく ίま 0. 5nm 以上 5nm以下(0. 608 gZcm2以上 6. 080 gZcm2以下)の範囲である。 0.2η m未満或いは 0. 2432 gZcm2未満では無電解パラジウムめっき中間層の効果が 発現できず、また 10nm、或いは 12. 160 gZcm2に至ると貴金属パラジウムの使 用量の増大によりコスト面での優位 ¾が小さくなるば力りでなぐはんだ接合強度の 低下を招くという問題も生じる。 [0013] Further, it is important that the electroless palladium film inserted between the base electroless nickel plating film and the electroless gold plating film used in the present invention is a substitutional electroless palladium plating. It is. When a film is formed by reducing electroless palladium plating, the film thickness needs to be about 50 nm or more in order to control the film thickness and ensure sufficient solderability. If a type electroless plating is used, it can be made very thin. In the present invention, the thickness of the substitutional electroless palladium plating film is also important. In the present invention, the thickness of the electroless palladium plating film is formed in the range of 0.2 nm or more and less than lOnm. Or it is formed by 12. 160 gZcm 2 below the range 0. 2432 / z gZcm 2 or more by weight. Preferably, 0.2 nm or more and 9 nm or less, and by weight, ί or 0.22432 / zg / cm 2 or more, 10.444 g / cm 2 or less, more preferably ί or more 0.5 nm or more and 5 nm or less (0.608 gZcm 2 or more 6. 080 gZcm 2 or less). In or 0. 2432 gZcm than 2 less than 0.2Ita m can not express the effect of the electroless palladium plating intermediate layer, also 10 nm, or 12. advantage in cost due to the increased use doses of the noble metal palladium reaches the 160 GZcm 2 If ¾ is small, the strength of solder joints There is also a problem of causing a decrease.
中間めつき皮膜を形成するための置換型無電解パラジウムめっき液自体について は、公知のめっき液を使用することができる。  For the substitutional electroless palladium plating solution itself for forming the intermediate plating film, a known plating solution can be used.
[0014] また、本発明においては、前記無電解ニッケル下地めつきの皮膜厚は 1〜20 m が好ましぐまた無電解金めつき皮膜厚は 10〜500nmが好ましい。  In the present invention, the thickness of the electroless nickel base coating is preferably 1 to 20 m, and the thickness of the electroless gold coating is preferably 10 to 500 nm.
実施例  Example
[0015] 以下に本発明の実施例を説明する。  [0015] Examples of the present invention will be described below.
実施例 1〜5、比較例 1〜4  Examples 1-5, Comparative Examples 1-4
めっきプロセス:  Plating process:
実施例 1〜5及び比較例 2〜3においては、下記に示すように、アルカリ脱脂液、ァ クチベータ一、無電解ニッケルめっき液は、それぞれ日鉱メタルプレーティング社製 品を使用した。また、置換型無電解パラジウムめっき液、無電解金めつき液は日鉱マ テリアルズ製品を使用した。  In Examples 1 to 5 and Comparative Examples 2 to 3, as shown below, the alkaline degreasing solution, the activator, and the electroless nickel plating solution were manufactured by Nikko Metal Plating, respectively. In addition, Nikko Materials products were used as substitutional electroless palladium plating solutions and electroless gold plating solutions.
下記に示す評価用プリント配線基板 1) , 2)をアルカリ脱脂液(日鉱プレーティング 社製、 P— 1000)を使用して、 45°C、 pH12. 0、で 2minアルカリ脱脂した。次いで、 ソフトエッチング (硫酸 +過硫酸 Na系、 25°C、 2min)  The printed wiring boards for evaluation 1) and 2) shown below were alkaline degreased for 2 min at 45 ° C and pH 12.0 using an alkaline degreasing solution (Nikko Plating, P-1000). Next, soft etching (sulfuric acid + sodium persulfate system, 25 ° C, 2 min)
→硫酸洗浄(3%、 25°C、 2min)  → Sulfuric acid washing (3%, 25 ° C, 2min)
→プレディップ(塩酸系、 25°C、 lmin)  → Pre-dip (hydrochloric acid, 25 ° C, lmin)
→ァクチベータ一付与(日鉱プレーティング社製、 KG— 522 (塩ィ匕物系、 Pd濃度: 0 . 12gZL、 25。C、pH< l. 0、 30s) )  → Acquisition of activator (Nikko Plating Co., Ltd., KG-522 (Salt and salt system, Pd concentration: 0.12gZL, 25.C, pH <l. 0, 30s))
→硫酸洗浄(3%、 25°C、 10s)  → Sulfuric acid cleaning (3%, 25 ° C, 10s)
→無電解ニッケルめっき(日鉱プレーティング社製、 KG— 530 (88°C、 pH4. 5、 25 min、 P含有率 7%) )  → Electroless nickel plating (Nikko Plating, KG-530 (88 ° C, pH 4.5, 25 min, P content 7%))
→置換型無電解パラジウムめっき(日鉱マテリアルズ製、 CF— 400 (塩ィ匕物系、 Pd: 0. lg/ 25。C、 pH2. 0、 lmin) )  → Substitutional type electroless palladium plating (manufactured by Nikko Materials Co., Ltd., CF-400 (Salt-based system, Pd: 0. lg / 25. C, pH2.0, lmin))
→無電解金めつき(日鉱マテリアルズ製、 CF— 500SS (亜硫酸系、 Au濃度: 1. Og ZL、 80°C、 pH7. 5、 20min) )の順に各工程を行った。なお、プレディップ→ァクチ ベータ一の間以外は全て lminの水洗工程が入る。 評価用基板: → Each electroless gold plating (manufactured by Nikko Materials, CF-500SS (sulfurous acid system, Au concentration: 1. Og ZL, 80 ° C, pH 7.5, 20 min)) was performed in this order. In addition, lmin water washing process is included except for pre-dip → activator beta. Evaluation board:
1)レジスト開口部 0. 48πιπιΦのパッドを 500個有するプリント配線板 1) Printed wiring board with 500 resist openings 0.448πιπιΦ
2)レジスト開口部 1〜: LOmm口のパッドを有するプリント配線板 2) Resist opening 1 ~: Printed wiring board with LOmm pad
また、上記置換型無電解パラジウムめっきを行わないものを比較例 1とし、上記置換 型無電解パラジウムめっきに替えて還元型無電解パラジウムめっき(日鉱マテリアル ズ製、 CA— 400 (Pd: 0. 8gZL、 43°C、 pH7. 5、 5min) )を行ったものを比較例 4と した。  In addition, Comparative Example 1 was used without the substitution type electroless palladium plating, and reduced electroless palladium plating (Nippon Materials CA-400 (Pd: 0.8gZL) was used instead of the substitution type electroless palladium plating. 43 ° C, pH 7.5, 5 min)) was used as Comparative Example 4.
[0016] 上記のようにして 3層めつき皮膜形成したプリント配線基板について以下の評価を 行った。  [0016] The following evaluation was performed on the printed wiring board on which the three-layered film was formed as described above.
耐食性:  Corrosion resistance:
1)の基板に所定のめっきを行った後、 20vol%の硝酸水溶液に lOmin浸漬した後 、水洗、乾燥した。その後、全パッドの金めつきの外観を光学顕微鏡 50倍で観察した 。その評価基準は 500パッド中、変色が 1%未満は〇、 1〜10%未満は△、 10%以 上は Xとした。  After predetermined plating on the substrate of 1), the substrate was immersed in 20 vol% nitric acid aqueous solution for lOmin, washed with water and dried. Thereafter, the gold-plated appearance of all the pads was observed with an optical microscope at 50 times. The evaluation criteria were ◯ when the discoloration was less than 1% in 500 pads, △ when less than 1-10%, and X when more than 10%.
[0017] はんだ濡れ性:  [0017] Solder wettability:
2)の基板に所定のめっき処理を行った後、基板を 160°C X 24h熱処理した。その 後、 3mm口のパッド 10個にフラックスを塗布し、 0. 6πιπιΦの Sn— 4. OAg— 0. 5C uはんだボールをパッド中央を載せ、リフロー炉でピーク温度 250°Cでリフローした。 はんだ濡れ広がりが 1. 5πιπιΦ以上は〇、 1. 2〜1. 5mm未満は△、 1. 2mm未 満は Xとした。  After the predetermined plating treatment was performed on the substrate of 2), the substrate was heat-treated at 160 ° C. for 24 hours. After that, flux was applied to 10 pads with 3mm openings, and 0.6πιπιΦ Sn— 4. OAg— 0.5Cu solder balls were placed on the center of the pad and reflowed at a peak temperature of 250 ° C in a reflow oven. Solder wetting spread is 1.5 for ≧ 1.5πιπιΦ, △ for less than 1.2 to 1.5mm, and X for less than 1.2mm.
[0018] はんだ接合強度: [0018] Solder joint strength:
1)の基板に所定のめっき処理を行った後、基板を 160°C X 24h熱処理し、その後 、 0. 48mm Φのパッド 20個にフラックスを塗布し、 0. 6πιπιΦの Sn— 4. OAg— 0. 5 Cuはんだボールを搭載し、リフロー炉でピーク温度 250°Cでリフローした。  After the predetermined plating treatment was performed on the substrate of 1), the substrate was heat-treated at 160 ° CX for 24 hours, and then flux was applied to 20 pads of 0.48 mmΦ, and 0.6πιπιΦ of Sn— 4. OAg— 0 . 5 Cu solder balls were mounted and reflowed at a peak temperature of 250 ° C in a reflow oven.
ディジ社製ボンドテスター 4000を用い、加熱プル法で接合強度を測定した。  Bond strength was measured by a heated pull method using a bond tester 4000 manufactured by Digi Corporation.
[0019] また、パラジウムコストは、還元型パラジウムめっき液を用い、厚さ 50nmのパラジゥ ムめっきを成膜した場合 (比較例 4)のパラジウム地金代を 1とした場合の相対コストで[0019] In addition, the palladium cost is a relative cost when the palladium metal price is set to 1 in the case where a reduced-type palladium plating solution is used and a 50 nm thick palladium plating film is formed (Comparative Example 4).
^:し 7こ。 ^: Seven.
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Figure imgf000007_0002
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Claims

請求の範囲 The scope of the claims
[1] 基材上に多層膜を有するめっき基材であって、該多層膜が下層として無電解-ッ ケルめっき皮膜、中間層として膜厚 0. 2nm以上 lOnm未満、または重量 0. 2432 gZcm2以上 12. 160 gZcm2未満の置換型無電解パラジウムめっき皮膜、上層と して無電解金めつき皮膜からなることを特徴とするめつき基材。 [1] A plating substrate having a multilayer film on a substrate, the multilayer film being an electroless-Neckel plating film as a lower layer, and a film thickness of 0.2 nm or more and less than lOnm as an intermediate layer, or a weight of 0.2432 gZcm 2 or more 12. Substitution type electroless palladium plating film having a thickness of less than 160 gZcm 2 and an electroless gold plating film as an upper layer.
[2] 無電解ニッケルめっき皮膜中のリン含有率が 15重量%以下であることを特徴とする 請求の範囲第 1項に記載のめっき基材。  [2] The plating base material according to claim 1, wherein the phosphorus content in the electroless nickel plating film is 15% by weight or less.
[3] 無電解金めつき皮膜が亜硫酸系の非シアンタイプであることを特徴とする請求の範 囲第 1項または第 2項に記載のめっき基材。  [3] The plating base material according to claim 1 or 2, wherein the electroless gold plating film is of a sulfite type non-cyan type.
PCT/JP2006/304881 2005-04-01 2006-03-13 Plated base material WO2006112215A1 (en)

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JP2008177261A (en) * 2007-01-17 2008-07-31 Okuno Chem Ind Co Ltd Multilayer plating film and printed wiring board
EP2309830A1 (en) * 2009-09-02 2011-04-13 TDK Corporation Plating film, printed wiring board, and module substrate
US8124174B2 (en) 2007-04-16 2012-02-28 C. Uyemura & Co., Ltd. Electroless gold plating method and electronic parts
JP2012505964A (en) * 2008-10-17 2012-03-08 アトテック・ドイチュラント・ゲーエムベーハー Ni-P / Pd stack with reduced stress for bondable wafer surfaces
JPWO2011099597A1 (en) * 2010-02-15 2013-06-17 株式会社Jcu Method for manufacturing printed wiring board

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CN102802364B (en) * 2012-09-11 2014-11-05 深圳市和美精艺科技有限公司 Method for arranging metal palladium layer in conducting layer of printed circuit board and layered structure thereof
JP6466521B2 (en) * 2017-06-28 2019-02-06 小島化学薬品株式会社 Electroless plating process
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JP2012505964A (en) * 2008-10-17 2012-03-08 アトテック・ドイチュラント・ゲーエムベーハー Ni-P / Pd stack with reduced stress for bondable wafer surfaces
EP2309830A1 (en) * 2009-09-02 2011-04-13 TDK Corporation Plating film, printed wiring board, and module substrate
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