WO2006088076A1 - Bague d'etancheite - Google Patents

Bague d'etancheite Download PDF

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Publication number
WO2006088076A1
WO2006088076A1 PCT/JP2006/302704 JP2006302704W WO2006088076A1 WO 2006088076 A1 WO2006088076 A1 WO 2006088076A1 JP 2006302704 W JP2006302704 W JP 2006302704W WO 2006088076 A1 WO2006088076 A1 WO 2006088076A1
Authority
WO
WIPO (PCT)
Prior art keywords
seal ring
material layer
seal
seals
main body
Prior art date
Application number
PCT/JP2006/302704
Other languages
English (en)
Japanese (ja)
Inventor
Yasuhiro Sakamoto
Tsuyoshi Noguchi
Original Assignee
Daikin Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries, Ltd. filed Critical Daikin Industries, Ltd.
Publication of WO2006088076A1 publication Critical patent/WO2006088076A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F16J15/024—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity

Definitions

  • the present invention relates to a seal ring having chemical resistance and plasma resistance and excellent anti-adhesion properties.
  • the seal ring is an elastic body and the cross-sectional shape is usually circular.
  • a reactive gas is introduced into a vacuum and turned into a plasma by applying a high frequency.
  • a synthetic rubber seal ring generally used for a vacuum shield is used, the portion exposed to the plasma gradually increases. Deteriorates and produces particles, and finally cracks, making it impossible to maintain a vacuum.
  • a general synthetic rubber seal ring has problems such as high replacement frequency because it is not only inferior in corrosion resistance but also in heat resistance.
  • An object of the present invention is to provide a seal ring that can ensure sufficient sealing performance, has chemical resistance and plasma resistance, and is excellent in anti-adhesion properties.
  • the non-adhering material layer is formed over the entire circumference of the seal ring main body on the inner diameter side surface or outer diameter side surface of the seal ring main body formed by an elastomer.
  • the present invention relates to a seal ring characterized in that a notch portion facing the non-fixed material layer is formed on the entire surface of the seal ring body on the surface opposite to the surface on which the non-fixed material layer is formed.
  • the non-fixed material layer is formed to be a sealing surface.
  • the percentage force occupied by the non-adhering material layer on the surface of the seal ring body is preferably 20% or more of the outer periphery in a cross section perpendicular to the circumferential direction of the seal ring body.
  • the area force occupied by the notch portion in the cross section perpendicular to the circumferential direction of the seal ring body is preferably 5 to 15% of the cross-sectional area in the state where the notch portion is not present.
  • a non-adhering material layer is formed over the entire circumference of the seal ring main body on the inner diameter side surface of the seal ring main body, and the inner surface of the seal ring main body is formed on the outer diameter side surface of the seal ring main body. It is preferable that the notch that is directed in the direction is formed over the entire circumference of the seal ring body.
  • FIG. 1 (a) is a diagram showing a cross-sectional shape in the first embodiment of the seal ring of the present invention.
  • (b) is a view showing a cross-sectional shape in a second embodiment of the seal ring of the present invention.
  • (C) is a diagram showing a cross-sectional shape of a third embodiment of the seal ring of the present invention.
  • (D) is a diagram showing a cross-sectional shape of a seal ring according to a fourth embodiment of the present invention.
  • (e) is a diagram showing a cross-sectional shape of a seal ring according to a fifth embodiment of the present invention.
  • FIG. 2 is a perspective view of the seal ring of the present invention.
  • FIG. 3 (a) is a partial schematic cross-sectional view when the seal ring of the present invention is mounted. (b) is a schematic sectional view when the seal ring is used.
  • FIG. 4 (a) is a partial schematic cross-sectional view when a conventional seal ring is attached. (b) is a schematic sectional view when the seal ring is used.
  • 1 and 2 show an embodiment of the seal ring of the present invention.
  • the seal ring of the present invention includes a seal ring body 1 formed from an elastomer and a non-adhering material layer 2 formed on an inner diameter side surface or an outer diameter side surface thereof.
  • the seal ring body 1 is formed from an elastomer and is used for a seal ring.
  • V As a material to be used, there is no particular limitation as long as it is used for a conventional force sealing material, but a fluorine-containing elastomer is preferably used also for the point of heat resistance and plasma resistance.
  • a fluorine-containing elastomer examples include fluororubbers, thermoplastic fluororubbers, and rubber compositions containing these fluororubbers.
  • fluororubber examples include non-perfluorofluororubber and perfluorofluororubber, and perfluorofluorocarbon rubber is particularly preferably used.
  • Non-perfluorofluorororubbers include bi-lidene fluoride (VdF) fluororubber, tetrafluoroethylene (TFE) Z propylene fluororubber, tetrafluoroethylene (TFE) Z propylene Z Redene Fluoride (VdF) Fluoro Rubber, Ethylene Z Hexafluoroethylene (HFP) Fluoro Rubber, Ethylene Z Hexafluoroethylene (HFP) Z Bi-Ridene Fluoride (VdF) Fluoro Rubber, Ethylene Z Hexa Fluoropropylene (HF P) Z Tetrafluoroethylene (TFE) fluororubber, fluorosilicone fluororubber, or fluorophosphazene fluororubber can be used. Any combination can be used within a range without impairing the effects of the invention.
  • Examples of the perfluorofluorororubber include a tetrafluoroethylene Z perfluoro (alkyl butyl ether) z monomer-containing fluorine-containing elastomer that provides a crosslinking site. Tetrafluoropropoxy O b ethylene / composition Pafuruoro (alkyl Bulle ether), 5 0-90 / 10-50 that force S preferably (Monore 0/0), more preferably 50 to 80/20 to 50 (mol 0 / 0 ), more preferably 55-70 30-45 (mol%).
  • the monomer providing the cross-linking site is preferably 0 to 5 mol%, preferably 0 to 2 mol%, based on the total amount of tetrafluoroethylene and perfluoro (alkyl butyl ether). More preferred.
  • the composition is out of the range, the properties as a rubber elastic body are lost, and the properties tend to be close to those of greaves.
  • perfluoro (alkyl butyl ether) include perfluoro (methyl butyl ether), perfluoro (propyl butyl ether), and the like. These may be used alone or without impairing the effects of the present invention. Can be used in any combination.
  • the seal ring body of the present invention may contain a filler.
  • Fillers include polyimide, polyamideimide, polyetherimide and other imide-based fillers; engineering plastics such as polyarylate, polysulfone, polyethersulfone, polyphenylene sulfide, polyetherol ether ketone, and polyoxybenzoate.
  • Metal oxide fillers such as aluminum oxide, aluminum oxide, silicon oxide, yttrium oxide, metal carbides such as silicon carbide and aluminum carbide, metal nitride fillers such as silicon nitride and aluminum nitride, aluminum fluoride And inorganic fillers such as carbon fluoride.
  • aluminum oxide, yttrium oxide, silicon oxide, polyimide, and carbon fluoride are preferable from the viewpoint of the shielding effect of various plasmas.
  • the seal ring body 1 has a notch portion as will be described later.
  • the notch portion is provided, as a virtual cross-sectional shape, FIG.
  • various two-dimensional shapes such as a circle, an ellipse, a polygon, a rounded polygon, etc. can be adopted, not limited to the shapes illustrated in the figure, and not particularly limited as long as they conform to them.
  • a round or rounded polygon is preferred from the viewpoint of stress and strain on the rubber.
  • a rounded polygon is a figure in which each vertex of the polygon as shown in Fig. 1 is rounded by an elliptical arc.
  • the seal ring of the present invention has an inner diameter side surface or an outer diameter side surface of the seal ring body 1!
  • a non-adhering material layer 2 is formed over the entire circumference of the seal ring, and a notch portion toward the non-adhering material layer 2 is formed on the surface opposite to the surface on which the non-adhering material layer is formed. It is formed over the entire circumference of
  • the non-fixed material layer 2 on the surface of the seal ring body 1 is preferably formed so as to be a seal surface during sealing.
  • the range occupied by the non-adhering material layer is preferably 20% or more of the outer circumference in the cross section perpendicular to the circumferential direction of the seal ring body, more preferably 50% or more.
  • the upper limit is not particularly limited, but is preferably 90% or less, more preferably 70% or less. If the area occupied by the non-adhesive material layer exceeds 90%, it is not preferable because it tends to cause a seal failure.
  • the non-fixed material layer may be provided at two or more places so as to cover the vicinity of the upper and lower seal portions S.
  • the non-adhering material layer is preferably provided on the inner surface of the seal ring.
  • the non-adhesive material layer 2 is preferably formed over the entire length of the entire circumference of the seal ring body 1 on the inner diameter side surface or outer diameter side surface of the seal ring body 1.
  • the thickness of the non-sticking material layer is preferably 0.001 to 2 mm, more preferably 0.01 to L0mm. If the thickness is less than 0.001 mm, the non-fixed material layer will be broken or poorly formed, and if it exceeds 2 mm, the non-fixed material will tend to crack or leak.
  • Examples of the material used for the non-adhesive material layer include fluororesin, polyimide, and other metals, aluminum, titanium, copper, and other metals. From the viewpoint of properties, it is preferable to use fluorine resin.
  • R 1 is —CF or —OR 2
  • R 2 is a perfluoroalkyl having 1 to 5 carbon atoms.
  • x 1 is a hydrogen atom or a fluorine atom
  • X 2 is a hydrogen atom, a fluorine atom or a chlorine atom
  • n is an integer of 1 to 10
  • the fluorine-containing ethylenic polymer may have a structural unit derived from a monomer copolymerizable with the fluorine-containing ethylenic monomer.
  • Non-fluorine ethylenic monomers other than refin and perfluororefin can be mentioned.
  • the non-fluorine ethylenic monomer include ethylene, propylene, and alkyl butyl ethers.
  • the alkyl butyl ether is an alkyl butyl ether having an alkyl group having 1 to 5 carbon atoms.
  • the fluorine-containing ethylenic polymer is excellent in that the resulting thermoplastic polymer composition has excellent heat resistance, "chemical resistance” and oil resistance, and facilitates molding processability.
  • Ethylene-tetrafluoroethylene copolymer consisting of tetrafluoroethylene and ethylene (ETFE)
  • R 1 is —CF or OR 2
  • R 2 is a perfluoroalkyl having 3 to 5 carbon atoms, f 3 ff
  • Tetrafluoroethylene perfluoro (alkyl butyl ether) copolymer (PFA) or tetrafluoroethylene monohexafluoropropylene copolymer (FEP) composed of perfluoroethylenically unsaturated compounds represented by
  • R 1 is —CF or OR 2
  • R 2 is a perfluoroalkyl having 3 to 5 carbon atoms, f 3 ff
  • Ethylene-tetrafluoroethylene monohexafluoropropylene copolymer consisting of perfluoroethylenically unsaturated compounds represented by
  • PVDF Polyvinylidene fluoride
  • the seal ring of the present invention is provided with a notch on the surface opposite to the side surface on which the non-fixed material layer 2 provided in the seal ring body 1 is formed.
  • the size of the notch to be formed is not particularly limited, but the area force occupied by the notch in the cross section perpendicular to the circumferential direction of the seal ring main body is assumed to have no notch. It is preferably ⁇ 15%, more preferably 7 ⁇ 12%. If the area occupied by the notch is less than 5%, the sealing performance may be lowered, and if it exceeds 15%, the sealing reliability tends to be lowered.
  • the central angle of the cross section of the notch is preferably 2 to 45 degrees, more preferably 10 to 40 degrees.
  • the center angle is less than 2 degrees, the sealability tends to be insufficient because the gap between the boundary portion P and the seal portion S between the non-adhering material layer and the synthetic rubber portion is small when the seal ring is used.
  • the seal ring tends to be twisted due to the twisting of the seal ring, resulting in insufficient sealing performance.
  • the notch is preferably formed over the entire circumference of the seal ring body 1.
  • the seal ring of the present invention has a cutout portion over the entire length of the entire circumference of the seal ring main body 1. Therefore, when compressed in use, the seal ring The boundary portion P between the main body 1 and the non-adhering material layer 2 is shifted toward the opening where the notch is opened. Therefore, not only does the boundary portion P, which is uneven due to the occurrence of a groove, but does not become the seal portion S, good sealability can be obtained without affecting the sealability of the seal portion.
  • composition used in the seal ring of the present invention is prepared by mixing the above-described components using a normal elastomer processing machine such as an open roll, a Banbury mixer, a kneader, or the like. Can do. In addition, it can also be prepared by a method using a closed mixer.
  • Methods for obtaining a preform from the composition are known methods such as a method of heat-compressing with a conventional mold, a method of press-fitting into a heated mold, and a method of extruding with an extruder. Can be done.
  • the seal ring of the present invention is a method in which a pre-molded non-adhesive material layer is placed in a mold of the seal ring and filled with a rubber composition, and is pressed.
  • a method of forming a material layer and pressing it with a seal ring mold, or pressing calo It can be manufactured by a method of forming a non-adhering material layer on the surface of the seal ring after the process.
  • the notch on the surface of the seal ring should be formed by using a special saddle that has a convex part to form the notch. You can form by! /
  • seal ring of the present invention can be suitably used in the following fields.
  • the gate valve O-ring and seal material the quartz window O-ring and seal material, the chamber O-ring and seal material as the gate O-ring and seal material as the bell jar O-ring and seal O-ring of coupling as seal material, O-ring of pump as seal material, seal material, diaphragm, O-ring of gas control device for semiconductor, O-ring for seal developer as seal material, seal material It can be used as a glue material.
  • gaskets, shaft seals, valve stem seals, seal materials can be used for engines and peripheral devices, and sheath materials can be used for AT devices, o (square) rings, knocks, Seals and diaphragms can be used in fuel systems and peripheral equipment.
  • a sealing material between electrodes and separators is used as a seal for hydrogen 'oxygen' product water piping.
  • the electronic component field specifically, it is used as a heat radiating material raw material, an electromagnetic shielding material raw material, a hard disk drive gasket of a computer, and the like.
  • sealing material for clean equipment such as a gasket for a magnetic recording device (hard disk drive), a sealing material for a device storage such as a semiconductor manufacturing apparatus wafer.
  • the non-fixed material layer is formed over the entire circumference of the seal ring over the inner surface or the outer surface of the seal ring, and opposite to the surface on which the non-fixed material layer is formed. Since a notch that extends toward the inside or outside of the seal ring is formed over the entire circumference of the seal ring on the side surface, the boundary between the non-adhering material layer and the fluororubber becomes a seal surface during use. It is possible to provide a seal ring that can ensure sufficient sealing performance, has high chemical resistance and plasma resistance, and can prevent sticking to a member in contact with the ring. it can.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)

Abstract

L'invention concerne une bague d'étanchéité pouvant assurer une caractéristique d'étanchéité satisfaisante, présentant une résistance chimique et une résistance au plasma et excellente pour empêcher l'adhésion. La bague d'étanchéité est caractérisée en ce qu'une couche de matériau antiadhésif est formée sur l'ensemble du périmètre d'un corps de bague d'étanchéité, comprenant un élastomère sur la surface du côté du diamètre intérieur ou sur la surface du côté du diamètre extérieur du corps de bague d'étanchéité ; et en ce qu’une portion munie d'une encoche vers la couche de matériau antiadhésif est formée sur l'ensemble du périmètre du corps de bague d'étanchéité sur la surface du côté opposé à la surface sur laquelle est formée la couche de matériau antiadhésif.
PCT/JP2006/302704 2005-02-16 2006-02-16 Bague d'etancheite WO2006088076A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-039820 2005-02-16
JP2005039820 2005-02-16

Publications (1)

Publication Number Publication Date
WO2006088076A1 true WO2006088076A1 (fr) 2006-08-24

Family

ID=36916477

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/302704 WO2006088076A1 (fr) 2005-02-16 2006-02-16 Bague d'etancheite

Country Status (1)

Country Link
WO (1) WO2006088076A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427172U (fr) * 1977-07-26 1979-02-22
JPS54108158A (en) * 1978-02-14 1979-08-24 Babcock Hitachi Kk O-ring covered with graphite sheet
JPS54127966U (fr) * 1978-02-28 1979-09-06
JPH10318867A (ja) * 1997-05-21 1998-12-04 Fuji Electric Co Ltd 圧力測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427172U (fr) * 1977-07-26 1979-02-22
JPS54108158A (en) * 1978-02-14 1979-08-24 Babcock Hitachi Kk O-ring covered with graphite sheet
JPS54127966U (fr) * 1978-02-28 1979-09-06
JPH10318867A (ja) * 1997-05-21 1998-12-04 Fuji Electric Co Ltd 圧力測定装置

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