WO2006088076A1

WO2006088076A1 - Seal ring

Info

Publication number: WO2006088076A1
Application number: PCT/JP2006/302704
Authority: WO
Inventors: Yasuhiro Sakamoto; Tsuyoshi Noguchi
Original assignee: Daikin Industries, Ltd.
Priority date: 2005-02-16
Filing date: 2006-02-16
Publication date: 2006-08-24

Abstract

Provided is a seal ring which can ensure satisfactory sealing property, has a chemical resistance and plasma resistance and is excellent in the prevention of sticking. A seal ring characterized in that a non-sticking material layer is formed over the whole perimeter of a seal ring body comprising an elastomer on the inner diameter side surface or the outer diameter side surface of the seal ring body, and a notched portion toward the non-sticking material layer is formed over the whole perimeter of the seal ring body on the surface of the side opposite to the surface having the non-sticking material layer formed thereon.

Description

Specification

Sino-Reling

Technical field

[0001] The present invention relates to a seal ring having chemical resistance and plasma resistance and excellent anti-adhesion properties.

Background art

Conventionally, when a vacuum vessel or the like is configured by combining members, sealing is ensured through a seal ring in consideration of maintenance and the like. At this time, the seal ring is an elastic body and the cross-sectional shape is usually circular. For example, in a plasma etching apparatus, a reactive gas is introduced into a vacuum and turned into a plasma by applying a high frequency. However, when a synthetic rubber seal ring generally used for a vacuum shield is used, the portion exposed to the plasma gradually increases. Deteriorates and produces particles, and finally cracks, making it impossible to maintain a vacuum. A general synthetic rubber seal ring has problems such as high replacement frequency because it is not only inferior in corrosion resistance but also in heat resistance.

[0003] When a seal ring made of fluorine resin having corrosion resistance is used instead of a synthetic rubber seal ring, the elasticity is low and the outside air blocking property is lowered. For this reason, fluorine-containing perfluoro rubber has been developed and is expensive, and costs 100 to 1000 times higher than ordinary synthetic rubber seal rings. Therefore, as shown in FIG. 4, a seal ring composed of a portion of a corrosion-resistant material disposed on the surface and a portion of a synthetic rubber disposed on another portion has been proposed (for example, Japanese Patent Laid-Open No. Hei 11-11). See No. 2328

) o

[0004] However, a slight rubber protrusion (burr) occurs in the seal ring at the boundary (P) between the site of the corrosion resistant material and the site of the synthetic rubber. In the case of the seal part (S), there was a problem that sufficient sealability could not be secured. In addition, when the perfluoro rubber is in contact with the seal surface, there is also a problem that the member with which the seal ring comes in contact with the perfluoro mouth rubber.

Disclosure of the invention [0005] An object of the present invention is to provide a seal ring that can ensure sufficient sealing performance, has chemical resistance and plasma resistance, and is excellent in anti-adhesion properties.

That is, according to the present invention, the non-adhering material layer is formed over the entire circumference of the seal ring main body on the inner diameter side surface or outer diameter side surface of the seal ring main body formed by an elastomer. In addition, the present invention relates to a seal ring characterized in that a notch portion facing the non-fixed material layer is formed on the entire surface of the seal ring body on the surface opposite to the surface on which the non-fixed material layer is formed.

[0007] It is preferable that the non-fixed material layer is formed to be a sealing surface.

[0008] The percentage force occupied by the non-adhering material layer on the surface of the seal ring body is preferably 20% or more of the outer periphery in a cross section perpendicular to the circumferential direction of the seal ring body.

[0009] The area force occupied by the notch portion in the cross section perpendicular to the circumferential direction of the seal ring body is preferably 5 to 15% of the cross-sectional area in the state where the notch portion is not present.

[0010] A non-adhering material layer is formed over the entire circumference of the seal ring main body on the inner diameter side surface of the seal ring main body, and the inner surface of the seal ring main body is formed on the outer diameter side surface of the seal ring main body. It is preferable that the notch that is directed in the direction is formed over the entire circumference of the seal ring body.

Brief Description of Drawings

FIG. 1 (a) is a diagram showing a cross-sectional shape in the first embodiment of the seal ring of the present invention. (b) is a view showing a cross-sectional shape in a second embodiment of the seal ring of the present invention. (C) is a diagram showing a cross-sectional shape of a third embodiment of the seal ring of the present invention. (D) is a diagram showing a cross-sectional shape of a seal ring according to a fourth embodiment of the present invention. (e) is a diagram showing a cross-sectional shape of a seal ring according to a fifth embodiment of the present invention.

FIG. 2 is a perspective view of the seal ring of the present invention.

FIG. 3 (a) is a partial schematic cross-sectional view when the seal ring of the present invention is mounted. (b) is a schematic sectional view when the seal ring is used.

FIG. 4 (a) is a partial schematic cross-sectional view when a conventional seal ring is attached. (b) is a schematic sectional view when the seal ring is used.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail with reference to the drawings.

1 and 2 show an embodiment of the seal ring of the present invention.

[0014] The seal ring of the present invention includes a seal ring body 1 formed from an elastomer and a non-adhering material layer 2 formed on an inner diameter side surface or an outer diameter side surface thereof.

[0015] The seal ring body 1 is formed from an elastomer and is used for a seal ring.

V. As a material to be used, there is no particular limitation as long as it is used for a conventional force sealing material, but a fluorine-containing elastomer is preferably used also for the point of heat resistance and plasma resistance. Examples of the fluorine-containing elastomer include fluororubbers, thermoplastic fluororubbers, and rubber compositions containing these fluororubbers.

[0016] Examples of the fluororubber include non-perfluorofluororubber and perfluorofluororubber, and perfluorofluorocarbon rubber is particularly preferably used.

[0017] Non-perfluorofluororubbers include bi-lidene fluoride (VdF) fluororubber, tetrafluoroethylene (TFE) Z propylene fluororubber, tetrafluoroethylene (TFE) Z propylene Z Redene Fluoride (VdF) Fluoro Rubber, Ethylene Z Hexafluoroethylene (HFP) Fluoro Rubber, Ethylene Z Hexafluoroethylene (HFP) Z Bi-Ridene Fluoride (VdF) Fluoro Rubber, Ethylene Z Hexa Fluoropropylene (HF P) Z Tetrafluoroethylene (TFE) fluororubber, fluorosilicone fluororubber, or fluorophosphazene fluororubber can be used. Any combination can be used within a range without impairing the effects of the invention.

[0018] Examples of the perfluorofluororubber include a tetrafluoroethylene Z perfluoro (alkyl butyl ether) z monomer-containing fluorine-containing elastomer that provides a crosslinking site. Tetrafluoropropoxy O b ethylene / composition Pafuruoro (alkyl Bulle ether), 5 0-90 / 10-50 that force S preferably (Monore ^_0/0), more preferably 50 to 80/20 to 50 (mol ⁰ / ₀ ), more preferably 55-70 30-45 (mol%). The monomer providing the cross-linking site is preferably 0 to 5 mol%, preferably 0 to 2 mol%, based on the total amount of tetrafluoroethylene and perfluoro (alkyl butyl ether). More preferred. When the composition is out of the range, the properties as a rubber elastic body are lost, and the properties tend to be close to those of greaves. [0019] In this case, examples of perfluoro (alkyl butyl ether) include perfluoro (methyl butyl ether), perfluoro (propyl butyl ether), and the like. These may be used alone or without impairing the effects of the present invention. Can be used in any combination.

[0020] The seal ring body of the present invention may contain a filler. Fillers include polyimide, polyamideimide, polyetherimide and other imide-based fillers; engineering plastics such as polyarylate, polysulfone, polyethersulfone, polyphenylene sulfide, polyetherol ether ketone, and polyoxybenzoate. Metal oxide fillers such as aluminum oxide, aluminum oxide, silicon oxide, yttrium oxide, metal carbides such as silicon carbide and aluminum carbide, metal nitride fillers such as silicon nitride and aluminum nitride, aluminum fluoride And inorganic fillers such as carbon fluoride. Of these, aluminum oxide, yttrium oxide, silicon oxide, polyimide, and carbon fluoride are preferable from the viewpoint of the shielding effect of various plasmas.

[0021] In particular, in fields where high purity and non-contaminating properties are not required, normal additives contained in the elastomer, such as fillers, processing aids, plasticizers, colorants, etc., are sealed as necessary. May be included in body 1! ,.

[0022] Further, the seal ring body 1 has a notch portion as will be described later. However, assuming that the notch portion is provided, as a virtual cross-sectional shape, FIG. As shown in the figure, various two-dimensional shapes such as a circle, an ellipse, a polygon, a rounded polygon, etc. can be adopted, not limited to the shapes illustrated in the figure, and not particularly limited as long as they conform to them. In particular, a round or rounded polygon is preferred from the viewpoint of stress and strain on the rubber. A rounded polygon is a figure in which each vertex of the polygon as shown in Fig. 1 is rounded by an elliptical arc.

[0023] As shown in FIG. 2, the seal ring of the present invention has an inner diameter side surface or an outer diameter side surface of the seal ring body 1! A non-adhering material layer 2 is formed over the entire circumference of the seal ring, and a notch portion toward the non-adhering material layer 2 is formed on the surface opposite to the surface on which the non-adhering material layer is formed. It is formed over the entire circumference of Here, the non-fixed material layer 2 on the surface of the seal ring body 1 is preferably formed so as to be a seal surface during sealing. Specifically, the range occupied by the non-adhering material layer is preferably 20% or more of the outer circumference in the cross section perpendicular to the circumferential direction of the seal ring body, more preferably 50% or more. When the range occupied by the non-adhering material layer is less than 20%, there is a tendency for a seal failure. The upper limit is not particularly limited, but is preferably 90% or less, more preferably 70% or less. If the area occupied by the non-adhesive material layer exceeds 90%, it is not preferable because it tends to cause a seal failure. As shown in FIG. 1 (d), the non-fixed material layer may be provided at two or more places so as to cover the vicinity of the upper and lower seal portions S. In view of heat resistance, plasma resistance and sealing properties, the non-adhering material layer is preferably provided on the inner surface of the seal ring. The non-adhesive material layer 2 is preferably formed over the entire length of the entire circumference of the seal ring body 1 on the inner diameter side surface or outer diameter side surface of the seal ring body 1.

[0025] The thickness of the non-sticking material layer is preferably 0.001 to 2 mm, more preferably 0.01 to L0mm. If the thickness is less than 0.001 mm, the non-fixed material layer will be broken or poorly formed, and if it exceeds 2 mm, the non-fixed material will tend to crack or leak.

[0026] Examples of the material used for the non-adhesive material layer include fluororesin, polyimide, and other metals, aluminum, titanium, copper, and other metals. From the viewpoint of properties, it is preferable to use fluorine resin.

[0027] The fluorinated resin is not particularly limited, and the fluorinated ethylenic polymer may be at least one fluorine-containing polymer as long as it contains at least one fluorinated ethylenic polymer. What has the structural unit derived from an ethylenic monomer should just be. Examples of the fluorine-containing ethylenic monomer include tetrafluoroethylene, general formula (1): CF = CF-R ¹ (1)

2 f

(In the formula, R ¹ is —CF or —OR ² , and R ² is a perfluoroalkyl having 1 to 5 carbon atoms.

f 3 f f

Perfluoroethylenically unsaturated compounds such as perfluoroethylenically unsaturated compounds represented by the following formulas), black trifluoroethylene, trifluoroethylene, hexafluoroisobutene, bi-lidene fluoride, fluoride Bulle, general formula (2): CH = CX ¹ (CF) X ² (2)

2 2 n

(Wherein x ¹ is a hydrogen atom or a fluorine atom, X ² is a hydrogen atom, a fluorine atom or a chlorine atom, and n is an integer of 1 to 10), etc. It is possible to raise.

[0028] The fluorine-containing ethylenic polymer may have a structural unit derived from a monomer copolymerizable with the fluorine-containing ethylenic monomer. Non-fluorine ethylenic monomers other than refin and perfluororefin can be mentioned. Examples of the non-fluorine ethylenic monomer include ethylene, propylene, and alkyl butyl ethers. Here, the alkyl butyl ether is an alkyl butyl ether having an alkyl group having 1 to 5 carbon atoms.

[0029] Among these, the fluorine-containing ethylenic polymer is excellent in that the resulting thermoplastic polymer composition has excellent heat resistance, "chemical resistance" and oil resistance, and facilitates molding processability.

(1) Ethylene-tetrafluoroethylene copolymer consisting of tetrafluoroethylene and ethylene (ETFE)

(2) Tetrafluoroethylene and general formula (I):

CF = CF-R ¹ (I)

2 f

(Wherein R ¹ is —CF or OR ² , and R ² is a perfluoroalkyl having 3 to 5 carbon atoms, f 3 ff

Tetrafluoroethylene perfluoro (alkyl butyl ether) copolymer (PFA) or tetrafluoroethylene monohexafluoropropylene copolymer (FEP) composed of perfluoroethylenically unsaturated compounds represented by

(3) Tetrafluoroethylene, ethylene and general formula (I):

CF = CF-R ¹ (I)

2 f

Ethylene-tetrafluoroethylene monohexafluoropropylene copolymer (Et-TFE-HFP copolymer) consisting of perfluoroethylenically unsaturated compounds represented by

(4) Polyvinylidene fluoride (PVDF)

of! It ’s good that it ’s off! /. [0030] The seal ring of the present invention is provided with a notch on the surface opposite to the side surface on which the non-fixed material layer 2 provided in the seal ring body 1 is formed. The size of the notch to be formed is not particularly limited, but the area force occupied by the notch in the cross section perpendicular to the circumferential direction of the seal ring main body is assumed to have no notch. It is preferably ˜15%, more preferably 7˜12%. If the area occupied by the notch is less than 5%, the sealing performance may be lowered, and if it exceeds 15%, the sealing reliability tends to be lowered. In addition, the central angle of the cross section of the notch is preferably 2 to 45 degrees, more preferably 10 to 40 degrees. When the center angle is less than 2 degrees, the sealability tends to be insufficient because the gap between the boundary portion P and the seal portion S between the non-adhering material layer and the synthetic rubber portion is small when the seal ring is used. On the other hand, if it exceeds 45 degrees, the seal ring tends to be twisted due to the twisting of the seal ring, resulting in insufficient sealing performance. In addition, the notch is preferably formed over the entire circumference of the seal ring body 1.

[0031] As shown in FIGS. 2 and 3, the seal ring of the present invention has a cutout portion over the entire length of the entire circumference of the seal ring main body 1. Therefore, when compressed in use, the seal ring The boundary portion P between the main body 1 and the non-adhering material layer 2 is shifted toward the opening where the notch is opened. Therefore, not only does the boundary portion P, which is uneven due to the occurrence of a groove, but does not become the seal portion S, good sealability can be obtained without affecting the sealability of the seal portion.

[0032] The composition used in the seal ring of the present invention is prepared by mixing the above-described components using a normal elastomer processing machine such as an open roll, a Banbury mixer, a kneader, or the like. Can do. In addition, it can also be prepared by a method using a closed mixer.

[0033] Methods for obtaining a preform from the composition are known methods such as a method of heat-compressing with a conventional mold, a method of press-fitting into a heated mold, and a method of extruding with an extruder. Can be done.

[0034] The seal ring of the present invention is a method in which a pre-molded non-adhesive material layer is placed in a mold of the seal ring and filled with a rubber composition, and is pressed. A method of forming a material layer and pressing it with a seal ring mold, or pressing calo It can be manufactured by a method of forming a non-adhering material layer on the surface of the seal ring after the process. The notch on the surface of the seal ring should be formed by using a special saddle that has a convex part to form the notch. You can form by! /

[0035] The seal ring of the present invention can be suitably used in the following fields.

[0036] In semiconductor-related fields such as semiconductor manufacturing equipment, liquid crystal panel manufacturing equipment, plasma panel manufacturing equipment, plasma addressed liquid crystal panels, field emission display panels, and solar cell substrates, o (square) rings, packing, sealing materials, gaskets These can be used for CVD equipment, dry etching equipment, wet etching equipment, oxidation diffusion equipment, sputtering equipment, ashing equipment, cleaning equipment, ion implantation equipment, and exhaust equipment. Specifically, as the gate valve O-ring and seal material, the quartz window O-ring and seal material, the chamber O-ring and seal material as the gate O-ring and seal material as the bell jar O-ring and seal O-ring of coupling as seal material, O-ring of pump as seal material, seal material, diaphragm, O-ring of gas control device for semiconductor, O-ring for seal developer as seal material, seal material It can be used as a glue material.

[0037] In the automotive field, gaskets, shaft seals, valve stem seals, seal materials can be used for engines and peripheral devices, and sheath materials can be used for AT devices, o (square) rings, knocks, Seals and diaphragms can be used in fuel systems and peripheral equipment. Specifically, engine head gaskets, metal gaskets, oil pan gaskets, crankshaft seals, camshaft seals, nozzle stem seals, hold packings, oxygen sensor seals, injector O-rings, injector packings, fuel pump O-rings , Diaphragm, crankshaft seal, gearbox seal, power piston seal, cylinder liner seal, nonreb stem seal, automatic transmission front pump seal, rear axle bee-on seal, universal joint gasket, speedometer Pion seals, foot brake piston cups, torque transmission O-rings, oil seals, exhaust gas reburner seals, bearing seals, carburetor sensor dies It can be used as Fulham like. [0038] In the aircraft field, the rocket field, and the ship field, there are diaphragms, O (square) rings, valves, packings, sealing materials, and the like, which can be used for fuel systems. Specifically, in the aircraft field, it is used for jet engine valve steal seals, gaskets and O-rings, rotating shaft seals, hydraulic equipment gaskets, firewall seals, etc., and in the ship field, screw propeller shaft stern seals. , Used for diesel engine intake / exhaust valve stem seals, butterfly valve seals, shaft seals for notch valves, etc.

[0039] In the field of chemical products such as plants, valves, knocks, diaphragms, O (square) rings, seal materials, etc. are listed. Can do. Specifically, chemical pumps, rheometers, pipe seals, heat exchange seals, glass cooler packing for sulfuric acid production equipment, pesticide sprayers, pesticide transfer pump seals, gas pipe seals , Seals for plating solutions, packing for high-temperature vacuum dryers, roller seals for papermaking belts, fuel cell seals, wind tunnel joint seals, gas chromatography, packing for pH meter tube connections, analytical instruments, physics It can be used as equipment seals, diaphragms, valve parts, etc.

[0040] In the field of photography such as developing machines, the field of printing such as printing machines, and the field of painting such as coating equipment

It can be used as a seal for dry copying machines, valve parts, and the like.

[0041] In the field of food plant equipment, there are nobles, packings, diaphragms, O (square) rings, sealing materials, etc., which can be used in food production processes. Specifically, plate-type heat exchange

Can be used as ^^ seals, solenoid valve seals for vending machines, etc.

[0042] In the field of nuclear power plant equipment, packing, O-rings, sealing materials, diaphragms, valves and the like can be mentioned.

[0043] In the general industrial field, there are the following: Kicking, O-ring, sealing material, diaphragm, valve and the like. Specifically, hydraulic seals, lubrication machinery seals, bearing seals, dry cleaning equipment windows, other seals, uranium hexafluoride concentrator seals, cyclotron seals (vacuum) valves, automatic packaging machine seals Used in diaphragms (pollution measuring devices) for analysis of sulfur dioxide and chlorine gas in the air.

[0044] In the electrical field, specifically, Shinkansen insulation oil caps and liquid ring transformer benches Used as daseal.

[0045] In the fuel cell field, specifically, a sealing material between electrodes and separators is used as a seal for hydrogen 'oxygen' product water piping.

[0046] In the electronic component field, specifically, it is used as a heat radiating material raw material, an electromagnetic shielding material raw material, a hard disk drive gasket of a computer, and the like.

[0047] There are no particular limitations on what can be used for on-site molding, such as an engine oil pan gasket, a magnetic recording device gasket, and a clean room filter unit sealant. It is done.

[0048] Further, it is particularly preferably used as a sealing material for clean equipment such as a gasket for a magnetic recording device (hard disk drive), a sealing material for a device storage such as a semiconductor manufacturing apparatus wafer.

[0049] Furthermore, taking advantage of characteristics such as chemical resistance, low gas permeability, and flame retardancy, it is particularly suitable as a sealing material for fuel cells such as packing used between fuel cell electrodes and surrounding piping. Used for.

Industrial applicability

[0050] In the seal ring of the present invention, the non-fixed material layer is formed over the entire circumference of the seal ring over the inner surface or the outer surface of the seal ring, and opposite to the surface on which the non-fixed material layer is formed. Since a notch that extends toward the inside or outside of the seal ring is formed over the entire circumference of the seal ring on the side surface, the boundary between the non-adhering material layer and the fluororubber becomes a seal surface during use. It is possible to provide a seal ring that can ensure sufficient sealing performance, has high chemical resistance and plasma resistance, and can prevent sticking to a member in contact with the ring. it can.

Claims

The scope of the claims

[1] A non-adhering material layer is formed over the entire circumference of the seal ring main body on the inner diameter side surface or outer diameter side surface of the seal ring main body formed by an elastomer. A seal ring, wherein a non-fixed material layer has a cut-out notch on the entire surface of the seal ring body on a surface opposite to the surface on which the layer is formed.

[2] The seal ring according to claim 1, wherein the non-fixed material layer is formed to be a sealing surface.

[3] The seal according to claim 1 or 2, wherein the non-adhering material layer occupies at least 20% of the outer circumference in a cross section perpendicular to the circumferential direction of the seal ring body. ring.

[4] The area force occupied by the notch in the cross section perpendicular to the circumferential direction of the seal ring body is 5 to 15% of the cross-sectional area in the absence of the notch. The seal ring according to any one of the items.

[5] A non-adhering material layer is formed over the entire length of the entire circumference of the seal ring main body on the inner diameter side surface of the seal ring main body, and the inner side direction of the seal ring main body is formed on the outer diameter side surface of the seal ring main body. The seal ring according to any one of claims 1 to 4, characterized in that a notch portion facing the inner surface is formed over the entire length of the entire circumference of the seal ring main body.