Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
  • F27B17/00—Furnaces of a kind not covered by any preceding group
  • F27B17/0016—Chamber type furnaces
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B22—CASTING; POWDER METALLURGY
  • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
  • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
  • B22D11/001—Continuous casting of metals, i.e. casting in indefinite lengths of specific alloys
• • C—CHEMISTRY; METALLURGY
  • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
  • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
  • C22B34/00—Obtaining refractory metals
  • C22B34/10—Obtaining titanium, zirconium or hafnium
  • C22B34/12—Obtaining titanium or titanium compounds from ores or scrap by metallurgical processing; preparation of titanium compounds from other titanium compounds see C01G23/00 - C01G23/08
  • C22B34/1295—Refining, melting, remelting, working up of titanium
• • C—CHEMISTRY; METALLURGY
  • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
  • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
  • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
  • C22B9/16—Remelting metals
  • C22B9/22—Remelting metals with heating by wave energy or particle radiation
  • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
  • F27D1/00—Casings; Linings; Walls; Roofs
  • F27D1/02—Crowns; Roofs
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
  • F27D99/00—Subject matter not provided for in other groups of this subclass
  • F27D99/0001—Heating elements or systems
  • F27D99/0006—Electric heating elements or system
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
  • F27D99/00—Subject matter not provided for in other groups of this subclass
  • F27D99/0001—Heating elements or systems
  • F27D99/0006—Electric heating elements or system
  • F27D2099/003—Bombardment heating, e.g. with ions or electrons

Definitions

• Metal electron beam melting apparatus and method for producing refractory metal ingot using this apparatus Metal electron beam melting apparatus and method for producing refractory metal ingot using this apparatus
• the present invention relates to an apparatus and method for melting a high melting point metal ingot such as titanium, and more particularly to suppressing contamination of the ingot of a contamination source such as LDI (Low Density Inclusions) into a melting furnace.
• the present invention relates to an electron beam melting technique that can effectively increase the operation rate of the laser beam.
• Titanium metal has been widely used for aircraft materials and parts in the past, but in recent years, its application development has progressed and is widely used for building materials, roads, sports equipment, and the like.
• impurities etc. increase in proportion to the number of times of dissolution.
• impurities or the like adhere to the furnace wall, the impurities themselves cannot withstand their own weight and may fall down the furnace. If these impurities fall into the bowl or molten metal in the hearth, the accumulated impurities are newly mixed into the bowl and the quality of the ingot is deteriorated.
• a technique for improving the ceiling wall of the electron beam melting furnace is disclosed.
• a condensate holding device for low temperature hearth milling in which a portion having a concave water-cooled surface is placed on the hearth to collect agglomerates of the evaporating components of the alloy being processed in the hearth (e.g. , See Patent Document 2).
• a large number of recesses called bee structures are laid on the ceiling wall of the electron beam melting furnace, so that even if solid impurities are deposited in these recesses, the impurities are unlikely to fall down. There is.
• the Nb—Al alloy is melted by a heating means under vacuum, and the heart placed in the melting furnace is placed.
• a process of purifying Nb by evaporating Al while accumulating on the surface a process of transferring the purified Nb to a water-cooled crucible and forging an Nb ingot, and a rotating body with a cooling means provided on the water-cooled crucible.
• a fall prevention method is disclosed (see, for example, Patent Document 3).
• a mesh-like disk is rotated and held in the upper space of the molten pool held in the vertical mold to condense impurities and titanium vapor that volatilize the molten pool force, and the ceiling of these electron beam melting devices. Can prevent adhesion to the wall.
• Patent Document 1 Japanese Patent Application Laid-Open No. 2004-183923
• Patent Document 2 Japanese Patent Laid-Open No. 11-132664
• Patent Document 3 Japanese Patent Laid-Open No. 11 061288
• Patent Document 4 US Patent No. 5222547
• Patent Document 1 can achieve some time reduction, it does not change to the situation where a certain amount of time is required to clean the inside of the melting furnace. The process is in a standby state, and the problem of lowering the operating rate has not been fundamentally solved.
• all of the techniques described in Patent Documents 2 to 4 are titanium vapors that volatilize from a molten titanium layer held in a hearth or a bowl, or let impurities be collected before reaching the ceiling wall or ceiling wall. V, the difference is that solids are precipitated, but there is no guarantee that solids will not fall into the molten metal pool depending on the degree of precipitation.
• the present invention has been made in view of the above-described demands, and suppresses generation of new impurities during melting when melting titanium sponge or titanium scrap to melt a titanium ingot.
• the inventor has intensively studied an electron beam melting apparatus capable of suppressing the molten pool force in the hearth mold from being mixed again into the molten pool. Piled up.
• at least one of the inner surfaces of the furnace wall and the ceiling wall is lined with titanium or stainless steel, and the fin-shaped member is provided on the ceiling wall, so that the condensed impurities are retained on the upper surface of the fin-shaped member, It was found that impurities can be prevented from falling downward.
• the inventor preferably configures the fin-shaped member from titanium or stainless steel.
• the molten pool force inside the hearth bowl is evaporated by the evaporated titanium vapor. It was also found that the corrosion of the furnace wall can be effectively suppressed.
• the present invention has been made in view of such knowledge.
• the electron beam melting apparatus of the present invention includes a raw material supply unit that supplies raw materials, a raw material supply unit, and a furnace wall and a ceiling wall, and at least a hearth, a water-cooled type, and an electron gun.
• a raw material supply unit that supplies raw materials
• a raw material supply unit that supplies raw materials
• a furnace wall and a ceiling wall and at least a hearth, a water-cooled type, and an electron gun.
• an electron beam melting apparatus for melting a refractory metal comprising a raw material melting part and an exhaust part connected to the raw material melting part
• at least one of a furnace wall and a ceiling wall is lined with titanium or stainless steel
• the ceiling is provided with multiple fin-shaped members made of titanium or stainless steel.
• the inventor finds that a shielding member is located below the ceiling wall that should block a path through which the evaporated pool of titanium or impurities reaches the ceiling wall.
• the knowledge that the amount of titanium vapor generated by the molten pool force condensing on the ceiling wall can be effectively suppressed by arranging the shielding member on the furnace wall.
• the inventor has also found that the above-described suppression effect is sufficiently exerted when the shielding member is extended from the furnace wall toward the center of the apparatus and upward in the side view of the electron beam melting apparatus. I got it.
• the following invention has been made based on these findings.
• a shielding member is provided on the furnace wall, extending from the furnace wall in the lateral direction of the apparatus toward the center and upward of the apparatus.
• the shielding member is made of a metal or ceramic having a melting point higher than that of the refractory metal.
• a metal, molybdenum or tantalum-strength ceramic it is preferable to use force Lucia or yttria, or a composite thereof.
• the inventor has invented the molten pool force in the cooling section (hereinafter sometimes referred to as "condensation pipe") in which the titanium vapor and impurities once evaporated are separately provided downstream of the exhaust section in the apparatus.
• condensation pipe the cooling section
• the titanium vapor and impurities once evaporated are separately provided downstream of the exhaust section in the apparatus.
• the electron beam melting apparatus it is more preferable to dispose a refractory metal vapor condensing tube on the downstream side of the exhaust part.
• the condenser tube can be provided integrally with the electron beam melting apparatus or can be provided separately.
• a raw material supply section that includes a raw material supply section that supplies raw materials, a raw material supply section, and is defined by a furnace wall and a ceiling wall, and includes at least a hearth, a water-cooled type, and an electron gun.
• An electron beam melting apparatus for melting a refractory metal which is composed of a section and an exhaust section that also has a raw material melting partial force, is characterized in that a lining that can be attached and detached is provided on the inner surface of the electron beam melting apparatus.
• the lining also includes a ceiling lining, a side wall lining, and a bottom lining force, and it is preferable that each lining can be attached and detached independently.
• the present invention provides a method for producing a refractory metal ingot characterized by melting using an electron beam melting apparatus having the above-described configuration.
• the present invention by optimizing at least the surface material of the furnace wall and the ceiling wall in the apparatus, it is possible to suppress the generation of new impurities when melting refractory metals such as titanium.
• the installation of the shielding member or the arrangement of the condensing tube can effectively suppress the impurities that are evaporated from the molten pool and condensed on the ceiling wall from entering the molten pool.
• the quality of the ingot can be maintained at an extremely high level.
• the lining can be attached and detached, after the metal is completely melted in the melting furnace, cooled and pulled out as an ingot, the lining on which the molten metal is deposited is quickly removed and newly added.
• the prepared lining can be installed to restart the melting furnace.
• the melting furnace of the present invention can greatly shorten the maintenance work in the furnace, and as a result, has an effect of dramatically improving the operating rate of the melting furnace. .
• the work frequency for cleaning the inner surface of the melting furnace can be reduced, shortening of the furnace life due to corrosion can be effectively avoided.
• FIG. 1 is a side view showing a first embodiment 10a of a preferred electron beam melting apparatus of the present invention.
• the electron beam melting apparatus 10a includes an electron beam 13a for irradiating a hearth 11 for melting titanium, a water-cooled type 12 for flowing molten titanium from the hearth 11, and a molten pool of the hearth 11 and the water-cooled type 12 A gun 13 and an exhaust nozzle 14 communicating with a decompression device (not shown) are provided.
• the raw material supply section is from Hearth 11.
• the raw material melting part means the area where the left end force of the hearth 11 reaches the root of the exhaust nozzle 14, and the exhaust part means the area where the root force of the exhaust nozzle 14 is also on the right side.
• a furnace wall 15 and a dome-shaped ceiling wall 16 are connected, and a plurality of fin-shaped members 17 are attached to the ceiling wall 16.
• the furnace wall 15, the ceiling wall 16 and the fin-shaped member 17 are preferably made of titanium or stainless steel, but other materials lined with stainless steel or titanium can also be used.
• the reason why the ceiling wall 16 is formed in a dome shape is to facilitate attachment of the plurality of fin-shaped members 17 to the ceiling wall 16.
• the molten titanium pool force in the hearth 11 or the water-cooled mold 12 When titanium or impurities move upward as vapor in the apparatus, the evaporated titanium or impurities Part of the gas is discharged to the outside through the exhaust nozzle 14 Most of the evaporated titanium and impurities reach the furnace wall 15 and the ceiling wall 16 and condense.
• the fin-shaped member 17 serves as a tray for receiving the condensed titanium impurities.
• the fin-shaped member 17 can be more effectively suppressed from dropping titanium and impurities loaded on the fin-shaped member 17 by forming a bent shape on the free end side thereof.
• FIG. 2 is a side view showing a second embodiment 10b of the preferred electron beam melting apparatus of the present invention.
• the basic configuration of the device shown in FIG. 2 is the same as the basic configuration of the device shown in FIG. Therefore, also in this example, the raw material supply part means the region on the left side of the hearth 11, and the raw material melting part means the region where the left end force of the hearth 11 reaches the root of the exhaust nozzle 14, and the exhaust part Means that the root force of the exhaust nozzle 14 is also on the right side.
• the shielding member 20 is additionally disposed on the furnace wall 15 so that the shielding member 20 is positioned below the ceiling wall 16.
• the shielding member 20 is disposed so as to block the route through which the evaporated titanium and impurities of the hearth 11 and the water cooling type 12 have reached the ceiling wall 16.
• the blocking member 20 preferably has an inverted cone shape with an opening through which the electron beam 13a passes at the center, but other shapes can also be selected as appropriate.
• the shielding member 20 has a reverse cone shape, that is, a structure extending from the furnace wall 15 toward the center of the device and upward in a side view of the device. Even when dropped from the member 17, impurities or the like can be deposited on the shielding member 20 to prevent the impurities or the like from falling below the shielding member 20.
• the shielding member 20 is preferably made of a material having a melting point higher than that of titanium, such as Mo or Ta.
• the temperature of the shielding member 20 is more preferably about 1000 to 1600 ° C, preferably about 1300 to 1600 ° C when the titanium ingot is melted. However, if the melting point of titanium is reached, an alloy with evaporated titanium may be formed and the strength of the ingot may be reduced. Therefore, it is preferable to keep the melting point of titanium. Yes.
• the temperature of the shielding member 20 can be maintained in the above temperature range by irradiation with the electron beam 13a or by mounting a heater. By keeping heating in such a temperature range, precipitation of titanium vapor evaporated from the hearth 11 or the water-cooled mold 12 can be suppressed on the lower surface of the shielding member 20. Through the above-described actions, it is possible to suppress the solid impurities that can cause LDI and HDI from falling into the hearth 11 and the water-cooled water mold 12, thereby effectively suppressing the deterioration of the quality of the titanium ingot. Can do.
• the shielding member 20 is a collecting member when titanium or impurities that have deposited and solidified on the lower surface of the fin-shaped member 17 and cannot withstand its own weight fall on the upper surface thereof. Can function.
• the shielding member 20 may be composed of force Lucia or yttria, or a composite ceramic of these. Even in this case, the temperature of the shielding member 20 is still preferably 1000 to 1600 ° C, and more preferably 1300 to 1600 ° C. Further, when the shielding member 20 is made of the above ceramic, it is preferable that a heater is attached and the temperature is kept in the above temperature range. By holding the shielding member 20 in such a high temperature region, condensation and precipitation of titanium vapor can be suppressed, and as a result, contamination of impurities into the ingot can be effectively suppressed.
• FIG. 3 is a side view showing a third embodiment 10c of the preferred electron beam melting apparatus of the present invention.
• titanium vapor and impurities that have evaporated the molten titanium pool force in the hearth 11 and the water-cooled mold 12 are kept at a high temperature in the condenser pipe 21 provided separately from the melting device 10 on the downstream side of the exhaust section. It is configured to cool and separate and recover titanium vapor and impurities in the condenser 21.
• the electron gun 13 irradiates an electron beam 13a to a water-cooled type 12 molten titanium pool
• the electron gun 22 emits an electron beam 22a to a hearth 11 Irradiate the molten titanium pool.
• the raw material supply section means the area on the left side of the hearth 11
• the raw material melting section means the hearth 11
• the left end force also means a region extending from the taper-shaped tapered portion made up of the furnace wall 15 and the ceiling wall 16 to the left side portion, and the exhaust portion means the tapered portion region.
• a heating plate 23 having corrosion resistance heated to a high temperature is disposed not only on the ceiling wall 16 but also on the inner surface of the side wall 15.
• the heating plate 23 is preferably maintained in a high temperature region where titanium vapor having a molten pool force evaporated is difficult to condense on the heating plate 23.
• it is important to keep the temperature so as not to reach the melting point of titanium which is preferably about 1000 to 1600 ° C.
• the heating plate 23 is preferably made of molybdenum or tantalum that can withstand the high temperature range.
• FIG. 4 is a side view showing a fourth embodiment 10d of the preferred electron beam melting apparatus of the present invention.
• the electron beam melting apparatus 10d shown in FIG. 4 is a schematic view seen from a right angle direction of the viewpoints of FIGS.
• a ceiling lining 31 is detachably attached to the inner wall of the ceiling wall 16.
• a side wall lining 32 is detachably provided on the inner surface of the furnace wall 15, and a bottom lining 34 is detachably provided on the inner surface of the bottom wall.
• the structure of the fin-shaped member 17 shown in FIG. 1 can also be applied to the ceiling lining 31.
• the molten titanium held in the hearth 11 and a part of the titanium vapor generated from the molten titanium pool in the water cooling mold 12 are the ceiling lining 31, the side wall lining 32, and the bottom. It adheres to the lining 34 and precipitates.
• the melting device can be disassembled, each lining can be replaced with a new lining, and the melting device can be assembled and used immediately for the next titanium ingot.
• a maintenance process such as washing and removing the deposits adhering to the inner wall, and the operating rate of the melting apparatus is low.
• the operating rate of the melting apparatus can be dramatically improved.
• the removed lining can be reused by cleaning and removing the deposits in a separate process.
• the precipitate produced by the adhesion of the vapor is mixed into the mold.
• the linings for the deposits on the side wall lining and bottom lining, the deposits are unlikely to fall into the saddle shape, so it is difficult to directly affect the ingot.
• the ceiling lining placed in the area if the deposit is left unattended, the precipitation proceeds and falls into the molten metal due to the weight of the deposit. For this reason, it is preferable that the ceiling lining has a structure in which molten metal deposits do not adhere and fall easily.
• the fin-shaped member is preferably configured to extend in the horizontal direction of the ceiling wall force as shown in FIG. More preferably, the tip of the fin-shaped member is bent upward. By adopting such a structure, it is possible to effectively suppress the falling of the deposit.
• a structure in which metal network structures are arranged in a plane is preferable. If the ceiling lining has a mesh structure, the precipitates are caught in the recesses, and the precipitates are less likely to fall compared to the case of using a plate-like ceiling lining.
• the material of the mesh can be made of stainless steel. If contamination of the product becomes a problem, it may be made of titanium. By adopting such a configuration and arrangement, it is possible to effectively suppress the fall of precipitates that adhere and grow on the ceiling lining.
• the ceiling lining has a structure that can be relatively easily attached to and detached from the ceiling.
• a bolted structure or a mounting structure using a hook For example, a ceiling lining can be attached and detached relatively easily using a crane. As a result, when removing and installing the ceiling lining The fall of the deposit can be effectively suppressed.
• the side wall lining is used by being attached to the inner wall portion of the main body, and it is preferable that the side wall lining also has a structure that can be easily attached and detached similarly to the ceiling lining. Specifically, it is preferable to have a structure that can be engaged with bolts or hooks.
• the material of the side wall lining is preferably made of stainless steel having excellent corrosion resistance, preferably made of metal.
• a titanium material when it is extremely difficult to contaminate impurities, it is preferable to use a titanium material.
• a portion where the radiant heat from the hearth or the saddle type is small and the temperature does not rise can be made of a heat resistant synthetic resin. Synthetic resins are resistant to corrosion and are suitable for washing and drying.
• an adhesion receiving portion 33 as shown in FIG. 4 is engaged and disposed at the lower end of the side wall lining.
• an adhesion receiving portion 33 By arranging such an adhesion receiving portion 33, it is possible to effectively recover the deposit deposited on the surface of the side wall lining when it falls. As a result, it is possible to effectively suppress the fall of deposits on the bottom of the melting furnace. Furthermore, the collected deposits can be collected and purified and reused as a titanium raw material.
• the side wall lining can be configured as a metal plate-like structure, but it may have a mesh structure as with the ceiling lining. By making the side wall lining have a mesh structure, it is possible to effectively suppress the fall of deposits.
• the bottom lining is attached to the bottom of the electron beam melting apparatus 10d, and it is preferable to have a structure that covers the entire bottom of the melting furnace as much as possible. By adopting such a structure, it is possible to effectively collect the deposits that fall when the ceiling lining or the side wall lining is detached.
• the bottom lining may be made of metal.
• it may be made of heat-resistant synthetic resin.
• a lining having a shape along the bottom shape of the electron beam melting apparatus 10d can be formed.
• the synthetic resin can be composed of, for example, vinyl chloride or styrene resin, It can also be configured. Since FRP is lightweight and strong, it is suitable as a constituent material for the bottom lining of the present invention.
• the bottom of the melting apparatus is provided with a saddle shape, a fixing member thereof, and the like, and is often provided with a bottom lining that can cope with such a bottom, which is often uneven and has a slightly complicated shape.
• the bottom part may be molded and the synthetic resin may be poured into this mold.
• deposits may also be seen on the inner wall of the melting device due to titanium vapor leaking the lining gap force, after removing all the lining from the melting device, clean the melting device body as necessary. It may be preferable to do so. If it is judged that the inside is contaminated with deposits, the linings with deposits can be removed, and then replacement linings that have been prepared in advance can be immediately attached to the inner surface of the melting furnace body.
• the ceiling is engaged with the main body, and the inside of the furnace is sucked to a reduced pressure.
• the above-described melting operation can be started by irradiating the electron gun force electron beam to the water-cooled nose and the stub held in the mold.
• the electron beam melting apparatus 10d is disassembled, the lining is removed, and a newly prepared lining is mounted, and the next melting is performed. You can move on to the process. Conventionally, after disassembling the melting device, the deposits deposited on the ceiling and inner wall of the melting device were manually removed, but this operation requires about 5-7 days and the operation of the device Was the main cause of the decline
• the maintenance time after the ingot melting is completed can be greatly reduced, and as a result, the melting time is reduced. This has the effect of dramatically increasing the productivity of the furnace.
• the frequency of cleaning the inner surface of the melting furnace can be reduced, shortening of the melting furnace life due to corrosion can also be effectively avoided.
• Each of the devices shown in FIGS. 1 to 3 was used to dissolve 1 OOOkg of sponge titanium in an electron beam to obtain a titanium ingot. This operation was repeated five times using each device, and the LDI in the titanium ingot produced was investigated. No LDI was detected in any of the titanium ingots. LDI was produced by forging and rolling the generated ingot to form a thin plate and observed by X-ray fluoroscopy.
• a titanium ingot is obtained in the same manner as in the above-described invention by using an apparatus in which the furnace wall 15 and the ceiling wall 16 are not lined, and the ceiling wall 16 does not have the fin-shaped member 17.
• the furnace wall 15 and the ceiling wall 16 are not lined, and the ceiling wall 16 does not have the fin-shaped member 17.
• one LDI with a particle size of about 1 to 2 mm was detected in each of the first and fourth ingots. .
• the lining with the melting equipment removed was polished, washed and dried outside the furnace to prepare for the next assembly.
• the dissolution process was carried out under the same conditions as in Example 2 except that the lining according to the present invention was not installed. After the dissolution process, the dissolution apparatus was disassembled and the inside was cleaned, washed with water, and dried. Next, the dissolution apparatus was assembled and prepared for the next dissolution step. During this time, the time required was 6 days. [0067] As shown in Example 2 and Comparative Example 2 above, the time required for maintenance of the melting furnace performed after the melting process is completed by the metal electron beam melting apparatus and the melting method using the same according to the present invention. The effect of being able to shorten significantly was confirmed.
• the present invention is useful for the production of titanium ingots for aircraft that are desired to suppress the mixing of LDI at a high level. It can be carried out.
• FIG. 1 is a side view showing a first embodiment of an electron beam melting apparatus of the present invention.
• FIG. 2 is a side view showing a second embodiment of the electron beam melting apparatus of the present invention.
• FIG. 3 is a side view showing a third embodiment of the electron beam melting apparatus of the present invention.
• FIG. 4 is a side view showing a fourth embodiment of the electron beam melting apparatus of the present invention.
• Electron beam melting device 10a -10d Electron beam melting device

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• 2006
  • 2006-01-23 CN CN2011100212764A patent/CN102175077B/zh active Active
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