WO2006008253A1 - Gassensor und verfahren zum betreiben einer getterpumpe - Google Patents
Gassensor und verfahren zum betreiben einer getterpumpe Download PDFInfo
- Publication number
- WO2006008253A1 WO2006008253A1 PCT/EP2005/053321 EP2005053321W WO2006008253A1 WO 2006008253 A1 WO2006008253 A1 WO 2006008253A1 EP 2005053321 W EP2005053321 W EP 2005053321W WO 2006008253 A1 WO2006008253 A1 WO 2006008253A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- hydrogen
- gas
- getter
- gas sensor
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/005—Specially adapted to detect a particular component for H2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
- G01N7/10—Analysing materials by measuring the pressure or volume of a gas or vapour by allowing diffusion of components through a porous wall and measuring a pressure or volume difference
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05766817A EP1769226A1 (de) | 2004-07-16 | 2005-07-12 | Gassensor und verfahren zum betreiben einer getterpumpe |
JP2007520829A JP2008506936A (ja) | 2004-07-16 | 2005-07-12 | ガスセンサ及びゲッタポンプの運転法 |
US11/632,112 US20080202211A1 (en) | 2004-07-16 | 2005-07-12 | Gas Sensor and Method For Operating a Getter Pump |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004034381A DE102004034381A1 (de) | 2004-07-16 | 2004-07-16 | Gassensor und Verfahren zum Betreiben einer Getterpumpe |
DE102004034381.0 | 2004-07-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006008253A1 true WO2006008253A1 (de) | 2006-01-26 |
Family
ID=35106658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2005/053321 WO2006008253A1 (de) | 2004-07-16 | 2005-07-12 | Gassensor und verfahren zum betreiben einer getterpumpe |
Country Status (6)
Country | Link |
---|---|
US (1) | US20080202211A1 (de) |
EP (1) | EP1769226A1 (de) |
JP (1) | JP2008506936A (de) |
CN (1) | CN1985159A (de) |
DE (1) | DE102004034381A1 (de) |
WO (1) | WO2006008253A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009030180A1 (de) | 2009-06-24 | 2010-12-30 | Inficon Gmbh | Wasserstoffsensor |
JP2011514523A (ja) * | 2008-02-28 | 2011-05-06 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | ヘリウムセンサ |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006026125A1 (de) | 2006-06-03 | 2007-12-06 | Inficon Gmbh | Gassensor |
DE102007057944A1 (de) | 2007-12-01 | 2009-06-04 | Inficon Gmbh | Verfahren und Vorrichtung zur Dichtheitsprüfung |
DE102008048625A1 (de) | 2008-09-24 | 2010-03-25 | Inficon Gmbh | Verfahren zur Leckprüfung einer Vakuumprozessanlage |
ITMI20090410A1 (it) * | 2009-03-18 | 2010-09-19 | Getters Spa | Leghe getter non evaporabili adatte particolarmente per l'assorbimento di idrogeno |
US8485544B2 (en) | 2009-04-21 | 2013-07-16 | Great Dane Limited Partnership | Method and apparatus for making galvanized upper coupler assembly |
AT512375B1 (de) * | 2011-12-23 | 2013-11-15 | Anton Paar Gmbh | Verfahren und sensor zur messung des co2-gehaltes von fluiden |
US9057659B2 (en) * | 2012-05-22 | 2015-06-16 | Rosemount Inc. | Pressure transmitter with hydrogen getter |
CA2874395A1 (en) | 2012-05-24 | 2013-12-19 | Douglas H. Lundy | Threat detection system having multi-hop, wifi or cellular network arrangement of wireless detectors, sensors and sub-sensors that report data and location non-compliance, and enable related devices while blanketing a venue |
CN103454050A (zh) * | 2013-09-11 | 2013-12-18 | 博益(天津)气动技术研究所有限公司 | 一种氮氢检漏仪的快速检漏装置 |
DE102013219964A1 (de) * | 2013-10-01 | 2015-04-02 | Bayerische Motoren Werke Aktiengesellschaft | Gasbehälter, gasbetriebenes Kraftfahrzeug und Verfahren zum Betreiben eines Gasbehälters |
DE102014000343A1 (de) | 2014-01-11 | 2015-07-16 | Dräger Safety AG & Co. KGaA | Gasmessgerät |
KR102325923B1 (ko) | 2017-03-31 | 2021-11-12 | 시바우라 메카트로닉스 가부시끼가이샤 | 히터관의 기체 누설 검출 장치 및 히터관의 기체 누설 검출 방법 |
CN107179158B (zh) * | 2017-06-05 | 2019-02-26 | 中国工程物理研究院材料研究所 | 气态氚包容设施微泄漏测试方法 |
WO2021052599A1 (de) * | 2019-09-20 | 2021-03-25 | Inficon ag | Verfahren zu bestimmung eines drucks und drucksensor |
CN111289604A (zh) * | 2020-03-16 | 2020-06-16 | 北京卫星环境工程研究所 | 用于低压氢环境下的膜分离型痕量气体探测装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54691A (en) * | 1977-06-03 | 1979-01-06 | Hitachi Ltd | Hydrogen detector |
JPS57148234A (en) * | 1981-03-09 | 1982-09-13 | Toshiba Corp | Hydrogen detector |
JPH02215977A (ja) * | 1989-02-17 | 1990-08-28 | Osaka Shinku Kiki Seisakusho:Kk | ターボ分子ポンプ |
DE10031882A1 (de) * | 2000-06-30 | 2002-01-10 | Leybold Vakuum Gmbh | Sensor für Helium oder Wasserstoff |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2988265A (en) * | 1958-03-21 | 1961-06-13 | Nat Res Corp | Vacuum device |
US3591827A (en) * | 1967-11-29 | 1971-07-06 | Andar Iti Inc | Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor |
US3969077A (en) * | 1971-12-16 | 1976-07-13 | Varian Associates | Alkali metal leak detection method and apparatus |
US4477778A (en) * | 1982-03-15 | 1984-10-16 | Lawrence Electronics Co. | Hydrogen detector |
US4858461A (en) * | 1987-09-29 | 1989-08-22 | General Electric Company | Permeation cell gas detector |
JPH02254333A (ja) * | 1989-03-28 | 1990-10-15 | Mitsubishi Electric Corp | ペニング真空計 |
DE4326264A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
JPH08232840A (ja) * | 1995-02-22 | 1996-09-10 | Osaka Shinku Kiki Seisakusho:Kk | 極高真空ポンプ系 |
DE19521275A1 (de) * | 1995-06-10 | 1996-12-12 | Leybold Ag | Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche |
JP4151824B2 (ja) * | 2002-02-05 | 2008-09-17 | 本田技研工業株式会社 | 水素ガスの選択的透過装置 |
-
2004
- 2004-07-16 DE DE102004034381A patent/DE102004034381A1/de not_active Withdrawn
-
2005
- 2005-07-12 EP EP05766817A patent/EP1769226A1/de not_active Withdrawn
- 2005-07-12 WO PCT/EP2005/053321 patent/WO2006008253A1/de active Application Filing
- 2005-07-12 JP JP2007520829A patent/JP2008506936A/ja active Pending
- 2005-07-12 CN CNA2005800238042A patent/CN1985159A/zh active Pending
- 2005-07-12 US US11/632,112 patent/US20080202211A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54691A (en) * | 1977-06-03 | 1979-01-06 | Hitachi Ltd | Hydrogen detector |
JPS57148234A (en) * | 1981-03-09 | 1982-09-13 | Toshiba Corp | Hydrogen detector |
JPH02215977A (ja) * | 1989-02-17 | 1990-08-28 | Osaka Shinku Kiki Seisakusho:Kk | ターボ分子ポンプ |
DE10031882A1 (de) * | 2000-06-30 | 2002-01-10 | Leybold Vakuum Gmbh | Sensor für Helium oder Wasserstoff |
Non-Patent Citations (4)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 003, no. 022 (E - 093) 24 February 1979 (1979-02-24) * |
PATENT ABSTRACTS OF JAPAN vol. 006, no. 252 (P - 161) 10 December 1982 (1982-12-10) * |
PATENT ABSTRACTS OF JAPAN vol. 014, no. 517 (M - 1047) 13 November 1990 (1990-11-13) * |
See also references of EP1769226A1 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011514523A (ja) * | 2008-02-28 | 2011-05-06 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | ヘリウムセンサ |
DE102009030180A1 (de) | 2009-06-24 | 2010-12-30 | Inficon Gmbh | Wasserstoffsensor |
Also Published As
Publication number | Publication date |
---|---|
US20080202211A1 (en) | 2008-08-28 |
DE102004034381A1 (de) | 2006-02-16 |
JP2008506936A (ja) | 2008-03-06 |
CN1985159A (zh) | 2007-06-20 |
EP1769226A1 (de) | 2007-04-04 |
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