JPS57148234A - Hydrogen detector - Google Patents

Hydrogen detector

Info

Publication number
JPS57148234A
JPS57148234A JP3342481A JP3342481A JPS57148234A JP S57148234 A JPS57148234 A JP S57148234A JP 3342481 A JP3342481 A JP 3342481A JP 3342481 A JP3342481 A JP 3342481A JP S57148234 A JPS57148234 A JP S57148234A
Authority
JP
Japan
Prior art keywords
vacuum
orifice
room
pump
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3342481A
Other languages
Japanese (ja)
Other versions
JPS621215B2 (en
Inventor
Shiro Furumura
Yuji Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3342481A priority Critical patent/JPS57148234A/en
Publication of JPS57148234A publication Critical patent/JPS57148234A/en
Publication of JPS621215B2 publication Critical patent/JPS621215B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
    • G01N7/10—Analysing materials by measuring the pressure or volume of a gas or vapour by allowing diffusion of components through a porous wall and measuring a pressure or volume difference

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating And Analyzing Materials By Characteristic Methods (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE:To enable high-precise detecting of hydrogen, by a method wherein an orifice is mounted between a vacuum pump and a vacuum room, and a vacuum gauge for detecting a pressure is placed between the orifice and the vacuum room. CONSTITUTION:A device is provided with a vacuum room 105 partitioned with a material to be measured and a hydrogen diffusion film, a vacuum pump 107 which exhausts gas in the vacuum room 105 so that the room is brought into a vacuum state an orifice 110 placed between the pump 107 and the vacuum room 105, and a vacuum gauge 108 for detecting a pressure between the orifice 110 and the vacuum room 105. Thus, an exhausting speed at the vacuum pump 107 is decided by a passing amount through the orifice 110. If the exhaust capacity of the vacuum pump 107 changes, a discharge passing through the orifice 110 is kept approximately constant to obtain a constant exhaust speed. This permits the high-precise detection of hydrogen and eliminates the need to perform a frequent correction.
JP3342481A 1981-03-09 1981-03-09 Hydrogen detector Granted JPS57148234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3342481A JPS57148234A (en) 1981-03-09 1981-03-09 Hydrogen detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3342481A JPS57148234A (en) 1981-03-09 1981-03-09 Hydrogen detector

Publications (2)

Publication Number Publication Date
JPS57148234A true JPS57148234A (en) 1982-09-13
JPS621215B2 JPS621215B2 (en) 1987-01-12

Family

ID=12386170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3342481A Granted JPS57148234A (en) 1981-03-09 1981-03-09 Hydrogen detector

Country Status (1)

Country Link
JP (1) JPS57148234A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006008253A1 (en) * 2004-07-16 2006-01-26 Inficon Gmbh Gas sensor and method for operating a getter pump
JP2008541076A (en) * 2005-05-12 2008-11-20 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Sniffer leak detector with quartz window sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54691A (en) * 1977-06-03 1979-01-06 Hitachi Ltd Hydrogen detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54691A (en) * 1977-06-03 1979-01-06 Hitachi Ltd Hydrogen detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006008253A1 (en) * 2004-07-16 2006-01-26 Inficon Gmbh Gas sensor and method for operating a getter pump
JP2008541076A (en) * 2005-05-12 2008-11-20 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Sniffer leak detector with quartz window sensor
JP4806011B2 (en) * 2005-05-12 2011-11-02 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Sniffer leak detector with quartz window sensor

Also Published As

Publication number Publication date
JPS621215B2 (en) 1987-01-12

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