Classifications

• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
  • C09K13/00—Etching, surface-brightening or pickling compositions
  • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P70/00—Cleaning of wafers, substrates or parts of devices
  • H10P70/80—Cleaning only by supercritical fluids
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
  • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
  • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
  • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
  • B81C1/00468—Releasing structures
  • B81C1/00476—Releasing structures removing a sacrificial layer
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
  • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
  • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
  • H10P50/262—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by physical means only
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
  • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
  • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
  • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials

Definitions

• the present invention relates to supercritical fluid-based compositions useful in semiconductor manufacturing for the removal of sacrificial layers, e.g., silicon, silicon oxide or silicon nitride, from Micro Electro Mechanical System (MEMS) and other substrates having such sacrificial layers.
• sacrificial layers e.g., silicon, silicon oxide or silicon nitride
• MEMS Micro Electro Mechanical System
• the compositions also have utility for removing post-ash and post-etch residue.
• Micro Electro Mechanical Systems are devices that integrate mechanical and electrical components on a single silicon wafer.
• the electrical and mechanical components are fabricated using traditional integrated circuit (IC) techniques and "micromachining" processes, respectively.
• Micromachining is used to produce a number of mechanical devices on the wafer that are able to sense and control the environment including, but not limited to, cantilever beams, hinges, accelerometers, microsensors, microactuators and micromirrors.
• the mechanical components on a MEMS wafer are created by depositing sacrificial and structural layers onto a substrate followed by selective etching of the sacrificial layer relative to the structural layer, leaving behind a suspended or freestanding micromechanical structure, such as a beam or a lever.
• a major problem with fabricating MEMS structures is that as aqueous based etching of the sacrificial layer proceeds, stiction may occur, wherein the surface adhesion forces are higher than the mechanical restoring force of the microstructure. In effect, the microstructure bends down toward the substrate and sticks to it, generally permanently.
• Proposed causes of stiction include; van der Waals forces, hydrogen bridging and/or electrostatic attractions between the microstructure and the substrate, surface tension forces generated from diminishing liquid menisci trapped in the etched space, and etch by-products precipitating out of solution during drying steps.
• van der Waals forces hydrogen bridging and/or electrostatic attractions between the microstructure and the substrate
• surface tension forces generated from diminishing liquid menisci trapped in the etched space and etch by-products precipitating out of solution during drying steps.
• etching compositions include anhydrous HF gas, which does not leave residues.
• etching with neat anhydrous HF can require up to ten hours to form complex microstructures and as such, the presence of some water is necessary to initiate the etch reaction thereby eliminating the advantages of using a water-free etchant.
• SCF supercritical fluids
• SCFs can be used to etch MEMS and other semiconductor devices. Because of low viscosity and near zero surface tension, SCFs avoid many of the problems associated with typical wet processes. For example, because SCFs exhibit a gaslike density, surface tension forces are low and thus the microstructure does not stick to the substrate. Because of high diffusion rates, SCFs can generally penetrate a solid sample faster than liquid solvents. Further, SCFs can rapidly transport dissolved solutes because of their low viscosity. However, many SCFs are highly non-polar and as such, contaminant species are not adequately solubilized therein.
• the present invention relates to supercritical fluid-based compositions useful in semiconductor manufacturing for the etching of sacrificial silicon-containing layers from semiconductor substrates, and methods of using such compositions for removal of same.
• the present invention relates to supercritical fluid-based compositions useful in semiconductor manufacturing for the removal of post-ash and post-etch residue from semiconductor surfaces, and methods of using such compositions for removal of same.
• the invention relates to a sacrificial silicon-containing layer etching composition, comprising a supercritical fluid, at least one co-solvent, at least one etchant species, and optionally at least one surfactant.
• the invention in another aspect, relates to a method of removing silicon-containing substances from a substrate having same thereon, said method comprising contacting the substrate with a SCF-based composition comprising a SCF, at least one co-solvent, at least one etchant species, and optionally at least one surfactant, for sufficient time and under sufficient contacting conditions to remove the silicon-containing substances from the substrate.
• Figure 1 is a control sample before SCF-based etching composition processing including a silicon substrate, a 100 nm thick silicon oxide film on the substrate and a 100 nm thick polysilicon film on the oxide.
• Figure 2 is the control sample in Figure 1 after the sacrificial silicon oxide layer was etched with, a SCF-based etching composition of the present invention, illustrating a free standing microstructure.
• Figure 3 is a control sample before SCF-based etching composition processing including a silicon substrate, a 100 nm thick silicon oxide film on the substrate and a 100 nm thick polysilicon film on the oxide.
• Figure 4 is the control sample in Figure 3 after the sacrificial silicon oxide layer was etched with a SCF-based etching composition of the present invention, illustrating a free standing microstructure.
• Figure 5 is a sample etched with a SCF-based etching composition of the present invention, illustrating a free standing microstructure. DETAILED DESCRIPTION OF THE INVENTION. AND PREFERRED EMBODIMENTS THEREOF
• the present invention is based on the discovery of supercritical fluid (SCF)-based etching compositions that are highly efficacious for the etching of sacrificial silicon-containing layers from semiconductor substrates.
• SCF supercritical fluid
• the compositions and methods of the invention are effective for etching sacrificial layers including, but not limited to, silicon, silicon oxide and silicon nitride
• supercritical carbon dioxide (SCC0 2 ) is a preferred SCF in the broad practice of the present invention, although the invention may be practiced with any suitable SCF species, with the choice of a particular SCF depending on the specific application involved.
• SCC0 2 supercritical carbon dioxide
• SCF species useful in the practice of the invention include oxygen, argon, krypton, xenon, and ammonia.
• SCC0 2 hereinafter in the broad description of tire invention is meant to provide an illustrative example of the present invention and is not meant to limit same in any way.
• SCC0 2 might at first glance be regarded as an attractive reagent for removal of oxides and residue contaminants, since SCC0 2 has the characteristics of both a liquid and a gas. Like a gas, it diffuses rapidly, has low viscosity, near-zero surface tension, and penetrates easily into deep trenches and vias. Like a liquid, it has bulk flow capability as a "wash" medium.
• SCC0 2 is non-polar. Accordingly, it will not solubilize many polar species, including ionic etchant species comprising fluoride or inorganic salts and polar organic compounds that are present in many post-etch and post-ash residues.
• ionic etchant species comprising fluoride or inorganic salts and polar organic compounds that are present in many post-etch and post-ash residues.
• the non-polar character of SCC0 2 thus poses an impediment to its use for etching sacrificial layers and the subsequent cleaning of wafer surfaces of contaminant residues.
• the present invention is based on the discovery that disadvantages associated with the non-polarity of SCC0 2 and other SCFs can be overcome by appropriate formulation of
• the invention relates to SCF-based etching compositions useful in removing sacrificial silicon-containing layers including, but not limited to, silicon, silicon oxide and silicon nitride, from a semiconductor substrate.
• the formulation of the present invention comprises a SCF, at least one co-solvent, at least one etchant, and optionally at least one surfactant, present in the following ranges, based on the total weight of the composition: component of % by weight SCF about 75.0% to about 99.5% co-solvent about 0.3% to about 22.5% Etchant about 0.01% to about 5.0% Surfactant about 0.01% to about 5.0%
• the SCF-based etching formulations may comprise, consist of, or consist essentially of a SCF, at least one co-solvent, at least one etchant and optionally at least one surfactant.
• the inclusion of the co-solvent with the SCF serves to increase the solubility of the etching composition for sacrificial silicon-containing species.
• the specific proportions and amounts of SCF, co-solvent, etchant, and optionally surfactant, in relation to each other may be suitably varied to provide the desired etching action of the SCF-based etching composition for the silicon-containing species and/or processing equipment, as readily determinable within the skill of the art without undue effort.
• the co-solvent used in the SCF-based etching composition is preferably an alcohol.
• such alcohol includes a straight-chain or branched Cj-C ⁇ alcohol (i.e., methanol, ethanol, isopropanol, etc.), or a mixture of two or more of such alcohol species.
• the alcohol is methanol or isopropanol (IP A).
• Prior art silicon oxide and silicon nitride etching compositions contain the etchant HF, which dissociates in water to form the etchant species F “ , H 2 F “ and H 2 F 2 .
• HF etchant
• the ionization of HF to form etchant species does not readily occur because the water reacts with the C0 2 (to form carbonic acid (H 2 C0 3 )) or is removed by the alcohol co-solvent.
• the silicon oxide and silicon nitride etchant used in the SCF-based etching composition of the present invention includes a pre-ionized fluoride source, such as a bifluoride species, including ammonium difluoride, tetraalkylammonium difluorides and alkyl phosphonium difluorides, such as those produced by the following reactions: (R) 4 NOH + 2 HF ⁇ (R) 4 NHF 2 + H 2 0 (R) 4 POH + 2 HF ⁇ (R) 4 PHF 2 + H 2 0 where R is hydrogen, methyl, ethyl, butyl, phenyl or fluorinated C C alkyl groups.
• a pre-ionized fluoride source such as a bifluoride species, including ammonium difluoride, tetraalkylammonium difluorides and alkyl phosphonium difluorides, such as those produced by the following reactions: (R) 4 NOH + 2
• the silicon oxide and silicon nitride etchant used in the SCF-based etching composition of the present invention may include the foregoing bifluoride species and optionally HF.
• reverse micelle technology may be used to encapsulate the HF within a reverse micelle for transport to the wafer surface without contact with the SCF.
• Potential reverse micelles include, but are not limited to, polymeric reverse micelles.
• Surfactants are optionally added when the sacrificial silicon-containing layer includes silicon oxide and silicon nitride.
• the surfactant used in the SCF-based etching composition of the present invention may include nonionic surfactants, such as fluoroalkyl surfactants, polyethylene glycols, polypropylene glycols, polyethylene or polypropylene glycol ethers, carboxylic acid salts, dodecylbenzenesulfonic acid or salts thereof, polyacrylate polymers, dinonylphenyl polyoxyethylene, silicone or modified silicone polymers, acetylenic diols or modified acetylenic diols, and alkylammonium or modified alkylammonium salts, as well as combinations comprising at least one of the foregoing surfactants.
• nonionic surfactants such as fluoroalkyl surfactants, polyethylene glycols, polypropylene glycols, polyethylene or polypropylene glycol ethers, carboxylic acid salts, dodecylbenzenesulfonic acid or salts thereof, polyacrylate polymers, din
• the surfactants may be a mixture of anionic and non-ionic surfactants.
• the surfactant is a modified acetylenic diol.
• the SCF-based silicon dioxide and silicon nitride etching composition of the invention includes SCC0 2 , methanol, ammonium bifluoride, and a modified acetylenic diol.
• the silicon etchant used in the SCF-based etching composition of the present invention may include XeF 2 , which is particularly well suited for etching MEMS and other semiconductor devices.
• XeF 2 etchants exhibit nearly infinite selectivity of silicon to photoresist, silicon oxides, silicon nitrides and aluminum. Being a vapor phase etchant, XeF 2 avoids many of the problems typically associated with wet processes. For example, XeF 2 surface tension forces are negligible and thus stiction between the microstructure and the substrate is less likely. In addition, etching rates using XeF 2 are much faster.
• XeF 2 etching of silicon involves the physisorption of XeF 2 onto the silicon surface. Because the bond energies of both the F atoms to the Xe atoms and the Si atoms to other Si atoms are sufficiently weak, and the attraction forces between Si and F are relatively strong, F will dissociate from Xe and bond to Si to form various silicon fluoride products, as illustrated in the following reactions: XeF 2 (g) + Si (s) ⁇ Xe(g) + SiF 2 (s) XeF 2 (g) + SiF 2 (s) ⁇ Xe(g) + SiF 4 (s) An etching reaction occurs when volatile SiF is formed and leaves the surface spontaneously, thus removing sacrificial silicon material.
• the silicon etchant used in the SCF-based etching composition of the present invention may include the XeF 2 species and optionally HF.
• the XeF 2 etch rate is highly dependent on the dryness of the silicon surface. If water is present on the surface of the silicon, a thin silicon fluoride polymer layer forms.
• the broad practice of the invention includes wafer surface drying prior to exposure to an SCF-based etching composition containing XeF 2 .
• SCC0 2 provides an efficient and environmentally safe way to dehydrate the wafer surface, thus eliminating the formation of the unwanted silicon fluoride polymer layer.
• pre-drying the silicon surface with SCC0 2 is also a necessary safety measure since most XeF 2 contains small amounts of XeF 4 , which upon reaction with water forms the contact explosive Xe0 .
• Species such as XeF 2 are largely insoluble in the non-polar SCF solvents. Accordingly, co- solvents may be added to the composition to increase the solubility of XeF 2 in the SCF-based etching composition of the present invention.
• the SCF-based silicon etching composition of the invention includes SCC0 2 , methanol and XeF 2 .
• the invention relates to methods of removal of sacrificial silicon- containing layers including, but not limited to, silicon, silicon oxide, silicon nitride and post-ash and post-etch residues, from a semiconductor substrate using the appropriate SCF-based etching composition.
• the present invention relates to the removal of post-ash and post-etch residues using a SCF-based etching composition including a SCF, at least one co-solvent, at least one etchant, and optionally at least one surfactant, as described herein.
• Plasma ashing involves exposing the photoresist-covered wafer to oxygen plasma in order to oxidatively decompose the unexposed photoresist film from the substrate surface.
• plasma etching usually results in the formation of plasma-ash and plasma-etch residue, and this residue must subsequently be removed.
• the SCF-based compositions of the present invention overcome the disadvantages of the prior art post-ash and post-etch residue removal treatments for Si-, Si0 2 - and Si 3 N 4 -based residues.
• the appropriate SCF-based etching composition can be employed to contact a substrate having a sacrificial layer, e.g., silicon oxide, silicon nitride or silicon, and/or post-ash and post-etch residue, at a pressure in a range of from about 1400 to about 4400 psi for sufficient time to effect the desired etching of the sacrificial layer and/or residue, e.g., for a contacting time in a range of from about 30 seconds to about 30 minutes and a temperature of from about 40 to about 70°C, although greater or lesser contacting durations and temperatures may be advantageously employed in the broad practice of the present invention, where warranted.
• a sacrificial layer e.g., silicon oxide, silicon nitride or silicon
• the removal process in a particularly preferred embodiment includes sequential processing steps including dynamic flow of the SCF-based etching composition over the substrate having the sacrificial layer and/or residue, followed by a static soak of the substrate in the SCF-based etching composition, with the respective dynamic flow and static soak steps being carried out alternatingly and repetitively, in a cycle of such alternating steps.
• a “dynamic” contacting mode involves continuous flow of the cleaning composition over the wafer surface, to maximize the mass transfer gradient and effect complete removal of the sacrificial layer and/or residue from the substrate.
• a “static soak” contacting mode involves contacting the wafer surface with a static volume of the etching composition, and maintaining contact therewith for a continued (soaking) period of time.
• the dynamic flow/static soak steps may be carried out for four successive cycles in the aforementioned illustrative embodiment, as including a sequence of 30 sec- 10 min dynamic flow, 30 sec-5 min high pressure static soak, e.g., about 3000 psi to about 4400 psi, 30 sec- 10 min dynamic flow, and 30 sec-10 min low pressure static soak, e.g., about 1400 psi to about 2800 psi.
• the wafer surface should be dehydrated prior to the etching process.
• SCFs can be used as drying media for patterned wafers in drying compositions that include one or more water-reactive agents that chemically react with water on the patterned wafer to form reaction product species that are more soluble in the SCF than water.
• hexafluoroacetone HFA is usefully employed as a water- reactive agent in SCC0 2 to provide a highly effective SCF composition for drying of patterned wafers.
• HFA reacts instantly with water and quantitatively forms a soluble and volatile diol as depicted in the following reaction: H 2 0 + CF 3 COCF 3 ⁇ CH 3 C(OH) 2 CF 3 [0049]
• the product diol, CH 3 C(OH) 2 CF 3 is highly soluble in SCC0 2 and is readily dissolved by the SCF, thereby effectively removing water from the patterned wafer substrate with which the SCF composition, containing SCC0 2 and HFA, is contacted.
• the water-reactive agent in the SCF-based wafer drying composition can be of any suitable type, including for example, other halogenated aldehydes and ketones; halogenated diketones, e.g., l,l,l,5,5,5-hexafluoro-2,4-pentanedione, alternatively denoted as (hfac)H; halogenated esters; carboxylic anhydrides, e.g., (CH 3 CO) 2 0; siloxanes; halogenated silanes; and any other compounds and materials that easily react with water and form derivatives soluble in SCC0 2 or other SCF species.
• halogenated aldehydes and ketones e.g., l,l,l,5,5,5-hexafluoro-2,4-pentanedione, alternatively denoted as (hfac)H
• halogenated esters e.g., (CH 3 CO) 2 0
• the water-reactive agent can be formulated in the SCF-based wafer drying composition at any suitable concentration that is effective for water removal from the patterned wafer substrate.
• the concentration of the water-reactive agent can be a concentration in a range of from about 0.01 to about 10.0 % by weight, based on the total weight of the supercritical fluid and the water-reactive agent, with concentrations of from about 0.1 to about 7.5 % by weight, on the same total weight basis being more preferred, and from about 0.1 to about 5.0 % by weight, on the same total weight basis being most preferred.
• the contacting of the patterned substrate with the drying composition is carried out for a suitable period of time, which in a specific embodiment can for example be on the order of from about 20 to about 60 seconds, although other (longer or shorter) periods of contacting may be usefully employed depending on the nature and amount of the water to be removed from the patterned substrate, and the process conditions employed for drying.
• the contacting vessel in which the SCF- based wafer drying composition is contacted with the patterned substrate can be rapidly decompressed to separate the SCF composition from the patterned substrate and exhaust the regasified SCF from the contacting vessel, so that the non-supercritical component(s), such as the soluble water reaction product(s), can be entrained in the regasified SCF and likewise be removed from the drying locus. Thereafter, the contacting vessel can be compressed and the SCF-based etching composition may be introduced to the vessel to remove the sacrificial layer and/or residue.
• the substrate thereafter preferably is washed with copious amounts of SCF/methanol/deionized water solution in a first washing step, to remove any residual precipitated chemical additives from the substrate region in which etching and/or residue removal has been effected, and finally with copious amounts of pure SCF, in a second washing step, to remove any residual methanol co-solvent and/or precipitated chemical additives from the substrate region.
• the SCF used for washing is SCC0 2 .
• SCF-based etching compositions of the present invention are readily formulated by simple mixing of ingredients, e.g., in a mixing vessel under gentle agitation.
• such SCF-based etching compositions are applied to the substrate for contacting with the sacrificial layer and/or residue thereon, at suitable elevated pressures, e.g., in a pressurized contacting chamber to which the etching composition is supplied at suitable volumetric rate and amount to effect the desired contacting operation for removal of the sacrificial layer and/or residue.
• the sample wafers examined in this study included a substrate, a 100 nm thick silicon oxide film on the substrate and a 100 nm polysilicon film on top of the oxide layer.
• the samples were processed to etch the sacrificial silicon oxide layer using the SCF-based etching composition of the following formulation: Component Weight Percent ammonium bifluoride (32.3 wt %) 1.0 % surfynol-104 0.05 % Methanol 4.0 % SCC0 2 94.95%
• the sample wafers may include a substrate, a 380 nm thick silicon film on the substrate, a 30 nm silicon oxide film on the silicon film, and a 300 nm silicon nitride film on top of the oxide layer.
• the samples may be processed to etch the sacrificial silicon oxide layer using the SCF-based etching composition of the following fonnulation: Component Weight Percent ammonium bifluoride (32.3 wt %) 1.0 % surfynol-104 0.05 % Methanol 4.0 % SCC0 2 94.95%
• the optimal process conditions are dynamic flow of the SCF-based etching composition for 45 sec at 4000 psi followed by a 1 min SCC0 2 rinse.
• the samples were then thoroughly rinsed with copious amounts of SCC0 2 /methanol/deionized water and pure SCC0 2 in order to remove any residual co-solvent and/or precipitated chemical additives.
• Figures 1 and 3 are optical microscope photographs of control wafers prior to etching, showing unremoved sacrificial silicon oxide layers.
• Figures 2 and 4 show the optical image of the Figures 1 and 3 wafers after sacrificial silicon oxide layer removal, respectively, using the composition and method described herein.
• Figure 5 is an optical image of a free-standing microstructure produced using the composition and method of the present invention.
• the above-described photographs thus evidence the efficacy of SCF-based etching compositions in accordance with the invention, for removal of sacrificial layers from wafer substrates.

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• 2004
  • 2004-11-30 CA CA002589168A patent/CA2589168A1/en not_active Abandoned
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