WO2005042979A1 - Pompe a vide seche rotative - Google Patents

Pompe a vide seche rotative Download PDF

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Publication number
WO2005042979A1
WO2005042979A1 PCT/JP2004/015639 JP2004015639W WO2005042979A1 WO 2005042979 A1 WO2005042979 A1 WO 2005042979A1 JP 2004015639 W JP2004015639 W JP 2004015639W WO 2005042979 A1 WO2005042979 A1 WO 2005042979A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
motor
rotor
housing
dry vacuum
Prior art date
Application number
PCT/JP2004/015639
Other languages
English (en)
Japanese (ja)
Inventor
Daisuke Inoue
Satoshi Fujii
Original Assignee
Nabtesco Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nabtesco Corporation filed Critical Nabtesco Corporation
Priority to EP04792788A priority Critical patent/EP1681469A1/fr
Priority to US10/595,482 priority patent/US20080038132A1/en
Priority to JP2005515119A priority patent/JPWO2005042979A1/ja
Publication of WO2005042979A1 publication Critical patent/WO2005042979A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps

Definitions

  • the present invention relates to a rotary dry vacuum pump having a structure in which a reaction product gas hardly flows into a canned motor which is a power unit of a rotary dry vacuum pump used in a device for flowing a reaction product gas such as a semiconductor manufacturing apparatus. Things.
  • a problem in the semiconductor manufacturing process is that impurities such as oil are mixed in the reaction chamber 1 to contaminate the semiconductor.
  • mixing of oil from a vacuum pump for exhausting gas in the reaction chamber becomes a problem. Therefore, a rotary dry vacuum pump has been conventionally used.
  • Rotary dry vacuum pumps include a screw type, a roots type and a scroll type.
  • such a rotary dry vacuum pump has a rotating shaft for rotating the rotor, and a bearing is used to support the rotating shaft.
  • Lubricating oil is usually attached to the bearing, and a shaft seal is arranged between the exhaust chamber and the bearing to prevent oil molecules of the lubricating oil from entering the exhaust chamber of the rotary dry vacuum pump.
  • the structure of the canned motor is such that the stator core has a stator winding that generates a rotating magnetic field, and the inside of the partition is sealed by a metal thin-walled cylindrical partition (can) mounted on the frame, side plates, and the stator inner diameter side.
  • the rotating shaft supported by the bearing fixed to the bracket has a rotatable structure with a rotor attached.
  • Patent Document 1 JP-A-2003-189529 Disclosure of the invention
  • the canned motor When the canned motor is used as a drive unit of a rotary dry vacuum pump for a semiconductor manufacturing apparatus for flowing a reaction product gas while applying force, the inside of the partition wall in which the rotor is housed is evacuated during operation. . Therefore, when the motor is stopped and returned to the atmospheric pressure, the reaction product gas is mixed into the motor from the exhaust chamber and the reaction product adheres to the components inside the partition wall of the canned motor, causing the motor to fail. There was a problem that it would. At that time, if reaction products also adhered to the bearing ⁇ shaft seal, it also caused a failure of the pump itself.
  • a rotary dry vacuum pump having a fluid suction port and a discharge port formed in the housing and a rotary rotor configured to rotate at least one of the one or more rotors
  • the motor is a stator.
  • a partition provided with an iron core and mounted on the inner diameter side of the stator is fixed to the housing to seal the inside of the partition, and a rotor is rotatably arranged in the partition, and at least one of the plurality of rotors is provided.
  • the rotating shaft of the rotor and the rotating shaft of the rotor are fixedly connected to each other, and the rotor is driven to rotate, and a gas injection port for flowing a purge gas into the partition wall is provided. If the purge gas inlet is formed in the flange of the motor, the processing is easy.
  • the partition walls may be made of a magnetic metal.
  • the purge gas can also flow through a bearing that rotatably supports the rotating shaft of the rotor.
  • the rotating shaft of the motor and the rotating shaft of the rotor are integrally formed.
  • a rotor of a motor is fixed to an end of the rotor by a predetermined means on a rotating shaft, and the end is formed by a cylindrical member constituting a partition.
  • the inside of the partition is sealed by fixing to the flange and further covering with a flange constituting the partition.
  • An O-ring should be placed where sealing is required.
  • the motor is arranged on the intake port side.
  • a flow rate adjusting means is provided in a pipe for sending a purge gas to the purge gas inlet.
  • the flow rate adjusting means there are a means for reducing the flow rate of the purge gas through a purge gas flow hole of a predetermined size in the purge gas flow path, a manual valve as required, and a solenoid valve on the N2 supply side.
  • the solenoid valve is opened and adjusted by the valve when the gas flow rate changes when the pump is stopped, before or after that, and during operation, especially when the pressure in the exhaust chamber becomes higher than the pressure in the motor bulkhead due to increase.
  • an orifice that allows the same amount of gas to flow instead of a valve can be installed in the piping to eliminate the adjustment valve.
  • a pressure measuring instrument for measuring the pressure in the partition wall or a pressure measuring instrument for measuring the pressure in the exhaust chamber is provided.
  • the difference between the two pressure values may be taken, and the flow rate may be adjusted by an electromagnetic valve so that the pressure in the partition wall is equal to or greater than the pressure in the exhaust chamber.
  • the inflow amount and flow rate of the purge gas can be adjusted with only one pressure.
  • a pressure measuring device there is a thin film semiconductor detector and the like.
  • the inflow amount and the flow rate of the purge gas can be adjusted by measuring the pressure in a chamber of a semiconductor manufacturing apparatus or the like which is evacuated by a vacuum pump. The inflow and flow rate of gas may be adjusted only by changing the pressure in the chamber, but may be adjusted according to the pressure in the partition.
  • the rotation speed measuring means for measuring the rotation speed of the rotor or the rotor of the motor. Measurement means were provided. As the rotation speed measuring means, the rotation speed is detected by attaching an encoder to the rotor of the motor or detecting the magnetism of the permanent magnet of the rotor at a specific position. The inflow amount and flow rate of the purge gas are adjusted by the rotation speed. For example, when the number of revolutions decreases, the flow of the purge gas is controlled, and the flow rate and the flow rate of the gas are adjusted according to the rate of change of the number of revolutions.
  • means for measuring the power consumption of the motor is provided.
  • the gas flow is adjusted by the power consumption. For example, if the power consumption fluctuates due to an increase in the intake gas amount during operation, control of the purge gas flow is performed, and the inflow amount and flow rate of the purge gas are adjusted according to the change in the power consumption at the time of stoppage. You can do it.
  • the reaction product gas flow meter is provided near the intake port or the exhaust port.
  • the flow rate of the purge gas is adjusted according to the change in the flow rate of the reaction product gas. For example, when the flow rate of the reaction product gas increases, control is performed such as increasing the flow rate of the purge gas. Further, the flow rate of the purge gas may be adjusted according to the flow rate of the gas flowing into the chamber.
  • a rotary dry vacuum pump having a rotary rotor composed of a motor that rotationally drives at least one of the single or multiple rotors, wherein the motor includes a stator core fixed inside a motor housing, A partition mounted on the inner diameter side of the stator is fixed to the housing to seal the inside of the partition, and a rotor is fixed to a rotating shaft in the partition so as to be rotatable, and a purge gas flows into the partition.
  • the reaction product gas force in the vacuum exhaust chamber and the inside of the bulkhead from the exhaust chamber when the inside of the vacuum exhaust chamber and the bulkhead return to atmospheric pressure when the pump is stopped.
  • the purge gas should be supplied to prevent the reaction product gas from flowing into the partition from the vacuum exhaust chamber. it can.
  • the purge gas by similarly supplying the purge gas to the bearing, it is possible to prevent the reaction product from adhering to the bearing and to prevent the bearing from malfunctioning.
  • the pipe for sending gas to the purge gas inlet is provided with a flow rate adjusting means.
  • a pressure measuring instrument for measuring the pressure in the partition or a pressure measuring instrument for measuring the pressure in the exhaust chamber is provided.
  • the flow rate of the purge gas can be controlled by an electromagnetic valve or the like so that the pressure in the partition wall becomes slightly higher than the pressure in the exhaust chamber.
  • FIG. 1 shows a screw vacuum pump as an embodiment of the rotary dry vacuum pump according to the present invention.
  • the vacuum pump 200 includes two screw rotors 202 and 204.
  • Screw rotors 202 and 204 are housed inside housing 210. More specifically, the screw rotor 202 is rotatably supported on the housing 210 by bearings 231 and 233, and the screw rotor 204 is rotatably supported on the housing 210 by bearings 234 and 236. In addition, the timing gears 251 and 253, the motor 241 and the seals 237, 238, 239 and 240 are placed as shown in the figure. Here, the shears 237 and 238 separate the bearings 231 and 233 from the inner chamber 210b of the rotor and set the bearings 231 and 233 together.
  • the shears 239 and 240 separate the bearings 234 and 236 from the inner chamber 210b of the rotor, prevent the lubricating oil of the bearings 234 and 236 from leaking into the screw rotor storage chamber 210b, and prevent the rotation of the screw rotor. It prevents foreign matter from entering the bearings 234 and 236 from the storage room 210b.
  • a non-contact seal such as an insect-type chinolle, a magnetic fluid seal, and a labyrinth.
  • timing gears 251 and 253 for rotating the screw rotor 202 with the rotation of the screw rotor 204 are fixed to one ends of the screw rotor 202 and the screw rotor 204 so as to mesh with each other.
  • a motor 241 is physically connected to the other end of the screw rotor 202.
  • the screw rotor storage chamber 210b is formed on a wall of the housing 210, and an external force of the housing 210 is also provided by an intake port (not shown) for sucking a compressible fluid into the housing 210.
  • the screw rotor storage chamber 210 b communicates with the outside of the housing 210, and a screw outlet (not shown) is formed in the wall of the housing 210 to discharge a compressible fluid from inside the housing 210 to outside the housing 210.
  • the suction port is communicated with a not-shown vacuum vessel, and the discharge port is shown in FIG.
  • the housing 210 includes a first housing member 211, a second housing member 212, and a second housing member 212.
  • the third housing member 213, the fourth housing member 214, and the fifth housing member 215 are formed.
  • the first housing member 211 constitutes an intake side flange and also serves as a housing for the canned motor 241.
  • the second housing member 212, the third housing member 213, and the fourth housing member 214 form a housing body, and the second housing member 212, the third housing member 213, and the fourth housing member 214 form a vacuum exhaust chamber. Have been.
  • Bearings 231 and 234 and shaft seals 237 and 239 are fixed to the second housing member 212.
  • the fourth housing member 214 is fixed with the bearings 233 and 236 and the shaft shear rollers 238 and 240.
  • the canned motor 241 which is a driving unit of the vacuum pump 200 according to the present embodiment will be described.
  • the canned motor 241 has a stator core 261 provided with a stator winding for generating a rotating magnetic field.
  • a rotor 265 is fixed to a rotating shaft 263 of a canned motor 241 integrated with the rotor 202.
  • a partition (can) 281 is separated between the stator core 261 and the rotor 265, and the partition 281 is tightly fixed to the second housing member 212.
  • the flange 267 of the canned motor 241 is tightly fixed to the partition wall 281, and the rotor 265 is also sealed against external air.
  • a purge gas for example, nitrogen gas or argon gas
  • a purge gas is supplied to the inside of the partition wall 281 in which the joint is sealed with a ring or the like (not shown), the housing second member 212 and the canned motor 241 sealed with the flange 267.
  • Injection hole 269 for flowing is open.
  • the injection hole 269 is provided with a flow passage 271 for introducing a purge gas, and the flow passage 271 has flow rate adjusting means (for example, a manual valve, an orifice, etc.) 273 for adjusting the flow rate of the purge gas, and a solenoid valve 273. 275 is installed.
  • the timing gears 253 and 251 are fixed to one end of the screw rotor 204 and one end of the screw rotor 202 so as to mesh with each other.
  • the screw rotor 204 rotates with the rotation of the screw rotor 202.
  • the compressible fluid in the screw rotor storage chamber 210b is also transferred to the communication passage 210c with the intake-port-side force, and is discharged through the communication passage 210c.
  • screw rotor storage room 2 When the compressible fluid in 10b is discharged to the outside of the screw rotor storage chamber 210b through the communication passage 210c, a new compressible fluid is sucked into the screw rotor storage chamber 210b through the suction port and the force of the vacuum container is also suctioned. You.
  • the inside of the canned motor 241 sealed by the housing first member 211, the housing second member 212, and the flange 267 is evacuated.
  • the pressure in the exhaust chamber 210c rises, and the gas in the exhaust chamber 210c reduces the pressure of the canned motor 241 sealed by the housing first member 211, the housing second member 212, and the flange 267 with low pressure. It flows back inside.
  • the gas in the exhaust chamber is a corrosive gas or a reaction product gas
  • the gas may cause corrosion of the rotor 265 and the rotating shaft 263, and may cause a failure of the canned motor 241 due to adherence of products.
  • the pressure inside the canned motor 241 sealed by the housing first member 211, the housing second member 212, and the flange 267 becomes higher than the pressure inside the exhaust chamber 210c.
  • Purge gas as described above. Therefore, assuming that the flow rate of the purge gas is P1 inside the can motor and the pressure inside the exhaust chamber 210c closest to the can motor 241 is P2, the flow rate may be such that P1 ⁇ P2 after the pump stops.
  • the operation sequence is as follows: When the pump stops or before or after the pump stops, the solenoid valve is opened, and the flow rate L adjusted by the valve (manual valve or solenoid valve or orifice) is flowed as purge gas, so that the bearing section, Prevent process gas from entering the motor. If the time T required for P1 to reach the atmospheric pressure is preliminarily measured, the solenoid valve can be opened and the flow rate L can be supplied only during the time T.
  • the pressure inside the canned motor 241 sealed by the housing first member 211, the housing second member 212 and the flange 267 is measured by a pressure gauge P1
  • the pressure inside the exhaust chamber 210c is measured by a pressure gauge P2.
  • valve + solenoid valve use an electromagnetic valve that can freely control the flow rate.
  • the flow rate control is not limited to stoppage, but continues to flow the purge gas slightly during operation so that P1 ⁇ P2.
  • the flow rate of the reaction product gas may change during the operation. In such a case, the pressure in the exhaust chamber may change, so the flow rate of the purge gas is controlled so that P1 ⁇ P2.
  • the pressure in the exhaust chamber can be replaced with the pressure in the semiconductor manufacturing apparatus chamber using the vacuum pump.
  • the flow rate of the purge gas is controlled by comparing the two pressures.
  • the flow rate can be controlled by any one of the pressure inside the motor partition wall, the pressure inside the exhaust chamber, or the pressure inside the chamber.
  • the pressure can be measured to control the force by controlling the flow rate of the purge gas, or by controlling the rotation speed of the rotor, the power consumption, and the flow rate of the reaction product gas.
  • the force indicated only for the purge gas to the motor If the purge gas is allowed to flow also to the bearing, a reaction product adheres to the bearing and the rotary dry vacuum pump loses power. Can also be prevented.
  • a semiconductor manufacturing apparatus dislikes contamination by oil.
  • a vertically installed mold is used, and an intake port is arranged upward with a discharge port arranged downward.
  • the gears 251 and 253 are disposed below, and the canned motor 241 which does not use lubricating oil and is not likely to be contaminated by lubricating oil is disposed on the intake side. This can minimize contamination of the intake side with oil.
  • the effect is further enhanced by using vacuum grease as a lubricant for the bearing on the intake side.
  • the volume transfer type screw vacuum pump has been described.
  • the present invention is applied to a vacuum pump in which a rotary shaft of a claw type, a roots type, a scroll type, or the like is driven by a motor. be able to.
  • each of a plurality of stages of vacuum pumps may have the structure of the rotary dry vacuum pump of the present invention.
  • the pressure, gas flow rate, power consumption, and number of revolutions are converted into data electric signals and sent to the signal processing means. From the data electric signals, the flow rate of the purge gas is determined by the signal processing means. , And transmitted to the flow rate adjusting means, and the flow rate of the purge gas is adjusted by an electromagnetic valve or the like.
  • the present invention can be applied to a vacuum pump having a rotating shaft for flowing and exhausting extremely dilute reaction product gas and a motor for driving the rotating shaft, such as a semiconductor manufacturing apparatus.
  • FIG. 1 is an axial sectional view of the screw vacuum pump of the present invention.

Abstract

Une pompe à vide sèche rotative de l'état de la technique présente un problème lié au fait que, lorsqu'un moteur protégé est utilisé dans une section d'entraînement, un gaz réactionnel produit pénètre à l'intérieur du moteur protégé, et provoque une défaillance du moteur qui conduit à une défaillance de la pompe à vide sèche rotative. L'invention a pour objet une pompe à vide sèche rotative à rotor, présentant un ou plusieurs rotors reçus dans un boîtier, des paliers qui supportent des arbres rotatifs des rotors, une ouverture d'aspiration et une ouverture de refoulement destinées à du liquide, pratiquées dans le boîtier, et un moteur destiné à entraîner en rotation au moins l'un des rotors. Le moteur comprend un noyau de stator en fer fixé dans le boîtier du moteur, une paroi de séparation installée sur le côté de diamètre interne du stator, adhère et est fixée au boîtier de façon à refermer l'intérieur de la paroi de séparation, un rotor adhère et est fixé à un arbre rotatif dans la paroi de séparation de façon à pouvoir tourner, et une entrée de gaz sert à l'introduction d'un gaz de purge à l'intérieur de la paroi de séparation.
PCT/JP2004/015639 2003-10-21 2004-10-21 Pompe a vide seche rotative WO2005042979A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04792788A EP1681469A1 (fr) 2003-10-21 2004-10-21 Pompe a vide seche rotative
US10/595,482 US20080038132A1 (en) 2003-10-21 2004-10-21 Rotary Dry Vacuum Pump
JP2005515119A JPWO2005042979A1 (ja) 2003-10-21 2004-10-21 回転式ドライ真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003-361153 2003-10-21
JP2003361153 2003-10-21

Publications (1)

Publication Number Publication Date
WO2005042979A1 true WO2005042979A1 (fr) 2005-05-12

Family

ID=34543742

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2004/015639 WO2005042979A1 (fr) 2003-10-21 2004-10-21 Pompe a vide seche rotative

Country Status (7)

Country Link
US (1) US20080038132A1 (fr)
EP (1) EP1681469A1 (fr)
JP (1) JPWO2005042979A1 (fr)
KR (1) KR20060087599A (fr)
CN (1) CN1871436A (fr)
TW (1) TW200525086A (fr)
WO (1) WO2005042979A1 (fr)

Cited By (3)

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Publication number Priority date Publication date Assignee Title
WO2010134427A1 (fr) * 2009-05-20 2010-11-25 三菱重工業株式会社 Pompe à vide sèche
JP2010270657A (ja) * 2009-05-20 2010-12-02 Mitsubishi Heavy Ind Ltd ドライ真空ポンプ
WO2012014497A1 (fr) * 2010-07-30 2012-02-02 Ｊｘ日鉱日石エネルギー株式会社 Système de traitement de gaz d'échappement

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US20100269540A1 (en) * 2009-04-24 2010-10-28 Ebara International Corporation Method to Liquefy Ammonia Gas
DE102009034837A1 (de) * 2009-07-27 2011-02-17 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Gehäuse
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KR101899348B1 (ko) 2010-12-10 2018-09-17 아뜰리에 부쉬 에스.아. 진공 포장 기계용 진공 펌프
DE102016102954A1 (de) * 2016-02-19 2017-08-24 Multivac Sepp Haggenmüller Se & Co. Kg Vakuumpumpe
TWI624596B (zh) * 2017-03-15 2018-05-21 亞台富士精機股份有限公司 可被遠端監控的幫浦機台及幫浦監控系統
US10844857B2 (en) * 2018-06-19 2020-11-24 Ingersoll-Rand Industrial U.S., Inc. Compressor system with purge gas system
GB2582327B (en) * 2019-03-19 2021-10-06 Edwards S R O Control apparatus and method for supplying purge gas

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JPWO2005042979A1 (ja) 2007-05-10
EP1681469A1 (fr) 2006-07-19
CN1871436A (zh) 2006-11-29
KR20060087599A (ko) 2006-08-02
US20080038132A1 (en) 2008-02-14

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