WO2005008887A1 - Scカット水晶振動子 - Google Patents
Scカット水晶振動子 Download PDFInfo
- Publication number
- WO2005008887A1 WO2005008887A1 PCT/JP2004/010557 JP2004010557W WO2005008887A1 WO 2005008887 A1 WO2005008887 A1 WO 2005008887A1 JP 2004010557 W JP2004010557 W JP 2004010557W WO 2005008887 A1 WO2005008887 A1 WO 2005008887A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- crystal
- axis
- cut
- rotated
- mode
- Prior art date
Links
- 239000010453 quartz Substances 0.000 title abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract description 19
- 239000013078 crystal Substances 0.000 claims abstract description 60
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 230000005284 excitation Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
Definitions
- the present invention relates to an SC cut quartz crystal resonator, and more particularly to an SC cut quartz crystal resonator having excellent vibration characteristics.
- This SC-Cart crystal resonator has a cubic curve-like temperature characteristic similar to that of the AT cut, and its inflection point is around 94 ° C. Is used as a crystal oscillator of a crystal oscillator.
- the SC-cut quartz resonator is near the resonance of the C mode, which is the main vibration (indicated by the symbol C in Fig. 4), and has a B Mode (shown by B) and A mode (shown by A) are generated.
- the value of the equivalent resistance of the A-mode vibration (hereinafter abbreviated as “CI”) is larger than the CI of the C-mode, making it difficult for the oscillator to output as a signal.
- the CI of the B-mode vibration is equal to or sometimes smaller than the CI of the C-mode, and the frequency is about 1.09 times that of the C-mode and is close to each other. are doing. For this reason, when an oscillator is actually manufactured, it often oscillates in the B mode, which is the secondary vibration.
- the CI of the B mode should be larger than the CI of the C mode so that the vibration of the B mode can be suppressed to reliably excite the vibration of the C mode. Need to be kept. For this reason, B-mode vibration has been suppressed by adding a mass to the plate surface of the crystal blank to suppress unnecessary vibration, or by devising the holding position.
- the SC-cut crystal unit of the present invention has been made in view of the problems of such an SC-cut crystal unit, and the external shape of the crystal piece is cut into a special shape I dog and processed. Accordingly, an object of the present invention is to provide an SC-cut crystal resonator that can surely and reproducibly suppress the resonance in the B mode.
- the SC-cart quartz crystal resonator of the present invention rotates a plane orthogonal to the Y-axis of the crystal of the crystal about 33 ° to 35 ° about the X-axis. From this rotated position, 22 ° to about the Z-axis.
- the end face perpendicular to the Z 'axis of the strip of ice crystal elongated in the X' axis direction cut out from the plane rotated 24 ° is X, and + 7 ° to 13 ° or 17 ° to 13 ° around the axis. It is characterized by being tilted in the direction of rotation.
- the SC-cut crystal resonator is characterized in that the tilt angle is in the range of 19 ° to 11 ° or + 9 ° to 11 °. Since the SC cut quartz resonator of the present invention is processed so that the longitudinal end face of the strip-shaped SC cut quartz piece is inclined, the vibration of the B mode of the present invention can be suppressed, and even if the dog of the type I is downsized. No change in the inflection point temperature occurs. Therefore, it is possible to provide an SC-cut crystal resonator that can easily design and manufacture an oscillator, obtain good oscillation characteristics, and is inexpensive.
- FIG. 1 is a perspective view showing a cutting angle of a crystal plate of the SC force sheet of the present invention.
- FIG. 2 is a perspective view of a crystal piece cut out from the crystal plate shown in FIG.
- FIG. 3 is a perspective view showing a cutting angle of a conventional SC cut quartz plate.
- FIG. 4 is a graph showing the resonance characteristics of the SC cut quartz crystal resonator.
- FIG. 1 is a perspective view showing a cutting angle of a crystal blank 1 used for an SC cut crystal resonator of the present invention.
- the plane orthogonal to the ⁇ axis of the crystal is rotated by 33 ° to 35 ° around the X axis, and from this rotated position, 22 ° to 24 ° around the ⁇ ⁇ ⁇ axis. ° Rotate.
- the X—Z plane orthogonal to the Y axis in FIG. 1 becomes the V—X, plane.
- it rotates 33 ° to 35 ° around the X axis, and 22 ° to 24 around the Z axis from this rotated position. When rotated, it can be excited as a so-called SC-cart crystal unit.
- a strip-shaped quartz crystal strip 1 elongated in the X and axial directions is cut out from the crystal plate of the Z'-X, face. Then, an end face in the longitudinal direction of the crystal blank 1, that is, an end face (X′-Y, plane) orthogonal to the Z ′ axis is subjected to tilting processing.
- the angle at which this end face is tilted should be rotated in the direction of + 7 ° to 13 ° or 17 ° to 13 ° around the X 'axis, and the end face of the crystal blank 1 tilted in this way is X '— becomes the ⁇ "plane.
- the angle of inclination of the end face is + 7 ° to 13 ° or ⁇ 7 ° to 13 °, a good ⁇ mode suppression effect can be obtained. More preferably, the angle of inclination is between ⁇ 9 ° and 11 °.
- a pair of excitation 3 mm is formed facing the plate surface of the crystal blank. Then, the crystal blank is housed in a predetermined container and held by a suitable holding means, and the excitation electrode is led out to form a crystal resonator.
- the B-mode vibration which is a particularly harmful sub-vibration, is the vibration of the contour slip vibration system.
- the SC-cut crystal resonator of the present invention can suppress the B-mode vibration, and the C-mode, which is the main vibration, Can be reliably excited.
- the CI of the B mode will be smaller than that of a crystal piece that does not tilt the end face.
- the inflection point temperature of the SC-cut crystal resonator of 94 ° C causes the phenomenon that the crystal piece is displaced to the high temperature side when the crystal piece is miniaturized. Setting was difficult.
- the quartz piece of the present invention having an inclined end face as shown in FIG. 2 is used, the inflection point temperature of the quartz resonator is maintained at 94 ° even when the shape of the quartz piece is reduced in size. It will not be displaced to the side.
- the SC-cut crystal resonator of the present invention is useful as a crystal resonator of a thermostat-type crystal oscillator, and in particular, reliably excites C-mode vibration by pressing ⁇ -mode vibration. Suitable for use in crystal oscillators that can be used.
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/563,431 US7705524B2 (en) | 2003-07-18 | 2004-07-16 | SC cut crystal resonator |
JP2005511932A JP4516021B2 (ja) | 2003-07-18 | 2004-07-16 | Scカット水晶振動子 |
EP04747920A EP1648085A4 (en) | 2003-07-18 | 2004-07-16 | QUARTZ OSCILLATOR WITH SC CUTTER |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003-276408 | 2003-07-18 | ||
JP2003276408 | 2003-07-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005008887A1 true WO2005008887A1 (ja) | 2005-01-27 |
Family
ID=34074589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/010557 WO2005008887A1 (ja) | 2003-07-18 | 2004-07-16 | Scカット水晶振動子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7705524B2 (ja) |
EP (1) | EP1648085A4 (ja) |
JP (1) | JP4516021B2 (ja) |
CN (1) | CN100488047C (ja) |
WO (1) | WO2005008887A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100788897B1 (ko) * | 2006-02-06 | 2007-12-27 | 한국전자통신연구원 | Ofdma 시스템에서 하이브리드 arq 패킷에 대한응답 전송 방법 및 이를 위한 송수신 장치 |
CN101867353A (zh) * | 2009-04-14 | 2010-10-20 | 日本电波工业株式会社 | 晶体单元 |
JP2013162266A (ja) * | 2012-02-03 | 2013-08-19 | Seiko Epson Corp | 水晶基板、振動素子、振動子、電子デバイス、発振器、及び電子機器 |
JP2016066909A (ja) * | 2014-09-25 | 2016-04-28 | 株式会社アルバック | 水晶振動子、この水晶振動子を有するセンサヘッド、成膜制御装置、および成膜制御装置の製造方法 |
JP2016096583A (ja) * | 2016-02-08 | 2016-05-26 | セイコーエプソン株式会社 | Scカット水晶基板、振動素子、電子デバイス、発振器、及び電子機器 |
WO2022196532A1 (ja) | 2021-03-17 | 2022-09-22 | 株式会社大真空 | 水晶振動子およびその製造方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4563437B2 (ja) * | 2007-10-18 | 2010-10-13 | 日本電波工業株式会社 | 2回回転yカット板からなる水晶振動子 |
JP4600692B2 (ja) * | 2007-12-28 | 2010-12-15 | エプソントヨコム株式会社 | 水晶振動片、水晶デバイス、および水晶振動片の製造方法 |
FR2932334B1 (fr) * | 2008-06-04 | 2010-07-30 | Centre Nat Rech Scient | Resonateur hbar a integration elevee |
FR2932333B1 (fr) * | 2008-06-04 | 2010-08-13 | Centre Nat Rech Scient | Resonateur hbar a stabilite en temperature elevee |
JP6295611B2 (ja) * | 2013-11-05 | 2018-03-20 | セイコーエプソン株式会社 | 振動子、発振器、電子機器、および移動体 |
JP6613482B2 (ja) * | 2015-09-03 | 2019-12-04 | 日本電波工業株式会社 | 水晶振動子 |
JP6549452B2 (ja) * | 2015-09-03 | 2019-07-24 | 日本電波工業株式会社 | 水晶振動子 |
JP6555779B2 (ja) * | 2015-12-28 | 2019-08-07 | 日本電波工業株式会社 | Atカット水晶片及び水晶振動子 |
US11456700B1 (en) | 2021-08-20 | 2022-09-27 | Rockwell Collins, Inc. | Specifying SC and IT cut quartz resonators for optimal temperature compensated oscillator performance |
CN116346078B (zh) * | 2023-05-31 | 2023-08-01 | 成都世源频控技术股份有限公司 | 一种带模态抑制功能的表贴石英晶体谐振器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4701661A (en) * | 1985-05-28 | 1987-10-20 | Frequency Electronics, Inc. | Piezoelectric resonators having a lateral field excited SC cut quartz crystal element |
JPH04123605A (ja) * | 1990-09-14 | 1992-04-23 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
JPH05243890A (ja) * | 1991-02-28 | 1993-09-21 | Nippon Dempa Kogyo Co Ltd | Scカットの水晶振動子 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635524A (en) * | 1980-08-18 | 1981-04-08 | Morio Onoe | Quartz oscillator |
JPS59158612A (ja) * | 1983-03-01 | 1984-09-08 | Seikosha Co Ltd | 厚みすべり水晶振動子 |
JPS59193612A (ja) * | 1983-04-18 | 1984-11-02 | Murata Mfg Co Ltd | 圧電共振子およびその製造方法 |
JPH11177376A (ja) * | 1997-12-12 | 1999-07-02 | Nippon Dempa Kogyo Co Ltd | Scカットの水晶振動子 |
JP4249502B2 (ja) * | 2003-02-04 | 2009-04-02 | 日本電波工業株式会社 | 圧電結晶材料及び圧電振動子 |
-
2004
- 2004-07-16 US US10/563,431 patent/US7705524B2/en not_active Expired - Fee Related
- 2004-07-16 WO PCT/JP2004/010557 patent/WO2005008887A1/ja active Application Filing
- 2004-07-16 EP EP04747920A patent/EP1648085A4/en not_active Withdrawn
- 2004-07-16 CN CNB2004800205612A patent/CN100488047C/zh not_active Expired - Fee Related
- 2004-07-16 JP JP2005511932A patent/JP4516021B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4701661A (en) * | 1985-05-28 | 1987-10-20 | Frequency Electronics, Inc. | Piezoelectric resonators having a lateral field excited SC cut quartz crystal element |
JPH04123605A (ja) * | 1990-09-14 | 1992-04-23 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
JPH05243890A (ja) * | 1991-02-28 | 1993-09-21 | Nippon Dempa Kogyo Co Ltd | Scカットの水晶振動子 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100788897B1 (ko) * | 2006-02-06 | 2007-12-27 | 한국전자통신연구원 | Ofdma 시스템에서 하이브리드 arq 패킷에 대한응답 전송 방법 및 이를 위한 송수신 장치 |
CN101867353A (zh) * | 2009-04-14 | 2010-10-20 | 日本电波工业株式会社 | 晶体单元 |
JP2013162266A (ja) * | 2012-02-03 | 2013-08-19 | Seiko Epson Corp | 水晶基板、振動素子、振動子、電子デバイス、発振器、及び電子機器 |
JP2016066909A (ja) * | 2014-09-25 | 2016-04-28 | 株式会社アルバック | 水晶振動子、この水晶振動子を有するセンサヘッド、成膜制御装置、および成膜制御装置の製造方法 |
JP2016096583A (ja) * | 2016-02-08 | 2016-05-26 | セイコーエプソン株式会社 | Scカット水晶基板、振動素子、電子デバイス、発振器、及び電子機器 |
WO2022196532A1 (ja) | 2021-03-17 | 2022-09-22 | 株式会社大真空 | 水晶振動子およびその製造方法 |
JP2022143433A (ja) * | 2021-03-17 | 2022-10-03 | 株式会社大真空 | 水晶振動子およびその製造方法 |
JP7302618B2 (ja) | 2021-03-17 | 2023-07-04 | 株式会社大真空 | 水晶振動子およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1823471A (zh) | 2006-08-23 |
JPWO2005008887A1 (ja) | 2006-09-07 |
US20080203858A1 (en) | 2008-08-28 |
EP1648085A1 (en) | 2006-04-19 |
CN100488047C (zh) | 2009-05-13 |
EP1648085A4 (en) | 2008-09-24 |
US7705524B2 (en) | 2010-04-27 |
JP4516021B2 (ja) | 2010-08-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2005008887A1 (ja) | Scカット水晶振動子 | |
JP2007267033A (ja) | 弾性表面波素子及び弾性表面波デバイス | |
JP4997780B2 (ja) | 圧電振動片の製造方法 | |
JP3096472B2 (ja) | Scカットの水晶振動子 | |
JPH0265518A (ja) | 圧電共振子 | |
JP2009232447A (ja) | Atカット水晶振動子及びその製造方法 | |
JP2006311303A (ja) | モード結合型圧電振動子 | |
JP5435060B2 (ja) | 振動片 | |
JPH0349307A (ja) | オーバートーン用矩形水晶振動子 | |
US6924588B2 (en) | Piezoelectric crystal material and piezoelectric resonator | |
JP2003318697A (ja) | Atカット水晶振動子 | |
JP3231055B2 (ja) | Scカットの水晶振動子 | |
JP3194442B2 (ja) | Scカットの水晶振動子 | |
JP2531304Y2 (ja) | Scカットの水晶振動子 | |
JPH077363A (ja) | Scカットの水晶振動子 | |
JPH0685598A (ja) | Scカットの水晶振動子 | |
JPS5928714A (ja) | 水晶振動子 | |
JPS5912805Y2 (ja) | 幅すべり振動子 | |
JP2001007676A (ja) | 短冊形atカット水晶振動子 | |
JP2006140986A (ja) | 水晶振動子及び水晶デバイス | |
JPH06338749A (ja) | Scカットの水晶振動子 | |
JPH0818370A (ja) | 水晶振動子の製造方法 | |
JPS6313364B2 (ja) | ||
JPH05243894A (ja) | Scカットの水晶振動子を用いた発振器 | |
JP2005347869A (ja) | 表面弾性波センサー用基板及び表面弾性波センサー |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200480020561.2 Country of ref document: CN |
|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2005511932 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2004747920 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 2004747920 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 10563431 Country of ref document: US |