WO2004057266A8 - Interferometersystem für optische kohärenztomographie - Google Patents
Interferometersystem für optische kohärenztomographieInfo
- Publication number
- WO2004057266A8 WO2004057266A8 PCT/EP2003/014636 EP0314636W WO2004057266A8 WO 2004057266 A8 WO2004057266 A8 WO 2004057266A8 EP 0314636 W EP0314636 W EP 0314636W WO 2004057266 A8 WO2004057266 A8 WO 2004057266A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- interferometer system
- beam path
- measuring device
- relative speed
- relates
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10392656T DE10392656B4 (de) | 2002-12-20 | 2003-12-19 | Interferometersystem für optische Kohärenztomographie |
AU2003290103A AU2003290103A1 (en) | 2002-12-20 | 2003-12-19 | Interferometer system and measuring device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10260256.5 | 2002-12-20 | ||
DE10260256A DE10260256B9 (de) | 2002-12-20 | 2002-12-20 | Interferometersystem und Meß-/Bearbeitungswerkzeug |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2004057266A2 WO2004057266A2 (de) | 2004-07-08 |
WO2004057266A3 WO2004057266A3 (de) | 2004-11-18 |
WO2004057266A8 true WO2004057266A8 (de) | 2005-01-20 |
Family
ID=32519247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2003/014636 WO2004057266A2 (de) | 2002-12-20 | 2003-12-19 | Interferometersystem für optische kohärenztomographie |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2003290103A1 (de) |
DE (2) | DE10260256B9 (de) |
WO (1) | WO2004057266A2 (de) |
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-
2002
- 2002-12-20 DE DE10260256A patent/DE10260256B9/de not_active Expired - Lifetime
-
2003
- 2003-12-19 DE DE10392656T patent/DE10392656B4/de not_active Expired - Lifetime
- 2003-12-19 WO PCT/EP2003/014636 patent/WO2004057266A2/de not_active Application Discontinuation
- 2003-12-19 AU AU2003290103A patent/AU2003290103A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
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AU2003290103A1 (en) | 2004-07-14 |
DE10392656D2 (de) | 2005-12-22 |
WO2004057266A3 (de) | 2004-11-18 |
WO2004057266A2 (de) | 2004-07-08 |
DE10260256B4 (de) | 2005-02-17 |
DE10392656B4 (de) | 2012-06-14 |
DE10260256B9 (de) | 2007-03-01 |
DE10260256A1 (de) | 2004-07-15 |
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