WO2004032593A3 - Dünnstsubstratträger - Google Patents

Dünnstsubstratträger Download PDF

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Publication number
WO2004032593A3
WO2004032593A3 PCT/EP2003/010358 EP0310358W WO2004032593A3 WO 2004032593 A3 WO2004032593 A3 WO 2004032593A3 EP 0310358 W EP0310358 W EP 0310358W WO 2004032593 A3 WO2004032593 A3 WO 2004032593A3
Authority
WO
WIPO (PCT)
Prior art keywords
extremely thin
thin substrate
substrate support
support
embodied
Prior art date
Application number
PCT/EP2003/010358
Other languages
English (en)
French (fr)
Other versions
WO2004032593A2 (de
Inventor
Thomas Zetterer
Hauke Esemann
Silke Knoche
Claudia Booss
Steffen Astheimer
Gerhard Weber
Andreas Habeck
Clemens Ottermann
Armin Plichta
Gerd Rudas
Frank Boehm
Frank Voges
Original Assignee
Schott Glas
Zeiss Stiftung
Thomas Zetterer
Hauke Esemann
Silke Knoche
Claudia Booss
Steffen Astheimer
Gerhard Weber
Andreas Habeck
Clemens Ottermann
Armin Plichta
Gerd Rudas
Frank Boehm
Frank Voges
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE20215401U external-priority patent/DE20215401U1/de
Priority claimed from DE10330430A external-priority patent/DE10330430A1/de
Application filed by Schott Glas, Zeiss Stiftung, Thomas Zetterer, Hauke Esemann, Silke Knoche, Claudia Booss, Steffen Astheimer, Gerhard Weber, Andreas Habeck, Clemens Ottermann, Armin Plichta, Gerd Rudas, Frank Boehm, Frank Voges filed Critical Schott Glas
Priority to AU2003283248A priority Critical patent/AU2003283248A1/en
Priority to PCT/EP2003/010907 priority patent/WO2004033197A2/de
Priority to AU2003268904A priority patent/AU2003268904A1/en
Publication of WO2004032593A2 publication Critical patent/WO2004032593A2/de
Publication of WO2004032593A3 publication Critical patent/WO2004032593A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Die Erfindung betrifft einen Dünnstsubstratträger, umfassend ein Tragelement, das ein Dünnstsubstrat mit einer Dicke von weniger als 0,3 mm aufnimmt. Die Erfindung ist dadurch gekennzeichnet, dass das Tragelement als Rahmenelement ausgebildet ist, auf welches das Dünnstsubstrat ausschließlich mit mindestens einem Teilbereich seines Umfangsbereiches biegesteif aufgelegt ist. Der Auflagebereich des Rahmenelements ist dabei derart gestaltet, dass eine Durchbiegung des Dünnstsubstrats im Wesentlichen vollständig vermieden wird.
PCT/EP2003/010358 2002-10-07 2003-09-18 Dünnstsubstratträger WO2004032593A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2003283248A AU2003283248A1 (en) 2002-10-07 2003-09-18 Extremely thin substrate support
PCT/EP2003/010907 WO2004033197A2 (de) 2002-10-07 2003-10-02 Träger für substrate und verbund aus einem trägersubstrat und einem dünnstsubstrat
AU2003268904A AU2003268904A1 (en) 2002-10-07 2003-10-02 Support for substrates and compound comprising a support substrate and an extremely thin substrate

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
DE20215401U DE20215401U1 (de) 2002-10-07 2002-10-07 Verbund aus einem Dünnstsubsrat und einem Trägersubstrat mit lösbarem Verbindungsmittel
DE20215401.7 2002-10-07
DE10323303A DE10323303A1 (de) 2002-10-07 2003-05-21 Verbund aus einem Dünnsubstrat und einem Trägersubstrat mit lösbarem Verbindungsmittel
DE10323304A DE10323304A1 (de) 2002-10-07 2003-05-21 Verbund aus einem Dünnstsubstrat einem Trägersubstrat mit lösbarem Verbindungsmittel
DE10323304.0 2003-05-21
DE10323303.2 2003-05-21
DE10323301.6 2003-05-21
DE10323302A DE10323302A1 (de) 2002-10-07 2003-05-21 Vakuumunterstützte adhäsive Haltevorrichtung für Dünnstglas
DE10323301A DE10323301A1 (de) 2002-10-07 2003-05-21 Verbund aus einem Dünnsubstrat einem Trägersubstrat mit lösbarem Verbindungsmittel
DE10323302.4 2003-05-21
DE10330430A DE10330430A1 (de) 2003-07-04 2003-07-04 Dünnstsubstratträger
DE10330430.4 2003-07-04

Publications (2)

Publication Number Publication Date
WO2004032593A2 WO2004032593A2 (de) 2004-04-22
WO2004032593A3 true WO2004032593A3 (de) 2004-09-30

Family

ID=32097164

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/010358 WO2004032593A2 (de) 2002-10-07 2003-09-18 Dünnstsubstratträger

Country Status (2)

Country Link
AU (1) AU2003283248A1 (de)
WO (1) WO2004032593A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004018249B3 (de) * 2004-04-15 2006-03-16 Infineon Technologies Ag Verfahren zum Bearbeiten eines Werkstücks an einem Werkstückträger
WO2006034775A1 (de) * 2004-09-27 2006-04-06 Schott Ag Verbundstruktur aus nullausdehnungsmaterial und verfahren zur herstellung einer solchen
US9847243B2 (en) 2009-08-27 2017-12-19 Corning Incorporated Debonding a glass substrate from carrier using ultrasonic wave
EP2360721A1 (de) 2010-02-23 2011-08-24 Saint-Gobain Glass France Vorrichtung zum Positionieren von mindestens zwei Gegenständen, Anordnungen, insbesondere Mehrschichtkörperanordnungen, Anlage zum Prozessieren, insbesondere zum Selenisieren, von Gegenständen, Verfahren zum Positionieren von mindestens zwei Gegenständen
EP2360720A1 (de) * 2010-02-23 2011-08-24 Saint-Gobain Glass France Vorrichtung zum Positionieren von mindestens zwei Gegenständen, Anordnungen, insbesondere Mehrschichtkörperanordnungen, Anlage zum Prozessieren, insbesondere zum Selenisieren, von Gegenständen, Verfahren zum Positionieren von mindestens zwei Gegenständen
KR101680950B1 (ko) 2012-02-16 2016-11-29 쌩-고벵 글래스 프랑스 코팅된 기판을 처리하기 위한 처리 박스, 장치 및 방법
EP3470223A1 (de) * 2012-07-02 2019-04-17 Corning Incorporated Verfahren zur verarbeitung eines glassubstrats
DE102014224588B4 (de) 2014-12-02 2019-08-01 Heraeus Deutschland GmbH & Co. KG Verfahren zum Herstellen eines plattenförmigen metallisierten Keramik-Substrats, Träger zum Herstellen des Substrats und Verwendung des Trägers
CN105486631A (zh) * 2015-12-22 2016-04-13 三棵树涂料股份有限公司 底漆附着力的测试方法
JP6714562B2 (ja) * 2017-09-20 2020-06-24 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム
KR102249027B1 (ko) * 2019-11-01 2021-05-07 위아코퍼레이션 주식회사 웨이퍼 보트 플레이트

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6097641A (ja) * 1983-11-02 1985-05-31 Hitachi Ltd ウエハからペレツトを得る方法
JPH01289135A (ja) * 1988-05-16 1989-11-21 Hitachi Ltd 開放型ウェハキャリア治具
US4886162A (en) * 1987-02-06 1989-12-12 Sgs-Thomson Microelectronics S.P.A. Container for vacuum storing and/or shipping silicon wafers
US5169453A (en) * 1989-03-20 1992-12-08 Toyoko Kagaku Co., Ltd. Wafer supporting jig and a decompressed gas phase growth method using such a jig
JPH08222622A (ja) * 1995-02-10 1996-08-30 Hitachi Electron Eng Co Ltd ウェハキャリア
JPH0940112A (ja) * 1995-07-26 1997-02-10 Metsukusu:Kk 薄型基板搬送装置
US5890598A (en) * 1997-01-22 1999-04-06 Nec Corporation Substrate cassette
US6110285A (en) * 1997-04-15 2000-08-29 Toshiba Ceramics Co., Ltd. Vertical wafer boat
US6152507A (en) * 1997-12-16 2000-11-28 Sez Semicondcutor Equipment Zubehor Fur Die Halbleiterfertigung Ag Conveying device for thin disk-like articles

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6097641A (ja) * 1983-11-02 1985-05-31 Hitachi Ltd ウエハからペレツトを得る方法
US4886162A (en) * 1987-02-06 1989-12-12 Sgs-Thomson Microelectronics S.P.A. Container for vacuum storing and/or shipping silicon wafers
JPH01289135A (ja) * 1988-05-16 1989-11-21 Hitachi Ltd 開放型ウェハキャリア治具
US5169453A (en) * 1989-03-20 1992-12-08 Toyoko Kagaku Co., Ltd. Wafer supporting jig and a decompressed gas phase growth method using such a jig
JPH08222622A (ja) * 1995-02-10 1996-08-30 Hitachi Electron Eng Co Ltd ウェハキャリア
JPH0940112A (ja) * 1995-07-26 1997-02-10 Metsukusu:Kk 薄型基板搬送装置
US5890598A (en) * 1997-01-22 1999-04-06 Nec Corporation Substrate cassette
US6110285A (en) * 1997-04-15 2000-08-29 Toshiba Ceramics Co., Ltd. Vertical wafer boat
US6152507A (en) * 1997-12-16 2000-11-28 Sez Semicondcutor Equipment Zubehor Fur Die Halbleiterfertigung Ag Conveying device for thin disk-like articles

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 0092, no. 48 (E - 347) 4 October 1985 (1985-10-04) *
PATENT ABSTRACTS OF JAPAN vol. 0140, no. 70 (E - 0886) 8 February 1990 (1990-02-08) *
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 12 26 December 1996 (1996-12-26) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 06 30 June 1997 (1997-06-30) *

Also Published As

Publication number Publication date
WO2004032593A2 (de) 2004-04-22
AU2003283248A1 (en) 2004-05-04
AU2003283248A8 (en) 2004-05-04

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DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase
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