WO2003078950A1 - Oberflächenwellensensor - Google Patents
Oberflächenwellensensor Download PDFInfo
- Publication number
- WO2003078950A1 WO2003078950A1 PCT/DE2003/000777 DE0300777W WO03078950A1 WO 2003078950 A1 WO2003078950 A1 WO 2003078950A1 DE 0300777 W DE0300777 W DE 0300777W WO 03078950 A1 WO03078950 A1 WO 03078950A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- surface wave
- wave sensor
- sensor
- reflectors
- adhesive
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
- G01D5/485—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means using magnetostrictive devices
Definitions
- the invention relates to a wirelessly interrogable surface wave sensor.
- Top surface wave sensors that can be queried wirelessly are used in many areas today, since these sensors can transmit measurement data wirelessly without their own energy supply.
- Such sensors have long been used in pressure measurement, acceleration measurement, surface tension measurement and for measuring chemical properties. Since the measurement results of this surface wave sensor are temperature-dependent, it is necessary to carry out a temperature compensation when transmitting the measurement result in order to be able to draw conclusions about the actual measurement values.
- Such a surface wave sensor is described in EP-0619 906 B1.
- This document also shows a method for determining the current temperature of the sensor from the radio signals sent back. With the help of this temperature information, the measurement result can be corrected for the temperature influence.
- the problem with this document is that several SAW sensors are required for the method shown there.
- the essence of the invention is that an edge region of the chip area that neither compresses nor stretches under mechanical loads is used to generate a temperature difference signal.
- two reflectors are placed in this calmed edge zone of the SAW sensor at a short distance. Since these two reflectors are always at the same distance from one another regardless of the mechanical load on the sensor, the temperature of the chip can be drawn directly from the difference signal of these two reflectors. With this simple measure, only the time interval between these two signals needs to be evaluated. This time interval is then directly proportional to the current temperature of the SAW sensor.
- a surface wave sensor 1 is shown in plan view in FIG. This surface wave sensor is applied to the surface of the part to be measured using adhesive.
- the adhesive 2 elastically transmits the changes in length of the part to be measured to the surface wave sensor.
- the antenna 3 is shown schematically on the sensor, via which the electromagnetic pulses reach the SAW sensor and are sent back again. These electromagnetic waves are converted by the transducer 4 into mechanical waves that run over the SAW sensor.
- reflectors 5a, 5b are attached to the surface wave sensor.
- the area that mechanically expands and compresses during the measurement tasks of this sensor is provided with the reference number 7.
- the two edge areas 8 of the surface wave sensor are areas that are not stretched or compressed due to the mechanical properties of the adhesive and the carrier material.
- the reflectors 6a and 6b are arranged in this edge region 8.
- the distance between the reflectors 6a and 6b remains largely independent of the external load and thus always almost constant.
- this calmed area 8 corresponds to approximately 3 times the thickness of the substrate of the SAW sensor.
- One possibility of enlarging the calmed edge area 8 is to specifically omit the adhesive 2 with which the surface wave sensor is applied to the carrier material in the edge area 8. No forces are transmitted in the area without adhesive 10.
- FIG. 2 shows the measurement result of a surface wave sensor that was glued to a carrier material that was stretched for experimental purposes.
- the measurement points along the surface wave sensor are plotted on the abscissa of this diagram.
- the ordinate of this diagram shows the elongation of the surface wave sensor.
- the two calming edge zones 8, in which the sensor does not stretch under load, are represented by horizontal lines. In between is the area 7, which is proportional to the elongation of the material to be measured.
- These additional reflectors are arranged in the area of the calmed edge zones 8.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Aerials With Secondary Devices (AREA)
- Measuring Fluid Pressure (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003576914A JP2005520147A (ja) | 2002-03-14 | 2003-03-12 | 表面波センサ |
EP03717140A EP1483557A1 (de) | 2002-03-14 | 2003-03-12 | Oberflächenwellensensor |
US10/507,532 US7109632B2 (en) | 2002-03-14 | 2003-03-12 | Surface wave sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10211198.7 | 2002-03-14 | ||
DE10211198A DE10211198A1 (de) | 2002-03-14 | 2002-03-14 | Oberflächenwellensensor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003078950A1 true WO2003078950A1 (de) | 2003-09-25 |
Family
ID=27771279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2003/000777 WO2003078950A1 (de) | 2002-03-14 | 2003-03-12 | Oberflächenwellensensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US7109632B2 (de) |
EP (1) | EP1483557A1 (de) |
JP (1) | JP2005520147A (de) |
CN (1) | CN100383553C (de) |
DE (1) | DE10211198A1 (de) |
WO (1) | WO2003078950A1 (de) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7243547B2 (en) * | 2004-10-13 | 2007-07-17 | Honeywell International Inc. | MEMS SAW sensor |
US7726184B2 (en) | 2007-12-28 | 2010-06-01 | Honeywell International Inc. | Surface acoustic wave sensor and package |
US7730772B2 (en) | 2007-12-28 | 2010-06-08 | Honeywell International Inc. | Surface acoustic wave sensor and package |
US8317392B2 (en) | 2008-12-23 | 2012-11-27 | Honeywell International Inc. | Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions |
US8384524B2 (en) | 2008-11-26 | 2013-02-26 | Honeywell International Inc. | Passive surface acoustic wave sensing system |
WO2019201409A1 (de) | 2018-04-19 | 2019-10-24 | Diehl Ako Stiftung & Co. Kg | Drucktasten-bedienvorrichtung |
WO2019201408A1 (de) | 2018-04-19 | 2019-10-24 | Diehl Ako Stiftung & Co. Kg | Elektronisches haushaltsgerät |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7136683B2 (en) | 2004-03-23 | 2006-11-14 | Honeywell International Inc. | Surface acoustic wave sensor and radio frequency identification interrogator fixture |
US7000461B2 (en) * | 2004-03-23 | 2006-02-21 | Honeywell International Inc. | Patch wireless test fixture |
FR2925696B1 (fr) * | 2007-12-21 | 2011-05-06 | Senseor | Capteur passif a ondes de surface comportant une antenne integree et applications medicales utilisant ce type de capteur passif |
JP5101356B2 (ja) * | 2008-03-17 | 2012-12-19 | 日産自動車株式会社 | 圧力センサおよびこれを備えた圧力測定装置 |
US8479581B2 (en) | 2011-05-03 | 2013-07-09 | General Electric Company | Device and method for measuring pressure on wind turbine components |
US9702772B2 (en) | 2014-03-26 | 2017-07-11 | Mnemonics, Inc. | Surface acoustic wave (SAW) based strain sensor |
CN104567963A (zh) * | 2015-01-16 | 2015-04-29 | 王东方 | 针对复杂被测体的声表面波无线传感器解决方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6182131A (ja) * | 1984-09-28 | 1986-04-25 | Shimadzu Corp | 表面弾性波圧力センサ |
EP0619906A1 (de) * | 1992-01-03 | 1994-10-19 | Siemens Ag | Passiver oberflächenwellen-sensor, der drahtlos abfrabgar ist. |
DE19514342C1 (de) * | 1995-04-18 | 1996-02-22 | Siemens Ag | Stromwandler, geeignet zur Stromstärkemessung an/in auf Hochspannung liegenden elektrischen Einrichtungen |
WO1999034168A1 (de) * | 1997-12-23 | 1999-07-08 | Siemens Aktiengesellschaft | Messanordnung und verfahren zur erfassung einer messgrösse unter zuhilfenahme von prozessenergie |
EP0936447A1 (de) * | 1998-02-12 | 1999-08-18 | DaimlerChrysler AG | System und Verfahren zur Materialprüfung von Werkstoffen, sowie Werkstoffe und Verfahren zu seiner Herstellung |
DE10018621A1 (de) * | 2000-04-14 | 2001-10-31 | Siemens Ag | Fernmess-Vorrichtung und -Verfahren |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1982421A (en) | 1933-02-08 | 1934-11-27 | Cleveland Twist Drill Co | Nitrided article of manufacture |
EP0295111B1 (de) | 1987-06-11 | 1994-11-02 | Aichi Steel Works, Ltd. | Stahl mit hoher Abnutzungsbeständigkeit |
JP3404899B2 (ja) | 1994-07-19 | 2003-05-12 | 日本精工株式会社 | 転がり軸受 |
WO1996033423A1 (de) * | 1995-04-18 | 1996-10-24 | Siemens Aktiengesellschaft | Funkabfragbarer sensor in oberflächenwellentechnik |
US6208062B1 (en) * | 1997-08-18 | 2001-03-27 | X-Cyte, Inc. | Surface acoustic wave transponder configuration |
JPH1171642A (ja) | 1997-08-29 | 1999-03-16 | Daido Steel Co Ltd | 摺動部材 |
FR2821905B1 (fr) | 2001-03-06 | 2003-05-23 | Snfa | Roulement a rouleaux cylindriques en acier de nitruration |
-
2002
- 2002-03-14 DE DE10211198A patent/DE10211198A1/de not_active Withdrawn
-
2003
- 2003-03-12 EP EP03717140A patent/EP1483557A1/de not_active Withdrawn
- 2003-03-12 US US10/507,532 patent/US7109632B2/en not_active Expired - Fee Related
- 2003-03-12 JP JP2003576914A patent/JP2005520147A/ja active Pending
- 2003-03-12 WO PCT/DE2003/000777 patent/WO2003078950A1/de active Application Filing
- 2003-03-12 CN CNB038060450A patent/CN100383553C/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6182131A (ja) * | 1984-09-28 | 1986-04-25 | Shimadzu Corp | 表面弾性波圧力センサ |
EP0619906A1 (de) * | 1992-01-03 | 1994-10-19 | Siemens Ag | Passiver oberflächenwellen-sensor, der drahtlos abfrabgar ist. |
US6144332A (en) * | 1992-01-03 | 2000-11-07 | Siemensn Aktiengesellschaft | Passive surface wave sensor which can be wirelessly interrogated |
DE19514342C1 (de) * | 1995-04-18 | 1996-02-22 | Siemens Ag | Stromwandler, geeignet zur Stromstärkemessung an/in auf Hochspannung liegenden elektrischen Einrichtungen |
WO1999034168A1 (de) * | 1997-12-23 | 1999-07-08 | Siemens Aktiengesellschaft | Messanordnung und verfahren zur erfassung einer messgrösse unter zuhilfenahme von prozessenergie |
EP0936447A1 (de) * | 1998-02-12 | 1999-08-18 | DaimlerChrysler AG | System und Verfahren zur Materialprüfung von Werkstoffen, sowie Werkstoffe und Verfahren zu seiner Herstellung |
DE10018621A1 (de) * | 2000-04-14 | 2001-10-31 | Siemens Ag | Fernmess-Vorrichtung und -Verfahren |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7243547B2 (en) * | 2004-10-13 | 2007-07-17 | Honeywell International Inc. | MEMS SAW sensor |
US7726184B2 (en) | 2007-12-28 | 2010-06-01 | Honeywell International Inc. | Surface acoustic wave sensor and package |
US7730772B2 (en) | 2007-12-28 | 2010-06-08 | Honeywell International Inc. | Surface acoustic wave sensor and package |
US8384524B2 (en) | 2008-11-26 | 2013-02-26 | Honeywell International Inc. | Passive surface acoustic wave sensing system |
US8317392B2 (en) | 2008-12-23 | 2012-11-27 | Honeywell International Inc. | Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions |
WO2019201409A1 (de) | 2018-04-19 | 2019-10-24 | Diehl Ako Stiftung & Co. Kg | Drucktasten-bedienvorrichtung |
WO2019201408A1 (de) | 2018-04-19 | 2019-10-24 | Diehl Ako Stiftung & Co. Kg | Elektronisches haushaltsgerät |
Also Published As
Publication number | Publication date |
---|---|
CN1685205A (zh) | 2005-10-19 |
US20050062364A1 (en) | 2005-03-24 |
JP2005520147A (ja) | 2005-07-07 |
EP1483557A1 (de) | 2004-12-08 |
DE10211198A1 (de) | 2003-09-25 |
US7109632B2 (en) | 2006-09-19 |
CN100383553C (zh) | 2008-04-23 |
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