CN100383553C - 表面波传感器 - Google Patents

表面波传感器 Download PDF

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Publication number
CN100383553C
CN100383553C CNB038060450A CN03806045A CN100383553C CN 100383553 C CN100383553 C CN 100383553C CN B038060450 A CNB038060450 A CN B038060450A CN 03806045 A CN03806045 A CN 03806045A CN 100383553 C CN100383553 C CN 100383553C
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wave sensor
surface wave
sensor
bonding agent
reverberator
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CN1685205A (zh
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亨利范德·诺科
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IHO Holding GmbH and Co KG
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FAG Kugelfischer AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G01D5/485—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means using magnetostrictive devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Aerials With Secondary Devices (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

本发明涉及一种表面波传感器(1)，包括天线(3)、换能器(4)和反射器(5a和5b)，其中在所述表面波传感器(1)上的一个稳定的边缘区域(8)内设置附加的反射器(6a，6b)，以反射用于分析当前温度的信号。

Description

表面波传感器
技术领域
本发明涉及一种可无线应答的表面波传感器。
背景技术
可无线应答的表面波传感器(OFW传感器)目前在许多领域中得到了应用，因为这种传感器无需自身供给能量就能实现无线的测量数据获取。因此长久以来这种传感器就被应用在压力测量、加速度测量、表面电压测量以及对于化学特性的测量中。由于这种表面波传感器的测量结果与温度有关，在获取测量结果时必须进行温度补偿，以能够得到实际的测量值。在EP-0619906B1中描述了一种这样的表面波传感器。同时该文献提供了一种方法，可以由发送回的无线信号获得传感器的当前温度。借助于该温度信息可以对测量结果中的温度影响进行校正。该文献的问题在于，在所述的方法中需要多个OFW传感器。
发明目的
本发明的目的在于提供一种表面波传感器，利用该传感器可以通过最简单的方法来获取温度或实现温度补偿。
发明内容
上述任务通过权利要求1的特征部分所述技术特征来解决。
本发明的核心在于，利用了芯片表面的边缘区域来产生温度差信号，所述边缘区域在机械负荷下既不会受到挤压也不会被拉长。为此目的，在OFW传感器的这种稳定的边缘区域中以很短的间隔设置了两个反射器。由于这两个反射器与传感器的机械负荷无关地相互始终具有相同的间隔，可以由这两个反射器的差信号直接得到芯片的温度。通过这种简单的措施，只需要分析这两个信号之间的时间间隔。这个时间间隔与OFW传感器的当前温度成正比。
对附图的详细说明
图1中示出了一个表面波传感器1的俯视图。该表面波传感器通过粘合剂设置到要测量的部位的表面上。粘合剂2将所要测量的部位的长度变化以有弹性的方式传递到表面波传感器上。在该传感器上简要地示出了天线3，通过所述天线3使电磁脉冲到达OFW传感器，并再次被发射回去。这种电磁波由换能器4转换成机械波，所述机械波在OFW传感器上运行。根据所要测量的任务，反射器5a，5b被设置在表面波传感器上。在传感器的测量任务中受到机械拉伸和挤压的区域用附图标记7来表示。表面波传感器的两个边缘区域8由于粘合剂和载体材料的机械特性而不会受到拉伸或挤压。
在边沿区域8中设置了反射器6a和6b。反射器6a和6b之间的间隔与外部负荷无关地在最大程度上始终保持近乎恒定。在实际的试验中发现，所述稳定的区域8大约为OFW传感器的载体材料厚度的3倍。将稳定的边缘区域8扩大的可能性在于，使表面波传感器设置在载体材料上的粘合剂2在边缘区域8内可以有目的地去除。在没有粘合剂的区域10中将不受力。
在图2中示出了粘合在载体材料上的表面波传感器的测量结果，所述载体材料为了试验的目的而被拉长了。在该图的横坐标中绘出了沿着表面波传感器的测量点。在该图的纵坐标中示出了表面波传感器的拉伸。两个稳定的边缘区域8(在该区域内传感器在负荷作用下未受到拉伸)用水平线来表示。在其之间是区域7，它与要测量的材料的拉伸成正比关系。在所述边缘区域8的该区域内设置了附加的反射器。
附图标记清单
1   表面波传感器
2   粘合剂
3   天线
4   换能器
5   用于任务的反射器5a，5b
6   用于温度补偿的反射器6a，6b
7   OFW传感器的受到拉伸的区域
8   OFW传感器的稳定的边缘区域
9   OFW传感器的载体材料的厚度
10  没有粘合剂的区域(可选)

Claims (3)

1.表面波传感器(1)，包括天线(3)、换能器(4)和反射器(5a和5b)，其特征在于，在所述表面波传感器(1)上的稳定的边缘区域(8)内设置附加的反射器(6a，6b)，以反射用于分析当前温度的信号。
2.如权利要求1所述的表面波传感器，特征在于，所述表面波传感器借助于粘合剂(2)固定在要测量的载体材料上。
3.如权利要求1所述的表面波传感器，特征在于，通过粘合剂(2)的粘合表面或没有粘合剂的区域(10)来扩大所述稳定的边缘区域(8)。
CNB038060450A 2002-03-14 2003-03-12 表面波传感器 Expired - Fee Related CN100383553C (zh)

Applications Claiming Priority (2)

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DE10211198A DE10211198A1 (de) 2002-03-14 2002-03-14 Oberflächenwellensensor
DE10211198.7 2002-03-14

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CN100383553C true CN100383553C (zh) 2008-04-23

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US (1) US7109632B2 (zh)
EP (1) EP1483557A1 (zh)
JP (1) JP2005520147A (zh)
CN (1) CN100383553C (zh)
DE (1) DE10211198A1 (zh)
WO (1) WO2003078950A1 (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7000461B2 (en) * 2004-03-23 2006-02-21 Honeywell International Inc. Patch wireless test fixture
US7136683B2 (en) 2004-03-23 2006-11-14 Honeywell International Inc. Surface acoustic wave sensor and radio frequency identification interrogator fixture
US7243547B2 (en) * 2004-10-13 2007-07-17 Honeywell International Inc. MEMS SAW sensor
FR2925696B1 (fr) * 2007-12-21 2011-05-06 Senseor Capteur passif a ondes de surface comportant une antenne integree et applications medicales utilisant ce type de capteur passif
US7726184B2 (en) 2007-12-28 2010-06-01 Honeywell International Inc. Surface acoustic wave sensor and package
US7730772B2 (en) 2007-12-28 2010-06-08 Honeywell International Inc. Surface acoustic wave sensor and package
JP5101356B2 (ja) * 2008-03-17 2012-12-19 日産自動車株式会社 圧力センサおよびこれを備えた圧力測定装置
US8384524B2 (en) 2008-11-26 2013-02-26 Honeywell International Inc. Passive surface acoustic wave sensing system
US8317392B2 (en) 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
US8479581B2 (en) 2011-05-03 2013-07-09 General Electric Company Device and method for measuring pressure on wind turbine components
US9702772B2 (en) 2014-03-26 2017-07-11 Mnemonics, Inc. Surface acoustic wave (SAW) based strain sensor
CN104567963A (zh) * 2015-01-16 2015-04-29 王东方 针对复杂被测体的声表面波无线传感器解决方法
EP3782285A1 (de) 2018-04-19 2021-02-24 Diehl AKO Stiftung & Co. KG Drucktasten-bedienvorrichtung
WO2019201408A1 (de) 2018-04-19 2019-10-24 Diehl Ako Stiftung & Co. Kg Elektronisches haushaltsgerät

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182131A (ja) * 1984-09-28 1986-04-25 Shimadzu Corp 表面弾性波圧力センサ
CN1181814A (zh) * 1995-04-18 1998-05-13 西门子公司 无线问答表面波技术传感器
US5966008A (en) * 1995-04-18 1999-10-12 Siemens Aktiengesellschaft Radio-interrogated, surface-wave technology current transformer for high-voltage systems
US6144332A (en) * 1992-01-03 2000-11-07 Siemensn Aktiengesellschaft Passive surface wave sensor which can be wirelessly interrogated
US6208062B1 (en) * 1997-08-18 2001-03-27 X-Cyte, Inc. Surface acoustic wave transponder configuration

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1982421A (en) 1933-02-08 1934-11-27 Cleveland Twist Drill Co Nitrided article of manufacture
EP0295111B1 (en) 1987-06-11 1994-11-02 Aichi Steel Works, Ltd. A steel having good wear resistance
JP3404899B2 (ja) 1994-07-19 2003-05-12 日本精工株式会社 転がり軸受
JPH1171642A (ja) 1997-08-29 1999-03-16 Daido Steel Co Ltd 摺動部材
WO1999034168A1 (de) * 1997-12-23 1999-07-08 Siemens Aktiengesellschaft Messanordnung und verfahren zur erfassung einer messgrösse unter zuhilfenahme von prozessenergie
DE19805584C2 (de) * 1998-02-12 2000-04-13 Daimler Chrysler Ag System und Verfahren zur Materialüberprüfung von Werkstoffen, sowie Werkstoff und Verfahren zu seiner Herstellung
DE10018621A1 (de) * 2000-04-14 2001-10-31 Siemens Ag Fernmess-Vorrichtung und -Verfahren
FR2821905B1 (fr) 2001-03-06 2003-05-23 Snfa Roulement a rouleaux cylindriques en acier de nitruration

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182131A (ja) * 1984-09-28 1986-04-25 Shimadzu Corp 表面弾性波圧力センサ
US6144332A (en) * 1992-01-03 2000-11-07 Siemensn Aktiengesellschaft Passive surface wave sensor which can be wirelessly interrogated
CN1181814A (zh) * 1995-04-18 1998-05-13 西门子公司 无线问答表面波技术传感器
US5966008A (en) * 1995-04-18 1999-10-12 Siemens Aktiengesellschaft Radio-interrogated, surface-wave technology current transformer for high-voltage systems
US6208062B1 (en) * 1997-08-18 2001-03-27 X-Cyte, Inc. Surface acoustic wave transponder configuration

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JP2005520147A (ja) 2005-07-07
US20050062364A1 (en) 2005-03-24
CN1685205A (zh) 2005-10-19
US7109632B2 (en) 2006-09-19
EP1483557A1 (de) 2004-12-08
DE10211198A1 (de) 2003-09-25
WO2003078950A1 (de) 2003-09-25

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