WO2003040432A1 - Nickel-based surface treatment films excellent in heat-resistant adhesion to resin - Google Patents

Nickel-based surface treatment films excellent in heat-resistant adhesion to resin Download PDF

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Publication number
WO2003040432A1
WO2003040432A1 PCT/JP2002/010825 JP0210825W WO03040432A1 WO 2003040432 A1 WO2003040432 A1 WO 2003040432A1 JP 0210825 W JP0210825 W JP 0210825W WO 03040432 A1 WO03040432 A1 WO 03040432A1
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Prior art keywords
nickel
surface treatment
based surface
treatment film
phosphorus
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PCT/JP2002/010825
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French (fr)
Japanese (ja)
Inventor
Jun Kawaguchi
Hiroki Hayashi
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Nihon Parkerizing Co., Ltd.
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Publication date
Application filed by Nihon Parkerizing Co., Ltd. filed Critical Nihon Parkerizing Co., Ltd.
Priority to KR10-2004-7005110A priority Critical patent/KR20040054703A/en
Publication of WO2003040432A1 publication Critical patent/WO2003040432A1/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating

Definitions

  • the present invention relates to a nickel-based surface treatment film formed on a surface of a metal substrate in order to provide a very strong adhesive force when bonding the substrate, particularly a metal substrate to a resin. . More specifically, the present invention relates to a nickel-based surface treatment film that can maintain excellent adhesive strength even when the metal-resin joined body is placed in a high temperature environment of 200 ° C. to 300 ° C. . Background art
  • thermosetting resins such as epoxy resin and polyimide resin or thermoplastic resin with high molding temperature used in such fields
  • the entire part is kept at 200 ° C to 300 ° C. Exposure to temperatures as high as 0 ° C is required.
  • soldering is used when mounting active components such as semiconductor devices and passive components such as LCRs.However, lead soldering cannot be used due to recent environmental issues, so the solder reflow temperature is becoming increasingly high. It is becoming.
  • a typical example is a copper oxide treatment called “black dyeing”.
  • the former involves contacting with a phosphoric acid aqueous solution in which a heavy metal having a very low solubility product with tertiary phosphoric acid, such as zinc, is dissolved.
  • a strong alkaline aqueous solution containing an appropriate oxidizing agent and boiled.
  • Japanese Patent Application Laid-Open No. 9-209916 and Japanese Patent Application Laid-Open No. 9-172125 the adhesion is improved by performing a chromate treatment on the surface of the metal substrate. I'm making it.
  • Japanese Patent Application Laid-Open No. 2000-183032 discloses a method of forming a special chromium compound layer having a large number of fine flake-like projections on the surface by using an electrolytic method. I have.
  • the present invention has been made to solve the above problems of the prior art, and an object of the present invention is to provide a method for manufacturing a metal substrate and a resin without using a substance causing environmental pollution such as hexavalent chromium.
  • An object of the present invention is to provide a surface-treated film having excellent adhesiveness with a coating, particularly at high temperatures.
  • the present inventors have conducted intensive studies to solve the above problems of the prior art, and as a result, have focused on nickel metal which is generally excellent in heat resistance and stability over time and nickel oxide formed on its surface.
  • the introduction of a third element into them has led to the discovery of a new nickel-based surface treatment film that is extremely excellent in adhesion to resins.
  • the present invention relates to a nickel-based surface treatment film having a two-layer structure formed on a target material, wherein nickel and phosphorus are provided in a lower layer in contact with the surface of the material, and nickel, oxygen and Provided is a nickel-based surface treatment film having excellent heat-resistant adhesion to a resin characterized by containing phosphorus.
  • boron can be used as an element instead of phosphorus contained in the nickel-based surface treatment film of the present invention.
  • phosphorus and boron may coexist.
  • the content ratio of phosphorus and / or boron to nickel in the nickel-based surface treatment film is more preferably such that the content ratio of the upper layer is larger than that of the lower layer, that is, the following relationship is satisfied.
  • the upper layer of the nickel-based surface treatment film preferably has a columnar structure, and more preferably has a fine gap between the columns of the columnar structure.
  • the nickel-based surface treatment film of the present invention is preferably formed on copper or a copper alloy.
  • the nickel-based surface treatment film of the present invention preferably has a gray, gray-black or black appearance.
  • the nickel-based surface treatment film of the present invention has a two-layer structure in which metal nickel and phosphorus, Z or boron are disposed on the lower layer in contact with the surface of the material, that is, an upper layer further includes a layer containing oxygen.
  • the target material is particularly limited as long as the metallic nickel can be formed with sufficient adhesion to the target material. Not determined. However, in the field of electronic and electrical components, in particular, heat resistance between copper or a copper alloy and a resin is often required, so copper will be mainly described as a target material.
  • FIG. 1 shows a cross-sectional scanning electron microscope (SEM) image of the nickel-based surface treatment film of the present invention
  • FIG. 2 shows a surface SEM image thereof.
  • Reference numeral 1 in FIG. 1 indicates an upper columnar structure (including nickel, oxygen, and phosphorus) of the nickel-based surface treatment film of the present invention
  • reference numeral 2 in FIG. indicates a copper substrate.
  • FIG. 2 shows a surface SEM image (X1000) of the nickel-based surface treatment film of the present invention.
  • the upper layer of the surface treatment film of the present invention has a columnar structure, and fine gaps are observed between the columns (comb structure). Therefore, when this is observed from the surface (Fig. 2), although it is irregular, it is observed as extremely fine irregularities on the order of several 10 O nm to several 10 O nm, and it is a huge, very effective when bonding with resin. A substantial surface area can be obtained.
  • the nickel in the upper layer is in an oxidized state and its thickness is about 50 O nm, but the oxide formed on the mere metallic nickel is thinner than this, and the present invention Is not formed.
  • Such a form can be obtained by introducing the third element introduced in the present invention, that is, phosphorus and / or boron. Empirically, it is preferred that these third elements range from 2% to 50% by weight. If the content is less than 2% by weight, such a form cannot be obtained, and if the content exceeds 50% by weight, formation of a nickel film having such a composition becomes gradually difficult as the content increases. That is, it is economically disadvantageous.
  • the height of the upper columnar structure of the nickel-based surface treatment film of the present invention is preferably in the range of 50 to 300 orchids. If it is less than 5 O nm, fine irregularities on the surface will not be sufficiently formed, and if it exceeds 300 O nm, the irregularities will be coarse.
  • the thickness of the lower metallic nickel layer is not particularly limited. However, in order to sufficiently cover the surface of the target material without exposing it, it is preferable that the length is 0.5 m or more. Good. Also, since unnecessary thick films are economically disadvantageous, an upper limit of 5 / m would be sufficient.
  • the appearance of the nickel-based surface treatment film of the present invention is gray, gray-black to black. This seems to be due to the columnar structure with gaps absorbing visible light as shown in FIGS. 1 and 2, which is particularly preferable in the field of electronic and electrical components.
  • the adhesive surface surface treated film surface of the present invention
  • the resin from the copper wiring pattern side, if it shows a black color, the contrast with the pattern becomes clear, and the inspection of the pattern becomes optical. This is advantageous when it is performed on a regular basis.
  • the nickel-based surface treatment film of the present invention can be formed by forming a metal nickel layer on a target material by various methods and then oxidizing the surface.
  • a physical method such as PVD can be used to form the nickel metal layer
  • a wet surface treatment method such as an electroplating method or an electroless plating method is superior in mass productivity.
  • a plating method for co-depositing the third element will be described.
  • hypophosphorous acid or phosphorous acid may be further added to a well-known pet bath.
  • electroless plating a commercially available type using hypophosphorous acid as a reducing agent may be used.
  • an electroless plating bath using a boron-containing reducing agent such as DMAB (dimethylamporane) may be used.
  • DMAB dimethylamporane
  • phosphorus and boron can be co-deposited at the same time.
  • carbon, nitrogen, sulfur and zinc can be co-deposited in addition to phosphorus and / or boron.
  • these methods work in a more favorable direction. For example, it becomes possible by introducing the additives described below.
  • a zinc compound such as zinc carbonate, zinc oxide, zinc chloride, and zinc sulfate may be added.
  • the copper surface may be cleaned and then directly electroplated.
  • a bath using an acid as a reducing agent copper cannot be applied as it is because it has no catalytic activity for hypophosphorous acid.
  • a small amount of palladium plating may be applied as a pretreatment by plating with palladium or the like, and electric nickel plating may be performed thinly (about submicron) as strike plating, followed by electroless nickel plating.
  • a columnar texture layer is formed on the surface.
  • an appropriate oxidizing agent such as nitric acid, permanganic acid, ferric ion or hydrogen peroxide may be added to a base of phosphoric acid, sulfuric acid, or hydrochloric acid.
  • the anode may be electrolyzed in the base aqueous acid solution.
  • the third element such as phosphorus introduced into the nickel-based surface treatment film of the present invention generally makes the crystal of metallic nickel finer, It is thought that this results in the formation of the characteristic columnar texture layer of the present invention as a result of miniaturizing the distribution state of the anode and the power source of the local battery formed by the oxidation treatment. It is.
  • the content ratio of the third element such as phosphorus to nickel is larger in the upper layer than in the lower layer. In other words, this suggests that nickel is more preferentially dissolved by the oxidation treatment, and that phosphorus and the like remain.
  • the oxygen contained in the columnar structure in the upper layer is introduced along with such an oxidation treatment, and the content of the oxygen increases in the surface layer and decreases toward the lower layer.
  • the resin to be bonded to the nickel-based surface treatment film of the present invention is not particularly limited. However, in the field of electronic and electrical components, epoxy resins and polyimide resins are frequently used and are the main object of the present invention. From the viewpoint of adhesion, a resin having a lower glass transition temperature can be softened at a high temperature and can reduce the difference in coefficient of thermal expansion between a metal and a resin. However, such a resin has a lower glass transition temperature because the heat resistance of the resin itself is reduced. Empirically, the nickel-based surface treatment film of the present invention is particularly effective for such a resin having a high glass transition temperature.
  • FIG. 1 shows a cross-sectional SEM image (X3000) of the nickel-based surface treatment film of the present invention.
  • FIG. 2 shows a surface SEM image (X1000) of the nickel-based surface treatment film of the present invention.
  • the phosphorus content becomes 9% by weight. It was immersed in the electroless plating bath prepared as described above to form a 5 ⁇ m electroless Ni-P alloy layer. Furthermore, this was immersed in an oxidation treatment solution in which 75% phosphoric acid and 677.5% nitric acid were mixed at a volume ratio of 90:10 at 40 ° C for 3 minutes. A nickel layer in which phosphorus was concentrated was formed on the surface of the alloy layer. The surface after the oxidation treatment had a beautiful black appearance with no gloss.
  • FIG. 1 and FIG. 2 are for the first embodiment.
  • a polyimide adhesive (“Neoflex double-sided adhesive sheet” manufactured by Mitsui Chemicals, Inc.) was adhered to the copper plate having been subjected to the nickel-based surface treatment to a thickness of 50 m.
  • a copper foil of ⁇ m was arranged and press-bonded under the conditions of a pressing pressure of 50 kg / cm 2 , a heating temperature of 250 ° C, and a heating time of 2 hours.
  • This sample was cut into 5 mm squares, left in a heated and moist environment at 85 ° C and 85% RH for 24 hours to promote deterioration, and floated in a molten solder bath at 270 ° C. As a result, no longer than 300 seconds was observed.
  • the details of the plating bath and the processing conditions used in Example 1 are described below.
  • the strike nickel plating is performed in a hot water bath, that is, in a reagent bath (nickel sulfate: 330 gZL, nickel chloride: 45 gZL, boric acid: 38 g / L).
  • the test was performed at a bath temperature of 50 ° C. with a nickel plate as an anode and a cathode current density of 5 A / dm 2 .
  • Electroless plating bath Sodium hypophosphite: 0.15 mol ZL, ammonium sulfate: 0.5 mol / L, trisodium citrate: 0.2 mol / L, nickel sulfate: 0
  • Each of the reagents was dissolved in deionized water to a concentration of 0.1 m1 / L, and the pH was adjusted to 9 by adding caustic soda.
  • the electroless Ni-P alloy plating bath adjusted in this way was heated to 90 ° C to reduce the electroless plating. Then, the Ni-P alloy layer was formed.
  • Example 2 The same test as in Example 1 was performed using the following electroless Ni-B alloy plating bath instead of the electroless Ni-P alloy plating bath.
  • nickel chloride 0.126 mol ZL
  • DMA B 0.06 mol / L
  • malonic acid 0.378 mol / L
  • TIN ⁇ 3 The reagents were respectively dissolved in deionized water so as to have a concentration of 70 mg / L, and the pH was adjusted to 6 with aqueous ammonia.
  • the electroless Ni-B alloy plating bath thus adjusted was heated to 70 ° C and used.
  • the boron content in the obtained Ni_B alloy film was 2.8% by weight.
  • Example 2 This was subjected to an oxidation treatment in the same manner as in Example 1 to give a gray-black appearance. Similarly, after bonding to a copper foil via polyimide adhesive and placing it in a heated and humid environment, the heat resistance of the solder was examined, and blistering occurred in the copper foil in 240 seconds.
  • Example phosphorous acid 1 0 g / L was added to the Wa Tsu preparative bath for scan trike plated used in 1, temperature 4 0 ° C, current density: cathode electrolysis performed at 5 A / dm 2 conditions, A Ni-P alloy film having a phosphorus content of 10% by weight was formed at 5 ⁇ m.
  • a beautiful black appearance was exhibited.
  • a sample similar to that of Example 1 was prepared and evaluated, and no abnormality was found in the solder heat resistance after 300 seconds.
  • Example 1 Using the Ni strike plating bath used in Example 1 as it was, a 3 ⁇ m nickel plating was formed, and the same oxidation treatment as in Example 1 was performed. However, although the gloss was slightly lost, it had an almost white appearance.
  • the same sample as in Example 1 was prepared and evaluated. As a result, the adhesive layer was peeled off within 2 to 3 seconds, and the adhesive layer was peeled off.
  • the nickel-based surface treatment film of the present invention when bonding a metal substrate and a resin, it is possible to impart excellent wet resistance and high-temperature adhesion at high temperatures. High reliability can be provided. Further, as an incidental effect, the surface treatment film of the present invention has a dull black appearance, so that a good contrast can be obtained when optically inspecting electronic and electrical components. To improve the detection accuracy.

Abstract

A nickel-based surface treatment film which is excellent in heat-resistant adhesion to a resin and has a two-layered structure formed on a subject material, characterized by containing nickel and phosphorus in the lower layer being in contact with the material and containing nickel, oxygen and phosphorus in the upper layer provided thereon, or containing nickel and boron in the lower layer and containing nickel, oxygen and boron in the upper layer provided thereon, or containing nickel, phosphorus and boron in the lower layer and containing nickel, oxygen, phosphorus and boron in the upper layer provided thereon.

Description

明細書  Specification
樹脂との耐熱接着性に優れたニッケル系表面処理皮膜 技術分野 Nickel-based surface treatment film with excellent heat-resistant adhesion to resin
本発明は、 対象とする基材、 特に金属基材と樹脂とを接着する際に、 きわ めて強力な接着力を提供するために金属基材表面に形成されるニッケル系表 面処理皮膜に関する。 より詳細に述べるならば、 前記金属一樹脂接合体が 2 0 0 °C〜 3 0 0 °Cといった高温環境下に置かれても優れた接着力を保持する ことができるニッケル系表面処理皮膜に関する。 背景技術  The present invention relates to a nickel-based surface treatment film formed on a surface of a metal substrate in order to provide a very strong adhesive force when bonding the substrate, particularly a metal substrate to a resin. . More specifically, the present invention relates to a nickel-based surface treatment film that can maintain excellent adhesive strength even when the metal-resin joined body is placed in a high temperature environment of 200 ° C. to 300 ° C. . Background art
プリント配線板、 リードフレーム、 L S Iなどの電子電気部品には、 金属 と樹脂との接合部分が多く使用されている。 特に、 このような分野で用いら れるエポキシ樹脂ゃポリイミ ド樹脂などの熱硬化性樹脂または成形温度の高 い熱可塑性樹脂では、 これら樹脂を成形する際に部品全体を 2 0 0 °C〜3 0 0 °Cといった高温にさらす必要がある。 また、 樹脂上に接着された銅箔で配 線パターンを形成するために、 有機溶剤、 酸およびアルカリなどの化学薬品 と接触するといつた過酷な製造工程を経る必要がある。 さらに、 半導体素子 などの能動部品、 L C Rなどの受動部品を実装する際には、 半田付けが用い られるが、 昨今の環境問題から鉛半田が使用できなくなるため、 半田リフロ 一温度はますます高温になりつつある。  Electronic and electrical components such as printed wiring boards, lead frames, and LSIs often use joints between metal and resin. In particular, in the case of thermosetting resins such as epoxy resin and polyimide resin or thermoplastic resin with high molding temperature used in such fields, when molding these resins, the entire part is kept at 200 ° C to 300 ° C. Exposure to temperatures as high as 0 ° C is required. In addition, in order to form a wiring pattern with copper foil adhered on a resin, it is necessary to go through a severe manufacturing process that comes into contact with chemicals such as organic solvents, acids and alkalis. In addition, soldering is used when mounting active components such as semiconductor devices and passive components such as LCRs.However, lead soldering cannot be used due to recent environmental issues, so the solder reflow temperature is becoming increasingly high. It is becoming.
このような状況において、 金属基材と樹脂との接着性が劣ると、 特に高温 度では金属面に吸着していた水分や製造工程で接着界面に吸収された水分が 膨張して金属基材表面と樹脂との剥離を促し、 膨れなどを生じて内部の耐食 性を損なったり、 場合によっては樹脂が割れたり、 配線パターンが破壌され る結果となる。 金属基材と樹脂との接着性を向上させるには、 金属表面を機 械的に粗面化し、 いわゆるアンカーを形成する方法が古くから行われている が、 該してこのような機械加工は生産性が悪く高コストになりがちなのと、 加工の際に発生する微粒子が電子電気部品の精密性を損なうことが多い。 従 つて、 現実的には金属基材表面側に何らかの表面処理を行うことが一般的で める。 In such a situation, if the adhesion between the metal substrate and the resin is poor, especially at high temperatures, the moisture adsorbed on the metal surface and the water absorbed at the bonding interface during the manufacturing process expand and the surface of the metal substrate is expanded. This causes swelling, etc., which impairs the internal corrosion resistance, and in some cases, the resin is cracked, and the wiring pattern is broken. The method of mechanically roughening the metal surface and forming a so-called anchor has long been used to improve the adhesion between the metal substrate and the resin. However, such machining tends to result in poor productivity and high cost, and the fine particles generated during the machining often impair the precision of electronic / electric parts. Therefore, in practice, it is generally possible to perform some surface treatment on the metal substrate surface side.
例えば、 鉄鋼材料においてはリン酸塩処理が、 銅および銅合金においては For example, phosphating in steel materials, copper and copper alloys
「黒染め」と言われる酸化銅処理が代表的である。 前者は、 亜鉛などの第 3 リ ン酸との溶解度積のきわめて小さな重金属を溶解させたリン酸酸性水溶液に 接触させる方法、 後者は、 適当な酸化剤を含有した強アルカリ水溶液に浸漬 して煮沸する方法である。 A typical example is a copper oxide treatment called “black dyeing”. The former involves contacting with a phosphoric acid aqueous solution in which a heavy metal having a very low solubility product with tertiary phosphoric acid, such as zinc, is dissolved.The latter is immersed in a strong alkaline aqueous solution containing an appropriate oxidizing agent and boiled. How to
しかしながら、 リン酸塩処理により形成される皮膜の多くは結晶水を有する ために、高々 2 0 0 °C程度の温度で結晶が破壊し、皮膜の耐熱性に劣ること、 「黒染め」処理においては、 接着初期の接着性は良好であるが、 耐久性に劣る ため時間と共に接合強度が低下したり、 また加熱処理に対しても当初の接着 力を維持することができない。 However, most of the films formed by the phosphate treatment have water of crystallization, so the crystals are broken at a temperature of about 200 ° C at most, and the heat resistance of the film is poor. Although the adhesiveness at the initial stage of bonding is good, the bonding strength decreases with time due to poor durability, and the initial adhesive strength cannot be maintained even with heat treatment.
これに対して、 特開平 9 - 2 0 9 1 6 7号公報ゃ特開平 9 - 1 7 2 1 2 5号公 報では、 金属基材表面にクロメ一ト処理を施すことにより接着性を向上させ ている。 さらに、 特開 2 0 0 0 - 1 8 3 2 3 5号公報では電解法を用いて、 表 面に多数の微細な鱗片状突起を有する特殊なクロム化合物層を形成させる方 法が開示されている。 On the other hand, in Japanese Patent Application Laid-Open No. 9-209916 and Japanese Patent Application Laid-Open No. 9-172125, the adhesion is improved by performing a chromate treatment on the surface of the metal substrate. I'm making it. Further, Japanese Patent Application Laid-Open No. 2000-183032 discloses a method of forming a special chromium compound layer having a large number of fine flake-like projections on the surface by using an electrolytic method. I have.
しかし、 これらの方法は、 いずれも表面処理液に有害な 6価のクロム化合 物を用いており、 形成された金属基材表面上にも 6価クロムが含有されてい るものと思われ、 環境上好ましくない。 発明の開示  However, all of these methods use hexavalent chromium compounds that are harmful to the surface treatment solution, and it is thought that hexavalent chromium is also contained on the surface of the formed metal substrate, Not preferred. Disclosure of the invention
本発明はこれらの従来技術の抱える前記問題点を解決するためのものであ り、 本発明の目的は、 6価クロムなどの環境汚染の原因となる物質を用いる ことなく、 金属基材と樹脂との接着性、 特に高温度における接着性に優れた 表面処理皮膜を提供することにある。 本発明者らは、 従来技術の抱える上記問題点を解決すべく鋭意検討を重ね た結果、 一般的に耐熱性と経時安定性に優れる金属ニッケルおよびその表面 に形成されたニッケル酸化物に注目 し、 それらに第 3の元素を導入すること により樹脂との接着性にきわめて優れる新たな二ッケル系表面処理皮膜を発 明するに至った。 The present invention has been made to solve the above problems of the prior art, and an object of the present invention is to provide a method for manufacturing a metal substrate and a resin without using a substance causing environmental pollution such as hexavalent chromium. An object of the present invention is to provide a surface-treated film having excellent adhesiveness with a coating, particularly at high temperatures. The present inventors have conducted intensive studies to solve the above problems of the prior art, and as a result, have focused on nickel metal which is generally excellent in heat resistance and stability over time and nickel oxide formed on its surface. However, the introduction of a third element into them has led to the discovery of a new nickel-based surface treatment film that is extremely excellent in adhesion to resins.
すなわち、 本発明は対象とする素材上に形成された 2層構造を有する二 ッケル系表面処理皮膜であって、 該素材の表面に接する下層にニッケルと リ ンを、 その上層にニッケル、 酸素およびリンを含有することを特徴とする樹 脂との耐熱接着性に優れたニッケル系表面処理皮膜を提供する。  That is, the present invention relates to a nickel-based surface treatment film having a two-layer structure formed on a target material, wherein nickel and phosphorus are provided in a lower layer in contact with the surface of the material, and nickel, oxygen and Provided is a nickel-based surface treatment film having excellent heat-resistant adhesion to a resin characterized by containing phosphorus.
また、 本発明の前記ニッケル系表面処理皮膜に含有されるリンの代わりの 元素としてホウ素を用いることができる。  Further, boron can be used as an element instead of phosphorus contained in the nickel-based surface treatment film of the present invention.
また、 本発明の前記ニッケル系表面処理皮膜に含有される元素と して、 リ ンとホウ素が共存しても良い。  Further, as an element contained in the nickel-based surface treatment film of the present invention, phosphorus and boron may coexist.
さらに、 前記ニッケル系表面処理皮膜のニッケルに対するリンおよび/ま たはホウ素の含有比率は、上層の含有比率が下層のそれに比べて大きいこと、 すなわち下記の関係を満足することがより好ましい。  Further, the content ratio of phosphorus and / or boron to nickel in the nickel-based surface treatment film is more preferably such that the content ratio of the upper layer is larger than that of the lower layer, that is, the following relationship is satisfied.
[ (リン及び/又はホウ素)/ N i ]下層く [ (リン及び/又はホウ素)/ N i ]上層 [(Phosphorus and / or boron) / Ni] lower layer [[phosphorus and / or boron) / Ni] upper layer
さらに、 前記ニッケル系表面処理皮膜の上層は柱状組織を有し、柱状組 織の柱と柱の間には微細な間隙を有することがより好ましい。  Further, the upper layer of the nickel-based surface treatment film preferably has a columnar structure, and more preferably has a fine gap between the columns of the columnar structure.
前記本発明のニッケル系表面処理皮膜は銅又は銅合金上に形成されるのが 好ましい。  The nickel-based surface treatment film of the present invention is preferably formed on copper or a copper alloy.
前記本発明のニッケル系表面処理皮膜は、 灰色、 灰黒色または黒色外観を 有することが好ましい。  The nickel-based surface treatment film of the present invention preferably has a gray, gray-black or black appearance.
以下、 本発明のニッケル系表面処理皮膜についてより詳細に説明する。 本発明のニッケル系表面処理皮膜は、 素材の表面に接する下層に金属ニッ ケルと リンおよび Zまたはホウ素をその表面、 すなわち上層にさらに酸素を 含有する層を配した 2層構造を有するが、 下層の金属ニッケルが対象素材に 対して十分な密着性をもって形成することができる限り、 対象素材は特に限 定されない。 ただし、 電子電気部品の分野においては、 特に銅または銅合金 と樹脂との耐熱接着性が要求されることが多いので、 対象素材として銅を中 心に説明する。 Hereinafter, the nickel-based surface treatment film of the present invention will be described in more detail. The nickel-based surface treatment film of the present invention has a two-layer structure in which metal nickel and phosphorus, Z or boron are disposed on the lower layer in contact with the surface of the material, that is, an upper layer further includes a layer containing oxygen. The target material is particularly limited as long as the metallic nickel can be formed with sufficient adhesion to the target material. Not determined. However, in the field of electronic and electrical components, in particular, heat resistance between copper or a copper alloy and a resin is often required, so copper will be mainly described as a target material.
本発明のニッケル系表面処理皮膜の断面走査形電子顕微鏡 (以下、 S E M と云う) 像を図 1に、 表面 S E M像を図 2に示す。 図 1 の符号 1は、 本発明 のニッケル系表面処理皮膜の上層柱状組織 (ニッケル、 酸素、 リンを含む) を示し、 図 1の符号 2は、 本発明のニッケル系表面処理皮膜の下層 (二ッケ ル、 リンを含む)を示し図 1の符号 3は銅基板を示す。 図 2は本発明のニッケ ル系表面処理皮膜の表面 S E M像 ( X 1 0 0 0 0 ) を示す。  FIG. 1 shows a cross-sectional scanning electron microscope (SEM) image of the nickel-based surface treatment film of the present invention, and FIG. 2 shows a surface SEM image thereof. Reference numeral 1 in FIG. 1 indicates an upper columnar structure (including nickel, oxygen, and phosphorus) of the nickel-based surface treatment film of the present invention, and reference numeral 2 in FIG. And the reference numeral 3 in FIG. 1 indicates a copper substrate. FIG. 2 shows a surface SEM image (X1000) of the nickel-based surface treatment film of the present invention.
図 1に示されるように、 本発明の表面処理皮膜の上層は柱状組織を有し、 柱と柱との間には微細な間隙が観察される (櫛状組織) 。 従って、 これを表 面から観察すると (図 2 ) 、 不定形ではあるが数 1 O nm〜数 1 0 O nmオーダ 一のきわめて微細な凹凸として観察され、 樹脂との接着時にきわめて有効な 巨大な実質表面積を得ることができる。  As shown in FIG. 1, the upper layer of the surface treatment film of the present invention has a columnar structure, and fine gaps are observed between the columns (comb structure). Therefore, when this is observed from the surface (Fig. 2), although it is irregular, it is observed as extremely fine irregularities on the order of several 10 O nm to several 10 O nm, and it is a huge, very effective when bonding with resin. A substantial surface area can be obtained.
X P Sによる分析によれば、 上層のニッケルは酸化状態にありその厚さは 5 0 O nm程度であるが、 単なる金属ニッケル上に形成される酸化物はこれよ り さらに薄膜であり、 かつ本発明のような柱状組織は形成されない。 本発明 で導入された第三元素、 すなわちリンおよび/またはホウ素が導入されるこ とにより、 このような形態が得られる。 経験的には、 これらの第三元素は 2 重量%〜 5 0重量%の範囲であることが好ましい。 2重量%未満ではこのよ うな形態が得られないし、 5 0重量%を越える事は差し支えないが、 そのよ うな組成のニッケル皮膜を形成することは含有量の増加と共に徐々に困難と なる。 すなわち、 経済的に不利となる。  According to the analysis by XPS, the nickel in the upper layer is in an oxidized state and its thickness is about 50 O nm, but the oxide formed on the mere metallic nickel is thinner than this, and the present invention Is not formed. Such a form can be obtained by introducing the third element introduced in the present invention, that is, phosphorus and / or boron. Empirically, it is preferred that these third elements range from 2% to 50% by weight. If the content is less than 2% by weight, such a form cannot be obtained, and if the content exceeds 50% by weight, formation of a nickel film having such a composition becomes gradually difficult as the content increases. That is, it is economically disadvantageous.
本発明のニッケル系表面処理皮膜の上層柱状組織の高さは、 5 0〜 3 0 0 0蘭の範囲であることが好ましい。 5 O nm未満であると表面の微細な凹凸が 十分形成されなくなるし、 3 0 0 O nmを越えると凹凸が粗大化する。 一方、 下層の金属ニッケル層の厚さは特に限定されない。 しかし、 対象素材表面の 一部が露出しないように十分覆うためには、 0 . 5 m以上であることが好 ましい。 また、 不必要な厚膜は経済的に不利なので、 膜厚の上限は 5 / mも あれば十分であろう。 The height of the upper columnar structure of the nickel-based surface treatment film of the present invention is preferably in the range of 50 to 300 orchids. If it is less than 5 O nm, fine irregularities on the surface will not be sufficiently formed, and if it exceeds 300 O nm, the irregularities will be coarse. On the other hand, the thickness of the lower metallic nickel layer is not particularly limited. However, in order to sufficiently cover the surface of the target material without exposing it, it is preferable that the length is 0.5 m or more. Good. Also, since unnecessary thick films are economically disadvantageous, an upper limit of 5 / m would be sufficient.
本発明のニッケル系表面処理皮膜の外観は、 該して灰色、 灰黒色から黒色 を呈する。 これは図 1およぴ図 2に見られるように間隙を伴う柱状組織が可 視光を吸収することによると思われるが、 これは特に電子電気部品分野にお いては好ましい。 銅配線パターン側から樹脂を通して接着面 (本発明の表面 処理皮膜表面) を観察したときに、 それが黒色系を呈していると、 パターン とのコントラス トが明確になり、 パターンの検查を光学的に行う際に有利と なる。  The appearance of the nickel-based surface treatment film of the present invention is gray, gray-black to black. This seems to be due to the columnar structure with gaps absorbing visible light as shown in FIGS. 1 and 2, which is particularly preferable in the field of electronic and electrical components. When observing the adhesive surface (surface treated film surface of the present invention) through the resin from the copper wiring pattern side, if it shows a black color, the contrast with the pattern becomes clear, and the inspection of the pattern becomes optical. This is advantageous when it is performed on a regular basis.
本発明のニッケル系表面処理皮膜は、 種々の方法で対象素材に金属ニッケ ル層を形成した後、 表面を酸化させることによって形成することができる。 金属ニッケル層を形成する方法は、 P V Dなどのような物理的方法も可能だ が、 電気めつき法や無電解めつき法などの湿式表面処理法が量産性に優れて いる。 以下、 前記第三元素を共析させるためのめっき法について述べる。 第三元素としてリ ンを共析させるためには、 電気めつきの場合、 例えば良 く知られるヮッ ト浴などにさらに次亜リン酸または亜リン酸を添加すればよ い。 また、 無電解めつきの場合では、 市販されている次亜リン酸を還元剤と したタイプのものを用いればよい。  The nickel-based surface treatment film of the present invention can be formed by forming a metal nickel layer on a target material by various methods and then oxidizing the surface. Although a physical method such as PVD can be used to form the nickel metal layer, a wet surface treatment method such as an electroplating method or an electroless plating method is superior in mass productivity. Hereinafter, a plating method for co-depositing the third element will be described. In order to co-deposit phosphorus as a third element, in the case of electroplating, hypophosphorous acid or phosphorous acid may be further added to a well-known pet bath. In the case of electroless plating, a commercially available type using hypophosphorous acid as a reducing agent may be used.
次に、 第三元素としてホウ素を共析させるためには、 D M A B (ジメチル ァミンポラン) などのホウ素含有還元剤を用いた無電解めつき浴を用いれば よい。 さらに、 還元剤として D M A Bと次亜リン酸を同時に用いると、 リン とホウ素を同時に共析させることができる。 これらはいずれも市販されてい る。  Next, in order to cause eutectoid of boron as a third element, an electroless plating bath using a boron-containing reducing agent such as DMAB (dimethylamporane) may be used. Furthermore, when DMAB and hypophosphorous acid are used at the same time as the reducing agent, phosphorus and boron can be co-deposited at the same time. These are all commercially available.
一方、 めっき液に添加される添加剤によっては、 リンおよび/またはホウ 素に加えて、 さらに炭素、 窒素、 硫黄および亜鉛を共析させることができる。 黒色化という意味ではこれらの方法はより好ましい方向に作用する。例えば、 以下に述べる添加剤を導入することにより可能となる。  On the other hand, depending on the additive added to the plating solution, carbon, nitrogen, sulfur and zinc can be co-deposited in addition to phosphorus and / or boron. In the sense of blackening, these methods work in a more favorable direction. For example, it becomes possible by introducing the additives described below.
すなわち、 窒素を共折させるには、 ァニリ ン、 モノェチルァミ ン、 ジエタ ノールァミン、 ジメチルァミン、 トリエタノールァミン、 二トリ 口 トリ酢酸、 ピリジン、 ィミダゾール、 モルフォリン、 O—フエナントロリン、 グリシン、 グルタミン酸、 ァラニン、 セリ ン、 ヒ ドラジン、 ァスパラギン酸、 エチレン ジァミ ン、 に代表される窒素含有有機物を添加すればよい。 硫黄を共析させ るには、 N, N -ジェチルージチォ力ルバミン酸ソーダ、 1, 3一ジェチルー 2 ーチォ尿素、 メチォニン、 ェチォニン、 シスチン、 システィン、 グルタチォ ン、 チォグリ コール酸、 サッカリン、 ジピリジン、 1, 2 , 3—べンゾトリ ァゾールー 2一チアゾリ ン— 2—チオール、 チアゾール、 チォ尿素、 チォゾ ール、 チォインドキシル酸、 o—スルホンアミ ド安息香酸、 スルファニル酸、 メチルオレンジ、 ナフチオン酸、 ナフタレン一 α—スノレホン酸、 2—メルカ プトベンゾチアゾール、 サルファダイアジン、 ロダンアンモン等の硫黄含有 有機化合物を添加すればよい。 亜鉛を共折させるには、 炭酸亜鉛、 酸化亜鉛、 塩化亜鉛、 硫酸亜鉛などの亜鉛化合物を添加すればよい。 最後に、 炭素を共 析させるには、 ジエチレントリアミンなどに代表されるアミン系有機化合物 を添加すればよい。 In other words, to make nitrogen co-fold, aniline, monoethylamine, and Represented by nolamine, dimethylamine, triethanolamine, triamine triacetic acid, pyridine, imidazole, morpholine, O-phenanthroline, glycine, glutamic acid, alanine, serine, hydrazine, aspartic acid, ethylene diamine What is necessary is just to add a nitrogen-containing organic substance. For the co-deposition of sulfur, N, N-ethyldithiol sodium rubinate, 1,3-ethylethyl-2-thiourea, methionine, etyonin, cystine, cystine, glutathione, thioglycolic acid, saccharin, dipyridine, 1,2 , 3-Venzotriazole-2 monothiazoline-2-thiol, thiazole, thiourea, thiozol, thioindoxylic acid, o-sulfonamide benzoic acid, sulfanilic acid, methyl orange, naphthonic acid, naphthalene-α-snolefone Sulfur-containing organic compounds such as acid, 2-mercaptobenzothiazole, sulfadiazine, and rhodanammon may be added. To co-fold zinc, a zinc compound such as zinc carbonate, zinc oxide, zinc chloride, and zinc sulfate may be added. Finally, carbon can be co-deposited by adding an amine organic compound typified by diethylenetriamine and the like.
以上のめっきを、 例えば銅および銅合金に適用する場合には、 電気めつき の場合は銅表面を清浄にした後、 直接電気めつきを行えばよいが、 無電解め つきで特に次亜リン酸を還元剤とした浴を用いる場合は、 銅は次亜リン酸に 対して触媒活性がないためそのままではめつきできない。このような場合は、 パラジウム置換めつき等により微量のパラジウムめっきを前処理として施す 力 、 ストライクめつきとして電気二ッケルめっきを薄く (サブミクロン程度) 行った後に、 無電解ニッケルめっきをすると良い。  When the above plating is applied to copper and copper alloys, for example, in the case of electroplating, the copper surface may be cleaned and then directly electroplated. When a bath using an acid as a reducing agent is used, copper cannot be applied as it is because it has no catalytic activity for hypophosphorous acid. In such a case, a small amount of palladium plating may be applied as a pretreatment by plating with palladium or the like, and electric nickel plating may be performed thinly (about submicron) as strike plating, followed by electroless nickel plating.
対象素材に所定のニッケルめっき層を形成した後に、 表面に柱状組織層を 形成させる。 それには、 適当な酸化剤を含有した酸に接触させて処理するの が効果的である。 具体的には、 リン酸、 硫酸、 または塩酸をベースとして、 これに硝酸、 過マンガン酸、 第二鉄イオンまたは過酸化水素などの酸化剤を 必要量添加すればよい。 あるいは、 前記ベースの酸水溶液中にてアノード電 解しても良い。 このよ うな酸化物形成処理を単なる金属ニッケル表面に適用 しても本発明のような表面形態が得られないが、 本発明のニッケル系表面処 理皮膜に導入したリンを初めとする第三元素は、 概して金属ニッケルの結晶 を微細化し、 さらには非晶質化するが、 これが酸化処理に伴って形成される 局部電池のァノードおよび力ソードの分布状態を微細化することにより、 結 果として本発明の特徴的な表面柱状組織層を作り上げるものと思われる。 実 際、 X P Sなどの分析によると、 ニッケルに対するリンをはじめとする第三 元素の含有比率は、 下層のそれに比べて上層が大きくなる。 すなわち、 酸化 処理によりニッケルがより優先的に溶解して、 リン等が残存することを示唆 している。 なお、 上層の柱状組織に含有される酸素は、 このような酸化処理 に伴って導入され、 表層ほどその含有率が大きく下層に向かって減少する。 本発明のニッケル系表面処理皮膜と接着される樹脂については特に限定さ れないが、 電子電気部品の分野ではエポキシ樹脂、 ボリイミ ド樹脂が多用さ れ、 本発明の主な対象となる。 接着という観点からは、 ガラス転移温度の低 い樹脂ほど、 高温時軟化して金属一樹脂間の熱膨張率の差を緩和することが できて接着性には都合がよい。 しカゝし、 このような樹脂では樹脂自身の耐熱 性が低下することから、 ガラス転移温度は高い方が好ましい。 本発明のニッ ケル系表面処理皮膜は、 経験的には特にこのようなガラス転移温度の高い樹 脂においてその本領を発揮する。 After forming a predetermined nickel plating layer on the target material, a columnar texture layer is formed on the surface. For this purpose, it is effective to contact the acid with an appropriate oxidizing agent. Specifically, a necessary amount of an oxidizing agent such as nitric acid, permanganic acid, ferric ion or hydrogen peroxide may be added to a base of phosphoric acid, sulfuric acid, or hydrochloric acid. Alternatively, the anode may be electrolyzed in the base aqueous acid solution. Applying such an oxide formation process to a mere metallic nickel surface However, the third element such as phosphorus introduced into the nickel-based surface treatment film of the present invention generally makes the crystal of metallic nickel finer, It is thought that this results in the formation of the characteristic columnar texture layer of the present invention as a result of miniaturizing the distribution state of the anode and the power source of the local battery formed by the oxidation treatment. It is. In fact, according to the analysis of XPS and the like, the content ratio of the third element such as phosphorus to nickel is larger in the upper layer than in the lower layer. In other words, this suggests that nickel is more preferentially dissolved by the oxidation treatment, and that phosphorus and the like remain. The oxygen contained in the columnar structure in the upper layer is introduced along with such an oxidation treatment, and the content of the oxygen increases in the surface layer and decreases toward the lower layer. The resin to be bonded to the nickel-based surface treatment film of the present invention is not particularly limited. However, in the field of electronic and electrical components, epoxy resins and polyimide resins are frequently used and are the main object of the present invention. From the viewpoint of adhesion, a resin having a lower glass transition temperature can be softened at a high temperature and can reduce the difference in coefficient of thermal expansion between a metal and a resin. However, such a resin has a lower glass transition temperature because the heat resistance of the resin itself is reduced. Empirically, the nickel-based surface treatment film of the present invention is particularly effective for such a resin having a high glass transition temperature.
図面の簡単な説明 BRIEF DESCRIPTION OF THE FIGURES
図 1は、 本発明のニッケル系表面処理皮膜の断面 S E M像 (X 3 0 0 0 ) を示す。  FIG. 1 shows a cross-sectional SEM image (X3000) of the nickel-based surface treatment film of the present invention.
図 2は、 本発明のニッケル系表面処理皮膜の表面 S E M像 (X 1 0 0 0 0 ) を示す。  FIG. 2 shows a surface SEM image (X1000) of the nickel-based surface treatment film of the present invention.
発明を実施するための最良の形態 以下、本発明の実施例を比較例とともに挙げ、本発明を具体的に説明する。 実施例 1 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described specifically with reference to Examples of the present invention and Comparative Examples. Example 1
3 0 0 X 2 0 0 X 0. 5 mmの銅板 ( J I S C 1 1 00 ) 表面に、 ワッ ト浴 を用いて、 1 mのストライクニッケルめっきを行った後、 リン含有量が 9 重量%となるように調製した無電解めつき浴に浸漬して 5 μ mの無電解 N i 一 P合金層を形成した。 さらに、 これを 7 5 %リン酸と 6 7 · 5 %硝酸を容 量比 9 0 : 1 0で混合した酸化処理液に、 40°Cにて 3分間浸漬し、 銅板上 の N i一 P合金層表面にリンが濃化したニッケル層を形成した。 酸化処理後 の表面は光沢のない美しい黒色外観を呈した。 X P Sにより深さ方向のリン の分析を行うと、 最表層では 3 5重量%、 下層 (柱状組織の下部) では 8. 8重量%であった。 ちなみに、 図 1およぴ図 2は実施例 1のものである。 次に、前記二ッケル系表面処理が施された銅板上に、ポリイミ ド接着剤(三 井化学製「ネオフレックス両面接着シート」)を 50 mの厚さで張り合わせ、 その上に厚さ 3 5 μ mの銅箔を配置し、 プレス圧力 50 kg/cm2、 加熱温度 2 5 0°C、 加熱時間 2時間の条件でプレス接着した。 この試料を 5 Omm角に 切断して、 劣化を促進するために 8 5 °C、 8 5 % RHの加温湿潤環境下に 2 4時間放置した後、 2 70 °Cの溶融半田浴に浮かべたところ、 3 00秒間以 上が認められなかった。 After applying 1 m strike nickel plating to a 300 mm X 300 mm X 0.5 mm copper plate (JISC 1100) surface using a watt bath, the phosphorus content becomes 9% by weight. It was immersed in the electroless plating bath prepared as described above to form a 5 μm electroless Ni-P alloy layer. Furthermore, this was immersed in an oxidation treatment solution in which 75% phosphoric acid and 677.5% nitric acid were mixed at a volume ratio of 90:10 at 40 ° C for 3 minutes. A nickel layer in which phosphorus was concentrated was formed on the surface of the alloy layer. The surface after the oxidation treatment had a beautiful black appearance with no gloss. Analysis of phosphorus in the depth direction by XPS revealed that it was 35% by weight in the outermost layer and 8.8% by weight in the lower layer (the lower part of the columnar structure). FIG. 1 and FIG. 2 are for the first embodiment. Next, a polyimide adhesive (“Neoflex double-sided adhesive sheet” manufactured by Mitsui Chemicals, Inc.) was adhered to the copper plate having been subjected to the nickel-based surface treatment to a thickness of 50 m. A copper foil of μm was arranged and press-bonded under the conditions of a pressing pressure of 50 kg / cm 2 , a heating temperature of 250 ° C, and a heating time of 2 hours. This sample was cut into 5 mm squares, left in a heated and moist environment at 85 ° C and 85% RH for 24 hours to promote deterioration, and floated in a molten solder bath at 270 ° C. As a result, no longer than 300 seconds was observed.
以下に、 実施例 1に用いためっき浴と処理条件の詳細について述べる。 ス トライクニッケルめっきは、 ヮッ ト浴、 すなわち硫酸ニッケル: 3 3 0 gZ L、 塩化ニッケル: 45 gZL、 ホウ酸: 3 8 g/Lの濃度となるようにそ れぞれ脱イオン水に試薬 (特級を使用) を溶解し、 浴温: 5 0°Cにて、 ニッ ケル板をァノードにして、 カソード電流密度を 5 A/ d m2として行った。 無 電解めつき浴は、 次亜リン酸ナトリウム : 0. 1 5mo l ZL、 硫酸アンモ ニゥム : 0. 5 mo l /L、 クェン酸三ナトリウム : 0. 2mo l /L、 硫 酸二ッケル: 0. 1 m 0 1 /Lの濃度となるようにそれぞれ脱イオン水に試 薬を溶解し、 さらに苛性ソーダを添加して、 p Hを 9に調整した。 このよ う に調整した無電解 N i一 P合金めつき浴を 9 0°Cに加温して無電解めつきを 行い前記 N i一 P合金層を形成した。 The details of the plating bath and the processing conditions used in Example 1 are described below. The strike nickel plating is performed in a hot water bath, that is, in a reagent bath (nickel sulfate: 330 gZL, nickel chloride: 45 gZL, boric acid: 38 g / L). The test was performed at a bath temperature of 50 ° C. with a nickel plate as an anode and a cathode current density of 5 A / dm 2 . Electroless plating bath: Sodium hypophosphite: 0.15 mol ZL, ammonium sulfate: 0.5 mol / L, trisodium citrate: 0.2 mol / L, nickel sulfate: 0 Each of the reagents was dissolved in deionized water to a concentration of 0.1 m1 / L, and the pH was adjusted to 9 by adding caustic soda. The electroless Ni-P alloy plating bath adjusted in this way was heated to 90 ° C to reduce the electroless plating. Then, the Ni-P alloy layer was formed.
実施例 2 Example 2
前記無電解 N i一 P合金めつき浴の代わりに、 以下に示す無電解 N i一 B 合金めつき浴を用いて実施例 1 と同様の試験を行った。 すなわち、 無電解 N i— B合金めつき浴として、 塩化ニッケル: 0. 1 26 mo l ZL、 DMA B : 0. 0 6 m o l /L、 マロン酸: 0. 3 7 8m o l /L、 T I N〇3 : 70m g /Lの濃度となるようにそれぞれ脱イオン水に試薬を溶解し、 さら にアンモニア水により p Hを 6に調整した。 このように調整した無電解 N i 一 B合金めつき浴を 7 0°Cに加温して用いた。 得られた N i _B合金皮膜中 のホウ素含有量は 2. 8重量%であった。 これを実施例 1 と同様の方法で酸 化処理したところ、 灰黒色の外観を呈した。 さらに同様にポリイミ ド接着剤 を介して銅箔と接着し加温湿潤環境下においた後に、 半田耐熱性を調べたと ころ 240秒で銅箔にフクレが生じた。 The same test as in Example 1 was performed using the following electroless Ni-B alloy plating bath instead of the electroless Ni-P alloy plating bath. For electroless Ni-B alloy plating bath, nickel chloride: 0.126 mol ZL, DMA B: 0.06 mol / L, malonic acid: 0.378 mol / L, TIN〇 3 : The reagents were respectively dissolved in deionized water so as to have a concentration of 70 mg / L, and the pH was adjusted to 6 with aqueous ammonia. The electroless Ni-B alloy plating bath thus adjusted was heated to 70 ° C and used. The boron content in the obtained Ni_B alloy film was 2.8% by weight. This was subjected to an oxidation treatment in the same manner as in Example 1 to give a gray-black appearance. Similarly, after bonding to a copper foil via polyimide adhesive and placing it in a heated and humid environment, the heat resistance of the solder was examined, and blistering occurred in the copper foil in 240 seconds.
実施例 3 Example 3
実施例 1で用いたス トライクめつき用のヮッ ト浴に亜リン酸を 1 0 g/L 添加し、 温度 4 0°C、 電流密度: 5 A/ dm2の条件でカソード電解を施し、 リン含有量 1 0重量%の N i一 P合金皮膜を 5 β m形成した。 実施例 1 と同 様に方法で酸化処理を行うと美しい黒色外観を呈した。 以下、 実施例 1 と同 様の試料を作製し、 評価したところ、 半田耐熱性において 3 00秒間で異常 が認められなかった。 Example phosphorous acid 1 0 g / L was added to the Wa Tsu preparative bath for scan trike plated used in 1, temperature 4 0 ° C, current density: cathode electrolysis performed at 5 A / dm 2 conditions, A Ni-P alloy film having a phosphorus content of 10% by weight was formed at 5 βm. When subjected to the oxidation treatment in the same manner as in Example 1, a beautiful black appearance was exhibited. Hereinafter, a sample similar to that of Example 1 was prepared and evaluated, and no abnormality was found in the solder heat resistance after 300 seconds.
比較例 1 Comparative Example 1
実施例 1で用いた N iストライクめつき用のヮッ ト浴をそのまま用いて、 3 μ mのニッケルめっきを形成した後、 実施例 1 と同様の酸化処理を施した ところ、 やや光沢が失われたが、 ほぼ白色の外観を呈した。 以下、 実施例 1 と同様の試料を作製し、 評価したところ、 2〜 3秒間でブタ レが生じ、 接着 剤層が剥離した。 Using the Ni strike plating bath used in Example 1 as it was, a 3 μm nickel plating was formed, and the same oxidation treatment as in Example 1 was performed. However, although the gloss was slightly lost, it had an almost white appearance. Hereinafter, the same sample as in Example 1 was prepared and evaluated. As a result, the adhesive layer was peeled off within 2 to 3 seconds, and the adhesive layer was peeled off.
以上の実施例 1〜 3により、 本発明のニッケル系表面処理皮膜を適用した 後、 樹脂と接着することにより、 例えば高温湿潤環境下にさらされた後でも きわめて良好な耐熱接着性を得ることができる。 これに対して、 比較例 1の ように単なるニッケル皮膜表面を酸化しただけでは良い接着性が得られない ことがわかる。  According to Examples 1 to 3 above, by applying the nickel-based surface treatment film of the present invention and then adhering to the resin, it is possible to obtain extremely good heat resistance even after exposure to, for example, a high-temperature and wet environment. it can. On the other hand, it can be understood that good adhesion cannot be obtained by simply oxidizing the nickel film surface as in Comparative Example 1.
産業上の利用可能性 Industrial applicability
本発明のニッケル系表面処理皮膜を適用することにより、 金属基材と樹脂 とを接着する際に、 耐湿潤性および高温下での優れた接着性を付与すること ができることから、 電子電気部品に高い信頼性をもたらすことができる。 さ らに、 付帯的な効果と して、 本発明の表面処理皮膜は光沢のない黒色系の外 観を有することから、 電子電気部品に光学的な検査を行う場合において、 良 いコン トラス トを与えて検查精度を向上させることができる。  By applying the nickel-based surface treatment film of the present invention, when bonding a metal substrate and a resin, it is possible to impart excellent wet resistance and high-temperature adhesion at high temperatures. High reliability can be provided. Further, as an incidental effect, the surface treatment film of the present invention has a dull black appearance, so that a good contrast can be obtained when optically inspecting electronic and electrical components. To improve the detection accuracy.

Claims

請求の範囲 The scope of the claims
1 . 対象とする素材上に形成された 2層構造を有するニッケル系表面処理皮 膜であって、 該素材の表面に接する下層にニッケルとリンを、 その上層に二 ッケル、 酸素およびリンを含有することを特徴とする樹脂との耐熱接着性に 優れたニッケル系表面処理皮膜。 1. A nickel-based surface treatment film having a two-layer structure formed on a target material, wherein nickel and phosphorus are contained in a lower layer in contact with the surface of the material, and nickel, oxygen, and phosphorus are contained in the upper layer. Nickel-based surface treatment film with excellent heat-resistant adhesion to resin.
2 . 対象とする素材上に形成された 2層構造を有するニッケル系表面処理皮 膜であって、 該素材の表面に接する下層にニッケルとホウ素を、 その上層に ニッケル、 酸素およびホウ素を含有することを特徴とする樹脂との耐熱接着 性に優れたニッケル系表面処理皮膜。  2. A nickel-based surface treatment film having a two-layer structure formed on a target material, wherein the lower layer in contact with the surface of the material contains nickel and boron, and the upper layer contains nickel, oxygen, and boron. A nickel-based surface treatment film with excellent heat-resistant adhesion to resins.
3 . 対象とする素材上に形成された 2層構造を有するニッケル系表面処理皮 膜であって、 該素材の表面に接する下層にニッケル、 リンおよびホウ素を、 その上層にニッケル、 酸素、 リンおよびホウ素を含有することを特徴とする 樹脂との耐熱接着性に優れたニッケル系表面処理皮膜。  3. A nickel-based surface treatment film having a two-layer structure formed on a target material, wherein nickel, phosphorus, and boron are provided in a lower layer in contact with the surface of the material, and nickel, oxygen, phosphorus, and A nickel-based surface treatment film that contains boron and has excellent heat-resistant adhesion to resins.
4 . 前記ニッケル系表面処理皮膜のニッケルに対するリンおよび/またはホ ゥ素の含有比率は、 上層の含有比率が下層のそれに比べて大きく、 下記の関 係を有することを特徴とする請求の範囲 1〜請求の範囲 3のいずれか 1項に 記載の樹脂との耐熱接着性に優れたニッケル系表面処理皮膜。  4. The content ratio of phosphorus and / or boron to nickel in the nickel-based surface treatment film is such that the content ratio of the upper layer is larger than that of the lower layer and has the following relationship. A nickel-based surface treatment film excellent in heat-resistant adhesion to the resin according to any one of claims 3 to 3.
[ (リン及び/又はホウ素)/ N i ]下層く [ (リン及び/又はホウ素)/ N i ]上層  [(Phosphorus and / or boron) / Ni] lower layer [[phosphorus and / or boron) / Ni] upper layer
5 . 前記ニッケル系表面処理皮膜の上層は柱状組織を有し、 柱状組織の柱と 柱の間には微細な間隙を有することを特徴とする請求の範囲 1〜請求範囲 4 のいずれか 1項に記載の樹脂との耐熱接着性に優れたニッケル系表面処理皮 膜。  5. The upper layer of the nickel-based surface treatment film has a columnar structure, and a fine gap is provided between the columns of the columnar structure. A nickel-based surface-treated coating excellent in heat-resistant adhesion to the resin described in the above.
6 . 銅または銅合金上に形成された、 請求の範囲 1〜請求の範囲 5のいずれ か 1項に記載の樹脂との耐熱接着性に優れたニッケル系表面処理皮膜。  6. A nickel-based surface treatment film formed on copper or a copper alloy and having excellent heat-resistant adhesion to the resin according to any one of claims 1 to 5.
7 . 灰色、 灰黒色または黒色外観を有することを特徴とする請求の範囲 1〜 請求の範囲 6のいずれか 1項に記載の樹脂との耐熱接着性に優れたニッケル 系表面処理皮膜。  7. The nickel-based surface treatment film having excellent heat-resistant adhesion to the resin according to any one of claims 1 to 6, wherein the nickel-based surface treatment film has a gray, gray-black or black appearance.
PCT/JP2002/010825 2001-11-08 2002-10-18 Nickel-based surface treatment films excellent in heat-resistant adhesion to resin WO2003040432A1 (en)

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