WO2003037477A1 - Appareil de filtration a lavage a contre-courant et procede associe - Google Patents

Appareil de filtration a lavage a contre-courant et procede associe Download PDF

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Publication number
WO2003037477A1
WO2003037477A1 PCT/JP2002/011387 JP0211387W WO03037477A1 WO 2003037477 A1 WO2003037477 A1 WO 2003037477A1 JP 0211387 W JP0211387 W JP 0211387W WO 03037477 A1 WO03037477 A1 WO 03037477A1
Authority
WO
WIPO (PCT)
Prior art keywords
filtration
filter
gel
layer
filtration device
Prior art date
Application number
PCT/JP2002/011387
Other languages
English (en)
Japanese (ja)
Inventor
Atsushi Sakamoto
Hisayuki Kataoka
Original Assignee
Pall Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pall Corporation filed Critical Pall Corporation
Priority to JP2003539815A priority Critical patent/JPWO2003037477A1/ja
Publication of WO2003037477A1 publication Critical patent/WO2003037477A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/11—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
    • B01D29/13—Supported filter elements
    • B01D29/15—Supported filter elements arranged for inward flow filtration
    • B01D29/21—Supported filter elements arranged for inward flow filtration with corrugated, folded or wound sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/62—Regenerating the filter material in the filter
    • B01D29/66—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps
    • B01D29/661—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps by using gas-bumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/88—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices
    • B01D29/94—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices for discharging the filter cake, e.g. chutes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D41/00—Regeneration of the filtering material or filter elements outside the filter for liquid or gaseous fluids
    • B01D41/04—Regeneration of the filtering material or filter elements outside the filter for liquid or gaseous fluids of rigid self-supporting filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/04—Backflushing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/18—Use of gases

Definitions

  • the present invention enables gel filtration and particle filtration, and in particular, has a long filtration life and is capable of backwashing even when filtering a filtration fluid containing a gel or highly viscous substance. And a method for back washing a filtration device.
  • Japanese Patent Application Laid-Open No. 7-21838 / 14 discloses a pleated particle removing layer having a cylindrical shape as a whole, and a hollow cylindrical gel filtration layer arranged in multiple layers around the particle removing layer.
  • a laminated pre-filter that performs gel filtration and particle removal is disclosed.
  • this laminated pre-filter can be used up to a filtration pressure difference of about 5 kgf / cm 2, it is a cylindrical type in which a plurality of filtration layers composing a gel filtration layer are concentrically stacked, so that gel The gel penetrates into the filtration layer up to the filtration layer where the water is trapped, or the gel is trapped near the surface of the filtration layer and the filtration layer is closed, so that it is substantially close to one layer. Therefore, other filtration cannot be used effectively. Therefore, the filtration area is not sufficient. For this reason, the total amount of gel-like substances that can be captured by the gel filtration layer must be extremely small as compared with the pleated filtration layer.
  • a laminated pleated filter disclosed in Japanese Patent Application Laid-Open No. H11-3194427 is an inner-layer pleated filter having the function of a normal filtration filter, and an inner-layer pleated filter.
  • An outer-layer pleated filter which is disposed on one outer peripheral portion and mainly has a function of removing a gel-like substance. Raised or cilia are formed in the valleys of the outer layer of the pleated filter, and the raised or cilia are intended to effectively capture the gel-like substance.
  • This multilayer pleated filter has a pleated shape because the outer layer filter for trapping the gel-like substance is pleated.
  • the trapped amount of the gel-like substance is larger than that of the multilayer filter disclosed in Kaihei 7-2 1 3 8 14.
  • the maximum Filtration pressure difference that can be used in layered filter 0.3 because it is kgf / cm 2, 0.3 multiplied by kg ip / cm 2 or more filtration differential pressure, a gel-like material to deform the outer layer After passing through the filter, it is trapped by the filter for particle removal arranged in the inner layer, and the inner layer filter is clogged.
  • the filtration life of a filter is expressed as the product of the filtration differential pressure that can be applied to the filter, the filtration area of the filter, and the volume of the substance captured by the filter retained by the filter, the so-called retention capacity.
  • the pleated filter has a plurality of filter elements each having a rhombic cross-sectional shape, and has an annular valley between adjacent chevrons for capturing a gel-like substance.
  • This filter is called a candle pre-filter because of its unique overall shape.
  • This candle pleated filter has a large filtration area because of its large size, but requires a large installation space and does not have a particle removal function.
  • the filter fluid after filtration and the fluid for washing are pressure-fed in the direction opposite to the filtration direction, thereby washing and regenerating the clogged gel filtration filter. So-called backwashing cannot be performed.
  • backwashing cannot be performed.
  • a large amount of resist residue is generated in a fluid as a gel-like foreign substance.
  • the reverse of the gel filtration filter is appropriately performed. Without cleaning, the filtration life of the filter will be extremely short.
  • Some filters are configured to replace only one gel filtration filter instead of performing backwashing.However, filter replacement requires a long time and requires frequent filter replacement. For this reason, it was practically extremely difficult to filter highly viscous organic exfoliated substances in production lines such as factories.
  • the gel filtration filter of the conventional filter device is particularly known as a so-called air-assist bag that uses a pneumatic pressure or the pressure of another compressible fluid to pump a cleaning liquid.
  • T / JP02 / 11387 washes were used, there was a problem that the gel filtration filter itself was deformed by the pressure of the washing liquid, making it impossible to reuse it.
  • An object of the present invention is to enable filtration of a filtration fluid containing a large amount of a gel-like or highly viscous substance by enabling back-washing of a filtration medium while a filter device is installed. It is to provide a filtration device and a filtration method. Further, an object of the present invention is to apply a pressure to a liquid for back washing by using a secondary-side air vent port for exhausting air mixed in a filtrate after filtration, thereby providing a filter.
  • the present invention provides a filter and a filtration device capable of easily performing regeneration cleaning by air-assisted backwash while suppressing restrictions on the arrangement of the filtration device.
  • a drain / support layer that does not substantially capture gels or particles, a gel filtration layer that captures gel, and a particle removal layer that captures fine particles are sequentially arranged from the upstream side to the downstream side. It is characterized by.
  • a compressed gas such as air pressure from a secondary air vent port or a secondary side filtrate outlet port located downstream of the particle removal layer.
  • the introduction of the compressed gas is not particularly limited as long as it is on the secondary side, but it is preferable to introduce the compressed gas from the secondary-side air vent port. It is desirable to introduce from the upper side of the filter. However, it may be introduced from the lower secondary side of the filter.
  • the exfoliated gel-like substance is discharged from a drain port or a primary air vent port disposed on the upstream side of the gel filtration layer, and if the drain port is closed, normal filtration work can be resumed.
  • the pressure of the liquid used for washing is applied to the gel filtration layer from the downstream side to the upstream side, and the gel filtration layer tends to be displaced to the upstream side.
  • the gel support is prevented from being displaced by the external support.
  • a drain / support layer is disposed upstream of the gel filtration layer, and the drain / support layer supports the adjacent filters of the gel filtration layer so as not to overlap with each other.
  • Gel filtration layer pre As a result, the same shape as before the back washing can be maintained. Therefore, after back washing, the filter returns to the initial state, and the intended filtration performance is restored.
  • the backwashable filtration device of the present invention comprises a backwashable gel filtration filter having a drainage Z support layer that does not substantially capture gels or particles, and a gel filtration layer that captures gel. And a filter for removing particles, which is disposed on the downstream side of the filter for gel filtration and has a particle removing layer for capturing fine particles.
  • This filtration device is characterized in that the gel filter and the filter for particle removal are configured as separate units, and only the gel filtration layer, which is likely to cause clogging at an early stage, can be back-washed.
  • an air vent port communicating with the filter housing is provided at the upper part of the filter element for gel filtration and on the secondary side of the filter element for particle removal filter, respectively.
  • the compressed gas is caused to flow backward from the secondary side to the primary side of the filtration device, thereby generating bubbles in the filtration fluid on the primary side, thereby using the gel for filtration.
  • the gel substance trapped in the filter is dispersed in the primary filtration fluid, and then the gel substance dispersed in the filtration fluid is discharged from the filtration device together with the primary filtration fluid.
  • the drainage Z support layer, the gel filtration layer, the particle removal layer, and the other liquid contact parts among the constituent elements of the filtration device of the present invention are made of an organic material, they will be intense as in a semiconductor manufacturing device.
  • Equipment that uses corrosive chemicals improves corrosion resistance and extends filtration life.
  • a fluorine-based resin a polyethylene resin—excellent in chemical resistance, heat resistance, and low extractability of Pt class.
  • an air vent port is provided on each of the primary side and the secondary side of the filtration device.
  • a drain port is provided in the filter, and when the filtration device is backwashed, after opening the air vent port on the primary side, compressed gas is introduced from the air vent port on the secondary side to generate air bubbles in the filtered fluid, which results in gel filtration Gel captured by a filter The substance is dispersed in the primary filtration fluid. Next, the drain port is opened, and the gel-like substance dispersed in the filtration fluid is discharged together with the filtration fluid on the primary side.
  • the gel-like substance captured by the filtration device is separated from the filter element by the collision of a large number of bubbles generated in the primary-side filtration fluid.
  • the introduction of the compressed gas is preferably provided at the air vent port, but may be introduced from the filtrate outlet port side. Prior to the regeneration cleaning by the air-assisted backwash, the undiluted solution supply valve and the return solution are used.
  • the viscous gel After closing the outlet valve, drain discharge valve, primary-side air release valve, secondary-side air release valve, and air-assist backwash valve, and opening the air-assist backwash valve located on the secondary side, the primary side
  • the air release valve By opening the air release valve, the viscous gel is separated from the gel filtration layer while generating a large amount of air bubbles in the primary chamber of the housing, and the viscous gel is dissolved by performing a bubbling operation with sufficient stirring.
  • the air-assisted backwash valve is opened and the drain discharge valve is opened before the dispersed gels aggregate again. By releasing the gel, the separated gel can be regenerated without re-adhering to the gel filtration layer.
  • the particle removal layer can be set to have a filtration accuracy of microfiltration or ultrafiltration.
  • the maximum operating pressure difference during filtration can be set to 1.0 kg ⁇ / cm 2, and the pressure during back washing can be set to 2.0 kgf / cm 2 or less.
  • the backwash pressure at the time of drain discharge is lower than the backwash pressure at the time of bubble generation as long as the primary room liquid after the bubble generation can be quickly discharged. It is possible to reduce the time required for backwashing strips.
  • FIG. 1 is a half sectional view of an embodiment of the filtration device of the present invention.
  • FIG. 2 is a piping diagram of the filtration device of the present invention.
  • FIG. 3 is a piping diagram showing another piping example of the filtration device of the present invention.
  • FIG. 4 is a view showing an experimental result of the filtration device of the present invention.
  • FIG. 5 is a cross-sectional view of one embodiment of the filter element of the filtration device of the present invention.
  • FIG. 6 is a cross-sectional view of another embodiment of the filter element of the filtration device of the present invention.
  • FIG. 7 is a perspective view of the filter element of FIG.
  • FIG. 8 is a conceptual diagram of another embodiment of the filtration device of the present invention. Detailed description of the invention
  • the filtration device 1 of the present invention is configured by housing a filter element 3 in a filter housing 2.
  • a primary chamber 4 is formed between the filter housing 2 and the filter element 3, and a secondary chamber 5 is formed in the center of the filter element 3.
  • a primary communication chamber 6 communicating with the primary chamber 4 and a secondary communication chamber 7 communicating with the secondary chamber 5 are formed.
  • a primary communication chamber 8 communicating with the primary chamber 4 and a secondary communication chamber 9 communicating with the secondary chamber 5 are formed at the lower portion of the filter housing 2.
  • the primary communication chamber 6 formed in the upper part of the filter housing 2 communicates with the inflow port 10 for the filtrate (stock solution) and the primary air vent port 11 and communicates with the secondary communication chamber.
  • the outlet port 12 for the filtrate after filtration and the air vent port 13 on the secondary side communicate with each other.
  • a drain port 14 for discharging waste liquid on the primary side communicates with a communication chamber 8 on the primary side formed at a lower portion of the filter housing 2, and a communication chamber 9 on the secondary side has Drain port 15 for discharging waste liquid on the secondary side communicates.
  • the filtrate (stock solution) flowing in the A direction from the inflow port 10 flows to the primary Through the communication chamber 6 on the side, the chamber 4 on the primary side, the filling element 3, the chamber 5 on the secondary side, and the communication chamber 7 on the secondary side, flow in the direction of the arrow in Figure 1, and from the outflow port 12 Outflow in B direction.
  • the filtration device 1 can be used with the communication chambers 6 and 7 arranged above as shown in Fig. 1, but it can also be used with the communication rooms 6 and 7 arranged upside down in the state shown in Fig. 1. Wear. When placed upside down from the state in Fig. 1, the primary air vent port 11 functions as the primary drain port, and the secondary air vent port 13 acts as the secondary drain port. Function. At this time, the drain port 14 on the primary side functions as an air vent port on the primary side, and the drain port 15 on the secondary side functions as an air vent port on the secondary side. In each case, the filtrate (stock solution) flows into the filter housing 2 from the inflow port 10, and the filtrate after filtration flows out of the filter port 18 from the outflow port 12. I do.
  • FIG. 2 is a piping diagram when the filtering device 1 is used in the arrangement of FIG. 1
  • FIG. 3 is a piping diagram when the wind filtering device 1 is arranged upside down from the arrangement of FIG.
  • valves V1, V2, and V4 are opened, valves V3 and V5 are closed, and filtrate (filtrate tank) 16
  • the undiluted solution) is fed to the inflow port 10 and the filtrate after filtration is taken out from the outflow port 12. If the filter element 3 in the filter device 1 is clogged by such a filtering operation, the filter element 3 is backwashed.
  • Fig. 4 shows the test results when the filter 1 was arranged as shown in Fig. 2 and the organic stripper washes back (backwash) under the following test conditions.
  • Test filter filtration accuracy 50 ⁇ m, effective filtration area 0.10 m 2
  • Test liquid IPA-dispersed pseudo-organic stripping contaminant: Re-dispersed filter-collected contaminants from filter used in organic stripping process
  • Test Filter one as filtration accuracy 50 was passed through a pseudo organic stripping contaminants solution of I PA dispersion, when passing fluid 6 rate Torr flow rate early It became 1Z6 and clogged. After that, a backwash was performed by introducing air from the secondary side at the festival. The pseudo organic stripping contaminant solution was passed through the filter again, and the change in the flow rate was monitored. As a result, the flow rate immediately after the backwash was the same as that when the liquid was passed through for the first time. The test cycle was repeated eight times thereafter. As a result, the initial flow velocity was recovered immediately after the pushback (see Figure 4).
  • FIG. 5 is a transverse sectional view of the filter element 3.
  • a drainage Z support layer 18 that does not substantially capture gels or particles, a gel filtration layer 19 that captures gel, and a particle removal layer 20 that captures fine particles are on the upstream side.
  • 21 and 22 are cylindrical support members.
  • the drainage / support layer 18 and the gel filtration layer 19 have a so-called ordinary pleated form, and the particle removal layer 20 has a lay-over-barrier form.
  • FIGS. 6 and 7 show another embodiment of the filter element 3 and the filter body 3 JP02 / 11387a includes a drain / support layer 18 that does not substantially capture gel or particles, a gel filtration layer 19 that captures gel, a particle removal layer 20 that captures fine particles, and another wastewater Z.
  • the support layer 23 is arranged from the upstream side to the downstream side.
  • the filter device of the present invention comprises a filter housing 24 containing a gel filtration layer 19 for capturing gel, and a filter housing containing a particle removal layer 20 for capturing fine particles. It is also applicable when 25 is configured separately.
  • the filter medium can be back-washed while the filter device is installed, so that a large amount of a gel-like or highly viscous substance is contained.
  • a filtration device and a filtration method capable of filtering a filtration fluid can be provided.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filtration Of Liquid (AREA)

Abstract

L'invention concerne un procédé de lavage à contre-courant d'un appareil de filtration (1), qui consiste à permettre à un gaz comprimé de revenir en arrière à partir du côté secondaire (5) de l'appareil de filtration (1), afin de générer ainsi des bulles dans le fluide devant être filtré du côté primaire (4) de l'appareil de filtration (1) et de disperser le matériau sous forme de gel et/ou le matériau visqueux capturés par l'élément filtre (3) de l'appareil de filtration (1) dans le fluide devant être filtré du côté primaire (4), puis à évacuer le matériau dispersé sous forme de gel et/ou le matériau dispersé visqueux de l'appareil de filtration (1) avec le fluide devant être filtré du côté primaire (4). Ce procédé permet le lavage à contre-courant d'un moyen de filtration tout en laissant l'appareil de filtration en place, ce qui permet la filtration d'un fluide devant être filtré contenant beaucoup de matériau sous forme de gel ou de matériau visqueux.
PCT/JP2002/011387 2001-10-31 2002-10-31 Appareil de filtration a lavage a contre-courant et procede associe WO2003037477A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003539815A JPWO2003037477A1 (ja) 2001-10-31 2002-10-31 逆洗浄可能な濾過装置及び濾過装置の逆洗浄方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-335522 2001-10-31
JP2001335522 2001-10-31

Publications (1)

Publication Number Publication Date
WO2003037477A1 true WO2003037477A1 (fr) 2003-05-08

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005169273A (ja) * 2003-12-11 2005-06-30 Mykrolis Corp ハウジング一体型プリーツフィルタを有する濾過装置
JP2012161749A (ja) * 2011-02-08 2012-08-30 Kurita Water Ind Ltd 濾過装置
WO2019102711A1 (fr) * 2017-11-24 2019-05-31 メタウォーター株式会社 Filtre, dispositif de filtration à diaphragme et procédé de filtration utilisant le filtre
CN113082809A (zh) * 2021-04-09 2021-07-09 东方电气集团科学技术研究院有限公司 一种鼓泡搅拌式纳米粉体清洗过滤装置及方法
JP7364641B2 (ja) 2021-10-27 2023-10-18 三益半導体工業株式会社 スピンエッチング装置用ポンプフィルターの再生システム及び再生方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618192A (ja) * 1984-06-22 1986-01-14 Toshiba Corp 水処理装置
JPH05168866A (ja) * 1991-12-26 1993-07-02 Hitachi Ltd 中空糸膜フィルタおよび膜モジュール装置
EP0648524A1 (fr) * 1993-10-19 1995-04-19 Millipore Corporation Ensemble de filtration à cartouche
WO1997024169A2 (fr) * 1995-12-21 1997-07-10 Pall Corporation Dispositif de separation
JP2001340732A (ja) * 2000-05-31 2001-12-11 Pall Corp 積層型フィルタエレメント

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618192A (ja) * 1984-06-22 1986-01-14 Toshiba Corp 水処理装置
JPH05168866A (ja) * 1991-12-26 1993-07-02 Hitachi Ltd 中空糸膜フィルタおよび膜モジュール装置
EP0648524A1 (fr) * 1993-10-19 1995-04-19 Millipore Corporation Ensemble de filtration à cartouche
WO1997024169A2 (fr) * 1995-12-21 1997-07-10 Pall Corporation Dispositif de separation
JP2001340732A (ja) * 2000-05-31 2001-12-11 Pall Corp 積層型フィルタエレメント

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005169273A (ja) * 2003-12-11 2005-06-30 Mykrolis Corp ハウジング一体型プリーツフィルタを有する濾過装置
JP4503276B2 (ja) * 2003-12-11 2010-07-14 インテグリス・インコーポレーテッド ハウジング一体型プリーツフィルタを有する濾過装置
JP2012161749A (ja) * 2011-02-08 2012-08-30 Kurita Water Ind Ltd 濾過装置
WO2019102711A1 (fr) * 2017-11-24 2019-05-31 メタウォーター株式会社 Filtre, dispositif de filtration à diaphragme et procédé de filtration utilisant le filtre
JP2019093353A (ja) * 2017-11-24 2019-06-20 メタウォーター株式会社 ろ過器、膜ろ過装置、及びろ過器を用いたろ過方法
CN113082809A (zh) * 2021-04-09 2021-07-09 东方电气集团科学技术研究院有限公司 一种鼓泡搅拌式纳米粉体清洗过滤装置及方法
JP7364641B2 (ja) 2021-10-27 2023-10-18 三益半導体工業株式会社 スピンエッチング装置用ポンプフィルターの再生システム及び再生方法

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