WO2003026013A1 - Dispositif semi-conducteur - Google Patents
Dispositif semi-conducteur Download PDFInfo
- Publication number
- WO2003026013A1 WO2003026013A1 PCT/JP2002/009384 JP0209384W WO03026013A1 WO 2003026013 A1 WO2003026013 A1 WO 2003026013A1 JP 0209384 W JP0209384 W JP 0209384W WO 03026013 A1 WO03026013 A1 WO 03026013A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fets
- fet
- resistors
- reduced
- buffer layer
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 239000012535 impurity Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- 230000037431 insertion Effects 0.000 abstract 1
- 238000003780 insertion Methods 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/095—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being Schottky barrier gate field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0802—Resistors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0805—Capacitors only
- H01L27/0811—MIS diodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Junction Field-Effect Transistors (AREA)
- Electronic Switches (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2003-7007232A KR100517531B1 (ko) | 2001-09-14 | 2002-09-12 | 반도체 장치 |
US10/416,261 US7012285B2 (en) | 2001-09-14 | 2002-09-12 | Semiconductor device |
EP02765528A EP1427017A4 (en) | 2001-09-14 | 2002-09-12 | SEMICONDUCTOR DEVICE |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001280061A JP2003086767A (ja) | 2001-09-14 | 2001-09-14 | 半導体装置 |
JP2001-280061 | 2001-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003026013A1 true WO2003026013A1 (fr) | 2003-03-27 |
Family
ID=19104125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/009384 WO2003026013A1 (fr) | 2001-09-14 | 2002-09-12 | Dispositif semi-conducteur |
Country Status (5)
Country | Link |
---|---|
US (1) | US7012285B2 (ja) |
EP (1) | EP1427017A4 (ja) |
JP (1) | JP2003086767A (ja) |
KR (1) | KR100517531B1 (ja) |
WO (1) | WO2003026013A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005006072A (ja) | 2003-06-12 | 2005-01-06 | Matsushita Electric Ind Co Ltd | 高周波スイッチ装置および半導体装置 |
JP4559772B2 (ja) * | 2004-05-31 | 2010-10-13 | パナソニック株式会社 | スイッチ回路 |
JP4854980B2 (ja) * | 2005-03-30 | 2012-01-18 | 住友電工デバイス・イノベーション株式会社 | スイッチ回路及び半導体装置の製造方法 |
JP5112620B2 (ja) * | 2005-05-31 | 2013-01-09 | オンセミコンダクター・トレーディング・リミテッド | 化合物半導体装置 |
JP4538016B2 (ja) * | 2007-03-23 | 2010-09-08 | パナソニック株式会社 | 高周波スイッチ装置および半導体装置 |
US11239802B2 (en) | 2019-10-02 | 2022-02-01 | Wolfspeed, Inc. | Radio frequency transistor amplifiers having engineered instrinsic capacitances for improved performance |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05259192A (ja) * | 1992-03-13 | 1993-10-08 | Toshiba Corp | ヘテロ接合型電界効果トランジスタおよびその製造方法 |
JPH06132310A (ja) * | 1992-10-15 | 1994-05-13 | Hitachi Ltd | 半導体装置およびそれを用いた集積回路 |
EP0613191A2 (en) * | 1993-02-26 | 1994-08-31 | Sumitomo Electric Industries, Limited | Channel structure for field effect transistor |
EP0700161A2 (en) * | 1994-08-29 | 1996-03-06 | Hitachi, Ltd. | Low distortion switch |
JPH11283995A (ja) * | 1998-03-30 | 1999-10-15 | Hitachi Ltd | 半導体装置およびその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61272964A (ja) * | 1985-05-28 | 1986-12-03 | Fujitsu Ltd | 半導体抵抗素子 |
JPH01171279A (ja) * | 1987-12-25 | 1989-07-06 | Mitsubishi Monsanto Chem Co | 半導体装置 |
US5196358A (en) * | 1989-12-29 | 1993-03-23 | The United States Of America As Represented By The Secretary Of The Navy | Method of manufacturing InP junction FETS and junction HEMTS using dual implantation and double nitride layers |
WO1995034913A1 (en) * | 1994-06-16 | 1995-12-21 | Anadigics, Inc. | Bootstrapped-gate field effect transistors and circuits thereof |
JP2687897B2 (ja) * | 1994-10-13 | 1997-12-08 | 日本電気株式会社 | 電界効果型トランジスタ及びその製造方法 |
US5903178A (en) * | 1994-12-16 | 1999-05-11 | Matsushita Electronics Corporation | Semiconductor integrated circuit |
JPH08204530A (ja) * | 1995-01-23 | 1996-08-09 | Sony Corp | スイツチ回路 |
JP3485711B2 (ja) * | 1996-02-29 | 2004-01-13 | 三洋電機株式会社 | スイッチ回路装置 |
JPH11136111A (ja) * | 1997-10-30 | 1999-05-21 | Sony Corp | 高周波回路 |
JP2000277703A (ja) * | 1999-03-25 | 2000-10-06 | Sanyo Electric Co Ltd | スイッチ回路装置 |
AU2001243426A1 (en) * | 2000-03-03 | 2001-09-17 | Alpha Industries, Inc. | Electronic switch |
-
2001
- 2001-09-14 JP JP2001280061A patent/JP2003086767A/ja not_active Withdrawn
-
2002
- 2002-09-12 KR KR10-2003-7007232A patent/KR100517531B1/ko not_active IP Right Cessation
- 2002-09-12 US US10/416,261 patent/US7012285B2/en not_active Expired - Fee Related
- 2002-09-12 EP EP02765528A patent/EP1427017A4/en not_active Withdrawn
- 2002-09-12 WO PCT/JP2002/009384 patent/WO2003026013A1/ja not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05259192A (ja) * | 1992-03-13 | 1993-10-08 | Toshiba Corp | ヘテロ接合型電界効果トランジスタおよびその製造方法 |
JPH06132310A (ja) * | 1992-10-15 | 1994-05-13 | Hitachi Ltd | 半導体装置およびそれを用いた集積回路 |
EP0613191A2 (en) * | 1993-02-26 | 1994-08-31 | Sumitomo Electric Industries, Limited | Channel structure for field effect transistor |
EP0700161A2 (en) * | 1994-08-29 | 1996-03-06 | Hitachi, Ltd. | Low distortion switch |
JPH11283995A (ja) * | 1998-03-30 | 1999-10-15 | Hitachi Ltd | 半導体装置およびその製造方法 |
Non-Patent Citations (2)
Title |
---|
INAMORI M. ET AL.: "A new GaAs variable-gain amplifier MMIC with a widw-dynamic-range and low-voltage-operation linear attenuation circuit", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, vol. 48, no. 2, February 2000 (2000-02-01), pages 182 - 186, XP000906145 * |
See also references of EP1427017A4 * |
Also Published As
Publication number | Publication date |
---|---|
JP2003086767A (ja) | 2003-03-20 |
KR100517531B1 (ko) | 2005-09-28 |
US7012285B2 (en) | 2006-03-14 |
KR20030082933A (ko) | 2003-10-23 |
EP1427017A4 (en) | 2006-10-18 |
EP1427017A1 (en) | 2004-06-09 |
US20040026742A1 (en) | 2004-02-12 |
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