WO2003026013A1 - Dispositif semi-conducteur - Google Patents

Dispositif semi-conducteur Download PDF

Info

Publication number
WO2003026013A1
WO2003026013A1 PCT/JP2002/009384 JP0209384W WO03026013A1 WO 2003026013 A1 WO2003026013 A1 WO 2003026013A1 JP 0209384 W JP0209384 W JP 0209384W WO 03026013 A1 WO03026013 A1 WO 03026013A1
Authority
WO
WIPO (PCT)
Prior art keywords
fets
fet
resistors
reduced
buffer layer
Prior art date
Application number
PCT/JP2002/009384
Other languages
English (en)
French (fr)
Inventor
Tadayoshi Nakatsuka
Toshiharu Tambo
Takahiro Kitazawa
Akiyoshi Tamura
Katsushi Tara
Original Assignee
Matsushita Electric Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co., Ltd. filed Critical Matsushita Electric Industrial Co., Ltd.
Priority to KR10-2003-7007232A priority Critical patent/KR100517531B1/ko
Priority to US10/416,261 priority patent/US7012285B2/en
Priority to EP02765528A priority patent/EP1427017A4/en
Publication of WO2003026013A1 publication Critical patent/WO2003026013A1/ja

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/095Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being Schottky barrier gate field-effect transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0605Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0611Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
    • H01L27/0617Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
    • H01L27/0629Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0802Resistors only
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0805Capacitors only
    • H01L27/0811MIS diodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Electronic Switches (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
PCT/JP2002/009384 2001-09-14 2002-09-12 Dispositif semi-conducteur WO2003026013A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR10-2003-7007232A KR100517531B1 (ko) 2001-09-14 2002-09-12 반도체 장치
US10/416,261 US7012285B2 (en) 2001-09-14 2002-09-12 Semiconductor device
EP02765528A EP1427017A4 (en) 2001-09-14 2002-09-12 SEMICONDUCTOR DEVICE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001280061A JP2003086767A (ja) 2001-09-14 2001-09-14 半導体装置
JP2001-280061 2001-09-14

Publications (1)

Publication Number Publication Date
WO2003026013A1 true WO2003026013A1 (fr) 2003-03-27

Family

ID=19104125

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/009384 WO2003026013A1 (fr) 2001-09-14 2002-09-12 Dispositif semi-conducteur

Country Status (5)

Country Link
US (1) US7012285B2 (ja)
EP (1) EP1427017A4 (ja)
JP (1) JP2003086767A (ja)
KR (1) KR100517531B1 (ja)
WO (1) WO2003026013A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005006072A (ja) 2003-06-12 2005-01-06 Matsushita Electric Ind Co Ltd 高周波スイッチ装置および半導体装置
JP4559772B2 (ja) * 2004-05-31 2010-10-13 パナソニック株式会社 スイッチ回路
JP4854980B2 (ja) * 2005-03-30 2012-01-18 住友電工デバイス・イノベーション株式会社 スイッチ回路及び半導体装置の製造方法
JP5112620B2 (ja) * 2005-05-31 2013-01-09 オンセミコンダクター・トレーディング・リミテッド 化合物半導体装置
JP4538016B2 (ja) * 2007-03-23 2010-09-08 パナソニック株式会社 高周波スイッチ装置および半導体装置
US11239802B2 (en) 2019-10-02 2022-02-01 Wolfspeed, Inc. Radio frequency transistor amplifiers having engineered instrinsic capacitances for improved performance

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05259192A (ja) * 1992-03-13 1993-10-08 Toshiba Corp ヘテロ接合型電界効果トランジスタおよびその製造方法
JPH06132310A (ja) * 1992-10-15 1994-05-13 Hitachi Ltd 半導体装置およびそれを用いた集積回路
EP0613191A2 (en) * 1993-02-26 1994-08-31 Sumitomo Electric Industries, Limited Channel structure for field effect transistor
EP0700161A2 (en) * 1994-08-29 1996-03-06 Hitachi, Ltd. Low distortion switch
JPH11283995A (ja) * 1998-03-30 1999-10-15 Hitachi Ltd 半導体装置およびその製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272964A (ja) * 1985-05-28 1986-12-03 Fujitsu Ltd 半導体抵抗素子
JPH01171279A (ja) * 1987-12-25 1989-07-06 Mitsubishi Monsanto Chem Co 半導体装置
US5196358A (en) * 1989-12-29 1993-03-23 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing InP junction FETS and junction HEMTS using dual implantation and double nitride layers
WO1995034913A1 (en) * 1994-06-16 1995-12-21 Anadigics, Inc. Bootstrapped-gate field effect transistors and circuits thereof
JP2687897B2 (ja) * 1994-10-13 1997-12-08 日本電気株式会社 電界効果型トランジスタ及びその製造方法
US5903178A (en) * 1994-12-16 1999-05-11 Matsushita Electronics Corporation Semiconductor integrated circuit
JPH08204530A (ja) * 1995-01-23 1996-08-09 Sony Corp スイツチ回路
JP3485711B2 (ja) * 1996-02-29 2004-01-13 三洋電機株式会社 スイッチ回路装置
JPH11136111A (ja) * 1997-10-30 1999-05-21 Sony Corp 高周波回路
JP2000277703A (ja) * 1999-03-25 2000-10-06 Sanyo Electric Co Ltd スイッチ回路装置
AU2001243426A1 (en) * 2000-03-03 2001-09-17 Alpha Industries, Inc. Electronic switch

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05259192A (ja) * 1992-03-13 1993-10-08 Toshiba Corp ヘテロ接合型電界効果トランジスタおよびその製造方法
JPH06132310A (ja) * 1992-10-15 1994-05-13 Hitachi Ltd 半導体装置およびそれを用いた集積回路
EP0613191A2 (en) * 1993-02-26 1994-08-31 Sumitomo Electric Industries, Limited Channel structure for field effect transistor
EP0700161A2 (en) * 1994-08-29 1996-03-06 Hitachi, Ltd. Low distortion switch
JPH11283995A (ja) * 1998-03-30 1999-10-15 Hitachi Ltd 半導体装置およびその製造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
INAMORI M. ET AL.: "A new GaAs variable-gain amplifier MMIC with a widw-dynamic-range and low-voltage-operation linear attenuation circuit", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, vol. 48, no. 2, February 2000 (2000-02-01), pages 182 - 186, XP000906145 *
See also references of EP1427017A4 *

Also Published As

Publication number Publication date
JP2003086767A (ja) 2003-03-20
KR100517531B1 (ko) 2005-09-28
US7012285B2 (en) 2006-03-14
KR20030082933A (ko) 2003-10-23
EP1427017A4 (en) 2006-10-18
EP1427017A1 (en) 2004-06-09
US20040026742A1 (en) 2004-02-12

Similar Documents

Publication Publication Date Title
TW200516717A (en) Structure and method of a strained channel transistor and a second semiconductor component in an integrated circuit
MY127799A (en) Soi device with reduced junction capacitance.
EP2259316A3 (en) Semiconductor circuit with TFTs
TWI266364B (en) Body-tied silicon on insulator semiconductor device and method therefor
WO2002047168A3 (en) Cmos inverter circuits utilizing strained silicon surface channel mosfets
WO2000004587A3 (en) Nitride based transistors on semi-insulating silicon carbide substrates
WO2004038808A3 (en) Double and triple gate mosfet devices and methods for making same
WO2004042826A3 (en) Semiconductor component comprising a resur transistor and method of manufacturing same
WO2003025984A3 (en) Semiconductor structures employing strained material layers with defined impurity gradients and methods for fabricating same
EP0531550A4 (ja)
WO2003103032A3 (en) A method for making a semiconductor device having a high-k gate dielectric
EP1001467A3 (en) Semiconductor device and method of manufacturing the same
WO2002013262A3 (en) Gate technology for strained surface channel and strained buried channel mosfet devices
AU5545894A (en) Power mosfet in silicon carbide
WO2002097968A3 (en) Method and apparatus for compensation of second order distortion
WO2003041185A3 (en) Organic thin film transistor with polymeric interface
ATE339016T1 (de) Hochfrequenzschalter und diesen verwendende elektronische vorrichtung
WO2002054449A3 (en) Silicon carbide and related wide-bandgap transistors on semi-insulating epitaxy for high-speed, high-power applications
TW356584B (en) Ferroelectric transistors of thin film semiconductor gate electrodes
WO2000030182A3 (en) Offset drain fermi-threshold field effect transistors
EP0784345A3 (en) Switching circuit comprising field effect transistors
EP1156530A3 (en) Compound semiconductor switching device for high frequency switching
WO2002003474A3 (en) N-type nitride semiconductor laminate and semiconductor device using same
EP0851494A3 (en) Semiconductor device having a protection circuit
EP1233453A3 (en) Semiconductor integrated circuit having anti-fuse, method of fabricating, and method of writing data in the same

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): KR

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FR GB GR IE IT LU MC NL PT SE SK TR

WWE Wipo information: entry into national phase

Ref document number: 10416261

Country of ref document: US

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 1020037007232

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 2002765528

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 1020037007232

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 2002765528

Country of ref document: EP

WWG Wipo information: grant in national office

Ref document number: 1020037007232

Country of ref document: KR

WWW Wipo information: withdrawn in national office

Ref document number: 2002765528

Country of ref document: EP