WO2003010736A1

WO2003010736A1 - Method of manufacturing flat display panel

Info

Publication number: WO2003010736A1
Application number: PCT/JP2002/007028
Authority: WO
Inventors: Yasuaki Miyake; Haruo Wakayama
Original assignee: Mitsuboshi Diamond Industrial Co., Ltd.
Priority date: 2001-07-12
Filing date: 2002-07-10
Publication date: 2003-02-06
Also published as: TWI309317B; JP2004157145A

Abstract

A method of manufacturing a flat display panel formed by sticking a pair of fragile material substrates opposedly to each other, comprising a step for forming scribe lines on a pair of mother fragile material substrates divided into a plurality of fragile material substrates and either of (1) a step for sticking the mother fragile material substrates to each other and dividing the stuck substrates, (2) a step for sticking the pair of fragile material substrates after forming the fragile material substrates by dividing the mother fragile material substrates, and (3) a step for sticking the fragile material substrates obtained by dividing either one of the mother fragile material substrates onto the other mother fragile material substrates.

Description

Specification

Method of manufacturing flat display panel

The present invention relates to a method of manufacturing a flat display panel in which brittle material substrates are bonded to each other, including a liquid crystal display panel having a pair of brittle material substrates bonded to each other and facing each other. Background art

Products related to flat display panels, such as liquid crystal display panels, organic EL elements and liquid crystal projectors, are used as a means to communicate information between machines and humans in various applications. The bonded substrate used for such flat display panel related products has a structure in which various electronic circuit means and the like necessary for the display function are formed on the inner surface of the substrate, and two sheets are bonded in opposition. The functional material sealed in the gap provided between the two substrates is electronically controlled by the above electronic control circuit to function as a display device in the form of a visible image. There is. In the following, the prior art will be described for a liquid crystal display panel which is a type of flat display panel.

In the liquid crystal display panel, a TFT substrate provided with a plurality of pixel electrodes in a matrix and provided with a TFT for each pixel electrode, and a color filter substrate (CF substrate) provided with a color filter are suitable. The liquid crystal is sealed in the gap, and the liquid crystal is sealed.

In such a liquid crystal display panel, each liquid crystal display is usually performed after a mother glass for a CF substrate divided into a plurality of CF substrates and a mother glass for a TFT substrate divided into a plurality of TFT substrates are bonded. As the size of the panel is increased, the substrate for the CF substrate-the surface of the glass for the TFT substrate (a surface different from the film surface) It is machined and divided into liquid crystal cell substrates. Thereafter, liquid crystal is injected between the CF substrate and the TFT substrate bonded to each other to form a liquid crystal display panel.

When manufacturing a liquid crystal display panel, first, a seal, a spacer, etc. are formed for each area of the liquid crystal display panel with respect to the CF substrate moxa glass which has been subjected to cleaning, alignment processing and the like. Processing such as spreading is carried out, and after that, a glass substrate for TFT substrate is pasted together.

However, when scribing is performed after the mother glass for the CF substrate and the mother glass for the TFT substrate are bonded, the scribing line is stabilized due to the influence of the sealing material that bonds the two mother glass substrates. Problem of not being formed.

In addition, as shown in FIG. 3, after the mother glass 31 for the CF substrate and the mother glass 32 for the TFT substrate are bonded to each other, the method of scribing and dividing is a vertical crack generated by the scribing. In the dividing step, a bending moment is applied to the scribe line in the dividing step to propagate in the thickness direction of the glass to divide each mother glass 31 and 32.

At this time, under the influence of the sealing material which bonds both Maza and Glass 3 1 and 3 2, vertical cracks do not spread straight in the thickness direction of the glass, and the film surface of both Glass substrates 3 1 and 3 2 The side surface has a defect that it is not divided at the desired position.

The present invention solves such a problem, and an object thereof is to manufacture a flat display panel in which brittle material substrates including liquid crystal display panels and the like capable of obtaining desired dimensional accuracy with high efficiency are bonded. It is about providing the method that can be done. Disclosure of the invention

A method of manufacturing a flat display panel according to the present invention comprises: Forming a scribing line on each of a pair of maze-brittle material substrates, each of which is divided into a plurality of brittle material substrates. After that, (1) a step of bonding together and dividing the respective Maza-I brittle material substrates, (2) after dividing the Maza-I-brittle material substrate into the respective brittle material substrates, a pair of brittleness is obtained. The step of bonding the material substrates together, (3) any of the steps of bonding the brittle material substrates obtained by dividing any one of the Maza-I brittle material substrates to the other Maza-I brittle material substrate It is special feature to prepare.

The step of forming the scribe line can use a cutting edge or a laser. In the case of using a laser, it is characterized by continuously cooling the vicinity of the irradiation region of the laser beam while irradiating the laser beam onto the substrate of the brittle material.

The pair of brittle material substrates may be both glass substrates, and one of the pair of brittle material substrates may be a glass substrate and the other may be a silicon substrate. Brief description of the drawings

FIGS. 1 (a) and 1 (b) are schematic diagrams each showing an example of the implementation state of the production method of the present invention.

FIGS. 2 (a) and 2 (b) are schematic diagrams each showing an example of the implementation state of the production method of the present invention.

FIG. 3 is a schematic view showing a defect of the conventional manufacturing method. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described. The method for producing a flat display panel of the present invention is carried out, for example, when producing a liquid crystal display panel. Liquid crystal display panel When manufacturing a glass substrate, as shown in Figure 1 (a), multiple color filter substrates

(Hereinafter referred to as a CF substrate) 1 1 a Divided into M 1 glass for CF substrate 1 1 As shown in FIG. 2 (a), 2 M divided into a plurality of TFT substrates 12 a One glass 12 is prepared.

The color filter, the counter electrode, the alignment film, and the alignment mark for positioning are respectively provided in advance in the area of each of the plurality of divided CF substrates 11 a in the mother glass 11 for CF substrates.

When such a CF substrate mother glass 1 1 is prepared, the CF substrate mother glass 1 1 is divided for each CF substrate 1 1 a. When dividing the mother glass 11 for the CF substrate, the laser beam LB oscillated from the laser 21 is applied to the surface of the mother glass 11 for the CF substrate. The laser beam LB is scanned along the scribe line SL when dividing the CF substrate mother glass 1 1, and the surface of the CF substrate mother glass 1 1 is a scribe line SL Along the, an oval shaped laser spot LS is formed.

The laser beam LB is at a temperature lower than the temperature at which the MS substrate glass for the CF substrate is melted, ie, at a temperature lower than the soft melting point of the MS substrate glass for the CF substrate. 1 1 is designed to heat. In the vicinity of the area where the laser spot LS is to be formed by the irradiation of the laser beam LB on the surface of the mother glass 1 1 for CF substrate, the cooling nozzle 22 is disposed to be opposed. The cooling nozzle 22 is disposed rearward of the scanning direction of the laser beam LB, and is scanned in the same direction as the scanning direction of the laser beam at a velocity equal to its traveling speed. The cooling nozzle 22 sprays, for example, various gases and fluids as a cooling medium. Here, cooling water is blown to the adjacent area of the laser beam LB, and the cooling water is scanned along the scribe line SL following the laser beam LB.

The surface of the Mazaha glass 1 1 for the CF substrate to which the laser beam LB is irradiated is -Heating by the first beam LB produces compressive stress, and blowing of cooling water produces tensile stress. As described above, since a tensile stress is generated in the vicinity of the area where the compressive stress is generated, a stress gradient is generated between the two areas due to the respective stress. A blind crack is formed from the initial crack formed at the end of the mother glass 1 1. Blind cracks are sequentially formed along the scribe line in order for the laser spot LS and the cooling spot by the cooling water to be scanned along the scribe line.

In this way, the CF substrate is divided into mother glass 1 1 for each CF substrate 1 1 a

As shown in (b), the maza-one glass 1 1 for the CF substrate is a scribe line S

It is divided along L to be a plurality of CF glass substrates 1 1 a.

A plurality of pixel electrodes are provided in the form of a matrix for each region of each double substrate 12 and a TFT is provided for each pixel electrode in the mother substrate glass 12 for TFT substrate shown in FIG. 2 (a). It is not shown. Furthermore, alignment marks for positioning are also provided in the area of each complete board 12 &, respectively.

As in the case of the mother glass for the CF substrate, scribing is performed by the irradiation of the laser beam LB by the laser oscillator 21 and the irradiation of the cooling water by the cooling nozzle 22 in the mother glass 12 for the TFT substrate. A blind crack is formed along the planned line SL, and then divided along the scribe line SL in which the blind crack is formed, as shown in FIG. 2 (b), to form a plurality of T FT substrates 12a and Be done. The blind crack formed by the laser beam and the cooling medium such as the cooling water is generated by thermal stress strain generated in the mother glass, and therefore the glass surface of the mother glass is scribed with a glass cutter or the like. There is no hour line like this. Therefore, when forming a scribe line by a blind crack, it is necessary to use a glass cutter, etc. There is very little dust generation.

Thus, when a plurality of CF substrates 11 a and a plurality of TFT substrates 12 a are formed, each CF substrate 11 a and the TFT substrate 12 a are inspected to confirm that no flaws or the like have occurred. . If there are scratches, etc., they will be discarded as defective products. Then, the CF substrate 1 1 a that has been determined to be non-defective by inspection and the perfect substrate 12 & are pasted together with the seal material applied to their respective peripheral edge portions, and the CF material is cured by curing the seal material. The substrate 11a and the TFT substrate 12a are bonded together with an appropriate space therebetween. Thereafter, a liquid crystal is injected between the CF substrate 11a and the TFT substrate 12a, and a polarizing plate is stuck to form a liquid crystal display panel.

As described above, both of the mother glass 11 for the CF substrate and the mother glass 12 for the TFT substrate are divided along the scribe line, and the plurality of CF substrates 11 a and the plurality of TFT substrates are respectively separated. After the formation of 12 a, the CF substrate 11 a and the TFT substrate 12 a were bonded to each other. However, only the CF substrate mother glass 11 was divided to form a plurality of CF substrates 11 a. Each CF substrate 11 a is pasted to the TFT substrate mask glass 12 on which a scribe line has already been formed, and each CF substrate 11 a is bonded to the TFT substrate matrix glass 12 is scratched. It may be divided along.

Also, after forming only a plurality of TFT substrates 12a by dividing only the mother substrate glass 12 for the TFT substrate, each double substrate 12 & is pasted on the mother substrate glass 11 for CF substrate on which a scribe line is already formed. In addition, the CF substrate mother glass 11 to which each TFT substrate 12 a is attached may be cut along the scribe line.

Furthermore, after the mother substrate glass 1 for CF substrate 11 and the mother substrate glass 12 for TFT substrate on which the scribe lines are respectively formed are bonded to each other, the mother substrate glass 11 for CF substrate and mother glass for TFT substrate are formed. 12 may be divided in order. Both the above-mentioned mother glass 11 for CF substrate and mother glass 12 for TFT substrate are divided along the scribe line, and a plurality of CF substrates 11 a and a plurality of TFT substrates 12 a are respectively formed. Later, when the CF substrate 11a and the TFT substrate 12a are bonded to each other, the size of each of the divided substrates is much smaller than the size of the single glass substrate. The positioning can be made relatively easily in each process.

Further, in the above embodiment, a blind crack is generated using thermal stress strain generated in each of the mother glass 11 for the CF substrate and the mother glass 12 for the TFT substrate using a single laser beam. Although the scribe line is formed by the above method, the scribe line may be formed on each of the mother glass 11 for the CF substrate and the mother glass 12 for the TFT substrate by the cemented carbide and diamond cutters. Good.

The surface on which the scribe line is formed in the one glass for the CF substrate and the TFT substrate may be either the front or back surface.

The manufacturing method of the present invention is suitable for an organic EL element, a PDP (plasma display panel), an FED (field emission display), a transmission type liquid crystal projector panel, etc. It can also be applied to the production of a reflective liquid crystal projector panel in which one substrate is other than a glass substrate. The reflective liquid crystal projector panel is formed by bonding a glass substrate and a silicon substrate with a sealing agent so as to face each other. In the method of manufacturing a liquid crystal display panel described in FIGS. 1 and 2, this reflection type liquid crystal projector-one panel replaces one maza-one glass substrate, for example, maza-glass for a TFT substrate with a silicon substrate and a scribe line. As a forming means, in place of a CO ₂ laser, a silicon substrate is divided using a YAG laser, cemented carbide or diamond force sensor, and manufacturing is performed in the same manner as the liquid crystal display panel described above. Be done. Although the manufacturing method of the liquid crystal display panel and the reflection type liquid crystal projector panel has been described above, in addition to the above, an organic EL element, a PDP (plasma display panel), an FED (field transmission display), a transmission type liquid crystal projector panel, etc. The technology of the present invention can be applied to the manufacture of Industrial applicability

The method of manufacturing a flat display panel according to the present invention is, as described above, to form a scribe line on a substrate of brittle material, and then bond the substrates of fragile material to each other, divide the substrate, etc. In the state where material substrates are pasted together

It is not necessary to form ', and the scry' can be formed stably and accurately without being affected by the sealing material.

Further, by scribing and dividing each bulky brittle material substrate before bonding, it is possible to accurately split each bulky brittle material substrate at a desired position without being affected by the sealing material.

In addition, in the process after dividing each bulky brittle material substrate into each brittle material substrate, accurate positioning becomes easy.

Claims

The scope of the claims

1. A method of manufacturing a flat display panel in which a pair of brittle material substrates are bonded to each other facing each other,

Forming a scribe line on each of a pair of maza-one brittle material substrates, each of which is divided into a plurality of brittle material substrates;

(1) A step of bonding together and dividing the respective substrates of brittle material

(2) A step of bonding together a pair of brittle material substrates after dividing each of the bulky brittle material substrates into respective brittle material substrates.

(3) A step of bonding together the brittle material substrates obtained by dividing one of the Maza-I brittle material substrates to the other Maza-I brittle material substrate '

A method of producing a flat display panel comprising the steps of

2. The step of forming the scribe line is a step of continuously cooling the vicinity of the irradiation area of the laser beam while irradiating the laser beam on the substrate of the brittle material. A method of manufacturing a flat display panel according to claim 1 in the range of 1.

3. The method for producing a flat display panel according to claim 1 or 2, wherein the pair of brittle material substrates are both glass substrates.

4. The flat display panel according to claim 1 or 2, wherein one of the pair of brittle material substrates is a glass substrate, and the other is a silicon substrate. Production method.