WO2002061458A1 - Detecteur de faisceau electronique, microscope electronique de type a balayage, spectrometre de masse et detecteur d'ions - Google Patents

Detecteur de faisceau electronique, microscope electronique de type a balayage, spectrometre de masse et detecteur d'ions Download PDF

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Publication number
WO2002061458A1
WO2002061458A1 PCT/JP2002/000726 JP0200726W WO02061458A1 WO 2002061458 A1 WO2002061458 A1 WO 2002061458A1 JP 0200726 W JP0200726 W JP 0200726W WO 02061458 A1 WO02061458 A1 WO 02061458A1
Authority
WO
WIPO (PCT)
Prior art keywords
detector
electron beam
photodetector
mass spectrometer
scanning type
Prior art date
Application number
PCT/JP2002/000726
Other languages
English (en)
French (fr)
Inventor
Minoru Kondo
Toshimitsu Nagai
Atsushi Kibune
Original Assignee
Hamamatsu Photonics K. K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics K. K. filed Critical Hamamatsu Photonics K. K.
Priority to EP02710405A priority Critical patent/EP1365260A4/en
Priority to KR1020037009043A priority patent/KR100917387B1/ko
Priority to JP2002561972A priority patent/JP4246995B2/ja
Priority to US10/470,847 priority patent/US6861650B2/en
Publication of WO2002061458A1 publication Critical patent/WO2002061458A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/36—Photoelectric screens; Charge-storage screens
    • H01J29/38—Photoelectric screens; Charge-storage screens not using charge storage, e.g. photo-emissive screen, extended cathode
    • H01J29/385—Photocathodes comprising a layer which modified the wave length of impinging radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Luminescent Compositions (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
PCT/JP2002/000726 2001-01-31 2002-01-30 Detecteur de faisceau electronique, microscope electronique de type a balayage, spectrometre de masse et detecteur d'ions WO2002061458A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP02710405A EP1365260A4 (en) 2001-01-31 2002-01-30 ELECTRON BEAM DETECTOR, RASTER ELECTRONIC MICROSCOPE, MASS SPECTROMETER AND ION DETECTOR
KR1020037009043A KR100917387B1 (ko) 2001-01-31 2002-01-30 전자선 검출기, 주사형 전자 현미경, 질량 분석 장치, 및,이온 검출기
JP2002561972A JP4246995B2 (ja) 2001-01-31 2002-01-30 電子線検出器、走査型電子顕微鏡、質量分析装置、及び、イオン検出器
US10/470,847 US6861650B2 (en) 2001-01-31 2002-01-30 Electron beam detector, scanning type electron microscope, mass spectrometer, and ion detector

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001024421 2001-01-31
JP2001-24421 2001-01-31

Publications (1)

Publication Number Publication Date
WO2002061458A1 true WO2002061458A1 (fr) 2002-08-08

Family

ID=18889565

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/000726 WO2002061458A1 (fr) 2001-01-31 2002-01-30 Detecteur de faisceau electronique, microscope electronique de type a balayage, spectrometre de masse et detecteur d'ions

Country Status (6)

Country Link
US (1) US6861650B2 (ja)
EP (1) EP1365260A4 (ja)
JP (2) JP4246995B2 (ja)
KR (1) KR100917387B1 (ja)
CN (1) CN1307432C (ja)
WO (1) WO2002061458A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005097945A1 (ja) * 2004-04-08 2005-10-20 Hamamatsu Photonics K.K. 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
US7030388B2 (en) 2002-10-09 2006-04-18 Hamamatsu Photonics K.K. Illuminant, and, electron beam detector, scanning electron microscope and mass spectroscope each including the same
WO2010140426A1 (ja) * 2009-06-04 2010-12-09 三菱瓦斯化学株式会社 積層型ＺｎＯ系単結晶シンチレータおよびその製造方法
CN103298906A (zh) * 2010-12-13 2013-09-11 阿海珐公司 具有荧光纳米颗粒标识的核电站部件及相应的读取方法和装置
JP2019186112A (ja) * 2018-04-13 2019-10-24 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置

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US7009187B2 (en) * 2002-08-08 2006-03-07 Fei Company Particle detector suitable for detecting ions and electrons
US7576324B2 (en) * 2003-09-05 2009-08-18 Griffin Analytical Technologies, L.L.C. Ion detection methods, mass spectrometry analysis methods, and mass spectrometry instrument circuitry
US20070258861A1 (en) * 2004-06-15 2007-11-08 Barket Dennis Jr Analytical Instruments, Assemblies, and Methods
WO2006116564A2 (en) 2005-04-25 2006-11-02 Griffin Analytical Technologies, L.L.C. Analytical instrumentation, appartuses, and methods
DE102006004478A1 (de) * 2006-01-30 2007-08-02 Spectro Analytical Instruments Gmbh & Co. Kg Vorrichtung zur Detektion von Teilchen
CN100424492C (zh) * 2006-05-26 2008-10-08 中国科学院上海技术物理研究所 窄带双波段扫描型红外焦平面探测器
US7947951B2 (en) * 2006-07-21 2011-05-24 National University Of Singapore Multi-beam ion/electron spectra-microscope
US7992424B1 (en) 2006-09-14 2011-08-09 Griffin Analytical Technologies, L.L.C. Analytical instrumentation and sample analysis methods
EP2006881A3 (en) * 2007-06-18 2010-01-06 FEI Company In-chamber electron detector
US8487242B2 (en) * 2008-01-04 2013-07-16 Covalx Ag Detector device for high mass ion detection, a method for analyzing ions of high mass and a device for selection between ion detectors
US8106355B1 (en) * 2008-06-27 2012-01-31 Kla-Tencor Corporation Automated inspection using cell-cell subtraction perpendicular to stage motion direction
US8222600B2 (en) 2009-05-24 2012-07-17 El-Mul Technologies Ltd. Charged particle detection system and method
JP5700325B2 (ja) * 2010-03-02 2015-04-15 国立大学法人三重大学 紫外線発生用ターゲットおよび電子線励起紫外光源
WO2012016198A2 (en) 2010-07-30 2012-02-02 Pulsetor, Llc Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and x-ray detector employing same
CZ303201B6 (cs) * 2011-03-01 2012-05-23 Crytur Spol. S R. O. Scintilacní detekcní jednotka pro detekci elektronu, iontu a fotonu sendvicové struktury
JP5735321B2 (ja) * 2011-03-28 2015-06-17 株式会社スペクトラテック 光検出器用高電圧回路
EP2521157A1 (en) * 2011-05-05 2012-11-07 Fei Company Segmented charged particle detector using scintillator material
JP5905672B2 (ja) * 2011-06-28 2016-04-20 株式会社東芝 放射線検出器及びその製造方法
EP2739958B1 (en) 2011-08-05 2016-01-20 Pulsetor, LLC Electron detector including one or more intimately-coupled scintillator-photomultiplier combinations, and electron microscope employing same
JP6076729B2 (ja) 2012-01-25 2017-02-08 浜松ホトニクス株式会社 イオン検出装置
EP2700979A1 (en) 2012-08-21 2014-02-26 Paul Scherrer Institut Transverse Profile Imager for Ionizing Radiation
JPWO2015052977A1 (ja) * 2013-10-07 2017-03-09 株式会社島津製作所 放射線検出器および放射線検出器の製造方法
WO2015153622A1 (en) 2014-03-31 2015-10-08 Leco Corporation Right angle time-of-flight detector with an extended life time
US9613781B2 (en) * 2015-01-23 2017-04-04 Hamamatsu Photonics K.K. Scanning electron microscope
US10037862B2 (en) 2015-07-31 2018-07-31 Carl Zeiss Microscopy, Llc Charged particle detecting device and charged particle beam system with same
CN105428198B (zh) * 2015-11-13 2017-07-25 中国电子科技集团公司第五十五研究所 采用高温共烧多层陶瓷工艺制作矩阵阳极及方法
JP6676372B2 (ja) * 2015-12-28 2020-04-08 株式会社Ｓ−Ｎａｎｏｔｅｃｈ Ｃｏ−Ｃｒｅａｔｉｏｎ シンチレータ及び電子検出器
JP6576257B2 (ja) 2016-01-29 2019-09-18 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置
CN107564794A (zh) * 2016-07-01 2018-01-09 张双喜 一种混合型光电倍增器及其光电倍增方法
US11183377B2 (en) 2017-05-12 2021-11-23 Nova Measuring Instruments, Inc. Mass spectrometer detector and system and method using the same
JP7304461B2 (ja) * 2018-04-13 2023-07-06 株式会社ホロン 電子検出装置
JP7217189B2 (ja) * 2019-03-28 2023-02-02 株式会社日立ハイテク イオン検出装置
FR3096506B1 (fr) * 2019-05-23 2021-06-11 Photonis France Photocathode à rendement quantique amélioré
JP6734449B1 (ja) * 2019-08-02 2020-08-05 浜松ホトニクス株式会社 イオン検出器、測定装置および質量分析装置
JP7252179B2 (ja) * 2020-07-08 2023-04-04 浜松ホトニクス株式会社 イオン検出器、測定装置および質量分析装置

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JPH05264738A (ja) * 1992-03-16 1993-10-12 Olympus Optical Co Ltd 軟ｘ線検出器
JPH05308149A (ja) * 1992-04-30 1993-11-19 Olympus Optical Co Ltd 軟ｘ線検出素子
JPH0611572A (ja) * 1992-06-26 1994-01-21 Fuji Electric Co Ltd シンチレーション式放射線検出器
JPH10160853A (ja) * 1996-11-29 1998-06-19 Shimadzu Corp Ｘ線検出器
JPH11339681A (ja) * 1998-05-26 1999-12-10 Toyota Central Res & Dev Lab Inc 蛍光表示板およびその製造方法
JP2000008035A (ja) * 1998-06-18 2000-01-11 Futaba Corp 蛍光体及び蛍光体の製造方法
JP2000249768A (ja) * 1999-03-02 2000-09-14 Hamamatsu Photonics Kk シンチレータ及びそれを用いた放射線検出器
JP2000253320A (ja) * 1999-02-25 2000-09-14 Nippon Hoso Kyokai <Nhk> 固体撮像装置

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JPS5418269A (en) * 1977-07-11 1979-02-10 Jeol Ltd Electron beam detector
JPH05264738A (ja) * 1992-03-16 1993-10-12 Olympus Optical Co Ltd 軟ｘ線検出器
JPH05308149A (ja) * 1992-04-30 1993-11-19 Olympus Optical Co Ltd 軟ｘ線検出素子
JPH0611572A (ja) * 1992-06-26 1994-01-21 Fuji Electric Co Ltd シンチレーション式放射線検出器
JPH10160853A (ja) * 1996-11-29 1998-06-19 Shimadzu Corp Ｘ線検出器
JPH11339681A (ja) * 1998-05-26 1999-12-10 Toyota Central Res & Dev Lab Inc 蛍光表示板およびその製造方法
JP2000008035A (ja) * 1998-06-18 2000-01-11 Futaba Corp 蛍光体及び蛍光体の製造方法
JP2000253320A (ja) * 1999-02-25 2000-09-14 Nippon Hoso Kyokai <Nhk> 固体撮像装置
JP2000249768A (ja) * 1999-03-02 2000-09-14 Hamamatsu Photonics Kk シンチレータ及びそれを用いた放射線検出器

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030388B2 (en) 2002-10-09 2006-04-18 Hamamatsu Photonics K.K. Illuminant, and, electron beam detector, scanning electron microscope and mass spectroscope each including the same
WO2005097945A1 (ja) * 2004-04-08 2005-10-20 Hamamatsu Photonics K.K. 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
US7910895B2 (en) 2004-04-08 2011-03-22 Hamamatsu Photonics K.K. Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device
US8164069B2 (en) 2004-04-08 2012-04-24 Hamamatsu Photonics K.K. Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device
WO2010140426A1 (ja) * 2009-06-04 2010-12-09 三菱瓦斯化学株式会社 積層型ＺｎＯ系単結晶シンチレータおよびその製造方法
CN103298906A (zh) * 2010-12-13 2013-09-11 阿海珐公司 具有荧光纳米颗粒标识的核电站部件及相应的读取方法和装置
CN103298906B (zh) * 2010-12-13 2015-03-04 阿海珐公司 具有荧光纳米颗粒标识的核电站部件及相应的读取方法和装置
JP2019186112A (ja) * 2018-04-13 2019-10-24 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置
JP7085258B2 (ja) 2018-04-13 2022-06-16 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置

Also Published As

Publication number Publication date
JP4246995B2 (ja) 2009-04-02
US20040061054A1 (en) 2004-04-01
CN1489704A (zh) 2004-04-14
JP4608572B2 (ja) 2011-01-12
EP1365260A1 (en) 2003-11-26
CN1307432C (zh) 2007-03-28
EP1365260A4 (en) 2013-01-23
JPWO2002061458A1 (ja) 2004-06-03
KR20030085115A (ko) 2003-11-03
JP2009080124A (ja) 2009-04-16
US6861650B2 (en) 2005-03-01
KR100917387B1 (ko) 2009-09-17

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