WO2002037892A2 - Element d'actionnement - Google Patents

Element d'actionnement Download PDF

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Publication number
WO2002037892A2
WO2002037892A2 PCT/DK2001/000718 DK0100718W WO0237892A2 WO 2002037892 A2 WO2002037892 A2 WO 2002037892A2 DK 0100718 W DK0100718 W DK 0100718W WO 0237892 A2 WO0237892 A2 WO 0237892A2
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
actuating element
electrode
longitudinal direction
adjacent
Prior art date
Application number
PCT/DK2001/000718
Other languages
German (de)
English (en)
Other versions
WO2002037892A3 (fr
Inventor
Peter Gravesen
Mohamed Yahia Benslimane
Original Assignee
Danfoss A/S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss A/S filed Critical Danfoss A/S
Priority to AU2002212104A priority Critical patent/AU2002212104A1/en
Publication of WO2002037892A2 publication Critical patent/WO2002037892A2/fr
Publication of WO2002037892A3 publication Critical patent/WO2002037892A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/051—Translation according to an axis parallel to the substrate

Definitions

  • the invention relates to an actuating element with a body made of an elastomer material, which is provided on two mutually opposite boundary surfaces, each with an electrode arrangement, at least one of which has a plurality of first electrodes passing through in the transverse direction of its boundary surface.
  • Such actuators are also called “artificial muscles” because their behavior corresponds to that of human muscles under certain conditions.
  • the change in thickness is completely converted into a change in length in the other direction.
  • the direction in which the length change is to take place is referred to as the "longitudinal direction”.
  • the direction in which a change in length should not take place is referred to as the "transverse direction”.
  • the electrode arrangement has a conductive layer with a relatively low conductivity, to which strips made of a non-compliant material are applied in the transverse direction, the strips being spaced apart from one another in the longitudinal direction.
  • the conductive layer is intended to ensure that the electrical field is distributed as uniformly as possible, while the strips, preferably made of a metal, are intended to prevent the body from spreading in the transverse direction.
  • due to the poor conductivity of the electrically conductive layer there is a certain limitation in the dynamics.
  • the invention has for its object to improve the mechanical extensibility of an actuating element.
  • the electrode arrangement has second electrodes, of which each because several are arranged in gaps between adjacent first electrodes and connect these, the second electrodes being arranged offset in relation to one another in adjacent gaps.
  • the first electrodes which pass in the transverse direction limit the elasticity of the body in this transverse direction or even exclude it. "Passing through” is intended to express that the first electrodes have a shape that can no longer be stretched, for example a straight line. So you ensure that a compression of the body can be converted almost completely into a change in length. In practice, of course, there will also be minor changes in the transverse direction. However, compared to the changes in the longitudinal direction, these are negligible.
  • the second electrodes now ensure that a relatively high electrical conductivity is obtained over the entire surface of the boundary surface. This improves the mechanical extensibility of the actuating element, and the actuating element can be operated at high frequencies.
  • the second electrodes do not significantly increase the rigidity in the longitudinal direction. Rather, the first and the second electrodes form meshes between them, which can pull apart in a diamond shape when the length changes. An additional effect is even achieved: the
  • the second electrodes of every nth gap lie on a line in the longitudinal direction. This simplifies the design of the electrode arrangement. At the same time, the electrical field distribution can be better controlled.
  • the second electrodes of each second gap lie in a line in the longitudinal direction.
  • a structure of the electrode arrangement in the manner of a grid or network with nodes arranged offset from one another is thus achieved.
  • Such a grid can be in
  • the second electrodes of a gap are preferably arranged in the middle of a distance between two adjacent electrodes of an adjacent gap. This results in a high symmetry when the second electrodes are loaded and a very uniform structure of the electric field.
  • the electrode arrangement is preferably connected directly to the body. This configuration has several advantages. On the one hand, the production of such an actuating element is simplified because there is no need to apply an intermediate layer between the electrode arrangement and the body. On the other hand, it is also possible to connect the electrode arrangement to the body more firmly, ie more permanently and more reliably. The attachment can only be matched to the material pairing between the electrode arrangement and the body.
  • the distance between two first electrodes is preferably not greater than the thickness of the body between the boundary surfaces.
  • the extension of a first electrode in the longitudinal direction preferably corresponds to the distance between two first electrodes.
  • the length of the second electrodes in the longitudinal direction is exactly the same as the length of the first electrodes in the longitudinal direction. This further contributes to an equalization of the electrical field. Since a relatively large area is available for conducting electrical current, the response time of such an actuating element is only slightly impaired in comparison to a full-area electrode.
  • a lateral offset between two adjacent second electrodes is preferably greater than the distance between two first electrodes. In this way, a particularly good stretchable mesh or grid is achieved.
  • the electrode arrangement is preferably composed of a multiplicity of congruent unit cells. These unit cells all have the same shape. However, they can be built up mirror-inverted to each other.
  • the body is usually formed by a relatively thin film. This film ensures that the distance between the opposing electrode arrangements is not too great and that an electric field building up between the electrode arrangements can exert sufficient force to compress the body. The thinner the body, the finer the structure of the electrode arrangements.
  • a preferred manufacturing process for the electrode arrangements is photolithography. In photolithography, production becomes easier if you can repeat a basic pattern, in this case the unit cell, many times.
  • Adjacent unit cells are preferably mirrored to one another.
  • the network or lattice-like structure described above is thereby achieved in a simple manner.
  • Each unit cell preferably has a strip which runs in the transverse direction and which is located on both ends. each has a projection which is directed in the longitudinal direction, the two projections being directed in opposite directions. Depending on the point of view, the unit cell has the shape of an elongated S or Z. If several such unit cells are assembled in the transverse direction, the strips form the first electrode.
  • the unit cell preferably has a width / height ratio which is greater than or equal to 3%.
  • the unit cell has a sufficient transverse extent to allow the desired change in length when it is assembled with other unit cells to form the electrode arrangement.
  • Fig. 3 shows a unit cell.
  • the actuating element 1 shows an actuating element 1 in two states, namely in FIG. 1 a in the idle state and in FIG. 1 b in the actuated state.
  • the actuating element 1 has a body 2 made of an elastomer film, for example a silicone elastomer. Such a film usually also has dielectric properties. Above all, the body 2 has the property that its volume remains constant when it is compressed. Accordingly, the reduction in the thickness d of the body 2 causes an expansion perpendicular to the printing direction, as can be seen from a comparison between FIGS. 1a and 1b.
  • the body 2 has an electrode arrangement 3 on its upper side and a further electrode arrangement 4 on its underside.
  • the two electrode arrangements 3, 4 have the same or at least a similar design. If a voltage difference is applied to the two electrode arrangements 3, 4, an electrical field is created which penetrates the body 2. This electric field generates forces which cause the two electrode arrangements 3, 4 to be attracted. The attractive forces of the two electrode arrangements 3, 4 press the body 2 together.
  • the body 2 has a constant volume, ie a reduction in the thickness d (from FIG. 1 a to FIG. 1 b) results in a corresponding expansion in width and length. If you now prevent the expansion in width, the reduction in thickness only affects an increase in length.
  • the longitudinal direction which is represented by an arrow 5 in FIGS. 1 and 2
  • the transverse direction which is represented by an arrow 6, runs from left to right in FIG.
  • the actuating element 1 is therefore anisotropic. Changes in the longitudinal direction 5 are possible, while changes in the transverse direction 6 are practically prevented.
  • the electrode arrangements 3, 4 have a specific design, which is explained below in connection with FIGS. 2 and 3.
  • the electrode arrangement 3 is shown in plan view in FIG. 2.
  • the electrode arrangement 4 looks exactly the same.
  • the electrode arrangement 3 has first electrodes 7 which extend in the transverse direction 6 in the form of a line over the entire width of the body 2.
  • the first electrodes 7 are arranged with gaps 8, 8a, 8b to one another.
  • second electrodes 9 are arranged in such a way that an electrode 9 'of a gap 8a is arranged in the middle between two second electrodes 9 of the adjacent gap 8b.
  • the second electrodes 9 'of every second gap 8 lie here on a straight line in the longitudinal direction 5.
  • the first and second electrodes are perpendicular to the direction of expansion. device attached to the actuator.
  • the electrode arrangement 3 thus forms a network or grid with meshes 10, each of which is bounded by two first electrodes 7 and two second electrodes 9, these meshes 10 being contracted in a diamond shape when the body 2 expands in the longitudinal direction 5.
  • the electrode arrangements 3, 4 are applied directly to the body 2, i.e. without an electrically poorly conductive intermediate layer. They can thus be connected relatively firmly to the body 2, so that the movement of the body 2, i.e. A change in the extension in the longitudinal direction 5 or transverse direction 6 is only permissible as far as the electrode arrangements 3, 4 allow.
  • the first electrodes 7 Basically, these are not stretchable, so that the body 2 must not expand in the transverse direction 6. It looks different in the longitudinal direction 5.
  • the meshes 10 which are slit-shaped in the rest state, are deformed like a diamond. This creates an additional pull in the transverse direction 6, which counteracts an expansion of the body 2 in the transverse direction 6.
  • the distance a between two first electrodes is not greater than the thickness d of the body 2 between the boundary surfaces, ie between the electrode arrangements 3, 4. It can also be seen from FIG. 2 that the first electrodes 7 have a longitudinal extension b which corresponds to the distance a, ie the longitudinal extension of the gaps 8.
  • the electrode arrangement 3 consists of a regular pattern of so-called unit cells 11, one of which is shown enlarged in FIG. 3.
  • unit cells 11 are drawn in with dashed lines, whereby it can be seen that adjacent unit cells 11 are each mirrored to one another, i.e. they are either mirrored on a line 12 which runs parallel to the longitudinal direction 5, or on a line 13 which runs parallel to the transverse direction 6.
  • Each unit cell 11 has a strip 14 which has the above-mentioned width b and a length L and later forms the first electrodes 7, and two projections 15, 16, so that the unit cell 11 has an extension H overall. While the strip 14 is directed in the transverse direction 6, the projections 15, 16 are directed in the longitudinal direction 5, but are opposed to one another.
  • the ratio L / H is at least 3 1/2 • It may also be even larger, for example 10.
  • the extension H twice the length b of the first electrode, so that during assembly of the respective unit cells 11 shown in Fig. 2 illustrated patterns of electrical the arrangement wins, in which the gaps 8 between the first electrodes 7 are as large as the longitudinal extent b of the first electrodes 7.
  • the second electrode 9 ' is offset from an adjacent electrode 9 by a distance L extending in the transverse direction. This offset should be greater than the distance a between two first electrodes 7, i.e. L> a.
  • the distance a between the first electrodes 7 is equal to or less than the thickness d of the body 2. If one works with thin films with a thickness in the micrometer range, photolithography techniques are well suited to design the electrode arrangements 3, 4. For example, a thin layer of gold can be applied to the body 2, for example by vapor deposition. A thin, for example 1 ⁇ m thick, positive photoresist layer is then applied to the gold-coated body 2. The photoresist is exposed to UN radiation, if necessary after curing, through a mask which is designed in such a way that it has exactly the desired profile pattern for the electrode arrangement 3, 4. The photoresist is then developed and the exposed parts are removed.
  • the body is then placed in a (KI + I 2 ) mixture that etches out unwanted gold surfaces, namely the meshes 10 or slots that are to be formed in the gold coating.
  • the pattern shown in FIG. 2 is thus achieved.
  • KI is iodine potassium and I 2 is iodine.
  • the electrostatic field is distributed uniformly over the body 2, as a result of which an optimal degree of efficiency is achieved.
  • the second electrodes 9 act as bridges between the first electrodes 7.
  • the meshes 10, however, do not conduct.
  • the electrode arrangement 3, 4 has an increased resistance compared to a continuous gold coating of the same thickness. You can roughly estimate this increased resistance with a resistance increase factor K R
  • a similar force factor K can be calculated from the same values using the following formula:
  • K F ⁇ 3 (H 2 / ((L- ⁇ H) L))
  • the table below shows typical values for electrode layers and elastomers as well as typical values for the activation voltage of an actuator.

Abstract

L'invention concerne un élément d'actionnement comprenant un corps en matériau élastomère, muni d'un système d'électrodes (3) sur chacune de deux surfaces périphériques opposées, dont au moins une présente plusieurs premières électrodes (7) traversantes dans le sens transversal de leur surface périphérique. L'invention vise à améliorer la dynamique d'un élément d'actionnement de ce type. A cet effet, le système d'électrodes (3) présente de secondes électrodes (9) parmi lesquelles, dans chaque cas, plusieurs sont disposées dans des interstices (8, 8a, 8b) entre de premières électrodes (7) adjacentes, qu'elles relient, les secondes électrodes (9, 9') étant disposées de manière décalée dans des interstices (8a, 8b) adjacents.
PCT/DK2001/000718 2000-11-02 2001-10-31 Element d'actionnement WO2002037892A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002212104A AU2002212104A1 (en) 2000-11-02 2001-10-31 Operating element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2000154246 DE10054246C2 (de) 2000-11-02 2000-11-02 Betätigungselement
DE10054246.8 2000-11-02

Publications (2)

Publication Number Publication Date
WO2002037892A2 true WO2002037892A2 (fr) 2002-05-10
WO2002037892A3 WO2002037892A3 (fr) 2002-09-26

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PCT/DK2001/000718 WO2002037892A2 (fr) 2000-11-02 2001-10-31 Element d'actionnement

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AU (1) AU2002212104A1 (fr)
DE (1) DE10054246C2 (fr)
WO (1) WO2002037892A2 (fr)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7233097B2 (en) 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US7368862B2 (en) 1999-07-20 2008-05-06 Sri International Electroactive polymer generators
US7378783B2 (en) 2001-03-02 2008-05-27 Sri International Electroactive polymer torsional device
US7436099B2 (en) 2003-08-29 2008-10-14 Sri International Electroactive polymer pre-strain
US7492076B2 (en) 2006-12-29 2009-02-17 Artificial Muscle, Inc. Electroactive polymer transducers biased for increased output
US7521840B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US7521847B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US7567681B2 (en) 2003-09-03 2009-07-28 Sri International Surface deformation electroactive polymer transducers
US7595580B2 (en) 2005-03-21 2009-09-29 Artificial Muscle, Inc. Electroactive polymer actuated devices
US7626319B2 (en) 2005-03-21 2009-12-01 Artificial Muscle, Inc. Three-dimensional electroactive polymer actuated devices
US7750532B2 (en) 2005-03-21 2010-07-06 Artificial Muscle, Inc. Electroactive polymer actuated motors
US7915789B2 (en) 2005-03-21 2011-03-29 Bayer Materialscience Ag Electroactive polymer actuated lighting
US8054566B2 (en) 2005-03-21 2011-11-08 Bayer Materialscience Ag Optical lens displacement systems
US9195058B2 (en) 2011-03-22 2015-11-24 Parker-Hannifin Corporation Electroactive polymer actuator lenticular system
US9231186B2 (en) 2009-04-11 2016-01-05 Parker-Hannifin Corporation Electro-switchable polymer film assembly and use thereof
US9425383B2 (en) 2007-06-29 2016-08-23 Parker-Hannifin Corporation Method of manufacturing electroactive polymer transducers for sensory feedback applications
US9553254B2 (en) 2011-03-01 2017-01-24 Parker-Hannifin Corporation Automated manufacturing processes for producing deformable polymer devices and films
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112264943B (zh) * 2020-09-09 2021-06-08 北京理工大学 一种基于血管化螺旋形人工肌肉驱动的仿生微夹钳

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4868447A (en) * 1987-09-11 1989-09-19 Cornell Research Foundation, Inc. Piezoelectric polymer laminates for torsional and bending modal control
US5060527A (en) * 1990-02-14 1991-10-29 Burgess Lester E Tactile sensing transducer
US5977685A (en) * 1996-02-15 1999-11-02 Nitta Corporation Polyurethane elastomer actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4868447A (en) * 1987-09-11 1989-09-19 Cornell Research Foundation, Inc. Piezoelectric polymer laminates for torsional and bending modal control
US5060527A (en) * 1990-02-14 1991-10-29 Burgess Lester E Tactile sensing transducer
US5977685A (en) * 1996-02-15 1999-11-02 Nitta Corporation Polyurethane elastomer actuator

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KORNBLUH R ET AL: "Electrostrictive polymer artificial muscle actuators." PROCEEDINGS OF THE 1998 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS & AUTOMATION, Bd. 3, Mai 1998 (1998-05), Seiten 2147-2154, XP002902376 Leuven Belgium *
PELRINE R ET AL: "Electrostriction of polymer films for microactuators." PROCEEDINGS OF THE 1997 IEEE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS. MEMS. '97., 26. - 30. Januar 1997, Seiten 238-243, XP010216911 *

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US7368862B2 (en) 1999-07-20 2008-05-06 Sri International Electroactive polymer generators
US7378783B2 (en) 2001-03-02 2008-05-27 Sri International Electroactive polymer torsional device
US7705521B2 (en) 2001-03-02 2010-04-27 Sri International Electroactive polymer torsional device
US7456549B2 (en) 2001-03-02 2008-11-25 Sri International Electroactive polymer motors
US7233097B2 (en) 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
US7761981B2 (en) 2001-05-22 2010-07-27 Sri International Methods for fabricating an electroactive polymer device
US8093783B2 (en) 2001-05-22 2012-01-10 Sri International Electroactive polymer device
US8042264B2 (en) 2001-05-22 2011-10-25 Sri International Method of fabricating an electroactive polymer transducer
US8316526B2 (en) 2003-08-29 2012-11-27 Sri International Method for forming an electroactive polymer
US7921541B2 (en) 2003-08-29 2011-04-12 Sri International Method for forming an electroactive polymer transducer
US7785656B2 (en) 2003-08-29 2010-08-31 Sri International Electroactive polymer pre-strain
US7436099B2 (en) 2003-08-29 2008-10-14 Sri International Electroactive polymer pre-strain
US7567681B2 (en) 2003-09-03 2009-07-28 Sri International Surface deformation electroactive polymer transducers
US7787646B2 (en) 2003-09-03 2010-08-31 Sri International Surface deformation electroactive polymer transducers
US7915789B2 (en) 2005-03-21 2011-03-29 Bayer Materialscience Ag Electroactive polymer actuated lighting
US7521840B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US7679267B2 (en) 2005-03-21 2010-03-16 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US7626319B2 (en) 2005-03-21 2009-12-01 Artificial Muscle, Inc. Three-dimensional electroactive polymer actuated devices
US8283839B2 (en) 2005-03-21 2012-10-09 Bayer Materialscience Ag Three-dimensional electroactive polymer actuated devices
US7595580B2 (en) 2005-03-21 2009-09-29 Artificial Muscle, Inc. Electroactive polymer actuated devices
US7923902B2 (en) 2005-03-21 2011-04-12 Bayer Materialscience Ag High-performance electroactive polymer transducers
US7990022B2 (en) 2005-03-21 2011-08-02 Bayer Materialscience Ag High-performance electroactive polymer transducers
US7521847B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US8054566B2 (en) 2005-03-21 2011-11-08 Bayer Materialscience Ag Optical lens displacement systems
US8183739B2 (en) 2005-03-21 2012-05-22 Bayer Materialscience Ag Electroactive polymer actuated devices
US7750532B2 (en) 2005-03-21 2010-07-06 Artificial Muscle, Inc. Electroactive polymer actuated motors
US8072121B2 (en) 2006-12-29 2011-12-06 Bayer Materialscience Ag Electroactive polymer transducers biased for optimal output
US7915790B2 (en) 2006-12-29 2011-03-29 Bayer Materialscience Ag Electroactive polymer transducers biased for increased output
US7492076B2 (en) 2006-12-29 2009-02-17 Artificial Muscle, Inc. Electroactive polymer transducers biased for increased output
US9425383B2 (en) 2007-06-29 2016-08-23 Parker-Hannifin Corporation Method of manufacturing electroactive polymer transducers for sensory feedback applications
US9231186B2 (en) 2009-04-11 2016-01-05 Parker-Hannifin Corporation Electro-switchable polymer film assembly and use thereof
US9553254B2 (en) 2011-03-01 2017-01-24 Parker-Hannifin Corporation Automated manufacturing processes for producing deformable polymer devices and films
US9195058B2 (en) 2011-03-22 2015-11-24 Parker-Hannifin Corporation Electroactive polymer actuator lenticular system
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode

Also Published As

Publication number Publication date
DE10054246C2 (de) 2002-09-26
AU2002212104A1 (en) 2002-05-15
DE10054246A1 (de) 2002-05-16
WO2002037892A3 (fr) 2002-09-26

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