EP1110254A1 - Piezo-acteur - Google Patents
Piezo-acteurInfo
- Publication number
- EP1110254A1 EP1110254A1 EP00951223A EP00951223A EP1110254A1 EP 1110254 A1 EP1110254 A1 EP 1110254A1 EP 00951223 A EP00951223 A EP 00951223A EP 00951223 A EP00951223 A EP 00951223A EP 1110254 A1 EP1110254 A1 EP 1110254A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- piezo actuator
- piezo
- neutral
- electrodes
- thickening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000007935 neutral effect Effects 0.000 claims abstract description 32
- 230000008719 thickening Effects 0.000 claims description 17
- 238000009413 insulation Methods 0.000 claims description 4
- 238000007493 shaping process Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
Definitions
- the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
- a piezo element can be constructed from a material with a suitable crystal structure using the so-called piezo effect.
- an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
- On this piezo actuator can be done in several layers (Multilayer actuators), the electrodes via which the electrical voltage is applied being arranged between the layers. When operating the piezo actuator, it must be ensured that mechanical stresses in the layer structure do not result in any troublesome cracks.
- the piezo actuator described at the outset which can be used, for example, to actuate a mechanical component, is advantageously constructed with a multilayer structure of piezo layers and electrodes arranged between them.
- a neutral phase is formed in the area between two piezo layers. Since the electrodes contacted in each case on one side are integrated into the layer structure in the manner of a comb, the electrodes which follow one another in the direction of the layer structure must be contacted alternately on opposite sides.
- the electrodes contacted on one side cannot be completely guided to the opposite side, otherwise voltage flashovers can destroy the piezo actuator.
- the piezo actuator is actuated, i.e. When a voltage is applied between the electrodes lying opposite one another in the layer structure, different mechanical forces occur in the area of the electrodes and in the non-contacting neutral phases, which can lead to mechanical stresses and cracks in the piezo actuator.
- the piezo actuator when clamped in, perpendicular to the layer structure a design of the multilayer structure specifically applied an increased mechanical stress in the area of the neutral phases to prevent cracking.
- At least one outer cover layer of the multi-layer structure is designed on the outer end surface in such a way that it has a thickening in the region of the neutral phases and an increased prestressing force can be applied here in a targeted manner.
- the thickening can be easily formed, for example, by grinding the cover layer.
- an insulation layer is arranged between the layers of the multilayer structure, each of which has a thickening in the region of the neutral phases and acts in a manner comparable to that in the first exemplary embodiment.
- a further embodiment advantageously has specially designed electrodes in the multilayer structure, which likewise each have a thickening in the region of the neutral phase, with some or all of the features being combined with one another with regard to the various previously mentioned embodiments.
- FIG. 1 shows a section through a piezo actuator with a multi-layer structure of layers made of piezoceramic and electrodes
- FIG. 2 shows a detail section through the layer structure in the area of neutral phases without application of an electrical voltage
- FIG. 3 shows a detail section through the layer structure in the area of neutral phases with application of an electrical voltage
- FIG. 4 shows a first exemplary embodiment of a piezo actuator in which an outer cover layer has thickenings on the side surfaces in the region of the neutral phases;
- FIG. 5 shows a second exemplary embodiment of a piezo actuator, in which an outer cover layer has thickened portions in the area of the neutral phases at the opposite corners;
- FIG. 6 shows a third exemplary embodiment of a piezo actuator, in which the electrodes have thickenings in the region of the neutral phases, and
- FIG. 7 shows a fourth exemplary embodiment of a piezo actuator, in each case with an insulation layer between the layers, which has thickenings on the side surfaces in the region of the neutral phases.
- piezo actuator 1 shows a piezo actuator 1, which is constructed in a manner known per se from piezo foils 2 of a quartz material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical voltage is applied to electrodes 3 and 4 via contact surfaces 5 and 6 a mechanical reaction of the piezo actuator 1 takes place.
- FIG. 2 shows the electrodes 3 and 4, wherein the contacting of the electrodes 4 with the contact surface 6 can also be seen here. Since the electrodes 3 have to maintain a distance from this contact surface 6 due to the different polarity, neutral phases are formed here, which are shown by way of example with reference to the neutral phase 7. Due to the spatially different occurrence of the piezo effect, mechanical stresses arise in the neutral phase 7, which lead to a material impairment, which is indicated schematically by the wavy line 8.
- FIG. 3 the area from FIG. 2 is shown with an applied electrical voltage, the mechanical reaction of the piezo actuator caused thereby being illustrated by arrows 9 and 10. It can be seen here that in the area of the neutral phase 7 there is less expansion in the direction of the arrows 9 and therefore a force effect in the direction of the arrow 10, which leads to crack formation in the area 8 of the neutral phase.
- FIG. 4 A first exemplary embodiment of the invention is explained with reference to FIG. 4, in which an outer cover layer 11 is arranged on the multilayer structure, which is provided with a thickening 12 in the region of the neutral phase 7, which can reach a size of 2 to 8 ⁇ m in the outer maximum.
- a thickening 12 in the region of the neutral phase 7, which can reach a size of 2 to 8 ⁇ m in the outer maximum.
- FIG. 5 shows an outer cover layer 11 with thickened portions 13, which are arranged at opposite corners of the piezo actuator 1.
- the neutral phases 7 are also formed here at the corners, since in this embodiment the electrodes 3 and 4 are contacted via a contact surface 14 attached to the corners and an invisible diagonally opposite contact surface.
- thickening in the area of the neutral phase 7 is brought about by local thickening of the electrodes 3 and 4 exclusively in the area of the neutral phases 7.
- a further exemplary embodiment according to FIG. 7 shows a piezo actuator 1, in which an extra thick insulation layer 15 is introduced between the piezo layers 2 in the area of the neutral phase 7, in order to apply a pre-tension here too when the piezo actuator 1 is clamped, which prevents crack formation.
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
L'invention concerne un piézo-actionneur, destiné par exemple à actionner un élément mécanique. Il est prévu une structure multicouche de couches piézo-électriques (2) et d'électrodes (3, 4) disposées entre. En cas de mise en contact (5, 6) latérale mutuelle des électrodes (3, 4), il se trouve une phase neutre (7) sans couche d'électrodes où un fendillement peut intervenir et peut être évité par conformation de la structure multicouche, ce qui permet de parvenir à une meilleure contrainte mécanique, lorsque le piézo-électrique (1) est monté par insertion perpendiculairement au montage des couches, dans la zone des phases neutres (7).
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19928177 | 1999-06-19 | ||
DE19928177A DE19928177C2 (de) | 1999-06-19 | 1999-06-19 | Piezoaktor |
PCT/DE2000/001929 WO2000079615A1 (fr) | 1999-06-19 | 2000-06-19 | Piezo-actionneur |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1110254A1 true EP1110254A1 (fr) | 2001-06-27 |
Family
ID=7911880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00951223A Withdrawn EP1110254A1 (fr) | 1999-06-19 | 2000-06-19 | Piezo-acteur |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1110254A1 (fr) |
JP (1) | JP2003522510A (fr) |
KR (1) | KR20010072697A (fr) |
CN (1) | CN1315058A (fr) |
DE (1) | DE19928177C2 (fr) |
HU (1) | HUP0103374A3 (fr) |
WO (1) | WO2000079615A1 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10201641A1 (de) | 2002-01-17 | 2003-08-07 | Epcos Ag | Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung |
DE10207292B4 (de) | 2002-02-21 | 2005-08-11 | Siemens Ag | Piezostack und Verfahren zur Herstellung eines Piezostacks |
DE102004031402A1 (de) * | 2004-06-29 | 2006-02-09 | Siemens Ag | Piezoelektrisches Bauteil mit Sollbruchstelle, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils |
DE102005008717A1 (de) | 2005-02-25 | 2006-08-31 | Robert Bosch Gmbh | Aktormodul mit einem Piezoaktor |
DE102007060167A1 (de) | 2007-12-13 | 2009-06-25 | Robert Bosch Gmbh | Piezoaktor mit einem Multilagenaufbau von Piezoelementen und ein Verfahren zu dessen Herstellung |
DE102009058907B4 (de) | 2009-12-17 | 2012-12-13 | Eads Deutschland Gmbh | Piezoaktor und Verfahren zum Betreiben eines Piezoaktors, insbesondere in mobilen technischen Einrichtungen |
DE102011014296A1 (de) * | 2011-03-17 | 2012-09-20 | Epcos Ag | Piezoelektrisches Aktorbauelement und Verfahren zur Herstellung eines piezoelektrischen Aktorbauelements |
KR101471185B1 (ko) * | 2013-04-11 | 2014-12-11 | 한국기계연구원 | 자가 정렬 임프린트 리소그래피 장치 및 이를 이용한 임프린트 리소그래피 방법 |
KR102495695B1 (ko) | 2022-05-09 | 2023-02-06 | 박대용 | 하수관거 비굴착 부분보수 및 모니터링 시스템 |
KR102547025B1 (ko) | 2022-05-09 | 2023-06-26 | 박대용 | 하수관거 비굴착 부분보수 장치 및 공법 |
KR102634118B1 (ko) | 2022-12-29 | 2024-02-06 | 삼아건설 주식회사 | 하수관거 비굴착 부분보수 장치 및 공법 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04214686A (ja) * | 1990-10-05 | 1992-08-05 | Nec Corp | 電歪効果素子 |
JPH04159785A (ja) * | 1990-10-23 | 1992-06-02 | Nec Corp | 電歪効果素子 |
JP2940376B2 (ja) * | 1993-12-24 | 1999-08-25 | 日立プラント建設株式会社 | 積層形圧電アクチュエータ |
JPH08274381A (ja) * | 1995-03-31 | 1996-10-18 | Chichibu Onoda Cement Corp | 積層型圧電アクチュエータ及びその製造方法 |
-
1999
- 1999-06-19 DE DE19928177A patent/DE19928177C2/de not_active Expired - Fee Related
-
2000
- 2000-06-19 KR KR1020017001996A patent/KR20010072697A/ko not_active Application Discontinuation
- 2000-06-19 EP EP00951223A patent/EP1110254A1/fr not_active Withdrawn
- 2000-06-19 JP JP2001505080A patent/JP2003522510A/ja active Pending
- 2000-06-19 WO PCT/DE2000/001929 patent/WO2000079615A1/fr not_active Application Discontinuation
- 2000-06-19 CN CN00801151A patent/CN1315058A/zh active Pending
- 2000-06-19 HU HU0103374A patent/HUP0103374A3/hu unknown
Non-Patent Citations (1)
Title |
---|
See references of WO0079615A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2000079615A1 (fr) | 2000-12-28 |
DE19928177C2 (de) | 2001-04-26 |
KR20010072697A (ko) | 2001-07-31 |
CN1315058A (zh) | 2001-09-26 |
JP2003522510A (ja) | 2003-07-22 |
DE19928177A1 (de) | 2001-01-11 |
HUP0103374A3 (en) | 2002-03-28 |
HUP0103374A2 (hu) | 2002-01-28 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
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AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
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17P | Request for examination filed |
Effective date: 20010628 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB IT |
|
18D | Application deemed to be withdrawn |
Effective date: 20040103 |