WO2001024286A1 - Actionneur piezo-electrique - Google Patents

Actionneur piezo-electrique Download PDF

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Publication number
WO2001024286A1
WO2001024286A1 PCT/DE2000/003025 DE0003025W WO0124286A1 WO 2001024286 A1 WO2001024286 A1 WO 2001024286A1 DE 0003025 W DE0003025 W DE 0003025W WO 0124286 A1 WO0124286 A1 WO 0124286A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezo actuator
piezo
electrodes
layers
actuator according
Prior art date
Application number
PCT/DE2000/003025
Other languages
German (de)
English (en)
Inventor
Bertram Sugg
Friedrich Boecking
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2001024286A1 publication Critical patent/WO2001024286A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H10N30/505—Annular cross-section

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo element can be constructed from a material with a suitable crystal structure by using the so-called piezo effect.
  • the piezoelectric element reacts mechanically, which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
  • Such piezo actuators can be used to build actuators, for example for the drive of switching valves in fuel injection systems in motor vehicles are provided.
  • the voltage or charge-controlled deflection of the piezo actuator is used to position a control valve, which in turn regulates the stroke of a nozzle needle.
  • a great advantage of the piezo actuators is the implementation of precise and very fast deflections with high forces.
  • this piezo actuator can be constructed in several layers (multilayer actuators), the thickness of which is typically 60 amount to up to 120 ⁇ m, the internal electrodes, via which the electrical voltage is applied, in each case between the layers, for example with a printing process.
  • the piezo actuator described at the outset which can be used, for example, to actuate a mechanical component, is, as mentioned, constructed with a multilayer structure of piezo layers and electrodes arranged between them.
  • the piezo actuator according to the invention advantageously has internal electrodes which are buried in the piezo layers such that they do not reach the outside of the piezo actuator in a predetermined area. When contacting the inner electrodes with outer electrodes changes from layer to layer, the respective contact is made in the region in which no inner electrode is brought to the outside in the respectively adjacent layer.
  • the internal electrodes are advantageously buried when the ceramic of the piezo actuator is sintered together, the risk of moisture penetration being significantly reduced, in particular on the outer surface, and the life of the piezo actuator is thus increased.
  • the inner electrodes are not brought to the outside of the piezo actuator in large areas, there is little or no separation through the metallic material of the inner electrodes when the green film is cut as the starting material for the piezo layers. This reduces the smearing of metal particles and thus the risk of short-circuiting, which increases the reliability of the piezo actuator and does not require additional insulation of the internal electrodes by paint or the like.
  • the outer electrodes are in each case attached to one side of the piezo actuator, the contacts can be simply led out to a plug and, with little manufacturing effort, only one-sided contacting or metallization on the outer electrode surface is necessary.
  • the outer electrodes are each mounted on opposite sides of the piezo actuator, or the outer electrodes are each arranged on diagonally opposite sides of the piezo actuator.
  • An arrangement on adjacent pages or on any pages can also be used in a simple manner, depending on the application. In this case, either a symmetrical or an asymmetrical arrangement of the inner electrode surface with regard to the recessed areas can be selected, so that the differently polarized electrode results from a reflection or rotation of the first electrode.
  • the layer geometry and thus the basic contour of the piezo actuator can advantageously be rectangular, in particular square. However, triangular, hexagonal or any other polygons can also be used advantageously depending on the application.
  • the layers of the piezo actuator can also have a round or oval structure.
  • the layers of the piezo actuator are constructed hexagonally.
  • the piezo layers with the buried internal electrodes can be easily separated from a green sheet, a largely coherent print layout for the internal electrodes being able to be produced.
  • the piezo actuator thus has an almost round outer geometry and has an optimal space filling when used in components with a round cross-sectional geometry, e.g. for injection valves for internal combustion engines in motor vehicles.
  • An internal bore can advantageously be present in the piezo actuator in the direction of the multilayer structure. As a result, not only a force in the pressure direction but also a tensile force can be used by actuating the piezo actuator by means of an inner rod. In addition, there is also an electric one; It is possible to connect one of the outer electrodes inside the bore.
  • FIG. 1 shows a view of a piezo actuator with a multilayer structure of layers made of piezoceramic with external electrodes attached to one side;
  • FIGS. 2 and 3 show a schematic plan view of two piezo layers alternately superimposed in the stack structure and a projection of both piezo layers according to FIG. 1 with differently recessed areas of the inner electrode layer and one-sided contacting of the outer electrodes;
  • FIGS. 4 and 5 show a modification of the structure according to the previous figures with an inner electrode geometry designed in the shape of a circular section and opposite outer electrodes;
  • FIGS. 6 to 9 show a modification of the construction according to the previous figures with an internal electrode geometry in which relatively large side areas of the internal electrodes are left out and opposing external electrodes are present;
  • Figure 10 shows a modification of the structure according to the previous figures with relatively small in alternation Layer structure close to recessed areas
  • Figures 11 to 13 a modification of the structure according to the previous figures with a round geometry of the piezo actuator
  • FIG. 14 shows a modification of the structure according to the previous figures with a rectangular piezo actuator and relatively close outer electrodes on one side;
  • FIG. 15 shows a modification of the structure according to the previous figures with a geometry of the piezo actuator that is chamfered at the contacts of the external electrodes;
  • FIG. 17 shows a view of a green film as the basic material of the piezo layers according to FIG. 16 with a print and stand layout for the buried internal electrodes before they are separated from the film.
  • FIG. 1 shows a piezo actuator 1, which is constructed in a manner known per se from piezo layers 2 of a ceramic material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical direct voltage is applied to internal electrodes 3 and 4 via electrodes 5 contacted externally and 6 there is a mechanical reaction of the piezo actuator 1.
  • FIG. 1 only a few internal electrodes 3 and 4 are indicated schematically and the external electrodes 5 and 6 are designed as flat electrodes, an external electrode 5 or 6 being contacted at contact points with the internal electrodes 2 or 3 each having the same polarity.
  • the buried inner electrodes 3 and 4 are alternately offset inwards in the areas where they are not contacted with an outer electrode 5 or 6 by a recessed area.
  • a projection of the views of the two inner electrodes 3 and 4 is shown on the right, in which the recessed regions 7 and 8 and the contacts of the outer electrodes 5 and 6 can be seen.
  • FIG. 3 shows a geometry of the recessed areas 7 and 9 that is somewhat different from that of FIG. 2.
  • FIG. 4 shows a view of an inner electrode 4 with a geometry in the form of a circular section, with the recessed area 7 at the top right and the contacting of the outer electrode 5 at the bottom left.
  • the inner electrode 3 is designed as a mirror image of the inner electrode 4 and has the recessed area 8 at the bottom left and the contacting of the outer electrode 6 at the top right.
  • the contacting of the External electrodes 5 and 6 according to FIG. 4 thus diagonally opposite.
  • FIG. 5 shows a modification of FIG. 4 with outer electrodes 5 and 6 lying opposite one another on one side.
  • Embodiments according to FIGS. 9 and 7 show geometries of the inner electrodes 3 and 4, in which large areas of the edge region are left out and each have diagonally opposite outer electrodes 5 and 6.
  • Different from this are the exemplary embodiments according to FIGS. 8 and 9 with a rounded geometry of the inner electrodes 3 and 4, in which the outer electrodes 5 and 6 are each arranged opposite one another in the middle of a side surface.
  • FIG. 10 shows an embodiment with outer electrodes 5 and 6 lying relatively close together on one side of the piezo actuator 1 and with small recessed areas of the inner electrodes 3 and 4.
  • FIG. 11, FIG. 12 and FIG. 13 each show exemplary embodiments of a piezo actuator 10 with a round contour and correspondingly round geometries of inner electrodes 11 and 12; the outer electrodes 5 and 6 are contacted opposite each other.
  • Figures 12 and 13 there is an inner bore 13; as a result, not only a force in the pressure direction but also a tensile force can be used by actuating the piezo actuator 10 by means of an internal rod (not shown here).
  • an electrical connection of an outer electrode 14 to one of the inner electrodes 11 or 12 inside the bore 13 is also possible, an outer electrode 15 being contacted externally in the manner mentioned above.
  • FIG. 11 In an exemplary embodiment according to FIG.
  • the outer electrodes 5 and 6 are arranged on one side on regions of the inner electrodes 3 and 4 which are led out in the form of a web.
  • a piezo actuator 16 with external electrodes 17 and 18 attached to bevelled corners can be seen in FIG.
  • FIG. 16 and FIG. 17 a piezo actuator 18 with a hexagonal contour is constructed, external electrodes 19 and 20 being connected to webs of the internal electrodes 21 and 22.
  • FIG. 17 shows a view of a green sheet 23 as the base material of the piezo layers with a print and stand layout for the buried inner electrodes 21 and 22 before they are separated from the sheet.

Abstract

L'invention concerne un actionneur piézo-électrique, par exemple pour actionner un élément mécanique, qui présente une structure multicouche de couches piézo-électriques (2) et d'électrodes intérieures (3, 4; 11, 12; 21, 22) disposées entre. Lesdites électrodes intérieures sont enfouies dans les couches piézo-électriques (2), de manière à ne pas parvenir, dans une zone prédéfinie, jusqu'à la face extérieure de l'actionneur piézo-électrique (1; 10; 18). Il est prévu une métallisation des électrodes intérieures (3, 4; 11, 12; 21, 22) avec des électrodes extérieures, alternée d'une couche à l'autre. Cette métallisation intervient dans chaque cas dans la zone où aucune électrode intérieure (3, 4, 11, 12, 21, 22) ne s'étend pas sur la face extérieure, dans la couche adjacente.
PCT/DE2000/003025 1999-09-30 2000-09-02 Actionneur piezo-electrique WO2001024286A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19946837A DE19946837A1 (de) 1999-09-30 1999-09-30 Piezoaktor
DE19946837.0 1999-09-30

Publications (1)

Publication Number Publication Date
WO2001024286A1 true WO2001024286A1 (fr) 2001-04-05

Family

ID=7923818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/003025 WO2001024286A1 (fr) 1999-09-30 2000-09-02 Actionneur piezo-electrique

Country Status (2)

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DE (1) DE19946837A1 (fr)
WO (1) WO2001024286A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002029910A1 (fr) * 2000-10-04 2002-04-11 Robert Bosch Gmbh Piezoelement
WO2007141133A2 (fr) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Actionneur piézoélectrique
WO2008037667A1 (fr) * 2006-09-28 2008-04-03 Siemens Aktiengesellschaft Dispositif d'horloge multicouche piézoélectrique pour l'entraînement d'un moteur électromécanique

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003038495A2 (fr) * 2001-10-22 2003-05-08 Siemens Aktiengesellschaft Dispositif de deplacement d'une pluralite d'objets, procede de realisation du dispositif de deplacement, et dispositif d'epissure d'une pluralite de guides d'ondes optiques
DE10237588A1 (de) * 2002-08-16 2004-02-26 Robert Bosch Gmbh Piezoaktor
JP4479271B2 (ja) * 2003-04-15 2010-06-09 株式会社デンソー 積層型圧電体素子
DE102005033463B3 (de) * 2005-07-18 2007-02-01 Siemens Ag Piezoaktor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094078A2 (fr) * 1982-05-11 1983-11-16 Nec Corporation Elément électrostrictif multicouche résistant à l'application répétée d'impulsions
DE4105997A1 (de) * 1990-02-26 1991-09-05 Hitachi Metals Ltd Laminatverschiebungseinrichtung
JPH0491664A (ja) * 1990-08-07 1992-03-25 Brother Ind Ltd 積層縦効果圧電素子
EP0545391A1 (fr) * 1991-12-05 1993-06-09 Hoechst CeramTec Aktiengesellschaft Organe d'actionnement comportant des disques céramiques ferroélectriques
JPH05335644A (ja) * 1992-06-02 1993-12-17 Fuji Elelctrochem Co Ltd 積層型電歪／圧電素子
EP0977284A1 (fr) * 1998-07-30 2000-02-02 Siemens Aktiengesellschaft Organe d'actionnement piezoélectrique multicouches
DE19909482A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor

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US4471256A (en) * 1982-06-14 1984-09-11 Nippon Soken, Inc. Piezoelectric actuator, and valve apparatus having actuator
JP3045531B2 (ja) * 1990-10-01 2000-05-29 日立金属株式会社 積層型変位素子
AU5707796A (en) * 1996-03-26 1997-10-17 Mats Bexell An actuator motor and a method for fabrication of such an actuator
DE19626671C1 (de) * 1996-07-03 1997-10-16 Fraunhofer Ges Forschung Piezoelektrischer Leistungsaktor mit Kühlung und Verfahren zu seiner Herstellung
DE19646511C1 (de) * 1996-11-12 1998-05-14 Marco Systemanalyse Entw Piezoaktuatorisches Antriebs- oder Verstellelement
DE19802302A1 (de) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelektrischer Aktor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094078A2 (fr) * 1982-05-11 1983-11-16 Nec Corporation Elément électrostrictif multicouche résistant à l'application répétée d'impulsions
DE4105997A1 (de) * 1990-02-26 1991-09-05 Hitachi Metals Ltd Laminatverschiebungseinrichtung
JPH0491664A (ja) * 1990-08-07 1992-03-25 Brother Ind Ltd 積層縦効果圧電素子
EP0545391A1 (fr) * 1991-12-05 1993-06-09 Hoechst CeramTec Aktiengesellschaft Organe d'actionnement comportant des disques céramiques ferroélectriques
JPH05335644A (ja) * 1992-06-02 1993-12-17 Fuji Elelctrochem Co Ltd 積層型電歪／圧電素子
EP0977284A1 (fr) * 1998-07-30 2000-02-02 Siemens Aktiengesellschaft Organe d'actionnement piezoélectrique multicouches
DE19909482A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 016, no. 318 (E - 1232) 13 July 1992 (1992-07-13) *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 161 (E - 1526) 17 March 1994 (1994-03-17) *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002029910A1 (fr) * 2000-10-04 2002-04-11 Robert Bosch Gmbh Piezoelement
WO2007141133A2 (fr) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Actionneur piézoélectrique
WO2007141133A3 (fr) * 2006-06-08 2008-01-24 Bosch Gmbh Robert Actionneur piézoélectrique
WO2008037667A1 (fr) * 2006-09-28 2008-04-03 Siemens Aktiengesellschaft Dispositif d'horloge multicouche piézoélectrique pour l'entraînement d'un moteur électromécanique

Also Published As

Publication number Publication date
DE19946837A1 (de) 2001-05-03

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