WO2001089002A1 - Actionneur piezo-electrique - Google Patents

Actionneur piezo-electrique Download PDF

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Publication number
WO2001089002A1
WO2001089002A1 PCT/DE2001/001160 DE0101160W WO0189002A1 WO 2001089002 A1 WO2001089002 A1 WO 2001089002A1 DE 0101160 W DE0101160 W DE 0101160W WO 0189002 A1 WO0189002 A1 WO 0189002A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezo actuator
piezo
layers
layer
internal electrodes
Prior art date
Application number
PCT/DE2001/001160
Other languages
German (de)
English (en)
Inventor
Thomas Biesinger
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2001089002A1 publication Critical patent/WO2001089002A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo element can be constructed from a material with a suitable crystal structure.
  • an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
  • this piezo actuator is constructed here in several layers from stacked metallized piezo ceramics to a so-called multilayer actuator. For this purpose, there are internal electrodes between the layers, for example with a Printing processes are applied, and there are external electrodes through which the electrical voltage is applied. Because of this extremely fast and precisely controllable stroke effect, such piezo actuators can be provided for the construction of actuators, for example for driving switching valves in fuel injection systems in motor vehicles. The voltage or charge-controlled deflection of the piezo actuator is used to position a control valve, which in turn regulates the stroke of a nozzle needle.
  • Such a piezo actuator is known, for example, from EP 0 844 678 AI, in which two outer electrodes of different polarity are provided, which are attached to opposite sides of the piezo actuator block.
  • the respective contact takes place in the area in which no inner electrode is brought to the outside in the respectively adjacent layer.
  • the generic piezo actuator described at the outset is constructed with a multilayer structure of piezo layers and internal electrodes arranged in a piezoelectrically active region between the layers, and is provided with contacting of the internal electrodes which changes from layer to layer and is subjected to an electrical voltage.
  • the characteristic Features are advantageously electrically connected to one another in the piezolayers by the internal electrodes which are contacted in each case via internal vias, which are mutually insulated from the other internal electrodes, for example in a so-called via technology.
  • the inner electrodes are covered except for the outer connection contacts by sintering.
  • connection contacts for supplying the electrical voltage are arranged on the end faces of the piezo actuator, the connection contacts preferably being metallized surfaces which are contacted by means of terminals. Thanks to the contact on the front, different actuator shapes, e.g. cuboid, any polygon, cylindrical or hollow cylindrical, the installation space can be minimized. A possibly necessary pretensioning force when installing the piezo actuator in an assembly can be used simultaneously as a contacting force. It is also advantageous if one or more piezoelectrically neutral foils are arranged on the regions lying at the end in the layer structure, the outer connection contacts being attached to these foils. Because the connections are thus not arranged in the active area of the piezo actuator, no mechanical stresses occur in the connection contacts due to the actuator stroke.
  • the plated-through holes can be arranged in a simple manner offset from one another in the layer structure from layer to layer on a bolt circle diameter.
  • Figure 1 is a view of a cylindrical piezo actuator with a multilayer structure of layers of piezoceramic
  • Figure 2 is a view of a cuboid piezo actuator with a multilayer structure of layers of piezoceramic
  • FIG. 3 shows a view of a hollow cylindrical piezo actuator with a multilayer structure of layers made of piezo ceramic and
  • Figure 4 shows a section through a piezo actuator with a detailed view of internal electrodes and plated-through holes in the piezo layers.
  • FIG. 1 shows a piezo actuator 1 which, in a manner known per se, consists of layers 2 of a piezoelectric or electrostrictive ceramic material is constructed with a suitable crystal structure, so that, for example, using the so-called piezo effect when an external electrical direct voltage is applied to inner electrodes, which are not recognizable here in detail between the layers 2, a piezo actuator 1 reacts.
  • the electrical voltage is applied via front-side connection contacts 3 and 4 and passed on to the internal electrodes via through contacts 5 and 6, which can only be seen here schematically.
  • an electrical field is applied to the internal electrodes, e.g. there is a change in length in the range of approximately 0.1-0.3% of the length of the piezo actuator 1.
  • the field strengths required for this must be several kV / mm, so that in order to use moderate control voltages of approx. 100 - 300 V, the so-called multilayer structure with the alternating ceramic and inner electrode layers was selected.
  • FIG. 2 shows an alternative design of a piezo actuator 7 as a cuboid, which accordingly has correspondingly adapted piezo layers 2 and connection contacts 3 and 4.
  • Figure 3 shows a further variant of a piezo actuator 8 with a hollow cylindrical structure.
  • FIG. 4 shows an enlarged section through one of the piezo actuators 1, 7 or 8.
  • the connection contact 3 for the positive pole of the voltage is connected to an internal electrode 10 via the via 5 through the piezo layer 2.
  • an insulation on to internal electrodes 11 of the other polarity an electrical connection to the other internal electrodes of the same polarity is established.
  • the through arrangement 6 applies the adequate arrangement.
  • the upper piezo layer 2, which carries the connection contacts 3 and 4 is a non-active layer here, since there is no field strength between the layer sides due to differently polarized inner electrodes 10 and 11.
  • a lower ceramic layer 12 is also passively constructed here and can support the mechanical attachment of the piezo actuator 1, 7 or 8 as a foot part.
  • the plated-through holes 5 and 6 can not be arranged directly one above the other, as can be seen in FIG. 4, but also advantageously offset in the structure of the layers 2 from layer to layer on a bolt circle diameter in order to increase the mechanical stability of the piezo actuator 1, 7 or 8.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

L'invention concerne un actionneur piézo-électrique, s'utilisant par exemple pour actionner un élément mécanique. Ledit actionneur piézo-électrique présente une structure multicouche comprenant des couches piézo-électriques (2), des électrodes intérieures (10,11) disposées entre lesdites couches et pouvant être sollicitées par une tension électrique, ainsi qu'une connexion mutuelle des électrodes intérieures (10,11) au moyen de contacts de connexion (3,4) extérieurs par l'intermédiaire desquels une tension électrique peut être acheminée. La connexion des électrodes intérieures (10,11) s'effectue dans chaque cas par correspondance entre les électrodes et lesdites électrodes sont interconnectées électriquement dans les couches piézo-électriques (2) par l'intermédiaire de connexions transversales (5,6) montées isolées, de manière réciproque par rapport aux autres électrodes intérieures (10,11).
PCT/DE2001/001160 2000-05-18 2001-03-24 Actionneur piezo-electrique WO2001089002A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10024701.6 2000-05-18
DE10024701A DE10024701A1 (de) 2000-05-18 2000-05-18 Piezoaktor

Publications (1)

Publication Number Publication Date
WO2001089002A1 true WO2001089002A1 (fr) 2001-11-22

Family

ID=7642736

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/001160 WO2001089002A1 (fr) 2000-05-18 2001-03-24 Actionneur piezo-electrique

Country Status (2)

Country Link
DE (1) DE10024701A1 (fr)
WO (1) WO2001089002A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003010835A2 (fr) * 2001-07-23 2003-02-06 Honeywell International Inc. Dispositif de commande piezo-electrique cocuit et procede de fabrication d'un gyrolaser annulaire

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1502310B1 (fr) 2002-05-06 2008-11-12 Epcos Ag Piezoactionneur et son procede de production
DE102004002087A1 (de) * 2004-01-15 2005-08-04 Robert Bosch Gmbh Piezoaktor und ein Verfahren zu dessen Herstellung
JP4667036B2 (ja) * 2004-12-27 2011-04-06 Ｎｅｃトーキン株式会社 積層型圧電振動子及びその製造方法、並びに圧電アクチュエータ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094078A2 (fr) * 1982-05-11 1983-11-16 Nec Corporation Elément électrostrictif multicouche résistant à l'application répétée d'impulsions
JPS62115788A (ja) * 1985-11-14 1987-05-27 Nec Corp 電歪効果素子の製造方法
JPH0794796A (ja) * 1993-09-24 1995-04-07 Fuji Elelctrochem Co Ltd 積層型電歪／圧電素子
JPH08316542A (ja) * 1995-05-19 1996-11-29 Nippon Cement Co Ltd 積層型圧電アクチュエーターの製造方法
DE19757877A1 (de) * 1997-12-24 1999-07-01 Bosch Gmbh Robert Verfahren zur Herstellung piezoelektrischer Aktoren und piezoelektrischer Aktor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086880A (ja) * 1983-10-19 1985-05-16 Nec Corp 電歪効果素子
JPH03151677A (ja) * 1989-11-09 1991-06-27 Toyota Motor Corp 積層型圧電アクチュエータ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094078A2 (fr) * 1982-05-11 1983-11-16 Nec Corporation Elément électrostrictif multicouche résistant à l'application répétée d'impulsions
JPS62115788A (ja) * 1985-11-14 1987-05-27 Nec Corp 電歪効果素子の製造方法
JPH0794796A (ja) * 1993-09-24 1995-04-07 Fuji Elelctrochem Co Ltd 積層型電歪／圧電素子
JPH08316542A (ja) * 1995-05-19 1996-11-29 Nippon Cement Co Ltd 積層型圧電アクチュエーターの製造方法
DE19757877A1 (de) * 1997-12-24 1999-07-01 Bosch Gmbh Robert Verfahren zur Herstellung piezoelektrischer Aktoren und piezoelektrischer Aktor

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 329 (E - 552) 27 October 1987 (1987-10-27) *
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 07 31 August 1995 (1995-08-31) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 03 31 March 1997 (1997-03-31) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003010835A2 (fr) * 2001-07-23 2003-02-06 Honeywell International Inc. Dispositif de commande piezo-electrique cocuit et procede de fabrication d'un gyrolaser annulaire
WO2003010835A3 (fr) * 2001-07-23 2004-02-05 Honeywell Int Inc Dispositif de commande piezo-electrique cocuit et procede de fabrication d'un gyrolaser annulaire

Also Published As

Publication number Publication date
DE10024701A1 (de) 2001-11-29

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