DE19946837A1 - Piezoaktor - Google Patents

Piezoaktor

Info

Publication number
DE19946837A1
DE19946837A1 DE19946837A DE19946837A DE19946837A1 DE 19946837 A1 DE19946837 A1 DE 19946837A1 DE 19946837 A DE19946837 A DE 19946837A DE 19946837 A DE19946837 A DE 19946837A DE 19946837 A1 DE19946837 A1 DE 19946837A1
Authority
DE
Germany
Prior art keywords
piezo actuator
piezo
electrodes
layers
internal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19946837A
Other languages
German (de)
English (en)
Inventor
Bertram Sugg
Friedrich Boecking
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19946837A priority Critical patent/DE19946837A1/de
Priority to PCT/DE2000/003025 priority patent/WO2001024286A1/fr
Publication of DE19946837A1 publication Critical patent/DE19946837A1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
DE19946837A 1999-09-30 1999-09-30 Piezoaktor Ceased DE19946837A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19946837A DE19946837A1 (de) 1999-09-30 1999-09-30 Piezoaktor
PCT/DE2000/003025 WO2001024286A1 (fr) 1999-09-30 2000-09-02 Actionneur piezo-electrique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19946837A DE19946837A1 (de) 1999-09-30 1999-09-30 Piezoaktor

Publications (1)

Publication Number Publication Date
DE19946837A1 true DE19946837A1 (de) 2001-05-03

Family

ID=7923818

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19946837A Ceased DE19946837A1 (de) 1999-09-30 1999-09-30 Piezoaktor

Country Status (2)

Country Link
DE (1) DE19946837A1 (fr)
WO (1) WO2001024286A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003038495A2 (fr) * 2001-10-22 2003-05-08 Siemens Aktiengesellschaft Dispositif de deplacement d'une pluralite d'objets, procede de realisation du dispositif de deplacement, et dispositif d'epissure d'une pluralite de guides d'ondes optiques
WO2004019424A2 (fr) * 2002-08-16 2004-03-04 Robert Bosch Gmbh Actionneur piezoelectrique
DE102005033463B3 (de) * 2005-07-18 2007-02-01 Siemens Ag Piezoaktor
DE102004018100B4 (de) * 2003-04-15 2014-06-12 Denso Corporation Gestapeltes piezoelektrisches Element

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10048928A1 (de) * 2000-10-04 2002-04-25 Bosch Gmbh Robert Piezoelement
DE102006026644A1 (de) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102006046018A1 (de) * 2006-09-28 2008-04-10 Siemens Ag Piezomehrschichtaktor zum Antrieb eines elektromechanischen Motors

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4471256A (en) * 1982-06-14 1984-09-11 Nippon Soken, Inc. Piezoelectric actuator, and valve apparatus having actuator
DE4105997A1 (de) * 1990-02-26 1991-09-05 Hitachi Metals Ltd Laminatverschiebungseinrichtung
JPH0491664A (ja) * 1990-08-07 1992-03-25 Brother Ind Ltd 積層縦効果圧電素子
DE4132723A1 (de) * 1990-10-01 1992-04-16 Hitachi Metals Ltd Laminierte verschiebungseinrichtung
WO1997036365A1 (fr) * 1996-03-26 1997-10-02 Stefan Johansson Moteur actionneur et son procede de fabrication
DE19626671C1 (de) * 1996-07-03 1997-10-16 Fraunhofer Ges Forschung Piezoelektrischer Leistungsaktor mit Kühlung und Verfahren zu seiner Herstellung
DE19646511C1 (de) * 1996-11-12 1998-05-14 Marco Systemanalyse Entw Piezoaktuatorisches Antriebs- oder Verstellelement
DE19802302A1 (de) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelektrischer Aktor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3378393D1 (en) * 1982-05-11 1988-12-08 Nec Corp Multilayer electrostrictive element which withstands repeated application of pulses
TW241363B (fr) * 1991-12-05 1995-02-21 Hoechst Ceram Tec Ag
JP2645628B2 (ja) * 1992-06-02 1997-08-25 富士電気化学株式会社 積層型電歪／圧電素子
DE19834461C2 (de) * 1998-07-30 2000-09-28 Siemens Ag Vielschicht-Piezoaktor
DE19909482A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4471256A (en) * 1982-06-14 1984-09-11 Nippon Soken, Inc. Piezoelectric actuator, and valve apparatus having actuator
DE4105997A1 (de) * 1990-02-26 1991-09-05 Hitachi Metals Ltd Laminatverschiebungseinrichtung
JPH0491664A (ja) * 1990-08-07 1992-03-25 Brother Ind Ltd 積層縦効果圧電素子
DE4132723A1 (de) * 1990-10-01 1992-04-16 Hitachi Metals Ltd Laminierte verschiebungseinrichtung
WO1997036365A1 (fr) * 1996-03-26 1997-10-02 Stefan Johansson Moteur actionneur et son procede de fabrication
DE19626671C1 (de) * 1996-07-03 1997-10-16 Fraunhofer Ges Forschung Piezoelektrischer Leistungsaktor mit Kühlung und Verfahren zu seiner Herstellung
DE19646511C1 (de) * 1996-11-12 1998-05-14 Marco Systemanalyse Entw Piezoaktuatorisches Antriebs- oder Verstellelement
DE19802302A1 (de) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelektrischer Aktor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003038495A2 (fr) * 2001-10-22 2003-05-08 Siemens Aktiengesellschaft Dispositif de deplacement d'une pluralite d'objets, procede de realisation du dispositif de deplacement, et dispositif d'epissure d'une pluralite de guides d'ondes optiques
WO2003038495A3 (fr) * 2001-10-22 2004-04-01 Siemens Ag Dispositif de deplacement d'une pluralite d'objets, procede de realisation du dispositif de deplacement, et dispositif d'epissure d'une pluralite de guides d'ondes optiques
WO2004019424A2 (fr) * 2002-08-16 2004-03-04 Robert Bosch Gmbh Actionneur piezoelectrique
WO2004019424A3 (fr) * 2002-08-16 2004-07-08 Bosch Gmbh Robert Actionneur piezoelectrique
DE102004018100B4 (de) * 2003-04-15 2014-06-12 Denso Corporation Gestapeltes piezoelektrisches Element
DE102005033463B3 (de) * 2005-07-18 2007-02-01 Siemens Ag Piezoaktor

Also Published As

Publication number Publication date
WO2001024286A1 (fr) 2001-04-05

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8131 Rejection