WO2000079615A1 - Piezo-actionneur - Google Patents

Piezo-actionneur Download PDF

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Publication number
WO2000079615A1
WO2000079615A1 PCT/DE2000/001929 DE0001929W WO0079615A1 WO 2000079615 A1 WO2000079615 A1 WO 2000079615A1 DE 0001929 W DE0001929 W DE 0001929W WO 0079615 A1 WO0079615 A1 WO 0079615A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezo actuator
piezo
neutral
electrodes
thickening
Prior art date
Application number
PCT/DE2000/001929
Other languages
German (de)
English (en)
Inventor
Klaus-Peter Schmoll
Friedrich Boecking
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to JP2001505080A priority Critical patent/JP2003522510A/ja
Priority to EP00951223A priority patent/EP1110254A1/fr
Priority to HU0103374A priority patent/HUP0103374A3/hu
Priority to KR1020017001996A priority patent/KR20010072697A/ko
Publication of WO2000079615A1 publication Critical patent/WO2000079615A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo element can be constructed from a material with a suitable crystal structure using the so-called piezo effect.
  • an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
  • On this piezo actuator can be done in several layers (Multilayer actuators), the electrodes via which the electrical voltage is applied being arranged between the layers. When operating the piezo actuator, it must be ensured that mechanical stresses in the layer structure do not result in any troublesome cracks.
  • the piezo actuator described at the outset which can be used, for example, to actuate a mechanical component, is advantageously constructed with a multilayer structure of piezo layers and electrodes arranged between them.
  • a neutral phase is formed in the area between two piezo layers. Since the electrodes contacted in each case on one side are integrated into the layer structure in the manner of a comb, the electrodes which follow one another in the direction of the layer structure must be contacted alternately on opposite sides.
  • the electrodes contacted on one side cannot be completely guided to the opposite side, otherwise voltage flashovers can destroy the piezo actuator.
  • the piezo actuator is actuated, i.e. When a voltage is applied between the electrodes lying opposite one another in the layer structure, different mechanical forces occur in the area of the electrodes and in the non-contacting neutral phases, which can lead to mechanical stresses and cracks in the piezo actuator.
  • the piezo actuator when clamped in, perpendicular to the layer structure a design of the multilayer structure specifically applied an increased mechanical stress in the area of the neutral phases to prevent cracking.
  • At least one outer cover layer of the multi-layer structure is designed on the outer end surface in such a way that it has a thickening in the region of the neutral phases and an increased prestressing force can be applied here in a targeted manner.
  • the thickening can be easily formed, for example, by grinding the cover layer.
  • an insulation layer is arranged between the layers of the multilayer structure, each of which has a thickening in the region of the neutral phases and acts in a manner comparable to that in the first exemplary embodiment.
  • a further embodiment advantageously has specially designed electrodes in the multilayer structure, which likewise each have a thickening in the region of the neutral phase, with some or all of the features being combined with one another with regard to the various previously mentioned embodiments.
  • FIG. 1 shows a section through a piezo actuator with a multi-layer structure of layers made of piezoceramic and electrodes
  • FIG. 2 shows a detail section through the layer structure in the area of neutral phases without application of an electrical voltage
  • FIG. 3 shows a detail section through the layer structure in the area of neutral phases with application of an electrical voltage
  • FIG. 4 shows a first exemplary embodiment of a piezo actuator in which an outer cover layer has thickenings on the side surfaces in the region of the neutral phases;
  • FIG. 5 shows a second exemplary embodiment of a piezo actuator, in which an outer cover layer has thickened portions in the area of the neutral phases at the opposite corners;
  • FIG. 6 shows a third exemplary embodiment of a piezo actuator, in which the electrodes have thickenings in the region of the neutral phases, and
  • FIG. 7 shows a fourth exemplary embodiment of a piezo actuator, in each case with an insulation layer between the layers, which has thickenings on the side surfaces in the region of the neutral phases.
  • piezo actuator 1 shows a piezo actuator 1, which is constructed in a manner known per se from piezo foils 2 of a quartz material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical voltage is applied to electrodes 3 and 4 via contact surfaces 5 and 6 a mechanical reaction of the piezo actuator 1 takes place.
  • FIG. 2 shows the electrodes 3 and 4, wherein the contacting of the electrodes 4 with the contact surface 6 can also be seen here. Since the electrodes 3 have to maintain a distance from this contact surface 6 due to the different polarity, neutral phases are formed here, which are shown by way of example with reference to the neutral phase 7. Due to the spatially different occurrence of the piezo effect, mechanical stresses arise in the neutral phase 7, which lead to a material impairment, which is indicated schematically by the wavy line 8.
  • FIG. 3 the area from FIG. 2 is shown with an applied electrical voltage, the mechanical reaction of the piezo actuator caused thereby being illustrated by arrows 9 and 10. It can be seen here that in the area of the neutral phase 7 there is less expansion in the direction of the arrows 9 and therefore a force effect in the direction of the arrow 10, which leads to crack formation in the area 8 of the neutral phase.
  • FIG. 4 A first exemplary embodiment of the invention is explained with reference to FIG. 4, in which an outer cover layer 11 is arranged on the multilayer structure, which is provided with a thickening 12 in the region of the neutral phase 7, which can reach a size of 2 to 8 ⁇ m in the outer maximum.
  • a thickening 12 in the region of the neutral phase 7, which can reach a size of 2 to 8 ⁇ m in the outer maximum.
  • FIG. 5 shows an outer cover layer 11 with thickened portions 13, which are arranged at opposite corners of the piezo actuator 1.
  • the neutral phases 7 are also formed here at the corners, since in this embodiment the electrodes 3 and 4 are contacted via a contact surface 14 attached to the corners and an invisible diagonally opposite contact surface.
  • thickening in the area of the neutral phase 7 is brought about by local thickening of the electrodes 3 and 4 exclusively in the area of the neutral phases 7.
  • a further exemplary embodiment according to FIG. 7 shows a piezo actuator 1, in which an extra thick insulation layer 15 is introduced between the piezo layers 2 in the area of the neutral phase 7, in order to apply a pre-tension here too when the piezo actuator 1 is clamped, which prevents crack formation.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un piézo-actionneur, destiné par exemple à actionner un élément mécanique. Il est prévu une structure multicouche de couches piézo-électriques (2) et d'électrodes (3, 4) disposées entre. En cas de mise en contact (5, 6) latérale mutuelle des électrodes (3, 4), il se trouve une phase neutre (7) sans couche d'électrodes où un fendillement peut intervenir et peut être évité par conformation de la structure multicouche, ce qui permet de parvenir à une meilleure contrainte mécanique, lorsque le piézo-électrique (1) est monté par insertion perpendiculairement au montage des couches, dans la zone des phases neutres (7).
PCT/DE2000/001929 1999-06-19 2000-06-19 Piezo-actionneur WO2000079615A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001505080A JP2003522510A (ja) 1999-06-19 2000-06-19 圧電式アクチェータ
EP00951223A EP1110254A1 (fr) 1999-06-19 2000-06-19 Piezo-acteur
HU0103374A HUP0103374A3 (en) 1999-06-19 2000-06-19 Piezo element
KR1020017001996A KR20010072697A (ko) 1999-06-19 2000-06-19 압전 액추에이터

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19928177A DE19928177C2 (de) 1999-06-19 1999-06-19 Piezoaktor
DE19928177.7 1999-06-19

Publications (1)

Publication Number Publication Date
WO2000079615A1 true WO2000079615A1 (fr) 2000-12-28

Family

ID=7911880

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/001929 WO2000079615A1 (fr) 1999-06-19 2000-06-19 Piezo-actionneur

Country Status (7)

Country Link
EP (1) EP1110254A1 (fr)
JP (1) JP2003522510A (fr)
KR (1) KR20010072697A (fr)
CN (1) CN1315058A (fr)
DE (1) DE19928177C2 (fr)
HU (1) HUP0103374A3 (fr)
WO (1) WO2000079615A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7208862B2 (en) 2002-01-17 2007-04-24 Epcos Ag Piezoelectric component and method for the production thereof
WO2012123156A1 (fr) * 2011-03-17 2012-09-20 Epcos Ag Composant actionneur piézoélectrique et procédé de fabrication d'un composant actionneur piézoélectrique

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10207292B4 (de) * 2002-02-21 2005-08-11 Siemens Ag Piezostack und Verfahren zur Herstellung eines Piezostacks
DE102004031402A1 (de) * 2004-06-29 2006-02-09 Siemens Ag Piezoelektrisches Bauteil mit Sollbruchstelle, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils
DE102005008717A1 (de) 2005-02-25 2006-08-31 Robert Bosch Gmbh Aktormodul mit einem Piezoaktor
DE102007060167A1 (de) 2007-12-13 2009-06-25 Robert Bosch Gmbh Piezoaktor mit einem Multilagenaufbau von Piezoelementen und ein Verfahren zu dessen Herstellung
DE102009058907B4 (de) 2009-12-17 2012-12-13 Eads Deutschland Gmbh Piezoaktor und Verfahren zum Betreiben eines Piezoaktors, insbesondere in mobilen technischen Einrichtungen
KR101471185B1 (ko) * 2013-04-11 2014-12-11 한국기계연구원 자가 정렬 임프린트 리소그래피 장치 및 이를 이용한 임프린트 리소그래피 방법
KR102547025B1 (ko) 2022-05-09 2023-06-26 박대용 하수관거 비굴착 부분보수 장치 및 공법
KR102495695B1 (ko) 2022-05-09 2023-02-06 박대용 하수관거 비굴착 부분보수 및 모니터링 시스템
KR102634118B1 (ko) 2022-12-29 2024-02-06 삼아건설 주식회사 하수관거 비굴착 부분보수 장치 및 공법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479328A2 (fr) * 1990-10-05 1992-04-08 Nec Corporation Organe d'actionnement piezoélectrique
US5266862A (en) * 1990-10-23 1993-11-30 Nec Corporation Piezoelectric actuator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2940376B2 (ja) * 1993-12-24 1999-08-25 日立プラント建設株式会社 積層形圧電アクチュエータ
JPH08274381A (ja) * 1995-03-31 1996-10-18 Chichibu Onoda Cement Corp 積層型圧電アクチュエータ及びその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479328A2 (fr) * 1990-10-05 1992-04-08 Nec Corporation Organe d'actionnement piezoélectrique
US5266862A (en) * 1990-10-23 1993-11-30 Nec Corporation Piezoelectric actuator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7208862B2 (en) 2002-01-17 2007-04-24 Epcos Ag Piezoelectric component and method for the production thereof
WO2012123156A1 (fr) * 2011-03-17 2012-09-20 Epcos Ag Composant actionneur piézoélectrique et procédé de fabrication d'un composant actionneur piézoélectrique

Also Published As

Publication number Publication date
KR20010072697A (ko) 2001-07-31
DE19928177A1 (de) 2001-01-11
DE19928177C2 (de) 2001-04-26
JP2003522510A (ja) 2003-07-22
CN1315058A (zh) 2001-09-26
EP1110254A1 (fr) 2001-06-27
HUP0103374A3 (en) 2002-03-28
HUP0103374A2 (hu) 2002-01-28

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