WO2002022500A1 - Verfahren zur herstellung von trichlorsilan - Google Patents
Verfahren zur herstellung von trichlorsilan Download PDFInfo
- Publication number
- WO2002022500A1 WO2002022500A1 PCT/EP2001/010360 EP0110360W WO0222500A1 WO 2002022500 A1 WO2002022500 A1 WO 2002022500A1 EP 0110360 W EP0110360 W EP 0110360W WO 0222500 A1 WO0222500 A1 WO 0222500A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon
- catalyst
- hydrogen
- average grain
- grain diameter
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10715—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material
- C01B33/10731—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane
- C01B33/10736—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane from silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
- C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
- C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Catalysts (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/380,320 US20040022713A1 (en) | 2000-09-14 | 2001-09-07 | Method for producing trichlorosilane |
EP01967319A EP1326803B1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
AT01967319T ATE273928T1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
DE50103349T DE50103349D1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
AU2001287719A AU2001287719A1 (en) | 2000-09-14 | 2001-09-07 | Method for producing trichlorosilane |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10045367A DE10045367A1 (de) | 2000-09-14 | 2000-09-14 | Verfahren zur Herstellung von Trichlorsilan |
DE10045367.8 | 2000-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002022500A1 true WO2002022500A1 (de) | 2002-03-21 |
Family
ID=7656116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2001/010360 WO2002022500A1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
Country Status (6)
Country | Link |
---|---|
US (1) | US20040022713A1 (de) |
EP (1) | EP1326803B1 (de) |
AT (1) | ATE273928T1 (de) |
AU (1) | AU2001287719A1 (de) |
DE (2) | DE10045367A1 (de) |
WO (1) | WO2002022500A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1861408A1 (de) * | 2005-03-09 | 2007-12-05 | Advanced Silicon Materials LLC | Verfahren zur herstellung von hydrochlorsilanen |
WO2020221421A1 (de) * | 2019-04-29 | 2020-11-05 | Wacker Chemie Ag | Verfahren zur herstellung von trichlorsilan mit struktur-optimierten silicium-partikeln |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008041974A1 (de) | 2008-09-10 | 2010-03-11 | Evonik Degussa Gmbh | Vorrichtung, deren Verwendung und ein Verfahren zur energieautarken Hydrierung von Chlorsilanen |
DE102009027730A1 (de) * | 2009-07-15 | 2011-01-27 | Evonik Degussa Gmbh | Verahren und Verwendung von aminofunktionellen Harzen zur Dismutierung von Halogensilanen und zur Entfernung von Fremdmetallen |
US8298490B2 (en) * | 2009-11-06 | 2012-10-30 | Gtat Corporation | Systems and methods of producing trichlorosilane |
WO2012033644A1 (en) * | 2010-09-08 | 2012-03-15 | Dow Corning Corporation | Method for preparing a trihalosilane |
CN103260716B (zh) | 2010-12-20 | 2015-10-14 | Memc电子材料有限公司 | 在涉及歧化操作的基本闭环方法中制备多晶硅 |
DE102011110040A1 (de) * | 2011-04-14 | 2012-10-18 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Chlorsilanen mittels hoch-siedender Chlorsilane oder chlorsilanhaltiger Gemische |
IN2015DN01936A (de) | 2012-08-13 | 2015-08-07 | Dow Corning | |
EP3068789B1 (de) | 2013-11-12 | 2021-04-07 | Dow Silicones Corporation | Verfahren zur herstellung eines halosilans |
KR101580171B1 (ko) | 2014-01-23 | 2015-12-24 | 한국화학연구원 | 금속 실리사이드 표면개질 방법, 표면개질된 금속 실리사이드를 이용한 삼염화실란의 제조방법 및 제조장치 |
KR102607348B1 (ko) * | 2018-12-18 | 2023-11-29 | 와커 헤미 아게 | 클로로실란을 제조하는 방법 |
CN113559862B (zh) * | 2021-06-21 | 2022-04-22 | 北京工商大学 | 原子级助剂修饰的CuO复合介晶催化剂及其制备方法 |
CN114392743A (zh) * | 2022-01-28 | 2022-04-26 | 中国科学院过程工程研究所 | 一种氧化亚铜粉末催化剂及其应用 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4676967A (en) * | 1978-08-23 | 1987-06-30 | Union Carbide Corporation | High purity silane and silicon production |
DE4104422A1 (de) * | 1991-02-14 | 1992-08-20 | Nuenchritz Chemie Gmbh | Verfahren zur herstellung von trichlorsilan aus siliciumtetrachlorid |
DE19654154A1 (de) * | 1995-12-25 | 1997-06-26 | Tokuyama Corp | Verfahren zur Herstellung von Trichlorsilan |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2380995A (en) * | 1941-09-26 | 1945-08-07 | Gen Electric | Preparation of organosilicon halides |
US4526769A (en) * | 1983-07-18 | 1985-07-02 | Motorola, Inc. | Trichlorosilane production process |
US4504597A (en) * | 1983-11-04 | 1985-03-12 | Scm Corporation | Cupreous catalyst and process making same |
US4520130A (en) * | 1984-05-08 | 1985-05-28 | Scm Corporation | Halosilane catalyst and process for making same |
DE3782213T2 (de) * | 1986-07-10 | 1993-03-11 | Chiyoda Chem Eng Construct Co | Verfahren zur enthalogenierung eines halogenids und katalysator hierfuer. |
DE4115183A1 (de) * | 1991-05-09 | 1992-11-12 | Bayer Ag | Feinteiliges silicium mit oberflaechlich gebundenem halogen, verfahren zu dessen herstellung und dessen verwendung |
JP3159029B2 (ja) * | 1996-01-12 | 2001-04-23 | 信越化学工業株式会社 | シラン類の製造方法 |
US6057469A (en) * | 1997-07-24 | 2000-05-02 | Pechiney Electrometallurgie | Process for manufacturing active silicon powder for the preparation of alkyl- or aryl-halosilanes |
-
2000
- 2000-09-14 DE DE10045367A patent/DE10045367A1/de not_active Withdrawn
-
2001
- 2001-09-07 WO PCT/EP2001/010360 patent/WO2002022500A1/de active IP Right Grant
- 2001-09-07 EP EP01967319A patent/EP1326803B1/de not_active Expired - Lifetime
- 2001-09-07 AU AU2001287719A patent/AU2001287719A1/en not_active Abandoned
- 2001-09-07 DE DE50103349T patent/DE50103349D1/de not_active Expired - Lifetime
- 2001-09-07 US US10/380,320 patent/US20040022713A1/en not_active Abandoned
- 2001-09-07 AT AT01967319T patent/ATE273928T1/de not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4676967A (en) * | 1978-08-23 | 1987-06-30 | Union Carbide Corporation | High purity silane and silicon production |
DE4104422A1 (de) * | 1991-02-14 | 1992-08-20 | Nuenchritz Chemie Gmbh | Verfahren zur herstellung von trichlorsilan aus siliciumtetrachlorid |
DE19654154A1 (de) * | 1995-12-25 | 1997-06-26 | Tokuyama Corp | Verfahren zur Herstellung von Trichlorsilan |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1861408A1 (de) * | 2005-03-09 | 2007-12-05 | Advanced Silicon Materials LLC | Verfahren zur herstellung von hydrochlorsilanen |
EP1861408A4 (de) * | 2005-03-09 | 2011-08-03 | Advanced Silicon Materials Llc | Verfahren zur herstellung von hydrochlorsilanen |
WO2020221421A1 (de) * | 2019-04-29 | 2020-11-05 | Wacker Chemie Ag | Verfahren zur herstellung von trichlorsilan mit struktur-optimierten silicium-partikeln |
Also Published As
Publication number | Publication date |
---|---|
EP1326803B1 (de) | 2004-08-18 |
US20040022713A1 (en) | 2004-02-05 |
AU2001287719A1 (en) | 2002-03-26 |
ATE273928T1 (de) | 2004-09-15 |
DE50103349D1 (de) | 2004-09-23 |
EP1326803A1 (de) | 2003-07-16 |
DE10045367A1 (de) | 2002-03-28 |
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