WO2001099098A2 - Microactionneur thermo-mecanique en plan - Google Patents
Microactionneur thermo-mecanique en plan Download PDFInfo
- Publication number
- WO2001099098A2 WO2001099098A2 PCT/US2001/019399 US0119399W WO0199098A2 WO 2001099098 A2 WO2001099098 A2 WO 2001099098A2 US 0119399 W US0119399 W US 0119399W WO 0199098 A2 WO0199098 A2 WO 0199098A2
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- WIPO (PCT)
- Prior art keywords
- shuttle
- expansion member
- expansion
- microelectromechanical mechanism
- base member
- Prior art date
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- 230000000930 thermomechanical effect Effects 0.000 title description 2
- 238000006073 displacement reaction Methods 0.000 claims abstract description 54
- 230000007246 mechanism Effects 0.000 claims description 90
- 230000001052 transient effect Effects 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 11
- 230000007423 decrease Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000004873 anchoring Methods 0.000 description 9
- 238000005452 bending Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 8
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
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- 238000005265 energy consumption Methods 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
- F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
- F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N10/00—Electric motors using thermal effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/051—Translation according to an axis parallel to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
Definitions
- the present device relates to microelectroinechanical systems. More particularly, the device relates to thermally activated microactuators.
- Microcircuits are used in many different applications, from hearing aids to dog tags, many of which require small-scale mechanical operations.
- MEMS, or microelectroinechanical systems have been developed to provide mechanical operations in microscopic environments.
- known small-scale transducers or microactuators, are in may respects limited. They are somewhat bulky with respect to the circuits in which they operate. They also require considerable voltage to operate, and provide only a relatively small amount of mechanical force or displacement in return. The high voltage requirements of most known transducers make them unusable in CMOS circuits, as found in personal computers, which typically operate at 5 Volts or less.
- known microactuators are often subject to failure due to contamination, which makes them useless in many exposed environments.
- many known microactuators are inflexible in design, and thus cannot be readily adapted to suit different applications. Known devices also must often be manufactured through special processes that require entirely different equipment and procedures from those used to form a circuit.
- One example of a known microactuator is a "U" shaped actuator, with a “hot” arm and a “cold” arm. Both arms have an anchored end and a free end. Each anchored end is fixed to a substrate and the free ends of the two arms are connected together by a thin member.
- the hot arm is a relatively thin member and the cold arm is a relatively thick member. Both arms have a thin flexure near the anchored end.
- the actuator is triggered by applying an electric current through the actuator, from anchor to anchor.
- the thin, hot aim has a higher current density than the thick, cold arm, due to its comparatively smaller cross- sectional area. The high current density causes the hot arm to heat and expand more than the cold arm.
- This actuator functions in a manner similar to a bimetallic strip, in which the different expansion properties of the two metals cause the strip to curl.
- Multiple "U" shaped actuators may be connected to a common actuating structure form an array that compounds their output forces. This is accomplished by attaching a flexible yoke between the free end of the actuator and the common actuating structure. This flexible yoke is required to translate the arc-like motion into a linear actuation.
- the "U" shaped actuator possesses multiple deficiencies. For example, arc incurred losses during conversion of the arcing output motion into linear translating motion. More specifically, the actuators in the array must expend a portion of their output energy to deform the flexible yokes so that the common actuating structure moves in a straight line. Additionally, the cold arm's bulky size resists deflection as the hot arm arcs towards the cold arm. The force required to bend the cold arm does not contribute to the ultimate output force at he "U" shaped microactuator. Furthermore, the cold arm requires material, volume, and energy but does not contribute to the actuating force.
- the non-contributing material, volume, and energy become even more burdensome when multiple "U" shaped actuators are connected to form an array.
- the flexible yoke members similarly require energy, material, and volume without contributing to the output force produced by the actuator.
- the bulk and energy requirements fo the "U" shaped actuator make such actuators unsuitable for certain applications.
- the actuator should be lightweight and small, and should continue to operate in the presence of contaminants common in microcircuit applications.
- the microactuator should have a flexible design that can be easily adapted to suit various input, output, size, and material specifications.
- the microactuator should be simple and easy to manufacture, preferably through methods similar to those used to make the circuits in which they operate.
- the present micromechanism includes a microactuator that has advantageous size, displacement, and force characteristics.
- the micromechanism may comprise a generally long and thin expansion member that is coupled at a first end to a base member and at a second end to a displaceable shuttle.
- the expansion member extends towards and the shuttle at an angle slightly offset from a perpendicular attachment to the base member.
- the expansion member may be configured to elongate in an elongation direction.
- the shuttle may be configured to travel in an output direction along a single axis.
- the displaceable shuttle may be constrained such that the lateral distance between the base member and the axis of shuttle's output direction is fixed. This output direction is substantially different from the elongation direction of the expansion member.
- the shuttle travels in a direction nearly perpendicular to the elongation direction of the expansion member.
- the expansion member is comprised of a material that can be formed microscopically. The material and shape of the expansion member may be selected such that substantial elongation occurs when thermal energy increases in the expansion member.
- the expansion member Upon an increase of thermal energy within the expansion member, the expansion member elongates in a direction nearly perpendicular to the base member and shuttle. Since the lateral offset of the base member and shuttle is constant, the expansion member cannot expand perpendicular to the shuttle.
- the expansion member's movement at the base member coupling is limited to slight angular rotation and movement at the shuttle coupling is limited to the uniaxial travel of the shuttle. These limitations may force the expansion member to pivot near the base member end and drive the shuttle at the shuttle end. Relative motion between the base member and the shuttle permits pivoting of the expansion member such that the increased length of the expansion member can be accommodated. The result is that a relatively small elongation of the expansion member creates a large displacement of the shuttle.
- microactuators disclosed herein may function substantially in-plane, which entails operation of each component within a single plane.
- the microactuator may be made through film deposition methods similar to those used to construct flat circuits.
- a microactuator according to the invention may even be made simultaneously and unitarily with a circuit so that production can be economically and rapidly carried out.
- the low voltage requirement makes such microactuators operative for CMOS applications and the like, and their high force/displacement characteristics make them uniquely suited to other applications in which efficient motion is desirable, fh addition, the simple design of the microactuators of the present invention enables them to continue operating even in the presence of small contaminants often found in circuit environments.
- Figure 1 is a plan view of one embodiment of a microactuator with having symmetrical sets of expansion members configured to drive a single shuttle;
- Figure 2 is the plan view of the microactuator of Figure 1, depicting one possible shape of elongated expansion members and one manner in wliich the microactuator may be connected to receive an electrical input;
- Figure 3 is a plan view of an alternative embodiment of a microactuator in which only a single set of expansion members is used;
- Figure 4 is a plan view of another alternative embodiment of a microactuator, in which each expansion member has a variable width
- Figure 5 is a plan view of another alternative embodiment of a microactuator, in which two symmetrical sets of expansion members are used, each of which contains two groups of expansion members;
- Figure 6 is a plan view of an embodiment of an array of microactuator in which two microactuators press inward to amplify the motion of a third microactuator; and
- Figure 7 is a plan view of another embodiment of an array of the microactuator, in which two microactuators press inward against an anchored microactuator and an unanchored microactuator to amplify the motion of the unanchored microactuator.
- FIG. 1 depicts a microactuator with enhanced force and displacement characteristics.
- a datum 4 has been established to provide orientation throughout the application. The datum shows negative 5 and positive 6 X directions ("lateral directions”) and negative 7 and positive 8 Y directions ("longitudinal directions").
- the respective locations of the various elements of the microactuator maybe more precisely defined by referring to the datum 4.
- the microactuator 10 has a first base member 12 anchored to a first surface 14 and a second base member 16 anchored to a second surface.
- the surfaces 14, 18 maybe parts of the substrate of a silicon chip or, in an alternative embodiment the surfaces 14, 18 maybe parts of one or more other microelectromechanical mechanisms.
- Two sets of expansion members 20, 22 are coupled to the base members 12, 16 respectively.
- the expansion members 20, 22 may be generally elongated and are composed of a thermally expanding material.
- the expansion members 20, 22 extend from the base members 12, 16 and are coupled to a shuttle 24 to create a ladder shaped actuator.
- the first expansion members 20 are attached to the first base member 12.
- the first expansion members 20 extend in the positive X direction 6 and are coupled to a side of the shuttle 24.
- the second expansion members 22 extend from the second base member 16 in the negative Y direction 5 and are coupled to the shuttle 24 opposite the first expansion members 20.
- the shuttle 24 may be generally stiff, and may be slidably disposed on a surface such as a semiconductor substrate, hi Figure 1, the shuttle 24 is only constrained by the expansion members 20, 22.
- the tensile and compressive strengths of the expansion members 20, 22 substantially limit the movement of the shuttle to displace in the positive 8 and negative 7 Y directions.
- the lateral distance in the X directions 5, 6 between the base members 12, 16, and the shuttle 24 does not change significantly during operation of the actuator 10.
- Figure 1 further depicts the shuttle 24 and base members 12, 16 as rectangular in shape, but one skilled in the art will recognize that these elements may be configured in any number of shapes to fit a particular design need. While Figure 1 demonstrates a preferred embodiment of present invention, an operable microactuator may be formed with a single expansion member 20 coupled to a single base member 12 and a shuttle 24. The expansion member 20, the base member 12, and shuttle 24 form an "I" shaped actuator. Thus, any disclosure referring to multiple expansion members or groups of expansion members in the application may simply be replaced with a single expansion member to provide additional alternative embodiments of the invention. However, even though the micromechanism is operable with only a single expansion member, an increased number of expansion members will correspondingly increase the output force of the device.
- the microactuator of Figure 1 will have a larger output force than an "I" shaped actuator with single expansion member.
- This relationship between the output force and the number of expansion members provides the microactuator of Figure lwith a large variety of versatile design options.
- the microactuator 10 can be simply optimized by adding or removing expansion members so that the microactuator 10 only outputs the required force for the actuating function. Thus, the overall size and energy consumption of the microactuator 10 can be minimalized.
- the microactuator 10 is a compliant mechanism.
- the base members 12, 16, the expansion members 20, 22, and the shuttle 24 form a single continuous, unitary structure.
- Compliant mechanisms are a family of devices in which flexible and bendable members replace convention multi-part devices, such as pin joints. They provide several benefits including simple manufacturing, high strength, and flexibility. Moreover, a compliant mechanism is typically constructed in unitary fashion.
- the various components of the embodiment of Figure 1 may be formed from one or more planar layers of polysilicon.
- the motion of the microactuator 10 is determined by its geometry. Thick members, such as the base members 12, 16 and the shuttle 24, will stay rigid. Conversely, thin or necked-down members, such as the expansion members 20, 22, will flex, hi Figure 1, the expansion members 20,22 are thin flexible members; however, where practical, they may be necked- down to form small length flexural pivots to obtain flexibility.
- the compliant nature of the expansion members 20, 22 provides the motion of the microactuator 10.
- the expansion members 20, 22 also supply actuating force for the microactuator 10.
- the expansion members 20, 22 are preferably made from a material with a high coefficient of thermal expansion (ratio of thermal expansion to temperature change) to obtain large displacements. However, a material with a lower coefficient or thermal expansion may be used when smaller displacements are desirable.
- the high coefficient allows for comparatively large elongation of the expansion members 20, 22 when the amount of thermal energy increases within the expansion members 20, 22.
- the first attachment angle 23 maybe substantially perpendicular, or close to 90°. Substantially parallel may be a ⁇ 15° offset from a true perpendicular attachment without diverging from the spirit of the embodiment.
- the second attachment angle 21 may be somewhat further from perpendicularity. The trigonometric effect of the decrease in the attachment angle displace the shuttle 24 in the positive Y direction 8 so that the expansion member can elongate.
- the expansion members 20, 22 forces the attachment angle to decrease, the expansion members 20, 22 then move from the adjacent position of the right triangle to the hypothenuse position 26, 28. This angle decrease drives the attached shuttle 24 along the Y-axis 7, 8 to a displaced position 30.
- elongation of the expansion members 20, 22 almost completely in the X direction 5, 6 produces a displacement 32 of the shuttle 24 in the Y direction 8. Therefore, the elongation direction and the shuttle output direction are substantially different directions. It is important to understand, however, that a substantially different direction is not limited to a near 90° difference in directions. Various embodiments of the microactuator may only require small differences in direction. The difference between the elongation and output directions will depend on the desired force and displacement characteristics of the actuator.
- the microactuator 10 of Figure 1 implements an initial angular offset of the expansion members 20, 22 to control the actuation direction.
- the first attachment angle 23 is slightly less than 90°
- elongation of the expansion members 20, 22 will displace the shuttle 24 in the positive Y direction 8. While comparatively large angle offsets will guarantee a predictable displacement direction, positioning the expansion members 20, 22 at a near perpendicular angle provides a greater output displacement 32.
- An advantage of the microactuator 10 over other designs is the ability to select a wide range of actuation force and displacement characteristics.
- the largest shuttle displacement occurs when the expansion members elongate in a direction nearly perpendicular to the direction of travel of the shuttle 24.
- This displacement comes at the expense of force.
- the output force can be increased by offsetting the attachment of the expansion member from a perpendicular configuration. The output force will increase as the offset increases, but the displacement distance will correspondingly decrease. Therefore, the first attachment angle 23 may be selected according to the force and displacement requirements for the application in which the microactuator 10 is to be used.
- additional expansion members 20, 22 can simply be added to a microactuator 10 to increase the output force while maintaining a desired output.
- a beneficial feature of this design is that a relatively small elongation of the expansion members 20, 22 can produce a shuttle displacement over ten times larger than the elongation of the expansion members 20, 22.
- the displacement of the shuttle 24 as a function of the elongation of expansion members 20, 22 can be derived from Pythagorean theorem, assuming the unelongated expansion members 20, 22 are nearly perpendicular to the base members 12, 16 and the shuttle 24. As the expansion members 20, 22 elongate, they depart further from perpendicularity.
- the following equation may be used to obtain the output displacement of the shuttle 24:and variables are as follows:
- This equation measures the length of the unelongated and elongated expansion members as the distance from the base member attachment to the shuttle attachment. This measurement may vary somewhat from the actual length of the expansion member if bending or buckling occurs in the member.
- a ratio (R ; ) of displacement to elongation can be obtained through the following equation.
- a more robust equation may also be employed to characterize the operation of the microactuator 10 without requiring unelongated expansion members 20, 22 to have a near perpendicular attachment.
- Such an equation may be obtained by referencing the unelongated and the elongated expansion members 20, 22 to theoretical expansion members (not shown) exactly perpendicularly fixed between the base members 12, 16 and the shuttle 24. The length of this theoretical member is the fixed lateral distance between each of the base members 20, 22 and the shuttle 24.
- This equation provides the output displacement of the shuttle 24 for any of a large range of values of the first attachment angle 23.
- the equation and variables are as follows:
- ⁇ is the displacement of the shuttle 24 in the output direction;
- L 0 is the fixed lateral distance between the base member 12 or 16 and the shuttle 24;
- L j is the unelongated length of the expansion members 20, 22;
- L 2 is the elongated length of the expansion members 20, 22.
- This equation is derived from the trigonometric relationships of two right triangles that share the same base, the common base being the fixed lateral distance (L Q ).
- the physical constraints must be considered in performing calculations with the above equation.
- the previous equation functions when the first attachment angle 23 is within 90° of the fixed lateral length.
- a shuttle displacement to elongation ratio (R 2 ) may be calculated in the same manner as above:
- the microactuator 10 may have comparatively low energy consumption wliich is due in part to the linear path of the expansion members 20, 22. More specifically, each of the expansion members 20, 22 has one end coupled to the shuttle 24; these coupled ends move in a substantially linear path as the microactuator 10 operates. Because the most efficient path between to points is a straight line, the linear travel of the coupled ends is more efficient than any other path, such as an accurate, elliptical, or otherwise nonlinear path.
- the substantially straight shape of the expansion members 20, 22 may also add to the efficiency of the microactuator 10. Bending consumes energy; consequently, eliminating bending from a system will increase the efficiency of the system. Therefore, a generally stiff member is more efficient than an extremely flexible member.
- the stiffness (k) of a beam may be calculated using the linear spring constant:
- E Young's modulus, which is a material property
- I is the moment of area of the cross-section of the beam
- E is the beam length.
- the shortest member (L) will be the stiffest. Therefore, because the shortest distance between two points is a straight line, the substantially straight elongation member 20, 22 is the stiffest and consequently, consumes less energy than a non-straight member. Stiffness, as discussed above, does not require absolute rigidity, but simply entails sufficient rigidity to substantially avoid deflection that is not necessary for the motion of a microactuator.
- Figure 1 depicts a substantially straight elongated expansion member 26, 28, this embodiment represents an ideal elongation in which flexibility is limited to the points at which the expansion members 26, 28 are coupled to the base members 12, 16 and the shuttle 24.
- This ideal elongation would require pin joints or necked-down cross-sections that permit flexing of the expansion members 20, 22 only at the ends of the expansion members 20, 22. Maintaining a substantially straight expansion member may not be as simply accomplished when the expansion member is attached without necked-down section or pivot joints.
- flexibility at the attachment points may be low. Therefore, bending at or near the attachment points will not occur as readily. In a member that is fixed on two ends, the most probable location for bending to occur is in the center of the member's length, assuming the member has a constant cross-section.
- Figure 2 shows the microactuator 10 of Figure 1, with an alternative mode of expansion member elongation.
- the expansion members 20, 22 may have elongated configurations 34, 36 respectively.
- the elongated expansion members 34, 36 may bend in the center during elongation to for an "S" shape. Despite this flexing, the elongated expansion members 34, 36 still remain substantially straight in some aspects.
- the expansion members 34, 36 remain substantially straight at the attachment points and only begin to flex near the center of their length. Even in the bent region of the "S" shape, the curvature remains relatively small. Consequently, the manner in which the expansion members 34, 36 bend is more efficient than other bending modes such as arcuate bending, in which a greater degree of bending is present over a greater length.
- the microactuator 10 disclosed herein remains efficient despite some bending.
- the flexure of the "S" shaped expansion members 34, 36 can also be understood as an elastically buckling process.
- Elastic buckling is not a permanent deformation of the member; rather, the elongated expansion member 34, 36 temporarily yield under axial loads, but return to their original substantially uneffected state 20, 22 when the load is removed.
- the direction of the buckling is controlled by the first attachment angle 23 of the expansion members 20, 22 with respect to the base members 12, 16. The elongation and subsequent buckling drive the shuttle 24 in the positive Y direction 8.
- the elongation of the expansion members 20, 22 may be initiated in a variety of manners.
- Figure 2 illustrates that the base members 12, 16, have contact surfaces 38, 39, respectively, by which the base members 12, 16 are electrically coupled to a current source 37.
- thermal energy in the expansion members 20, 22 is increased by an electrical current flowing through the expansion members 20, 22 from the current source 37.
- the electrical resistance of the expansion members 20, 22 causes an increase in temperature.
- the temperature increase causes elongation of the expansion members 20, 22.
- the shuttle 24 actuates when a current passes through the microactuator. Once the current is removed, the amount of thermal energy decreases to an equilibrium state and the shuttle 24 returns to its original position.
- An increase in the ambient temperature surrounding the microactuator 10, may also provide enough thermal energy in the expansion members 20, 22 to actuate the shuttle 24.
- the ambient temperature may be increased by disposing a heat generating device near the microactuator 10.
- Other methods of increasing thermal energy within the expansion members 20, 22, such as conduction and radiation may also be used to actuate the shuttle 24.
- traditional methods of preventing heat loss maybe implemented in conjunction with the microactuator 10 to increase efficiency.
- An adequately insulated mechanism will require the addition of less thermal energy to provide actuation, and will remain in the actuated position with a lower steady state current input.
- Figure 3 demonstrates an alternative embodiment of a microactuator 40 according to the invention.
- the microactuator 40 may have only one set of expansion members 20.
- the shuttle 24 directly abuts the second base member 42 to restrict motion of the shuttle 24 in the positive X direction 6.
- the second base member 42 is anchored against a surface 44 (or another suitable anchoring feature) and in one embodiment, has a smooth surface 46 against which the shuttle 24 slides.
- the second base member 42 fixes the lateral distance between the first base member 12 and the shuttle 24.
- elongation of the expansion members 20 drive the shuttle in the positive Y direction 8.
- the microactuator 40 is more compact than other actuators, such as the microactuator 10, that have two sets of expansion members 20, 22. Therefore, the microactuator 40 requires less energy to actuate, but has a correspondingly lower output force.
- This embodiment 40 also has an "I" shape.
- Each of the four expansion members 20 forms an "I" shape in conjunction with the base member 12 and the shuttle 24.
- the second base member 42 need not be a fixed member; it simply must restrain movement of the shuttle 24 in the positive X direction 6. Consequently, a variety of structures may be used in place of the second base member 42.
- the abutting surfaces of the shuttle 24 and the second base 42 may be replaced with a rack-and-pinion type structure, so that the shuttle 24 can drive a gear or the like.
- the second base member 42 may be a member capable of sliding along the Y axis 7, 8, such as another shuttle 24.
- the contact surfaces between shuttle 24 and the second base member 42 need not be straight surfaces.
- Various shapes can be implemented that allow for travel in a combination of X 5,6 and Y 7,8 directions.
- FIG 4 illustrates an alternative embodiment of expansion members suitable for use in any of the microactuator designs of the present invention.
- Each of the expansion members 49 shown here has a variable width.
- the rectangular shapes of the expansion members 49 of Figure 4 represent only one of many possible geometric structures that could be incorporated into the expansion members 49.
- the variable width geometry of the expansion members 49 may provide structural support so that the expansion members 49 can be made comparatively long. More specifically, the wide cross-section 48 prevents the expansion member 49 from plastically buckling, i.e. permanently deforming, when the mechanism is actuated. Additionally, various shaped cross-sections may also serve to control the manner in which the expansion member elastically buckles.
- Figure 5 shows yet another embodiment of the present invention.
- the expansion members 20, 22 have been gathered to form groups 52, 54.
- the effect of positioning the expansion members 20, 22 to form the groups 52, 54 is to reduce thermal energy losses because the expansion members 20, 22 thermally insulate each other. Actuation in a vacuum will also reduce energy requirements of a microactuator because thermal energy is not dissipated by convection.
- Figure 5 also demonstrates an angle that has been shown in previous figures. The more accurate attachment clearly determines that the displacement direction of the shuttle 24 will be in the positive X direction 6.
- an alternative embodiment shows multiple microactuators arrayed to form a single microactuator 60.
- This microactuator 60 is configured to provide a larger output displacement and/or force than a single microactuator would be capable of providing.
- Figure 6 shows two transient microactuators 62a , 62b that are similar to the microactuator 10 depicted in Figure 1.
- the first transient microactuator 62a has two base members 64a, 65a that maybe fixed to a substrate 66. hi the embodiment shown, multiple primary expansion members 67a, 68a are coupled to the base members 64a, 65a respectively.
- the actuation direction of the first transient microactuator 62 can be controlled by disposing the expansion members 67a, 68a at an offset angle from the base member 64a, 65 a.
- the embodiment of Figure 6 shows the expansion members 67a, 68a coupled to a transient shuttle 69a, with the expansion member 67a, 68a angling toward a biasing actuator 70.
- the transient shuttle 69a is driven in a positive X direction 6 when the expansion members 67a, 68a elongate.
- the transient shuttle 69a is coupled to a first base member 71a of the biasing actuator 70.
- a second transient microactuator 62b is coupled to a second base member 71b of the biasing actuator 70.
- Two sets of primary expansion members 67b, 68b are coupled between two base members 64b, 65b and a second transient shuttle 69b of the second transient actuator 62b. Elongation of the primary expansion members 67b, 68b drives the second transient shuttle 69b in a negative X direction 8 (the direction opposite the travel direction of the first transient shuttle 69a).
- the displacement of the transient shuttles 69a, 69b decreases the lateral distance between the actuating shuttle 77 and base members 71a, 71b of the actuating shuttle. The decrease in lateral distance drives the actuating shuttle 77 in the Y direction 8.
- the motion of the two transient shuttles 69a, 69b forces two sets of secondary expansion members 72a, 72b to pivot or bend, driving the actuating shuttle 77 in the positive Y direction 8.
- the secondary expansion members 72a, 72b can actuate the actuating shuttle 77 in a manner similar to the expansion members 20, 22 of the microactuator 10 of Figure 1, even if none of the primary expansion members 67a, 67b, 68a, 68b have elongated. The largest displacement occurs when all of the expansion members 67a, 67b, 68a,
- microactuators 10, 40, 50 maybe arrayed in various other combinations to amplify the displacement of a shuttle by using the shuttle of one microactuator 10, 40, 50 as a base member attachment for another microactuator 10, 40, 50.
- the microactuator 50 of Figure 6 also demonstrates that several advantages may be derived from affixing base members of a microactuator 10, 40, 50.
- the actuation of the microactuator 60 of Figure 6 may be controlled through selectively applying electric current to the base members 64a, 64b, 65a, 65b, 71a, 71b.
- the primary expansion members 67a, 68a of the first actuator 62a maybe elongated by applying a current source to the base members 64a, 65a.
- the current then flows between the two base members 64a, 65a via the expansion member 67a, 68a, to heat, and thereby elongate, the expansion members 67a, 68a.
- a similar process may be used to elongate the expansion members 67b, 68b of the second actuator 62b.
- a current source may be coupled to the base members 67b, 68b such that the current flows through, heats, and elongates the expansion members 67b, 68b.
- the secondary expansion members 72a, 72b may be elongated by coupling a current source to the lower base members 65a, and 65b.
- the current flowing between the base members 65a, 65b similarly flows through, heats, and elongates the expansion members 72a, 72b.
- three different current sources may be coupled to the microactuator 60 to control the energy consumption and actuation sequence.
- a single current source may alternatively be used to actuate the microactuator 60 by electrically connecting the two lower base members 65a, 65b such that current can shunt between the base members 65a, 65b. This may be accomplished by, for example, replacing the lower base members 65a, 65b with a single elongated base member 79.
- a single current source may then be coupled to the upper base members 64a, 64b to actuate the entire microactuator 60.
- Other current source coupling schemes may be implemented in the microactuator 60 or in other microactuator arrays to suit a large variety of control needs.
- Figure 7 illustrates an alternative embodiment of a microactuator 80 that implements multiple microactuators to obtain compound force and displacement characteristics.
- the microactuator 80 is based at least in part on the sliding microactuator 40 shown in Figure 3.
- a first base member 82a is fixed to a surface 84a.
- At least one primary expansion member 86a is coupled to the base member 82a.
- the primary expansion members 86a are coupled to a first transient shuttle 88a.
- a similar base member 82b and expansion member 86b structure is coupled to a second transient shuttle 88b.
- the expansion members 86a, 86b are angled from an orthogonal intersection with the base members 82a, 82b.
- the two transient shuttles 88a, 88b serve as base members for a biasing actuator 89 and an anchoring actuator 90.
- Secondary expansion members 91a, 91b are coupled between the transient shuttles 88a, 88b and a biasing shuttle 92. Again, in one embodiment the secondary expansion members 91a, 91b are angled from an perpendicular intersection with the transient shuttles 88a, 88b.
- Secondary, expansion members 94a, 94b are also coupled between the transient shuttles 88a, 88b and an anchoring shuttle 96.
- the microactuator 80 functions in a manner similar to the other microactuators 10, 40, 50, 60 previously discussed.
- the expansion members 86a, 86b, 91a, 91b, 94a, 94b are simultaneous elongated.
- the primary expansion members 86a, 86b elongate, biasing the transient shuttles 88a, 88b toward the biasing shuttle 92 and the anchoring shuttle 96.
- the motion of the transient shuttles 88a, 88b compresses the secondary expansion members 91a, 91b, 94a, 94b to transmit the biasing force to the actuating shuttle 92 and to the anchoring shuttle 96.
- the secondary expansion members 91a, 91b, 94a, 94b may simultaneously elongate to partially or fully resist inward motion of the transient shuttles 88a, 88b, and to create additional biasing force between the actuating shuttle 92 and the anchoring shuttle 96.
- the secondary expansion members 91a, 91b, 94a, 94b may be made thinner or thicker than the primary expansion members 86a, 86b to control the proportions of biasing force provided by the expansion members 86a, 86b, 91a, 91b, 94a, 94b.
- the actuating shuttle receives force in the positive Y direction 8 and the anchoring shuttle 96 receives force in the negative Y direction 8.
- These opposing forces tend to increase the distance 97 between the biasing shuttle 92 and the anchoring shuttle 96.
- the anchoring shuttle 96 is fixed in place, the actuating shuttle 92 receives all of the displacement 97.
- the comparatively small force and displacements of the expansion members 86a, 86b, 91a, 91b, 94a, 94b in the microactuator 60 maybe combined to create a larger output force and displacement in the actuating shuttle 92. Similar results, but with a smaller force and displacement, will result if only the primary expansion members 86a, 86b are elongated.
- microactuators disclosed herein may be modified in many other ways to suit a wide variety of applications.
- the invention may be embodied in other specific forms without departing from its structures, methods, or other essential characteristics as broadly described herein and claimed hereinafter.
- the described embodiments are to be considered in all respects only as illustrative, and not restrictive.
- the scope of the intellectual property rights is, therefore, indicated by the appended claims, rather than by the foregoing description. All changes that come within the meaning and range of equivalency of the claims are to be embraced within their scope.
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Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU6851101A AU6851101A (en) | 2000-06-19 | 2001-06-18 | Thermomechanical in-plane microactuator |
US10/312,172 US6734597B1 (en) | 2000-06-19 | 2001-06-18 | Thermomechanical in-plane microactuator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US21224900P | 2000-06-19 | 2000-06-19 | |
US60/212,249 | 2000-06-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001099098A2 true WO2001099098A2 (fr) | 2001-12-27 |
WO2001099098A3 WO2001099098A3 (fr) | 2002-07-04 |
Family
ID=22790213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/019399 WO2001099098A2 (fr) | 2000-06-19 | 2001-06-18 | Microactionneur thermo-mecanique en plan |
Country Status (3)
Country | Link |
---|---|
US (1) | US6734597B1 (fr) |
AU (1) | AU6851101A (fr) |
WO (1) | WO2001099098A2 (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US6983088B2 (en) * | 2003-08-05 | 2006-01-03 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
US6985650B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
US6985651B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same |
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US7126446B2 (en) * | 2001-06-15 | 2006-10-24 | Brigham Young University | Self-retracting fully compliant bistable micromechanism |
US6975060B2 (en) * | 2003-01-30 | 2005-12-13 | Donald Styblo | Meso-to-micro-scaleable device and methods for conversion of thermal energy to electrical energy |
US7150365B2 (en) * | 2004-02-03 | 2006-12-19 | Rtc Industries, Inc. | Product securement and management system |
US20060158484A1 (en) * | 2005-01-14 | 2006-07-20 | Greywall Dennis S | Thermal actuator for a MEMS device |
US7224883B2 (en) * | 2005-03-31 | 2007-05-29 | Xerox Corporation | Actuator and latching systems and methods |
US7339454B1 (en) * | 2005-04-11 | 2008-03-04 | Sandia Corporation | Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom |
US7421924B1 (en) | 2005-08-11 | 2008-09-09 | Sandia Corporation | Apparatus for raising or tilting a micromechanical structure |
US7893799B1 (en) | 2007-04-11 | 2011-02-22 | Microstar Technologies, LLC | MEMS latching high power switch |
US7580175B2 (en) * | 2007-06-21 | 2009-08-25 | Alcatel-Lucent Usa Inc. | Detector of infrared radiation having a bi-material transducer |
US7851759B2 (en) * | 2007-06-21 | 2010-12-14 | Alcatel-Lucent Usa Inc. | Infrared imaging apparatus |
EP2017949A1 (fr) * | 2007-07-16 | 2009-01-21 | Interuniversitair Microelektronica Centrum (IMEC) | Actionneur pas à pas et son procédé de fabrication |
US20090146773A1 (en) * | 2007-12-07 | 2009-06-11 | Honeywell International Inc. | Lateral snap acting mems micro switch |
US7842923B2 (en) * | 2008-07-28 | 2010-11-30 | Alcatel-Lucent Usa Inc. | Thermal actuator for an infrared sensor |
FR2964653B1 (fr) * | 2010-09-13 | 2012-10-12 | Commissariat Energie Atomique | Dispositif resonant a actionnement dans le plan, et procede de fabrication du dispositif |
BR112013020233A2 (pt) | 2011-02-11 | 2020-07-07 | President And Fellows Of Harvard College | método para fabricar uma estrutura tridimensional, precursor de laminado para uma estrutura tridimensional e método para formar uma estrutura tridimensional |
JP6336904B2 (ja) | 2011-08-17 | 2018-06-06 | デジタルダイレクト・アイアール、インク | 撮像システム用受動型検出装置 |
CN104049361A (zh) * | 2014-06-06 | 2014-09-17 | 无锡微奥科技有限公司 | 一种面内mems驱动运动装置 |
CN106115616B (zh) * | 2016-06-27 | 2019-03-22 | 北京大学 | 一种mems加工工艺的温度监控装置及温度监控方法 |
CN117052620A (zh) * | 2023-06-12 | 2023-11-14 | 中国科学院长春光学精密机械与物理研究所 | 基于热膨胀原理的差动式促动器 |
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US5994816A (en) * | 1996-12-16 | 1999-11-30 | Mcnc | Thermal arched beam microelectromechanical devices and associated fabrication methods |
US5796152A (en) * | 1997-01-24 | 1998-08-18 | Roxburgh Ltd. | Cantilevered microstructure |
US6590313B2 (en) * | 1999-02-26 | 2003-07-08 | Memscap S.A. | MEMS microactuators located in interior regions of frames having openings therein and methods of operating same |
US6211598B1 (en) * | 1999-09-13 | 2001-04-03 | Jds Uniphase Inc. | In-plane MEMS thermal actuator and associated fabrication methods |
US6367251B1 (en) * | 2000-04-05 | 2002-04-09 | Jds Uniphase Corporation | Lockable microelectromechanical actuators using thermoplastic material, and methods of operating same |
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2001
- 2001-06-18 AU AU6851101A patent/AU6851101A/xx active Pending
- 2001-06-18 US US10/312,172 patent/US6734597B1/en not_active Expired - Lifetime
- 2001-06-18 WO PCT/US2001/019399 patent/WO2001099098A2/fr active Application Filing
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US6236139B1 (en) * | 1999-02-26 | 2001-05-22 | Jds Uniphase Inc. | Temperature compensated microelectromechanical structures and related methods |
US6291922B1 (en) * | 1999-08-25 | 2001-09-18 | Jds Uniphase, Inc. | Microelectromechanical device having single crystalline components and metallic components |
US6255757B1 (en) * | 1999-09-01 | 2001-07-03 | Jds Uniphase Inc. | Microactuators including a metal layer on distal portions of an arched beam |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6983088B2 (en) * | 2003-08-05 | 2006-01-03 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
US6985650B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
US6985651B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same |
Also Published As
Publication number | Publication date |
---|---|
WO2001099098A3 (fr) | 2002-07-04 |
US20040074234A1 (en) | 2004-04-22 |
US6734597B1 (en) | 2004-05-11 |
AU6851101A (en) | 2002-01-02 |
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