WO2001065688A1 - Oberflächenwellenwandler mit optimierter reflexion - Google Patents
Oberflächenwellenwandler mit optimierter reflexion Download PDFInfo
- Publication number
- WO2001065688A1 WO2001065688A1 PCT/DE2001/000630 DE0100630W WO0165688A1 WO 2001065688 A1 WO2001065688 A1 WO 2001065688A1 DE 0100630 W DE0100630 W DE 0100630W WO 0165688 A1 WO0165688 A1 WO 0165688A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- converter
- finger
- reflection
- electrode fingers
- cells
- Prior art date
Links
- 230000004936 stimulating effect Effects 0.000 claims abstract description 13
- 238000003780 insertion Methods 0.000 claims abstract description 6
- 230000037431 insertion Effects 0.000 claims abstract description 6
- 238000002310 reflectometry Methods 0.000 claims abstract 2
- 230000005284 excitation Effects 0.000 claims description 10
- 230000000638 stimulation Effects 0.000 abstract 1
- 238000005457 optimization Methods 0.000 description 6
- 238000000375 direct analysis in real time Methods 0.000 description 3
- 238000012063 dual-affinity re-targeting Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
- H03H9/14505—Unidirectional SAW transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14517—Means for weighting
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14517—Means for weighting
- H03H9/14523—Capacitive tap weighted transducers
Definitions
- the invention relates to an interdigital transducer for generating surface acoustic waves, in short surface wave transducers or in the following also generally called transducers.
- a transducer usually consists of two comb-shaped electrodes, each called a current busbar or busbar and comprising electrode fingers attached to it. Two such interdigitated electrode combs form an interdigital transducer.
- a surface wave filter can be constructed, for example, from a piezoelectric substrate with two interdigital transducers serving as input and output transducers. The acoustic generated in the input converter
- the path of the surface acoustic wave which may be limited on both sides of the transducers by reflectors or may extend into them, is also referred to as the acoustic track.
- the efficiency of the electro-acoustic conversion is optimal at the center frequency.
- the filter is set so that it has good pass behavior over a desired bandwidth in the vicinity of its center frequency. Within this band, a filter should have the lowest possible insertion loss, that is to say a low loss in the coupling and transmission of the surface wave. Signals outside this band should be attenuated in the filter.
- a narrow band filter can be obtained by increasing the number of electrode fingers so that a long transducer is obtained.
- each electrode finger of the normal finger transducer is replaced by two split fingers arranged at a distance of ⁇ / 4, which are mechanically reflection-free, since the reflections of the two fingers cancel each other out.
- problems can also arise here in the case of longer transducers, so that a split transducer transducer is not free of reflection due to the electrical regeneration at the non-zero terminating impedance at the acoustic gates
- a reflective electrode finger is arranged in a unit line of length ⁇ st, over whose width and exact position the reflection of this cell can be adjusted. In this way it is possible to model a transducer that has a desired reflection distributed across the transducer. This distributed reflection can follow a weighting, for example.
- a transducer according to the invention is made up of a number of basic cells arranged in a row in the direction of propagation of the surface wave, all of which have the approximate length ⁇ , where ⁇ represents the center frequency of the transducer.
- the transducer can be divided into stimulating and reflecting base cells to which the reflection contribution has only certain values mx R 0 , where m can take the values -2, -1, 0, 1 or 2, and where R 0 is a reference reflection.
- Each of 0 different reflection contributions has the same phase position ⁇ O.
- the phase position and excitation strength like the number of stimulating fingers, are identical in all stimulating basic cells.
- the phase relationship between excitation and reflection leads to the unidirectional behavior of the transducer, with phase alignment being obtained in one preferred direction, but phase opposition in the opposite direction.
- a transducer according to the invention is no longer subdivided strictly into stimulating and reflecting fingers; rather, stimulating fingers also have a contribution to reflection which is optimized to the desired phase position and strength by varying the finger width and finger position. This can also increase the unidirectionality of the converter, which in a filter with such a converter leads to reduced insertion loss, a longer impulse response and steeper flanks of the passband of the pass curve.
- the stimulating base cells of a transducer according to the invention can all have exactly one electrode finger individually connected to a busbar as a stimulating electrode.
- a transducer in which the finger widths and spacings of the electrode fingers increase or decrease continuously in the transverse direction (transverse to the direction of propagation of the surface wave). Such a measure increases the bandwidth of a converter and thus also the bandwidth of a filter in which the converter according to the invention is used.
- the transducer is designed to focus and has electrode fingers with curved edges.
- Such a transducer has the advantage that, when used as an input transducer in a surface acoustic wave filter, the scattering losses are reduced, since the focusing also means that those surface waves still get into the receiving and output transducers that can no longer reach the input transducer with electrode fingers that are running would. This also lowers the insertion loss of the converter or filter.
- all finger widths and all finger spacings of the electrode fingers are different in each basic cell. This means that a certain finger width or a certain finger distance occurs at most once within a basic cell.
- this is preferably, but not exclusively, used in an IF filter which, with the invention, has a low insertion loss and, due to the additionally created resonance spaces, an extended impulse response.
- FIGS. 2a to c show different types of double finger cells
- FIG. 3 shows an exemplary basic cell according to the invention
- the precise determination of the finger geometries, in particular the finger widths and the finger distances, is carried out by formulating a solvable optimization task.
- Optimization methods for transducers are already known, but these are subject to restrictions, so that the cells to be constructed have fewer degrees of freedom than the geometry widths available.
- the problem can be generalized for an optimization method for producing transducers according to the invention, so that the restrictions applicable to previous optimization methods, in particular the fixed relationships of finger widths and positions, are eliminated.
- the reflection of a cell could only be adjusted by the metallization height.
- a continuous width variation of the reflection finger or fingers is now possible.
- the geometries without excitation are formed directly from the geometries with excitation by omitting the overlap, for example by changing the finger connection sequence.
- the basic cells from known single and double finger cells are selected as the starting geometries for the optimization task.
- Figures la to c show three different approaches for single finger cells, in which only one electrode finger is arranged on the signal-carrying busbar.
- the Single finger cells can be composed of three or four electrode fingers.
- FIG. 1 a shows a single-use cell without reflection that can be used as a starting point and has a regular ⁇ / 8 finger arrangement in the ⁇ / 8 grid, which is reflection-free in the event of an electrical short circuit.
- FIG. 1c shows how a single finger cell with negative reflection is created from this cell by exchanging two electrode fingers.
- the phase difference of the reflection between cells with positive and cells with negative reflection is 90 °, so that the phase difference of the reflection at the transducer ends of these simple transducers is 180 °.
- FIGS. 2a to c show different types of double finger cells, in each of which two electrode fingers are connected to the signal-carrying busbar.
- FIG. 2a again shows a regular ⁇ / 8 finger arrangement that is reflection-free.
- FIG. 2b shows a double finger cell with positive reflection
- Figure 2c shows a double finger cell with negative reflection.
- the known and known single and double cell cells serve as the starting point for the optimization. If a converter is electrically connected, i.e. connected to an external load, acoustic-electrical feedback M iV) 1
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001564458A JP2003526240A (ja) | 2000-03-02 | 2001-02-19 | 最適化された反射を有する表面波変換器 |
EP01913681A EP1264397A1 (de) | 2000-03-02 | 2001-02-19 | Oberflächenwellenwandler mit optimierter reflexion |
CA002400719A CA2400719A1 (en) | 2000-03-02 | 2001-02-19 | Surface acoustic wave transducers with optmised reflection |
US10/204,103 US6777855B2 (en) | 2000-03-02 | 2001-02-19 | Surface wave converter with optimized reflection |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10010089A DE10010089A1 (de) | 2000-03-02 | 2000-03-02 | Oberflächenwellenwandler mit optimierter Reflexion |
DE10010089.9 | 2000-03-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001065688A1 true WO2001065688A1 (de) | 2001-09-07 |
Family
ID=7633184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2001/000630 WO2001065688A1 (de) | 2000-03-02 | 2001-02-19 | Oberflächenwellenwandler mit optimierter reflexion |
Country Status (8)
Country | Link |
---|---|
US (1) | US6777855B2 (ko) |
EP (1) | EP1264397A1 (ko) |
JP (1) | JP2003526240A (ko) |
KR (1) | KR100752828B1 (ko) |
CN (1) | CN1190893C (ko) |
CA (1) | CA2400719A1 (ko) |
DE (1) | DE10010089A1 (ko) |
WO (1) | WO2001065688A1 (ko) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3414373B2 (ja) * | 2000-07-26 | 2003-06-09 | 株式会社村田製作所 | 弾性表面波装置 |
JP3674564B2 (ja) * | 2001-09-25 | 2005-07-20 | セイコーエプソン株式会社 | 半導体装置およびその製造方法 |
JP3844725B2 (ja) * | 2002-09-30 | 2006-11-15 | 富士通メディアデバイス株式会社 | 弾性表面波フィルタ、それを有する弾性表面波分波器 |
JP4302394B2 (ja) * | 2002-12-02 | 2009-07-22 | ポリプラスチックス株式会社 | ポリオキシメチレン樹脂製延伸体の製造方法 |
US7096736B2 (en) * | 2003-08-04 | 2006-08-29 | The Goodyear Tire & Rubber Company | Passive tire pressure sensor and method |
DE10345239B4 (de) * | 2003-09-29 | 2013-09-05 | Epcos Ag | Mit Oberflächenwellen arbeitender Wandler |
DE102005009359B4 (de) * | 2005-03-01 | 2014-12-11 | Epcos Ag | Bandpassfilter |
DE102005045638B4 (de) * | 2005-09-23 | 2017-02-02 | Epcos Ag | Mit Oberflächenwellen arbeitender Wandler |
US8340768B2 (en) * | 2007-12-12 | 2012-12-25 | Cardiac Pacemakers, Inc. | Sensing threshold control to limit amplitude tracking |
US8436509B1 (en) | 2008-07-08 | 2013-05-07 | Saudia Corporation | High-frequency shear-horizontal surface acoustic wave sensor |
US7939989B2 (en) * | 2009-09-22 | 2011-05-10 | Triquint Semiconductor, Inc. | Piston mode acoustic wave device and method providing a high coupling factor |
US8294331B2 (en) | 2009-09-22 | 2012-10-23 | Triquint Semiconductor, Inc. | Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities |
DE102012107049B4 (de) | 2012-08-01 | 2017-10-05 | Snaptrack, Inc. | Elektroakustischer Wandler |
US10261078B2 (en) | 2015-08-17 | 2019-04-16 | National Technology & Engineering Solutions Of Sandia, Llc | Shear horizontal surface acoustic wave (SH-SAW) resonators and arrays thereof |
US10009002B1 (en) | 2015-09-04 | 2018-06-26 | National Technology & Engineering Solutions Of Sandia, Llc | Methods for suppressing spurious modes in microresonators |
US11405014B1 (en) | 2019-06-27 | 2022-08-02 | National Technology & Engineering Solutions Of Sandia, Llc | Solid-state tuning behavior in acoustic resonators |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0255263A2 (en) * | 1986-07-29 | 1988-02-03 | R F Monolithics, Inc. | Transducer |
US4910839A (en) * | 1984-12-03 | 1990-03-27 | R.F. Monolithics, Inc. | Method of making a single phase unidirectional surface acoustic wave transducer |
US5793146A (en) * | 1993-11-12 | 1998-08-11 | Rf Monolithics, Inc. | Surface acoustic wave transducer having selected reflectivity |
US5818310A (en) * | 1996-08-27 | 1998-10-06 | Sawtek Inc. | Series-block and line-width weighted saw filter device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2078042B (en) * | 1980-06-13 | 1984-08-08 | Nippon Telegraph & Telephone | Surface acoustic wave resonator |
US4473888A (en) * | 1981-10-28 | 1984-09-25 | The United States Of America As Represented By The Secretary Of The Army | Saw monolithic convolver using dispersive transducers |
JPS58213519A (ja) * | 1982-06-07 | 1983-12-12 | Clarion Co Ltd | 弾性表面波装置 |
DE3529916A1 (de) * | 1985-08-21 | 1987-02-26 | Siemens Ag | Dispersiver interdigital-wandler fuer mit akustischen wellen arbeitenden anordnungen |
US4918349A (en) * | 1987-11-13 | 1990-04-17 | Hitachi, Ltd. | Surface acoustic wave device having apodized transducer provided with irregular pitch electrode group |
JP2847438B2 (ja) * | 1991-03-29 | 1999-01-20 | 三井金属鉱業株式会社 | 弾性表面波素子 |
-
2000
- 2000-03-02 DE DE10010089A patent/DE10010089A1/de not_active Ceased
-
2001
- 2001-02-19 KR KR1020027011393A patent/KR100752828B1/ko active IP Right Grant
- 2001-02-19 CA CA002400719A patent/CA2400719A1/en not_active Abandoned
- 2001-02-19 CN CNB018058949A patent/CN1190893C/zh not_active Expired - Lifetime
- 2001-02-19 US US10/204,103 patent/US6777855B2/en not_active Expired - Lifetime
- 2001-02-19 EP EP01913681A patent/EP1264397A1/de not_active Withdrawn
- 2001-02-19 WO PCT/DE2001/000630 patent/WO2001065688A1/de not_active Application Discontinuation
- 2001-02-19 JP JP2001564458A patent/JP2003526240A/ja not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4910839A (en) * | 1984-12-03 | 1990-03-27 | R.F. Monolithics, Inc. | Method of making a single phase unidirectional surface acoustic wave transducer |
EP0255263A2 (en) * | 1986-07-29 | 1988-02-03 | R F Monolithics, Inc. | Transducer |
US5793146A (en) * | 1993-11-12 | 1998-08-11 | Rf Monolithics, Inc. | Surface acoustic wave transducer having selected reflectivity |
US5818310A (en) * | 1996-08-27 | 1998-10-06 | Sawtek Inc. | Series-block and line-width weighted saw filter device |
Non-Patent Citations (2)
Title |
---|
MORGAN D P ET AL: "LOW LOSS FILTERS USING GROUP-TYPE SPUDT TRANSDUCERS", PROCEEDINGS OF THE ULTRASONICS SYMPOSIUM,US,NEW YORK, IEEE, vol. -, 4 December 1990 (1990-12-04), pages 31 - 35, XP000290030 * |
VENTURA P ET AL: "A NEW CONCEPT IN SPUDT DESIGN: THE RSPUDT (RESONANT SPUDT)", PROCEEDINGS OF THE ULTRASONICS SYMPOSIUM,US,NEW YORK, IEEE, 1 November 1994 (1994-11-01), pages 1 - 6, XP000590526, ISBN: 0-7803-2013-1 * |
Also Published As
Publication number | Publication date |
---|---|
CN1406412A (zh) | 2003-03-26 |
EP1264397A1 (de) | 2002-12-11 |
KR20020079927A (ko) | 2002-10-19 |
US6777855B2 (en) | 2004-08-17 |
DE10010089A1 (de) | 2001-09-06 |
CA2400719A1 (en) | 2001-09-07 |
JP2003526240A (ja) | 2003-09-02 |
KR100752828B1 (ko) | 2007-08-29 |
CN1190893C (zh) | 2005-02-23 |
US20030057805A1 (en) | 2003-03-27 |
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