WO2001016051A1 - Formation de joint entre des corps de diamant depose et des structures metalliques - Google Patents

Formation de joint entre des corps de diamant depose et des structures metalliques Download PDF

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Publication number
WO2001016051A1
WO2001016051A1 PCT/IB2000/001172 IB0001172W WO0116051A1 WO 2001016051 A1 WO2001016051 A1 WO 2001016051A1 IB 0001172 W IB0001172 W IB 0001172W WO 0116051 A1 WO0116051 A1 WO 0116051A1
Authority
WO
WIPO (PCT)
Prior art keywords
cvd diamond
ceramic body
bonded
metal
supporting structure
Prior art date
Application number
PCT/IB2000/001172
Other languages
English (en)
Inventor
Ricardo Simon Sussmann
Simon Hanks
John Robert Brandon
Original Assignee
De Beers Industrial Diamonds (Proprietary) Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Beers Industrial Diamonds (Proprietary) Limited filed Critical De Beers Industrial Diamonds (Proprietary) Limited
Priority to CA002383325A priority Critical patent/CA2383325A1/fr
Priority to JP2001519622A priority patent/JP2003508330A/ja
Priority to AU64637/00A priority patent/AU6463700A/en
Priority to EP00951792A priority patent/EP1214276A1/fr
Publication of WO2001016051A1 publication Critical patent/WO2001016051A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/08—Dielectric windows
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/121—Metallic interlayers based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/341—Silica or silicates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/361—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/363—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/403—Refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/408—Noble metals, e.g. palladium, platina or silver
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube

Definitions

  • a requirement in high power vacuum RF sources such as gyrotrons which provide up to 1 MW power in the millimetre wave band is for windows or viewports which are transparent to the radiation and able to maintain high vacuum conditions in the tube.
  • High power gyrotrons of this type are predominantly used in nuclear fusion plasma research. In such applications the windows must be able to withstand pressure differentials of up to five atmospheres and to contain highly radioactive gases such as tritium.
  • the intermediate metal element may be of tantalum or other suitable metal having good dimensional compliance and thermal expansion characteristics between those of the ceramic material and the metal supporting structure, typical examples being copper, gold, platinum or the like.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Microwave Tubes (AREA)

Abstract

L'invention concerne un procédé de formation d'un joint entre un diamant déposé (par dépôt chimique en phase vapeur) et une structure de support métallique, et un joint formé selon ce procédé. Dans ledit procédé, un corps en diamant déposé (14) est fixé à un corps en céramique (16) présentant des caractéristiques d'expansion thermique compatibles avec celles du diamant déposé. Le corps en céramique (16) est à son tour fixé à un élément métallique intermédiaire (18) de dimensions correspondantes. Cet élément métallique est ensuite fixé à la structure de support métallique (12). De façon optimale, l'élément métallique intermédiaire présente des caractéristiques d'expansion thermique entre celles du corps en céramique et de la structure de support métallique. Dans une forme de réalisation, le joint peut être utilisé pour monter la fenêtre dans une bride de judas de gyroron.
PCT/IB2000/001172 1999-08-28 2000-08-25 Formation de joint entre des corps de diamant depose et des structures metalliques WO2001016051A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CA002383325A CA2383325A1 (fr) 1999-08-28 2000-08-25 Formation de joint entre des corps de diamant depose et des structures metalliques
JP2001519622A JP2003508330A (ja) 1999-08-28 2000-08-25 Ｃｖｄダイヤモンド本体を金属支持構造体に結合させる方法
AU64637/00A AU6463700A (en) 1999-08-28 2000-08-25 Joining of cvd diamond bodies to metal structures
EP00951792A EP1214276A1 (fr) 1999-08-28 2000-08-25 Formation de joint entre des corps de diamant depose et des structures metalliques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9920384.6A GB9920384D0 (en) 1999-08-28 1999-08-28 Joining of cvd diamond bodies to metal structures
GB9920384.6 1999-08-28

Publications (1)

Publication Number Publication Date
WO2001016051A1 true WO2001016051A1 (fr) 2001-03-08

Family

ID=10859973

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2000/001172 WO2001016051A1 (fr) 1999-08-28 2000-08-25 Formation de joint entre des corps de diamant depose et des structures metalliques

Country Status (6)

Country Link
EP (1) EP1214276A1 (fr)
JP (1) JP2003508330A (fr)
AU (1) AU6463700A (fr)
CA (1) CA2383325A1 (fr)
GB (1) GB9920384D0 (fr)
WO (1) WO2001016051A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1197470A2 (fr) * 2000-10-13 2002-04-17 Philips Patentverwaltung GmbH Procédé de fabrication de fenêtres transparentes aux faisceaux d'électrons et fenêtres transparentes aux faisceaux d'électrons
US6956706B2 (en) 2000-04-03 2005-10-18 John Robert Brandon Composite diamond window
EP2401759A2 (fr) * 2009-02-27 2012-01-04 Pacific Aerospace And Electronics, Incorporated Ensembles substrats transmissifs scellés par céramique
US8809821B2 (en) 2011-11-28 2014-08-19 Gigaphoton Inc. Holder device, chamber apparatus, and extreme ultraviolet light generation system
US9194189B2 (en) 2011-09-19 2015-11-24 Baker Hughes Incorporated Methods of forming a cutting element for an earth-boring tool, a related cutting element, and an earth-boring tool including such a cutting element

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024068732A1 (fr) * 2022-09-30 2024-04-04 Element Six Technologies Limited Ensemble fenêtre en céramique

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0761623A2 (fr) * 1995-08-31 1997-03-12 General Electric Company Assemblage de diamant
EP0840373A1 (fr) * 1996-10-31 1998-05-06 Alcatel Procèdè de liaison d'un substrat de diamant à au moins un substrat métallique

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0761623A2 (fr) * 1995-08-31 1997-03-12 General Electric Company Assemblage de diamant
EP0840373A1 (fr) * 1996-10-31 1998-05-06 Alcatel Procèdè de liaison d'un substrat de diamant à au moins un substrat métallique

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6956706B2 (en) 2000-04-03 2005-10-18 John Robert Brandon Composite diamond window
EP1197470A2 (fr) * 2000-10-13 2002-04-17 Philips Patentverwaltung GmbH Procédé de fabrication de fenêtres transparentes aux faisceaux d'électrons et fenêtres transparentes aux faisceaux d'électrons
EP2401759A2 (fr) * 2009-02-27 2012-01-04 Pacific Aerospace And Electronics, Incorporated Ensembles substrats transmissifs scellés par céramique
EP2401759A4 (fr) * 2009-02-27 2012-08-29 Pacific Aerospace & Electronics Inc Ensembles substrats transmissifs scellés par céramique
US9194189B2 (en) 2011-09-19 2015-11-24 Baker Hughes Incorporated Methods of forming a cutting element for an earth-boring tool, a related cutting element, and an earth-boring tool including such a cutting element
US8809821B2 (en) 2011-11-28 2014-08-19 Gigaphoton Inc. Holder device, chamber apparatus, and extreme ultraviolet light generation system

Also Published As

Publication number Publication date
GB9920384D0 (en) 1999-11-03
CA2383325A1 (fr) 2001-03-08
JP2003508330A (ja) 2003-03-04
AU6463700A (en) 2001-03-26
EP1214276A1 (fr) 2002-06-19

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