WO2000036340A1 - Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur - Google Patents

Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur Download PDF

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Publication number
WO2000036340A1
WO2000036340A1 PCT/US1999/028305 US9928305W WO0036340A1 WO 2000036340 A1 WO2000036340 A1 WO 2000036340A1 US 9928305 W US9928305 W US 9928305W WO 0036340 A1 WO0036340 A1 WO 0036340A1
Authority
WO
WIPO (PCT)
Prior art keywords
manifold
burner
fluid
fluid passages
passages
Prior art date
Application number
PCT/US1999/028305
Other languages
English (en)
Inventor
David F. Dawson-Elli
Xiaodong Fu
Daniel W. Hawtof
William J. Kiefer
John Stone, Iii
John F. Wight, Jr.
Original Assignee
Corning Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Incorporated filed Critical Corning Incorporated
Priority to KR1020017007404A priority Critical patent/KR20010086107A/ko
Priority to CA002355941A priority patent/CA2355941A1/fr
Priority to US09/830,512 priority patent/US6736633B1/en
Priority to JP2000588546A priority patent/JP2002532632A/ja
Priority to EP99965064A priority patent/EP1144913A4/fr
Priority to AU31061/00A priority patent/AU3106100A/en
Priority to BR9916203-2A priority patent/BR9916203A/pt
Publication of WO2000036340A1 publication Critical patent/WO2000036340A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/047—Re-forming tubes or rods by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/52—Nozzles for torches; for blow-pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
    • F23D14/583—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration of elongated shape, e.g. slits
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/02—Elongated flat flame or slit-nozzle type
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/101—Flame diffusing means characterised by surface shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/104—Grids, e.g. honeycomb grids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/10—Burner material specifications ceramic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2213/00—Burner manufacture specifications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/14—Special features of gas burners
    • F23D2900/14001—Sealing or support of burner plate borders

Definitions

  • the receptor surface may be a flat substrate in the case of planar waveguide fabrication, a rotating starting rod (bait tube) in the case of vapor axial deposition (NAD) for waveguide fiber fabrication, or a rotating mandrel in the case of outside vapor deposition (OVD) for waveguide fiber fabrication.
  • Numerous burner designs have been developed for use in vapor delivery precursor processes, and at least one liquid delivery precursor process has been contemplated, as disclosed in co-pending application serial no. 08/767,653 to Hawtof et al, incorporated herein by reference. Whether the precursor is delivered to the burner in vapor form or liquid form, it is important that the burner receives a distributed, even stream of precursor. This consideration is particularly important during waveguide manufacture to form accurate refractive index profiles.
  • burners for deposition of metal oxide soot have been proposed having orifices and supply channels on a small scale.
  • the channels and orifices in these burners may have widths or diameters less than 150 microns, for example, as disclosed in commonly-owned provisional application serial no. 60/068,255 entitled “Burner and Method For Producing Metal Oxide Soot,” incorporated herein by reference.
  • the vertical passages of the manifold base are symmetric about a first axis bisecting the top of the manifold base.
  • the vertical passages preferably include a central vertical passage and pairs of vertical passages, each pair defined by two vertical passages spaced equidistant from the first axis. Each pair intersects a particular horizontal passage to create an array of passages within the manifold to distribute fluid symmetrically about the first axis.
  • the apparatus of the first embodiment further includes a manifold burner mount mounted to the top of the plate.
  • the manifold burner mount defines fluid passages that extend from a bottom of the manifold burner mount to a top of the manifold burner mount. These fluid passages are arranged to converge such that a distance between adjacent fluid passages is greater at the inlet of the manifold burner mount than at the outlet of the manifold burner mount.
  • the burner manifold apparatus further comprises a first gasket positioned between the manifold base and the plate.
  • the first gasket has slots therein in alignment with grooves in the top of the manifold base.
  • a second gasket preferably is positioned between the plate and the manifold burner mount. This second gasket has slots in alignment with the slots in the first gasket.
  • a burner gasket may be placed upon the manifold burner mount.
  • the burner gasket has slots in alignment with the exits of the fluid passages in the manifold burner mount.
  • Securing elements such as clamps, maybe mounted to the top of the manifold burner mount for releasably securing a burner to the manifold burner mount.
  • the clamps each have an outer edge and an inner edge, and the inner edge has a shoulder that engages the burner. Further, the inner edge of each clamp has a tapered surface that tapers away from the top of the manifold burner mount.
  • the burner manifold may also comprises a top section coextensive with the tapered section.
  • the top section has a first end adjoining the second end of the tapered section, and a second end for carrying a burner.
  • the burner manifold is formed by an extrusion process.
  • the burner manifold tapers from a first end to a second end or, alternatively, has a tapered section located between the first end and the second end.
  • This can be done, for example, by plastically transforming a preform of parallel channels (honeycomb substrate) into a funnel of funneling channels.
  • Two suitable transforming processes are hot draw down and reduction extrusion.
  • Hot draw down is a viscous forming process carried out on viscously sintered preforms and is described in commonly-owned provisional application no. 60/091,107 entitled “Redrawn Capillary Imaging Reservoir", incorporated herein by reference.
  • a fourth embodiment of the invention includes a plurality of burner mounts, a plurality of plates, and a single manifold base.
  • the manifold has a thickness dimension between the front wall and the back wall that is greater than a thickness dimension of the burner mounts and the plates such that a plurality of burner mount/plate combinations may be mounted to the manifold.
  • the burner manifold apparatus of the present invention achieves a number of advantages over conventional burner manifolds.
  • the burner manifold apparatus bridges the gap between the conventional "macro" world of manifolds and the "micro” world of micromachined silicon wafer burners.
  • Another advantage is that the burner manifold apparatus is capable of use in conjunction with a burner having a linear flame array that evenly distributes fluid through the manifold and to either side of the burner's linear flame array.
  • the burner manifold apparatus may securely and precisely mount a micromachined burner wafer in place.
  • the burner manifold apparatus may be arranged adjacent other assemblies to form an array of adjacent burners, which generate closely adjacent burner flames.
  • the burner manifold apparatus may be produced by an extrusion process or, alternatively, a hot draw down process. Still a further advantage of the burner manifold apparatus is that the burner may be mounted to the burner mount by an anodic bond, without the need for clamps or other mechanical attachment means.
  • the manifold of the present invention also enables and facilitates the use of miniature micromachined burners in applications for depositing silica soot, in particular for making high purity soot for optical waveguide manufacturing processes.
  • Fig. 1 is an exploded perspective view of a burner manifold apparatus for use with a micromachined burner wafer in accordance with the invention
  • Fig. 2 is a side elevation view, in partial cross section, of the burner manifold apparatus and a micromachined burner wafer in accordance with the invention
  • Fig. 3 is a top plan view of the burner manifold apparatus, with a burner mounted thereto, in accordance with the invention
  • Fig. 4 is a top plan view of a burner manifold of the burner manifold apparatus in accordance with the invention.
  • Fig. 5 is a side elevation view, in cross section, of the burner manifold along section line B-B in Fig. 4;
  • Fig. 6 is a top plan view of a pressure plate of the burner manifold apparatus in accordance with the invention.
  • Fig. 9 is a top plan view of the burner manifold apparatus shown in Fig. 7;
  • Figs. 12A and 12B are top plan views of an alternative design for the third embodiment shown in Fig. 10;
  • Micromachined burners such as those disclosed in commonly-owned provisional application serial no. 60/068,255 to Hawtof et al., have stimulated the need for a new, sophisticated burner manifold apparatus for manifolding the flow of fluid to the micromachined burners.
  • These micromachined burners are typically constructed as wafers and are fabricated on a small scale.
  • burners used for the production of silica soot for waveguide fiber preform may be approximately 1 inch long by 1 inch wide. The length and width of the burners can be smaller or larger, limited by semiconductor wafer fabrication procedures.
  • RIE reactive etching
  • vertical wall micromachining vertical wall micromachining
  • crystallographic etching The specific technique used depends on the burner material, particularly the crystal structure and orientation.
  • micromachined burners are much smaller than conventional burners and are linearly symmetric about their center, conventional manifolds do not work.
  • the burner manifold apparatus 10 generally includes a manifold base 12, a pressure plate 14, and a manifold burner mount 16.
  • the manifold base 12 illustrated in Fig. 1 has a top 18, a bottom 20, a front wall 22, a back wall 23 (in Fig 4), and side walls 24.
  • Horizontal passages, such as passages 26 and 27 extend between the side walls 24 of the manifold base 12.
  • the manifold base 12 also has vertical passages 30a-30f (see Figs.
  • each vertical passage 30b-30f intersects and extends upward from a particular horizontal passage, as will be explained below in more detail.
  • the manifold base 12 further has fluid inlet ports 32a, 32b located on either the front wall (32a) or the back wall (32b).
  • the fluid inlet ports serve as ports for fluid lines to introduce vapors and/or liquids into the manifold.
  • Each fluid inlet port fluidly communicates with at least one of the horizontal and vertical passages.
  • the horizontal passages, the vertical passages, and the fluid inlet ports intersect with each other to facilitate symmetric distribution of fluid within the manifold.
  • the vertical passages 30a-30f are symmetric about a first axis A-A bisecting the top 18 of the manifold base 12.
  • the vertical passages include a central passage 30a and pairs of vertical passages 30b-30f.
  • Each pair 30b-30f is defined by two vertical passages that are spaced equidistant from the first axis A-A to distribute fluid symmetrically about the first axis A-A.
  • the pairs 30b-30f may be symmetric about a central passage 30a that lies off of the first axis A-A.
  • the vertical passages 30b-30f are located at different cross-sectional planes within the manifold, where the planes are defined parallel to section line B-B and extend through the manifold top-to-bottom. Vertical passages 30a and 30b fall on the same plane, as shown in Fig. 4.
  • the vertical passage 30a and pair 30b are located on section line B-B; pairs 30c and 30d are offset from section line B-B, closer to the front wall 22 of the manifold base 12; and pairs 30e and 30f are offset from section line B-B, closer to the rear wall 23 of the manifold base 12.
  • the vertical passages 30b-30f (and their associated horizontal passages) are fluidly independent from each other so that, for example, a first fluid can be piped through vertical passages 30b and a second fluid can be piped through vertical passages 30c.
  • a first fluid can be piped through vertical passages 30b and a second fluid can be piped through vertical passages 30c.
  • One of skill in the art will recognize that the exact placement of the vertical passages at various planes within the manifold base 12 can be altered, as long as their symmetry about the first axis A-A is maintained.
  • the horizontal passages such as passages 26 and 27, they are located at different heights in the manifold base 12 and span the manifold base 12 between the side walls 24.
  • the height location of the horizontal passages is marked by the location of the fluid inlet ports 32a, 32b shown in Fig. 2.
  • Fig. 2 shows a horizontal passage 26 located at a height marked by lowermost inlet port 32b and a horizontal passage 27 located at a height marked by another higher inlet port 32b.
  • Each horizontal passage is fed by a single fluid inlet port 32a, 32b.
  • each fluid inlet port 32a, 32b intersects a particular horizontal passage, with the exception of the fluid inlet port that intersects central vertical passage 30a (and that fluid inlet port is shown as the topmost of inlet ports 32a in Fig. 2).
  • a single fluid feed line splits the fluid internally in the manifold for even distribution between two vertical passages located equidistant from the central vertical passage 30a.
  • horizontal passage 26 lies at the central plane defined by section line B-B in Fig. 4.
  • Horizontal passage 27, which, in this embodiment of the invention, fluidly communicates with the vertical passages 30f, lies in a plane closer to the back wall 23 of the manifold base 12.
  • the vertical passages 30b-30f are not of a uniform length. Rather, the length of the vertical passages 30b-30f varies, depending upon which horizontal passage the vertical passages 30b-30f intersect. For example, as shown in Fig. 2, the vertical passages 30f, which intersect the horizontal passage 27, will be shorter than the vertical passages 30b, which intersect the horizontal passage 26.
  • the orientation of the passages and ports in the manifold may be described by reference to an x-y-z coordinate system (shown beside Fig. 2).
  • the vertical passages 30a-30f extend in the y-direction and shift along both the x-axis and the z-axis relative to each other.
  • the horizontal passages for example 26 and 27 in Fig. 2, extend in the x-direction and shift along both the y-axis and the z-axis relative to each other.
  • the fluid inlet ports 32a, 32b extend along the z-axis and shift along both the x-axis and the y-axis relative to each other.
  • the horizontal passages are fitted on either end with plugs 33, as shown in Fig. 5.
  • the invention thus provides an intricate and effective array of fluid passageways within the manifold base that ensures an even distribution of the various fluids introduced through the inlet ports to both sides of the first axis A-A.
  • the top 18 of the manifold base 12 includes grooves 34 positioned above the exits of the vertical passages 30a-30f.
  • the grooves 34 are elongate and extend in a direction parallel to the side walls 24 of the manifold base 12.
  • the grooves 34 represent the spaced apart locations of the inlets of the fluid passages in that the vertical passages 30a-30f are fluid inlets.
  • the pressure plate 14 is separated from the manifold base 12 by a first gasket 36, as shown in Fig. 1.
  • the first gasket 36 includes slots 40 that are in alignment with the grooves 34 of the top 18 of the manifold base 12.
  • the pressure plate 14 in turn includes an array of apertures 38 in alignment with the grooves 34.
  • the apertures 38 are smaller in size than the exits of the vertical passages 30a-30f. These apertures 38 are small enough to create a high back pressure and equalize the fluid flow through the apertures on either side of the first axis A-A.
  • the associated fluid inlet port 32b is closer to the left passage 30f than the right passage 3 Of.
  • the pressure plate 14 ensures that fluid introduced through inlet port 32b, which, unhindered, would migrate up the left passage 30f more quickly than up the right passage 30f, disperses evenly between the two passages.
  • the pressure plate 14 in effect blocks the rapid exit of fluid from the manifold base 12 via a path of least resistance.
  • the manifold burner mount 16 is positioned above the second gasket 42.
  • the manifold burner mount 16 has a top 46 and a bottom 48 and includes fluid passages 50 that extend from top 46 to bottom 48.
  • the entrances 52 to the fluid passages 50 from the second gasket 42 are in alignment with the slots 44 in the second gasket 42 and the apertures 38 in pressure plate 14.
  • Fluid passing through the pressure plate 14 travels to the fluid passages 50 in the manifold burner mount 16.
  • the fluid is symmetrically distributed at the time it passes through the pressure plate 14, and it remains evenly distributed as it passes through the manifold burner mount 16 to a micromachined burner mounted thereon.
  • the two outermost vertical passages 30f are spare vertical passages and do not adjoin any fluid passages 50 in the burner mount; however, it will be understood that these outermost vertical passage 30f may be used with burner mounts having additional fluid passages.
  • the fluid passages 50 through the manifold burner mount 16 are generally rectangular, having a longitudinal axis extending between a back wall 52 and a front wall 54.
  • the outlets 49 of the fluid passages 50 form a linear array, symmetric about a central fluid passage. This linear array produces one or more linear streams of fluid to the burner 58 mounted atop the manifold burner mount 16, and, when the fluid streams combine, the burner 58 generates a flame.
  • the central fluid passage 50 is typically for the silica/dopant precursor materials (which can be liquid or vapor), and the remaining fluid passages 50 are for gases that react and combust with silica and dopants.
  • the unique structure of the manifold burner mount 16 bridges the gap between the "macro" world of manifold and the "micro” world of micromachined siliconized wafer burners.
  • the outlets 49 of the fluid passages 50 converge such that they are spaced closer together than the inlets of the fluid passages 50 (and, hence, the vertical fluid passages 30a-30f).
  • the manifold burner mount 16 may be manufactured by plunge Electrical Discharge Machine (EDM) technology, either using a wire or a plunge which vaporizes the metal that comes into contact with the tip of the plunge.
  • the burner manifold apparatus 10 in accordance with this first embodiment further includes a burner gasket 60, which is mounted between the top 46 of the manifold burner mount 16 and the burner 58.
  • the burner gasket 60 has slots 62 for alignment with the outlets of the fluid passages 50, including the central passage, in the manifold burner mount 16. These slots 62 are also aligned with the slots 64 that form the linear array in the burner 58.
  • the top 46 of the manifold burner mount 16 has a cutout for receiving the burner gasket 60 for accurate placement and alignment of the gasket 60.
  • the burner mount apparatus 10 in this first embodiment also includes burner securing elements 66 mounted on the top 46 of the manifold burner mount 16.
  • the securing elements 66 secure the burner 58 and burner gasket 60 to the burner mount top
  • the securing elements 66 preferably comprise a pair of clamps releasably secured to the top 46 of the manifold burner mount 16 by screws 68 and spring rings 69.
  • the spring rings 69 are positioned between the clamps 66 and the burner mount top 46.
  • the clamps 66 have screw holes 71 for receiving the screws 68.
  • the spring rings 69 have a slightly larger diameter than the holes 71 in the clamps 66 and the coextensive holes in the burner mount top 46.
  • the clamps 66 each have an outer edge 70 and an inner edge 72.
  • the inner edge 72 of each clamp 66 has a downwardly facing shoulder 74, as shown in Fig. 2, which engages opposite sides of the burner 58 to clamp the burner 58 in place against the burner gasket 60.
  • the inner edge 72 has a tapered surface 76 tapers away from the burner 58.
  • the apparatus 10 To secure the manifold burner mount 16 to the manifold base 12, the apparatus 10 includes channels 78 that extend completely through the manifold base 12, adjacent the side walls 24, and through at least a portion of the manifold burner mount 16. The apparatus 10 further includes screws 80 for receipt by the channels 78 to attach the manifold base 12 to the manifold burner mount 16.
  • the burner mount apparatus 10 When completely assembled, the burner mount apparatus 10 has a generally rectangular configuration, with the thickness dimension from the front wall 22 to the back wall 23.
  • the manifold base 116 may be elongated in the z- direction such that several burners and burner mount assemblies may be mounted thereon, side by side.
  • three fluid lines may be introduced at the front wall 118 and the back wall 120 of the burner manifold 116, totaling six fluid lines.
  • the holes 32 extend between the front wall 118 and the back wall 120, feeding the several vertical passages 30a-30f in the manifold.
  • Figs. 7-9 illustrate a second embodiment of the subject burner manifold apparatus.
  • this burner manifold apparatus generally indicated 82, includes a base element 84 and a plurality of manifold elements 86a-86f positioned in a stacked arrangement on top of the base 84.
  • the base 84 is preferably solid, as shown in cross section in Fig. 8.
  • Each of the manifold elements 86a-86f has a different number of fluid passages 88, the number of fluid passages 88 increasing for each element that is closer to the top of the stack.
  • the lowermost manifold element 86a has a single fluid passage fed by a single fluid feed line through a port 90.
  • the fluid passages are isolated from one another, two new outer fluid passages being introduced into the stacked arrangement with each successive manifold element from bottom to top.
  • manifold element 86b has three fluid passages
  • manifold element 86c has five fluid passages, and so on. In this manner, the fluid remains contained until it reaches the topmost manifold element 86f and the burner (not shown).
  • the manifold apparatus 82 of this second embodiment further comprises gaskets 92 positioned between adjacent manifold elements 86a-86f (the gaskets are not shown in Fig. 8).
  • the gaskets 94 may, for example, be formed from an elastomer material, such as Viton, a product of DuPont Dow Elastomers.
  • the gaskets include slots 94 that align with the fluid passages in the manifold elements 86a-86f. All of the gaskets 92 may be formed with the same number of slots 94, as illustrated by the two gaskets shown in Fig. 7; only those slots in alignment with fluid passages being used
  • Fig. 9 shows a top view of the topmost manifold element 86f in the stacked arrangement.
  • the fluid passages 88 are rectangular in shape, with a longitudinal axis extending between a front wall 96 of the manifold element 86f and a back wall 98.
  • the fluid passages form a linear array such that a burner, for example, burner 58 in Fig. 1, placed on top of the topmost manifold element 86f would produce a linear flame.
  • the fluid passages are symmetric about a central fluid passage and converge at the fluid outlets of the fluid passages.
  • the cross section of the fluid inlets are greater than the cross section of the associated fluid outlets.
  • the manifold elements 86a-86f may be releasably connected by four long rods (not shown), each channeled in a vertical direction through a set of bores 100 formed in each corner of the manifold elements 86a-86f, the base element 84, and the gaskets 92.
  • the rods may be threaded on each end for receipt of a nut to secure the rod in place on the topmost manifold element 86f and the base element 84.
  • Also shown in the top view of Fig. 9 are bores 101 for receipt of alignment pins (not shown).
  • FIGs. 10-12 show a third embodiment of the subject invention.
  • a burner manifold, generally indicated 102 provides a web-like or honeycomb structure capable of use with micromachined silicon wafer burners.
  • the burner manifold 102 includes a tapered section 104 and a top section 106.
  • the top section has a first end 107 and a second end 108.
  • a burner may be mounted to the second end 108 of the top section 106.
  • the fluid passages may have rectangular cross sections, forming slots, similar to the shape of the passages in the first two embodiments.
  • the top section 106 has a rectangular cross section; however, it will be understood that the top section 106 can have any configuration suitable for use with a micromachined burner.
  • the top section may be cylindrical, as shown in Fig. 12A and indicated 115. This cylindrical top section 115 has fluid passages 116.
  • a preform of parallel channels is extruded from particulate material compounded with liquid additives.
  • the viscously sintered preform can be hot drawn down viscously to make a taper of channels, a funnel of funnels.
  • the particulate preform (wet-green and plastic) can be reduction extruded into a taper.
  • the channels of the particulate preform can then be backfilled with a material, such as a polycrystalline wax, which matches the plasticity and incompressibility of the webs of the particulate preform sufficiently so as to then allow the assembled structure (plastic composite) to plastically deform in a reasonably self-similar manner as it is extruded into a die of the desired manifold shape.
  • a material such as a polycrystalline wax
  • Suitable particulate materials include glass, ceramic, metal and/or plastics.
  • the ensemble of fluid passages can take on any pixelated shape, depending on which passages are blocked and which are not.
  • the backfill material may be removable (by a variety of methods) so as to leave an array of fluid passages, or it may be permanent so as to form an array of filaments, or some combination of the two.
  • Manufacture of this third embodiment by extrusion is a particularly convenient method for impressing a taper on a honeycomb structure, and can be carried out by forcing the honeycomb from a suitable supporting enclosure (i.e., the barrel of a ram extruder) partially into or through a tapered barrel, mold or extrusion die of a desired prismatic, conical, or other tapering form.
  • the extrusion path preferably has an inlet cross section close in size and shape to that of the supporting enclosure for the starting honeycomb.
  • the extrusion path preferably offers a smooth transition to an outlet or receptacle having a different cross-sectional size and/or shape, corresponding to a predetermined channel size and shape for the final honeycomb product.
  • any size reduction carried out between the die inlet and outlet will dictate a corresponding increase in cell density and overall reduction in cell wall thickness in the reshaped product, while any change in outlet shape will modify the final cell shapes and/or cell wall thickness distributions in that product. Both are accomplished without any loss of channel integrity, because flow paths do not cross.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Chemical Vapour Deposition (AREA)
  • Gas Burners (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

Ce collecteur pour brûleur (10), destiné à alimenter en corps réagissants un site de combustion d'un équipement de dépôt chimique en phase vapeur, comprend des orifices d'entrée (32a, 32b) et de sortie (49) de fluides et plusieurs voies de passage pour fluide (50) s'étendant entre ces orifices. Ces voies de passage convergent les unes vers les autres à partir des orifices d'entrée et en direction des orifices de sortie. Dans une réalisation, ce collecteur comporte une assise (12), une plaque de pression (14) et un bloc de montage (16) de brûleur sur lequel monter un brûleur micro-usiné (58). Les voies de passage pour fluide (50), dans l'assise du collecteur, sont conçues pour alimenter systématiquement en fluide le bloc de montage du brûleur du collecteur. Le fluide est alors acheminé par ces voies de passage (50) à destination du bloc de montage du brûleur. Ces voies de passage pour fluide convergent, tout en restant isolées les unes des autres, et elles constituent un réseau linéaire destiné à produire des courants linéaires de fluide. Dans une variante, ce collecteur pour brûleur peut comporter plusieurs éléments de collecteur empilés. Dans cette variante, ces éléments de collecteur sont conçus pour constituer un réseau linéaire de voies de passage pour fluide au sommet de la pile, ce qui augmente le nombre de ces voies de passage à chaque niveau de la pile plus proche du sommet. Dans une autre réalisation, on fabrique le collecteur pour brûleur par extrusion de matériau particulaire composite à travers une filière, de manière à obtenir un collecteur renfermant des voies de passage pour fluide. Ce collecteur extrudé possède, généralement, une section conique sur laquelle peut être monté un brûleur.
PCT/US1999/028305 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur WO2000036340A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
KR1020017007404A KR20010086107A (ko) 1998-12-17 1999-12-01 화학 증착용 버너 메니폴드 장치
CA002355941A CA2355941A1 (fr) 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur
US09/830,512 US6736633B1 (en) 1998-12-17 1999-12-01 Burner manifold apparatus for use in a chemical vapor deposition process
JP2000588546A JP2002532632A (ja) 1998-12-17 1999-12-01 化学的気相成長プロセスに使用するためのバーナマニホールド装置
EP99965064A EP1144913A4 (fr) 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur
AU31061/00A AU3106100A (en) 1998-12-17 1999-12-01 Burner manifold apparatus for use in a chemical vapor deposition process
BR9916203-2A BR9916203A (pt) 1998-12-17 1999-12-01 Aparelho de coletor de queimador para uso em um processo de deposição de vapor quìmico

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11276798P 1998-12-17 1998-12-17
US60/112,767 1998-12-17

Publications (1)

Publication Number Publication Date
WO2000036340A1 true WO2000036340A1 (fr) 2000-06-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/028305 WO2000036340A1 (fr) 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur

Country Status (10)

Country Link
EP (1) EP1144913A4 (fr)
JP (1) JP2002532632A (fr)
KR (1) KR20010086107A (fr)
CN (1) CN1330753A (fr)
AU (1) AU3106100A (fr)
BR (1) BR9916203A (fr)
CA (1) CA2355941A1 (fr)
ID (1) ID29926A (fr)
TW (1) TW418303B (fr)
WO (1) WO2000036340A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003053871A1 (fr) * 2001-12-19 2003-07-03 Corning Incorporated Module de bruleur multicouche, adaptateur et assemblage correspondant

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8857216B2 (en) * 2012-05-31 2014-10-14 Corning Incorporated Burner modules, methods of forming glass sheets, and glass sheets formed thereby
US9599333B2 (en) * 2013-11-08 2017-03-21 Air Products And Chemicals, Inc. Burner retraction system
CN109928612B (zh) * 2017-02-24 2021-08-06 天津富通集团有限公司 一种光纤预制棒的制造方法

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US192460A (en) * 1877-06-26 Joseph s
US2054601A (en) * 1934-07-21 1936-09-15 Alexander F Jenkins Tip for oxy-acetylene torches
US2496923A (en) * 1947-03-21 1950-02-07 John D Walters Tip structure for gas torches
US4821963A (en) * 1986-07-30 1989-04-18 L'air Liquide Steelworks cutting nozzle with a double heating ring
US5683516A (en) * 1994-07-18 1997-11-04 Watkins-Johnson Co. Single body injector and method for delivering gases to a surface

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FR2333628A1 (fr) * 1975-12-01 1977-07-01 Vergnon Pierre Procede et equipement pour la production de preformes de fibres optiques
US4136828A (en) * 1977-06-27 1979-01-30 Corning Glass Works Oxide depositing ribbon burner
CA2259625A1 (fr) * 1996-07-08 1998-01-15 Spraychip Systems Corp. Dispositif d'atomisation a l'aide de gaz

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Publication number Priority date Publication date Assignee Title
US192460A (en) * 1877-06-26 Joseph s
US2054601A (en) * 1934-07-21 1936-09-15 Alexander F Jenkins Tip for oxy-acetylene torches
US2496923A (en) * 1947-03-21 1950-02-07 John D Walters Tip structure for gas torches
US4821963A (en) * 1986-07-30 1989-04-18 L'air Liquide Steelworks cutting nozzle with a double heating ring
US5683516A (en) * 1994-07-18 1997-11-04 Watkins-Johnson Co. Single body injector and method for delivering gases to a surface

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1144913A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003053871A1 (fr) * 2001-12-19 2003-07-03 Corning Incorporated Module de bruleur multicouche, adaptateur et assemblage correspondant
US6743011B2 (en) * 2001-12-19 2004-06-01 Corning Incorporated Multi-layer burner module, adapter, and assembly therefor

Also Published As

Publication number Publication date
CN1330753A (zh) 2002-01-09
CA2355941A1 (fr) 2000-06-22
BR9916203A (pt) 2001-09-04
TW418303B (en) 2001-01-11
KR20010086107A (ko) 2001-09-07
EP1144913A4 (fr) 2004-12-15
ID29926A (id) 2001-10-25
EP1144913A1 (fr) 2001-10-17
AU3106100A (en) 2000-07-03
JP2002532632A (ja) 2002-10-02

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