KR20010086107A - 화학 증착용 버너 메니폴드 장치 - Google Patents

화학 증착용 버너 메니폴드 장치 Download PDF

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Publication number
KR20010086107A
KR20010086107A KR1020017007404A KR20017007404A KR20010086107A KR 20010086107 A KR20010086107 A KR 20010086107A KR 1020017007404 A KR1020017007404 A KR 1020017007404A KR 20017007404 A KR20017007404 A KR 20017007404A KR 20010086107 A KR20010086107 A KR 20010086107A
Authority
KR
South Korea
Prior art keywords
manifold
burner
fluid
mount
passages
Prior art date
Application number
KR1020017007404A
Other languages
English (en)
Korean (ko)
Inventor
데이비드 에프. 다우손-엘리
시아오동 푸
데니얼 더블유. 하우토프
윌리엄 제이. 키에퍼
존 3세 스톤
존 에프. 쥬니어. 웨이트
Original Assignee
알프레드 엘. 미첼슨
코닝 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 알프레드 엘. 미첼슨, 코닝 인코포레이티드 filed Critical 알프레드 엘. 미첼슨
Publication of KR20010086107A publication Critical patent/KR20010086107A/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/047—Re-forming tubes or rods by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/52—Nozzles for torches; for blow-pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
    • F23D14/583—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration of elongated shape, e.g. slits
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/02—Elongated flat flame or slit-nozzle type
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/101—Flame diffusing means characterised by surface shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/104—Grids, e.g. honeycomb grids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/10—Burner material specifications ceramic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2213/00—Burner manufacture specifications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/14—Special features of gas burners
    • F23D2900/14001—Sealing or support of burner plate borders

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Chemical Vapour Deposition (AREA)
  • Gas Burners (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
KR1020017007404A 1998-12-17 1999-12-01 화학 증착용 버너 메니폴드 장치 KR20010086107A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11276798P 1998-12-17 1998-12-17
US60/112,767 1998-12-17
PCT/US1999/028305 WO2000036340A1 (fr) 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur

Publications (1)

Publication Number Publication Date
KR20010086107A true KR20010086107A (ko) 2001-09-07

Family

ID=22345738

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020017007404A KR20010086107A (ko) 1998-12-17 1999-12-01 화학 증착용 버너 메니폴드 장치

Country Status (10)

Country Link
EP (1) EP1144913A4 (fr)
JP (1) JP2002532632A (fr)
KR (1) KR20010086107A (fr)
CN (1) CN1330753A (fr)
AU (1) AU3106100A (fr)
BR (1) BR9916203A (fr)
CA (1) CA2355941A1 (fr)
ID (1) ID29926A (fr)
TW (1) TW418303B (fr)
WO (1) WO2000036340A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6743011B2 (en) * 2001-12-19 2004-06-01 Corning Incorporated Multi-layer burner module, adapter, and assembly therefor
US8857216B2 (en) * 2012-05-31 2014-10-14 Corning Incorporated Burner modules, methods of forming glass sheets, and glass sheets formed thereby
US9599333B2 (en) * 2013-11-08 2017-03-21 Air Products And Chemicals, Inc. Burner retraction system
CN109928612B (zh) * 2017-02-24 2021-08-06 天津富通集团有限公司 一种光纤预制棒的制造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US192460A (en) * 1877-06-26 Joseph s
US2054601A (en) * 1934-07-21 1936-09-15 Alexander F Jenkins Tip for oxy-acetylene torches
US2496923A (en) * 1947-03-21 1950-02-07 John D Walters Tip structure for gas torches
FR2333628A1 (fr) * 1975-12-01 1977-07-01 Vergnon Pierre Procede et equipement pour la production de preformes de fibres optiques
US4136828A (en) * 1977-06-27 1979-01-30 Corning Glass Works Oxide depositing ribbon burner
FR2602309B1 (fr) * 1986-07-30 1988-11-10 Soudure Autogene Francaise Buse de coupe siderurgique a double couronne de chauffe
TW359943B (en) * 1994-07-18 1999-06-01 Silicon Valley Group Thermal Single body injector and method for delivering gases to a surface
CA2259625A1 (fr) * 1996-07-08 1998-01-15 Spraychip Systems Corp. Dispositif d'atomisation a l'aide de gaz

Also Published As

Publication number Publication date
CN1330753A (zh) 2002-01-09
CA2355941A1 (fr) 2000-06-22
BR9916203A (pt) 2001-09-04
TW418303B (en) 2001-01-11
EP1144913A4 (fr) 2004-12-15
ID29926A (id) 2001-10-25
EP1144913A1 (fr) 2001-10-17
AU3106100A (en) 2000-07-03
WO2000036340A1 (fr) 2000-06-22
JP2002532632A (ja) 2002-10-02

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