KR20010086107A - Burner manifold apparatus for use in a chemical vapor deposition process - Google Patents

Abstract

Burner manifold device 10 for delivering reactants to the combustion section of a chemical vapor deposition process includes fluid inlets 32a and 32b, fluid outlet 49 and a plurality of fluid passages 50 extending therebetween. The fluid passages 50 converge toward each other from the fluid inlet to the fluid outlet. One embodiment includes a manifold base 12, a pressure plate 14, and a manifold burner mount 16 for mounting a micromachined burner 58. The fluid passage 50 inside the manifold base has a structure for symmetrically distributing fluid to the manifold burner mount. The fluid passes through the fluid passage of the manifold burner mount. The fluid passages converge, but remain fluidly isolated from each other, and the fluid passages form a linear array that allows for the generation of a linear fluid stream. Optionally, the burner manifold device may comprise a plurality of manifold elements in a stacked configuration. In this optional embodiment, the manifold element is a structure that forms an array of linear fluid passages on top of the stack, and closer to the top increases the number of fluid passages in each layer. In another embodiment, the burner manifold may be manufactured by extruding particulate composite through a die to form a manifold with fluid passages therein. In general, the extruded manifold has a tapered portion on which the burner can be mounted.

Description

BURNER MANIFOLD APPARATUS FOR USE IN A CHEMICAL VAPOR DEPOSITION PROCESS}

Numerous burner structures have been developed for use in vapor delivery precursor processes, and at least one liquid delivery precursor process has been attempted, as disclosed in the pending patent application 08 / 767,653 to Hautov et al. Whether the precursor is delivered to the burner in vapor form or in liquid form, it is important that the burner accepts a dispersed uniform precursor stream. This concept is particularly important in waveguide fabrication to form accurate refractive index profiles.

Recently, a burner for metal oxide soot deposition with a small supply channel and orifice has been proposed. The burner's channels and orifices may have a diameter or width of 150 microns or less, as disclosed, for example, in 60 / 068,255, previously filed under "Burners and Methods for Manufacturing Metal Oxide Suits".

Thus, there has been a demand for burner manifolds that can be used with such finely machined burners and that can evenly and evenly distribute fluid to the burners. In conventional large burners, this uniformity is achieved by concentric rings that are equally large. However, this solution has not been practical for micromachined burners.

The present invention relates to a novel burner manifold device. In particular, the present invention relates to a burner manifold device for a micromachined burner, such as a micromachined silicon burner.

BACKGROUND OF THE INVENTION There are known methods for producing various objects such as crucibles, tubes, lenses and optical waveguides by reacting precursors in the flames of the burners to produce soot and then stacking the soot on the receptor surface. This method is particularly useful for producing optical waveguide preforms with doped and undoped silica soot, including planar waveguides and waveguide fibers.

In general, waveguide fabrication involves reacting a silicon-containing precursor in a burner flame produced by a combustible gas such as a mixture of methane and oxygen, and laminating the silica soot onto a suitably shaped receptor surface. Include. In this method, typically, the silicon-containing material is vaporized at a location remote from the burner. The vaporized raw material is conveyed to the burner by the carrier gas. Here, they are volatilized and hydrolyzed to produce soot particles. The soot particles are then collected on the receptor surface. The receptor surface may be a flat substrate in the case of planar waveguide fabrication, a rotating rod (bait tube) in the case of axial deposition (VAD) for waveguide fiber fabrication, or a waveguide fiber fabrication In the case of external deposition (OVD) may be a rotating mandrel.

The accompanying drawings constitute a part of this specification and illustrate preferred embodiments of the invention, which together with the foregoing general description and the following detailed description serve to explain the principles of the invention.

1 is an exploded perspective view of a burner manifold device for use with a micromachined burner wafer in accordance with the present invention;

2 is a partial side cross-sectional view of a micromachined burner wafer and burner manifold device according to the present invention;

3 is a plan view illustrating a burner manifold device and a burner mounted thereto according to the present invention;

Figure 4 is a plan view showing the burner manifold of the burner manifold device according to the present invention,

5 is a side cross-sectional view of the burner manifold taken along line B-B of FIG. 4,

6 is a plan view of a pressure plate of the burner manifold device according to the invention,

7 is an exploded perspective view of a second embodiment of a burner manifold device according to the invention,

FIG. 8 is a side cross-sectional view of a portion of the device in the burner manifold device shown in FIG. 7 with fluid piping; FIG.

9 is a plan view of the burner manifold device shown in FIG. 7,

10 is a side view of a third embodiment of a burner manifold according to the present invention;

FIG. 11 is a bottom view of the burner manifold shown in FIG. 10,

12A and 12B are plan views showing optional structures of the third embodiment shown in FIG. 10, and

13 is an exploded perspective view of a fourth embodiment of a burner manifold device according to the present invention.

With the appearance of fine machined burners, it is desirable to have a burner manifold device that distributes fluid (vapor or liquid) evenly and uniformly to the burner.

The burner manifold device according to the invention comprises a fluid inlet, a fluid outlet and a plurality of fluid passages. The fluid passageway extends between the fluid inlet and the fluid outlet to deliver reactants to the combustion section of the chemical vapor deposition process. The fluid passages converge toward each other from the fluid inlet to the fluid outlet such that the inlet of the fluid passage is further spaced than the outlet of the fluid passage. This structure facilitates delivery of the reactant precursor fluid from the large delivery system to the small burner. Preferably, the fluid passageway has a smaller cross-sectional area at its outlet than its inlet.

In general, the fluid passages are isolated from each other such that some fluid passageways carry reactant precursor material and other fluid passageways carry combustion material. Preferably, the fluid passageway of the fluid outlet is shaped to match the shape of the burner. In a preferred embodiment, the fluid outlet is a slot shaped or formed as a series of in-line round holes.

The burner manifold device further comprises at least one pressure induction limiting mechanism to allow fluid to pass through the device in the form of a narrow elongated stream with an even distribution. The pressure induction limiting mechanism is located between the fluid inlet and the fluid outlet. Preferably, the pressure inducement restrictor comprises a plate having a series of slots or linearly arranged apertures that discharge the fluid into a generally linear droplets stream.

One embodiment of the present invention includes a manifold base having a top, a bottom, a front wall, a back wall and two side walls. The manifold base defines a horizontal passage extending between the sidewalls, a vertical passage extending from a predetermined position within the manifold base to the top of the manifold base, and a fluid inlet port. Each fluid inlet port is located in the rear wall or front wall of the manifold base and is in fluid communication with at least one of the vertical and horizontal passages, respectively. Preferably, the horizontal passage is parallel to the top and bottom of the manifold base, preferably the vertical passage is parallel to the sidewall of the manifold base.

The burner manifold device of the first embodiment also includes a plate mounted on top of the manifold base. The plate defines a plurality of apertures through it. At least one aperture is disposed at a predetermined position above the exit of each vertical passageway of the manifold base, thereby allowing fluid to pass through the plate from the vertical passageway.

The vertical passage of the manifold base is symmetric about a first axis that bisects the top of the manifold base. Preferably, the vertical passageway comprises a central vertical passageway and a pair of vertical passageways, each pair defined by two vertical passageways being equidistantly spaced from the first axis. Each pair intersects a particular horizontal passageway, thereby forming an array of passageways within the manifold that distributes the fluid symmetrically about the first axis.

The apparatus of the first embodiment further comprises a manifold burner mount mounted on top of the plate. The manifold burner mount defines a fluid passageway extending from the bottom of the manifold burner mount to the top of the manifold burner mount. The fluid passages are arranged converging so that the distance between neighboring fluid passages is greater at the inlet than the outlet of the manifold manor mount.

The burner manifold device further comprises a first gasket positioned between the manifold base and the plate. The first gasket has a slot therein that coincides with a groove above the manifold base. Preferably, a second gasket is located between the plate and the manifold burner mount. The second gasket has a slot that matches the slot of the first gasket. Any burner gasket may be located on the manifold burner mount. The burner gasket has a slot coinciding with the outlet of the fluid passage of the manifold burner mount.

In order to detachably secure the burner to the manifold burner mount, a fixing element such as a clamp may be mounted on top of the manifold burner mount. The clamps each have an outer edge and an inner edge, and the inner edge has a shoulder that is engaged with the burner. In addition, the inner edge of each clamp has a tapered surface tapering from the top of the manifold burner mount.

A second embodiment of the burner manifold device comprises a plurality of manifold elements located in a stack on top of the base element. The manifold elements are in fluid communication with one another through fluid passages therein. Each manifold element has a different number of fluid passageways, preferably increasing by two each in successive elements located higher in the stack. These fluid passages converge towards each other at the exit of the manifold device. Each manifold element has at least one fluid inlet port, preferably two fluid inlet ports, except for the lowest manifold element.

Preferably, the fluid passage is linear and extends vertically through the manifold element. The outermost fluid passage of each manifold element is in communication with the fluid inlet port, and the inner fluid passage is isolated from the outermost fluid passage, thereby isolating the fluid directed to the different manifold elements. The fluid passageways of neighboring manifold elements are aligned vertically. Similar to the fluid passage of the burner mount of the first embodiment, the fluid passage of the second embodiment is symmetric about the central fluid passage.

Gaskets are disposed between neighboring manifold elements. The gasket has a slot through which fluid can pass. Preferably, the gasket is made of elastomeric material.

In a third embodiment of the invention, the burner manifold comprises a tapered portion having first and second ends, wherein the first end has a larger surface area than the second end. A fluid inlet is located at the first end of the manifold and a fluid outlet is located at the second end. Preferably, the tapered portion has a truncated cone shape.

The burner manifold also includes an upper portion that extends in the same manner as the tapered portion. The upper portion has a first end adjacent to the second end of the tapered portion and a second end for holding the burner.

The tapered portion and top of the third embodiment define a plurality of fluid passages for carrying fluid from the first end of the tapered portion to the second end of the upper portion. In a preferred embodiment, the fluid passages are generally parallel to each other and converge towards each other from the fluid inlet of the first end of the tapered portion to the fluid outlet of the second upper end. The predetermined passage selected from among the fluid passages is plugged or plugged to select which passage will provide fluid flow by erasing.

In a third embodiment, the burner manifold is molded by an extrusion process. The burner manifold is tapered from the first end to the second end and optionally has a tapered portion located between the first end and the second end. This can be done, for example, by plastic deformation of the base material (honeycomb substrate) of the parallel channel into the funnel of the funneled channel. Two suitable deformation processes are hot drawing and shrink extrusion. "High temperature drawing" is a viscous molding process performed on a viscously sintered base material, which is disclosed in a previously filed application 60 / 091,107 entitled "Redrawing Capillary Container." "Shrinkage extrusion" is a plastic molding process performed on a base material composed of non-sintered fine particles, which is disclosed in Corning's preliminary patent P13569 filed under the name "Manufacture of Cellular Honeycomb Structure". Fine particles such as metal, plastic, ceramic and / or glass are mixed and extruded to form the base material. The top of the manifold may be cylindrical, rectangular or any other shape suitable for holding a burner.

A fourth embodiment of the present invention may comprise a plurality of burner mounts, a plurality of plates and a single manifold base. The manifold may have a thickness between the front wall and the rear wall that is greater than the thickness of the burner mount and plate, such that a plurality of burner mount / plate combinations may be mounted to the manifold.

The burner manifold apparatus of the present invention has many advantages over conventional burner manifolds. For example, the burner manifold device fills the gap between a conventional large manifold and a small, fine machined silicon wafer burner.

Another advantage is that the burner manifold device can be used with a burner having a linear flame array, which distributes the fluid evenly to one side of the linear flame array of the burner through the manifold.

Another advantage is that the burner manifold device can mount the micromachined burner wafer firmly and accurately in place.

Another advantage is that the burner manifold device can be placed near other assemblies, forming a proximity burner array that generates very close burner flames.

Another advantage is that the burner manifold device can be manufactured by an extrusion process or, optionally, by a hot drawing process.

Another advantage of the burner manifold device is that the burner can be mounted to the burner mount by anodic bonding without clamps or other mechanical attachment means.

In addition, the manifolds of the present invention enable and facilitate the use of small, fine machined burners in the field of laminating silica soot, particularly in the manufacture of high purity soot in optical waveguide manufacturing processes.

Additional advantages of the invention are set forth in the detailed description which follows, and will be apparent from the description, or by practice of the invention. The advantages of the invention may be embodied and realized by the means and combinations thereof specified in the appended claims.

Micromachined burners, as disclosed in HOWTOF, et al., Application 60 / 068,255, stimulate the demand for a novel state-of-the-art burner manifold device for collecting the flow of fluid to the burner. Typically, such micromachined burners are configured as wafers and are made compact. For example, a burner for making silica soot for waveguide fiber substrates may be about 1 inch long and about 1 inch wide. The length and width of the burners may be limited by the semiconductor wafer manufacturing process and may be smaller or larger.

Such wafer burners are typically formed with precise channels or orifices having a width or diameter of 150 microns or less, and in some embodiments 10 microns or less. Preferably, the channels and orifices are micromachined into a linear array passing through a burner. Such micromachining may be accomplished by conventional methods used in the manufacture of integrated circuits such as lithography, masking, etching, photochemical processes, reactive ion etching (RIE), ultrasonic processing, vertical wall micromachining and crystal etching. The technique used depends on the burner material, in particular the crystal structure and orientation.

Conventional manifolds are not suitable because micromachined burners are much smaller than conventional burners and are linearly symmetric about their center. There is a need for burner manifolds suitable for novel “small” linear array wafer burners, which represents a significant change from the relatively large conventional “large” ring burners.

The burner manifold device of the present invention comprises a fluid inlet, a fluid outlet and a plurality of fluid passageways extending between the fluid inlet and the fluid outlet. The fluid passages converge towards each other from the fluid inlet to the fluid outlet. For example, in a fluid passage having a rectangular cross section, the longitudinal axis of the cross section of the fluid passage is spaced farther from the inlet end of the passage than at the outlet end of the passage, thereby facilitating delivery of the precursor reactant from the large delivery system to the desired small burner. Let's do it. Thus, the wider spaced inlet facilitates the fitting, while the closely spaced outlet allows for alignment with the orifice of the small burner. Similarly, the fluid passageway preferably has a smaller cross-sectional area at the fluid outlet than at the fluid inlet. Accordingly, the burner manifold device is particularly suitable for use with micromachined burners.

Referring to the accompanying drawings in which like parts are represented by like numbers, FIG. 1 shows a first embodiment of a burner manifold apparatus 10 according to the invention. In general, the burner manifold device 10 comprises a manifold base 12, a pressure plate 14 and a manifold burner mount 16. The manifold base 12 shown in FIG. 1 has a top 18, a bottom 20, a front wall 22, a back wall 23 (see FIG. 4), and a side wall 24. Horizontal passages, such as passages 26 and 27 (see FIGS. 2 and 5), extend between the side walls 24 of the manifold base 12. In addition, the manifold base 12 has vertical passages 30a to 30f (see FIGS. 4 and 5) extending from a predetermined position inside the manifold base 12 to the upper portion 18 of the manifold base 12. . As described below, except for the central vertical passageway 30a, each vertical passageway 30b to 30f intersects and extends upwards from a particular horizontal passageway.

The horizontal and vertical passages may be configured such that the horizontal and vertical passages are not perpendicular to each other. In addition, although the horizontal and vertical passages shown are preferably linear, they may be composed of curved and wavy shapes.

The manifold base 12 further has fluid inlet ports 32a and 32b located on the front wall 32a or the rear wall 32b. The fluid inlet port functions as a port for a fluid conduit that introduces vapor and / or liquid into the manifold. Each fluid inlet port is in fluid communication with at least one of the horizontal and vertical passageways. The horizontal passage, the vertical passage and the fluid inlet port intersect each other, thereby facilitating symmetrical distribution of the fluid inside the manifold.

2, 4 and 5, the vertical passages 30a to 30f are symmetric about a first axis A-A which bisects the upper portion 18 of the manifold base 12. As shown in FIG. The vertical passageway comprises a central vertical passageway 30a and a pair of vertical passageways 30b to 30f. Each pair 30b-30f is defined by two vertical passages spaced equidistantly from the first axis A-A to distribute the fluid symmetrically about the first axis A-A. Each pair 30b-30f intersects a specific horizontal passageway, thereby forming an array of fluid passageways within the manifold base 12. In another embodiment, the pair of passages 30b to 30f may be symmetric about a central passage 30a spaced from the first axis A-A.

The vertical passages 30b to 30f are located at different cross sections inside the manifold, the cross sections being defined parallel to the line B-B and extending from the top to the bottom of the manifold. As shown in FIG. 4, the vertical passages 30a and 30b are located on the same plane. The vertical passageway 30a and the pair 30b are located on a line B-B; The pairs 30c and 30d are offset from the line B-B and approach the front wall 22 of the manifold base 12; The pairs 30e and 30f are offset from the line B-B to approach the rear wall 23 of the manifold base 12. The vertical passages 30b to 30f (and their associated horizontal passages) are fluidly independent of one another, such that, for example, a first fluid may be transferred through the vertical passage 30b and a second fluid may be It can be conveyed through the vertical passageway 30c. It will be appreciated by those skilled in the art that the exact position of the vertical passageway in various planes inside the manifold base 12 can be altered as long as symmetry about the first axis A-A is maintained.

With reference to horizontal passages, such as passages 26 and 27, they are located at different heights inside the manifold base 12 and span the manifold base 12 between the side walls 24. The height position of the horizontal passage is indicated by the position of the fluid inlet ports 32a and 32b shown in FIG. For example, FIG. 2 shows a horizontal passage 26 located at the height indicated by the lowest inlet port 32b and a horizontal passage 27 located at the height indicated by the other higher inlet port 32b. Each horizontal passage is fed by a single fluid inlet port 32a, 32b. Each fluid inlet port 32a, 32b is a specific horizontal, except for a fluid inlet port that intersects the central vertical passageway 30a (this fluid inlet port is shown as the top inlet port 32a in FIG. 2). Cross the passage. This configuration allows a single fluid feed tube to split the fluid internally within the manifold for even distribution between two vertical passageways located equidistant from the central vertical passageway 30a.

Although only two representative horizontal passages are shown in FIG. 2, in the preferred embodiment of the manifold base 12 there are five horizontal passages located at the heights indicated by the five lower inlet ports 32a and 32b. In order to emphasize that the horizontal passages lie on different front and rear planes inside the manifold base 12, the horizontal passages 26 and 27 are shown by different types of chain lines. For example, the horizontal passage 26 lies in the central plane defined by line B-B in FIG. 4. In this embodiment the horizontal passage 27 in fluid communication with the vertical passage 30f lies in a plane proximate to the rear wall 23 of the manifold base 12.

In addition, the vertical passages 30b to 30f are not uniform in length. Rather, the lengths of the vertical passages 30b to 30f vary depending on the horizontal passages intersecting with the vertical passages 30b to 30f. For example, as shown in FIG. 2, the vertical passageway 30f that crosses the horizontal passageway 27 will be shorter than the vertical passageway 30b that crosses the horizontal passageway 26.

Slightly different from the foregoing, the passages and ports in the manifold may be represented in an x-y-z coordinate system (except for FIG. 2). The vertical passages 30b to 30f extend in the y direction and are translated with respect to each other along the x and z axes. The horizontal passages, for example passages 26 and 27 of FIG. 2, extend in the x direction and are translated relative to each other along the y and z axes. Finally, the fluid inlet ports 32a and 32b extend in the z direction and are translated relative to each other along the x and y axes.

To prevent fluid from flowing out of the manifold, one end of the horizontal passage is fitted with a plug 33 as shown in FIG.

The present invention therefore provides a complex and effective array of fluid passageways in the manifold base that ensures even distribution of the various fluids induced through the inlet ports on both sides of the first axis A-A.

The upper portion 18 of the manifold base 12 includes a groove 34 disposed above the outlet of the vertical passages 30a to 30f. The groove 34 is elongate and extends in a direction parallel to the side wall 24 of the manifold base 12. The groove 34 means a spaced position of the fluid passage inlet, where the vertical passages 30a to 30f are fluid inlets.

The pressure plate 14 shown in the top view of FIG. 6 is seated on the manifold base 12. The pressure plate 14 is separated from the manifold base 12 by a first gasket 36 as shown in FIG. 1. In order to allow fluid to pass from the manifold base 12 to the pressure plate 14, the first gasket 36 is provided with a slot 40 that coincides with the groove 34 of the top 18 of the manifold base 12. Include. The pressure plate 14 comprises an array of apertures 38 that coincide with the grooves 34. The through hole 38 is smaller in size than the outlet of the vertical passages 30a to 30f. The through hole 38 is small enough to equalize the fluid flow through the through hole on one side of the first axis A-A and to produce a high back pressure. For example, in the vertical passage 30f, the associated fluid input port 32b is closer to the left passage 30f than to the right passage 30f. The pressure plate 14 ensures that the fluid induced through the input port 32b is evenly distributed in the two passages, and the fluid moves faster to the left passage 30f than the right passage 30f if not constrained. will be. The pressure plate 14 effectively blocks the rapid release of fluid from the manifold base 12 through a path of least resistance. Thus, the fluid is substantially uniform in each aperture 38 and exits the manifold base 12 through the pressure plate 14 at a substantially constant pressure symmetrically about the first axis AA. .

In this embodiment, as shown in FIG. 2, the upper portion 18 of the manifold base 12 is sized to receive at least a portion of the first gasket 36, the pressure plate 14, and the second gasket 42. Has an incision. The second gasket 42 separates the pressure plate 14 from the manifold burner mount 16. Similar to the first gasket 36, the second gasket 42 has a slot 44. This slot 44 coincides with the slot 40 of the first gasket 36 and thus coincides with the groove 34 of the manifold base 12 and the aperture array 38 of the pressure plate 14.

The manifold burner mount 16 is disposed above the second gasket 42. The manifold burner mount 16 has a top 46 and a bottom 48 and includes a fluid passage 50 extending from the top 46 to the bottom 48. The inlet portion 52 from the second gasket 42 to the fluid passage 50 coincides with the slot 44 of the second gasket 42 and the through hole 38 of the pressure plate 14. Fluid passing through the pressure plate 14 moves into the fluid passage 50 of the manifold burner mount 16. The fluid is distributed symmetrically as it passes through the pressure plate 14 and remains evenly distributed until it passes through the manifold burner mount 16 to reach a micromachined burner mounted thereon. . In the embodiment of FIG. 2, the two outermost vertical passages 30f are redundant vertical passages and are not adjacent to any fluid passage 50 of the burner mount. However, it will be appreciated that these outermost vertical passages 30f can be used with burner mounts with additional fluid passages.

As mentioned above, the manifold burner mount 16 is designed for use with a micromachined burner, preferably a micromachined burner with a small channel or orifice. To facilitate this use, the fluid passage 50 is arranged such that the distance between adjacent fluid passages 50 is greater at the lower portion 48 than at the upper portion 46 of the manifold burner mount 16. Preferably, the fluid passage 50 does not intersect at the top 46 of the manifold burner mount 16 but is linear and convergent, extending through the micromachined burner 58 as shown in FIG. 2. It meets in the vertical passageway and top 46. The direction of the passage extending through the burner 58 is shown in FIGS. 2 and 3.

Like the passage through burner 58, the fluid passage through the manifold burner mount 16 is also rectangular with a longitudinal axis extending between the rear wall 52 and the front wall 54. The outlet 49 of the fluid passage 50 forms a linear array symmetric about the central fluid passage. This linear array forms one or more linear fluid streams for the burners 58 mounted above the manifold burner mount 16, and when the fluid streams are combined, the burners 58 generate a flame. Typically, the central fluid stream 50 is for silica / dopant precursor material (which may be liquid or vapor) and the remaining fluid passage 50 is for gases that react with and combust with silica and dopant.

The unique structure of the manifold burner mount 16 fills the gap between a large manifold and a small, finely machined silicon wafer burner. The outlet 49 of the fluid passage 50 converges closer to each other than the inlet of the fluid passage 50 (and the vertical fluid passages 30a to 30f).

The manifold burner mount 16 may be made of a plunge discharge processor (EDM) using a wire or a plunge to vaporize metal in contact with the tip of the plunge.

The burner manifold device 10 according to the first embodiment further comprises a burner gasket 60 mounted between the top 46 of the manifold burner mount 16 and the burner 58. The burner gasket 60 has a slot 62 that coincides with the outlet of the fluid passage 50 of the manifold burner mount 16, including the central passage. In addition, the slot 62 coincides with a slot 64 forming a linear array in the burner 58. For correct mounting and alignment of the gasket 60, the top 46 of the manifold burner mount 16 has an incision to receive the burner gasket 60.

The burner mount device 10 of the first embodiment also includes a burner fixing element 66 mounted to the upper portion 46 of the manifold burner mount 16. The fixing element 66 secures the burner 58 and burner gasket 60 to the burner mount top 46. Preferably, the securing element 66 comprises a pair of clamps detachably fixed to the upper portion 46 of the manifold burner mount 16 with screws 68 and spring rings 69. The spring ring 69 is located between the clamp 66 and the burner mount top 46. The clamp 66 has a threaded hole 72 for receiving the screw 68. The spring ring 69 is slightly larger in diameter than the coplanar hole of the burner mount top 46 and the hole 71 of the clamp 66.

Each clamp 66 has an outer edge 70 and an inner edge 72. As shown in FIG. 2, the inner edge 72 of the clamp 66 has a downwardly facing shoulder 74, which is coupled to the opposite side of the burner 58 to the burner 58 against the burner gasket 60. ) Will be clamped in place. At the top of the shoulder 74, the inner edge 72 has a tapered surface 76 tapering from the burner 58.

The device includes a channel 78 for securing the manifold burner mount 16 to the manifold base 12, the channel completely penetrating the manifold base 12 and proximate the side wall 24 and the manifold burner mount ( Pass at least a portion of 16). The device 10 further comprises a screw 82 received in the channel 78 for attaching the manifold base 12 to the manifold burner mount 16.

When fully assembled, the burner mount device 10 has a generally rectangular shape with a thickness size from the front wall 22 to the rear wall 23. As illustrated in FIG. 13, the manifold base 116 may be elongated in the z direction so that a plurality of burners and burner mount assemblies may be mounted side by side. In a preferred embodiment, three fluid tubes each, a total of six fluid tubes, may be led to the rear wall 120 and the front wall 118 of the burner manifold 116. The hole 32 extends between the rear wall 120 and the front wall 118 to feed into the plurality of manifold vertical passageways 30a to 30f.

This embodiment enables efficient delivery of fluid to a plurality of different burner mounts, whereby a plurality of linear flame arrays can be created by side-by-side burners. Fluid induced in the manifold base 116 is distributed evenly through the manifold base 116 such that the burner creates an essentially uniform burner flame.

7 to 9 show a second embodiment of the burner manifold device. As shown in FIG. 8, this burner manifold device 82 includes a base element 84 and a plurality of manifold elements 86a-86f positioned in a stack on top of the base element 84. Preferably, the base 84 is solid as shown in the cross sectional view of FIG. Each manifold element 86a-86f has a different number of fluid passages 88, with the number of fluid passages 88 increasing as the element nears the top of the stack. For example, the bottom manifold element 86a has a single fluid passage that is fed by a single fluid feed tube through the port 90. The fluid passages are isolated from each other, and two new external fluid passages are directed into a stack of manifold elements each successive from bottom to top. For example, manifold element 86b has three fluid passages and manifold element 86c has five fluid passages. Thus, the fluid remains housed until it reaches the top manifold element 86f and a burner (not shown).

The manifold elements 86a through 86f each have two ports 90, and two fluid feed pipes are required for each element 86a through 86f. The ports 90 face each other in successive manifold elements 86a through 86f for easy attachment of the fluid feed tube. The fluid is evenly divided into two ports 90 of each manifold element 86a through 86f. This is different from the first embodiment in which a particular fluid is led to a burner mount through a single fluid inlet port and then internally split into opposite sides of the burner mount.

The manifold device 82 of the second embodiment further includes a gasket 92 (not shown in FIG. 8) located between neighboring manifold elements 86a to 86f. For example, the gasket 92 may be made of an elastomeric material such as Viton, manufactured by DuPont Dow Elastomers. The gasket includes slots 94 that coincide with fluid passages of manifold elements 86a through 86f. All gaskets 92 can be formed with the same number of slots 94 as shown by the two gaskets shown in FIG. 7; Only slots that match the fluid passage are used (e.g., only the central slot is used for the gasket located between elements 86a and 86b). Similar to the fluid passage 88, the slot 94 is rectangular in shape.

9 is a plan view showing the top manifold element 86f in the laminated structure. Here, it can be seen that the fluid passage 88 is rectangular in shape and the longitudinal axis extends between the front wall 96 and the rear wall 98 of the manifold element 86f. The fluid passageway forms a linear array such that a burner located above the top manifold element 86f, for example burner 58 of FIG. 1, generates a linear flame. Also, as in the first embodiment, the fluid passage is symmetric about the central fluid passage and converges at the fluid outlet of the fluid passage. Also, the cross section of the fluid inlet is larger than the cross section of the fluid outlet.

The manifold elements 86a-86f can be detachably connected by four long rods (not shown), each rod of the manifold elements 86a-86f, the base element 84 and the gasket 92. Channels are formed in a vertical direction through a series of bores 100 formed at each corner. At each end of the rod may be threaded to receive a nut for securing the rod in place at top manifold element 86f and base element 84. The top view of FIG. 9 shows a bore 101 for receiving an alignment pin (not shown).

Similar to the first embodiment, the second embodiment can be used with fine machined burners that generate linear flames used in flame hydrolysis processes.

10 to 12 show a third embodiment of the present invention. Burner manifold 102 provides a web or honeycomb structure that can be used with micromachined silicon wafer burners. The burner manifold 102 includes a taper portion 104 and an upper portion 106. The upper portion has a first end 107 and a second end 108. A burner may be mounted to the second end 108 of the upper portion 106.

The taper portion 104 has a first end 110 and a second end 112. The first end 110 is larger in diameter than the second end 112. The upper portion 106 extends coplanar with the tapered portion 104 and the first end 107 of the upper portion 106 is adjacent to the second end 112 of the tapered portion 104.

The taper 104 and top 106 define a plurality of fluid passages 114 through them. The fluid passageway 114 transports fluid from the first end 110 of the taper portion 104 to the second end 108 of the upper portion 106. The fluid passages 114 are spaced apart from one another but converge at the taper portion 104, and the convergence of the fluid passages extends to the upper portion 106 as shown in FIG. 10.

As shown in FIG. 11, the fluid passageway may have a rectangular cross section defining a slot, which is similar in shape to the passages of the two embodiments described above. The top 106 has a rectangular cross section, but it will be appreciated that the top 106 can be any other structure suitable for use with a micromachined burner. For example, the top may be cylindrical as indicated by reference numeral 115 of FIG. 12A. This cylindrical top 115 has a fluid passageway 116.

As one feature of the invention, any fluid passage selected from the fluid passages may be filled or plugged with a filler material to close the passage of the fluid. By closing the selected fluid passage, it is possible to form a fluid passage having any cross-sectional shape. For example, a fluid passage selected to form a rectangular slot similar to that shown in FIG. 11 may be closed, and each rectangular slot may be closed by a plurality of unclosed fluids surrounded by a closed fluid passage, as shown in FIG. 12B. Consists of passages. The entire non-closed fluid passageway 116 has a rectangular cross section.

Also, the third embodiment can be formed with only a tapered portion. The tapered portion has a first end and a second end for holding a micromachined burner, the surface area of the first end being smaller than the second end. The tapered portion defines a plurality of fluid passages for conveying fluid from the first end to the second end, and any fluid passage selected from the fluid passages may be closed to inhibit passage of the fluid.

The burner manifold 102 may be manufactured by shrink extrusion and / or hot drawing, preferably comprising a glass material such as PYREX, such that the silicon burner is directly bonded to the second end 108 by an anodic bonding. In this way, there is no need for a clamp to secure the burner to the manifold. Optionally, the burner manifold 102 may be made of silica or ceramic material. The silica and ceramic manifolds can be made by cold shrink extrusion.

Typically, in order to produce the manifolds shown in FIGS. 10-12, the base material (honeycomb) with parallel channels formed is extruded from the particulate material mixed with the liquid additive. In the special case of amorphous particles that are sintered viscously, the viscously sintered base material can be viscously hot drawn to make the taper of the channel, the funnel of the funnel. In the general case, the particulate base material (wet-green and plastic) can be shrink extruded into a taper. Subsequently, the channels of the particulate base material are subjected to the firing of the web of the particulate base material in order to enable plastic deformation of the assembled structure (plastic composition) in a reasonable self-similar manner when extruded into a die having a desired manifold shape. It can be backfilled with materials such as polycrystalline waxes that match incompressibility. Suitable particulate materials include glass, ceramics, metals and / or plastics. After the backfilled honeycomb matrix is shrink extruded, the backfill material is removed from the channel and the particulate taper is sintered. In the case of large channel arrays, any channel selected may be permanently charged or plugged to allow a desired flow pattern through the taper to be formed. At this time, all fluid passageways may take any pixelated form, depending on which passageways are closed. The backfill material may be removable (by various methods) to leave a fluid passageway array, or may be permanently left to form a filament array, or a combination of the two.

The manufacture of the third embodiment by extrusion is a particularly easy way to form a taper on the honeycomb structure, tapered barrel, mold with prismatic, conical or other tapered shape from a suitable acceptor (ie barrel of ram extruder). Or by partially pressing honeycomb into the extrusion die. Preferably, the extrusion path has an inlet cross section similar in size and shape to the initial honeycomb acceptor. Preferably, the extrusion path provides a smooth transition to an outlet or receiver having different cross-sectional sizes and / or shapes to match the channel size and shape of the predetermined final honeycomb product.

The size reduction between the die inlet and outlet causes an increase in cell density and an overall decrease in cell wall thickness of the remolded product, while a change in outlet shape causes a change in cell wall thickness distribution in the final cell form and / or product. do. Since the flow paths do not intersect, they all occur without loss of channel integrity.

Those skilled in the art will readily recognize additional advantages and modifications. Accordingly, the invention is not limited to the specific representative apparatus described and illustrated herein. Accordingly, various modifications may be made without departing from the scope and spirit of the general inventive concept as defined in the claims.

Claims (56)

A burner manifold device for delivering a reactant to a combustion section of a chemical vapor deposition process, And a fluid inlet, a fluid outlet, and a plurality of fluid passages extending between the fluid inlet and the fluid outlet, the fluid passages converging toward each other from the fluid inlet to the fluid outlet. 2. The burner manifold device of claim 1 wherein the fluid passageway has a smaller cross-sectional area at the fluid outlet than at the fluid inlet. 2. The burner manifold device of claim 1, wherein the fluid passageway is isolated from one another such that a selected one of the fluid passageways delivers reactant precursor material and the other selected fluids deliver combustion material. 2. The burner manifold device of claim 1 wherein the fluid passageway of the fluid outlet is slotted. 2. The apparatus of claim 1, further comprising at least one pressure induction restrictor for allowing fluid to pass in the form of a narrow elongate stream, wherein the at least one pressure induction restrictor is located between the fluid inlet and the fluid outlet. Burner manifold unit. 6. The burner manifold device of claim 5, wherein the at least one pressure inducement restrictor comprises a plate having a series of slots or linearly arranged apertures for discharging fluid into a generally linear stream. The apparatus of claim 1, wherein the burner manifold device is A manifold base with top, bottom, front wall, rear wall and two side walls; A plate mounted on top of the manifold base; And And a manifold burner mount mounted to the plate. The fluid passageway comprises a horizontal fluid passageway extending between the sidewalls and a vertical fluid passageway extending from a predetermined position in the manifold to the top of the manifold base, The fluid inlet comprises a fluid inlet port, each fluid inlet port being located in at least one of a front wall and a rear wall of the manifold base and in fluid communication with at least one of the vertical and horizontal fluid passages, The plate defining a plurality of apertures, at least one aperture disposed at a predetermined position above the outlet of each vertical fluid passageway of the manifold base to allow fluid to pass from the vertical fluid passageway through the plate; The fluid passage further comprises a manifold burner mount fluid passage extending from the bottom of the manifold burner mount to the top of the manifold burner mount and ending as a fluid outlet, wherein the manifold burner mount fluid passage is a distance between adjacent manifold burner mount fluid passages. Is arranged to be larger at the bottom of the manifold burner mount than at the top of the manifold burner mount, and the manifold burner mount fluid passage is symmetrically disposed about a central position of the top of the manifold burner mount. 8. The burner manifold device of claim 7, wherein the vertical fluid passageway is symmetric about a first axis adjacent the top of the manifold base. 8. The burner manifold device of claim 7, wherein the vertical fluid passageway is asymmetric about a first axis adjacent the top of the manifold base. 4. The vertical fluid passage of claim 3 wherein the vertical fluid passage comprises a central vertical passage and a pair of vertical passages, each pair defined by two vertical passages spaced equidistantly from the first axis, each pair being a specific horizontal line. And an array within the manifold base for forming an array symmetrically distributing fluid about the first axis by intersecting with the fluid passage. 11. The burner manifold device of claim 10, wherein each pair of vertical passages and a particular horizontal fluid passage is fluidly independent of each pair of other vertical passages and a particular horizontal fluid passage. 8. The burner manifold device of claim 7, wherein each horizontal fluid passageway is connected to a single fluid inlet port. 8. The burner manifold device of claim 7, wherein the manifold burner mount fluid passage is linear. 8. The burner manifold device of claim 7, wherein an upper portion of the manifold base includes a groove therein, each groove located at an outlet of one of the vertical fluid passageways. 15. The burner manifold apparatus of claim 14 wherein the outlet of the vertical fluid passage of the manifold base and the corresponding groove at the top of the manifold base coincide with the linear inlet of the manifold burner mount fluid passage. 8. The burner manifold device of claim 7, wherein the plate has a linear through array, the lines of the linear array coincident with the linear inlet of the manifold burner mount fluid passage and the outlet of the vertical fluid passage of the manifold base. 17. The burner of claim 16, wherein the aperture of the plate is smaller in size than the axis of the vertical fluid passageway such that the plate acts as a pressure plate for symmetrically and evenly distributing fluid throughout the manifold base. Manifold device. 8. The burner manifold device of claim 7, further comprising a fixing element mounted on top of the manifold burner mount to secure the burner thereto. 19. The burner manifold device of claim 18, wherein the securing element includes a pair of clamps detachably fixed to one side of the top of the manifold burner mount to secure the burner over the manifold burner mount fluid passageway. 20. The burner manifold device of claim 19, wherein the clamps each have an outer edge and an inner edge, the inner edge having a shoulder coupled with a burner mounted to the manifold burner mount. 21. The burner manifold device of claim 20, wherein the inner edge of each clamp has a tapered surface tapering from the top of the manifold burner mount. 20. The burner manifold device of claim 19, further comprising a spring mounted between the manifold burner mount and each clamp. 8. The burner manifold device of claim 7, wherein the manifold base, plate and manifold burner mount are generally rectangular. 24. The burner manifold device of claim 23, wherein the burner manifold device comprises a plurality of burner mounts, a plurality of plates and a single manifold, wherein the single manifold has a thickness between the front wall and the rear wall that is greater than the thickness of the burner mount and the plate. And accordingly a plurality of burner mount / plate combinations can be mounted to the manifold. 8. The burner manifold device of claim 7, wherein the fluid inlet port is located on the front wall of the manifold. 8. The burner manifold device of claim 7, wherein the fluid inlet port is located on a rear wall of the manifold. 8. The burner manifold device of claim 7, wherein the first set of fluid inlet ports is located on the front wall of the manifold and the second set of fluid inlet ports is located on the rear wall of the manifold. The method of claim 1, further comprising a plurality of manifold elements in a stack configured such that the fluid passage extends through and terminates at the fluid outlet, wherein the manifold elements are in fluid communication with each other through the fluid passage, wherein each manifold element is A burner manifold device, characterized in that the top manifold element has the largest number of fluid passages, with the fluid passages converging at the fluid outlet, with a larger number of fluid passages than the stacked manifold elements. 29. The burner manifold device of claim 28, wherein each manifold element comprises at least one fluid inlet port. 30. The burner manifold device of claim 29, wherein the bottom manifold element has a single fluid inlet port and the remaining manifold element has two fluid inlet ports. 31. The burner manifold device of claim 30, wherein in the remaining manifold element, fluid is divided evenly between two fluid inlet ports. 30. The burner manifold device of claim 29, wherein the fluid passage is linear and extends vertically through the manifold element. 33. The burner manifold device of claim 32, wherein the outermost fluid passage of each manifold element is in communication with a corresponding fluid inlet port, and the inner fluid passage is isolated from the outermost fluid passage. 34. The burner manifold device of claim 33, wherein the fluid passageway of the neighboring manifold element is vertically aligned. 34. The burner manifold device of claim 33, wherein the inner fluid passageway is a rectangular vertical slot. 30. The burner manifold device of claim 29, wherein the fluid passageway is symmetric about a central fluid passageway. 2. The apparatus of claim 1, further comprising a tapered portion having a first end defining the fluid outlet and a second end defining the fluid inlet, wherein the first end has a smaller surface area than the second end. Burner manifold device. 38. The burner manifold apparatus of claim 37, wherein the selected one of the fluid passages is closed to inhibit passage of the fluid. 2. The apparatus of claim 1, further comprising: a taper having a first end defining the fluid inlet and a second end having a smaller surface area than the first end; And And an upper portion having a first end in fluid communication with the second end of the tapered portion and a second end defining the fluid outlet. And the fluid passage extends through the tapered portion and the upper portion for transferring fluid from the first end of the tapered portion to the second end of the upper portion. 40. A burner manifold device according to claim 39, wherein said upper portion extends coplanar with the tapered portion. 40. The burner manifold device of claim 39, wherein the burner manifold is molded by an extrusion process. 40. The burner manifold device of claim 39, wherein the burner manifold is molded by a high temperature drawing process. 40. The burner manifold device of claim 39, wherein the selected one of the fluid passages is plugged. 44. The burner manifold device of claim 43, wherein said selected fluid passageway is filled with a solid material. 44. The burner manifold device of claim 43, wherein the solid material is at least one of epoxy and silicone. 40. The burner manifold device of claim 39, wherein the burner manifold device comprises a glass material. 40. The burner manifold device of claim 39, wherein the burner manifold device comprises a ceramic material. 40. The burner manifold device of claim 39, wherein the burner manifold device comprises a silica material. 40. The burner manifold device of claim 39, wherein the top is cylindrical. As a method of manufacturing a burner manifold used in a chemical vapor deposition process, And extruding the plastic composite of the honeycomb matrix at least partially through the tapered portion such that the first end of the manifold has a smaller surface area than the second end of the manifold. 51. The method of claim 50, prior to the extrusion step, And filling the honeycomb matrix with a filler material. The method of claim 50, wherein after the extrusion step, Removing filler material from the honeycomb matrix; Sintering the honeycomb matrix; And And plugging the selected channel of the honeycomb matrix with a different filling material. 53. The method of claim 52, after the plugging step, And further comprising sealing a burner at the first end of the manifold. The structure of the burner manifold assembly used in the chemical vapor deposition process, A manifold having a fluid passageway and a plurality of fluid inlet ports; A plurality of burner mounts mounted to the manifold and having a fluid passage in fluid communication with the fluid passage of the manifold; And And a plurality of flow restrictors located between the manifold and each burner mount. Wherein the burner mounts each have a linear array of slots thereon for discharging fluid, the slots of the burner mounts linearly coinciding with the slots of neighboring burner mounts. 55. The apparatus of claim 54, wherein the plurality of flow restrictors comprises a plurality of pressure plates with apertures, the apertures coinciding with the manifold fluid passages and the burner mount fluid passages to discharge the fluid stream from the manifold to the burner mount. A structure of a burner manifold assembly. A burner manifold assembly for delivering reactants to the combustion section of a chemical vapor deposition process, A burner manifold device comprising a fluid inlet, a fluid outlet, and a plurality of fluid passages extending between the fluid inlet and the fluid outlet, the fluid passages converging toward each other from the fluid inlet to the fluid outlet; And A burner mounted to said burner manifold device, said burner having at least one slot and orifice linear array, said linear array in fluid communication with a fluid passageway at said fluid outlet.