BR9916203A - Burner collector apparatus for use in a chemical vapor deposition process - Google Patents

Burner collector apparatus for use in a chemical vapor deposition process

Info

Publication number
BR9916203A
BR9916203A BR9916203-2A BR9916203A BR9916203A BR 9916203 A BR9916203 A BR 9916203A BR 9916203 A BR9916203 A BR 9916203A BR 9916203 A BR9916203 A BR 9916203A
Authority
BR
Brazil
Prior art keywords
fluid
burner
collector
fluid passages
manifold
Prior art date
Application number
BR9916203-2A
Other languages
Portuguese (pt)
Inventor
David Francis Dawson-Elli
Daniel Warren Hawtof
William Joseph Kiefer
Xiaodong Fu
John Stone Iii
John Forest Wight Jr
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of BR9916203A publication Critical patent/BR9916203A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/047—Re-forming tubes or rods by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/52—Nozzles for torches; for blow-pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
    • F23D14/583—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration of elongated shape, e.g. slits
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/02—Elongated flat flame or slit-nozzle type
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/101—Flame diffusing means characterised by surface shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/104—Grids, e.g. honeycomb grids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/10—Burner material specifications ceramic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2213/00—Burner manufacture specifications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/14—Special features of gas burners
    • F23D2900/14001—Sealing or support of burner plate borders

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Gas Burners (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

Patente de Invenção para <B>"APARELHO DE COLETOR DE QUEIMADOR PARA USO EM PROCESSO DE DEPOSIçãO DE VAPOR QUìMICO"<D>. Um aparelho de coletor de queimador (10) para distribuição de reagentes para um local de combustão de um processo de deposição de vapor químico, inclui admissões de fluido (32a, 32b), descargas de fluido (49), e uma pluralidade de passagens de fluido (50) que se estendem entre as mesmas. As passagens de fluido (50) convergem umas em direção às outras a partir das admissões de fluido para as descargas de fluido. Uma concretização inclui uma base de coletor (12), uma placa de pressão (14), e uma montagem de coletor de queimador (16) para montagem a estes de um queimador micro-usinado (58). As passagens de fluido (50) internas à base do coletor, são configuradas para distribuírem simetricamente o fluido para a montagem de queimador de coletor. O fluido é, em seguida, canalizado através de passagens de fluido na montagem de queimador de coletor. As passagens de fluido convergem, ainda que permaneçam fluidamente isoladas umas das outras, e as passagens de fluido criam uma série linear para produção de correntes lineares de fluido. Alternativamente, o aparelho de coletor de queimador pode incluir uma pluralidade de elementos de coletor em um arranjo empilhado. Nesta concretização, os elementos de coletor estão configurados para produzirem uma série linear de passagens de fluido no topo da pilha, aumentando o número de passagens de fluido em cada nível da pilha próxima ao topo. Como ainda uma alternativa adicional, o coletor de queimador pode ser produzido por extrusão de um composto particulado através de uma matriz, para produzir um coletor tendo passagens de fluido neste. O coletor extrudado apresenta geralmente uma seção afilada a qual um queimador pode ser montado.Invention Patent for <B> "BURNER COLLECTOR APPLIANCE FOR USE IN CHEMICAL VAPOR DEPOSITION PROCESS" <D>. A burner collector apparatus (10) for dispensing reagents to a combustion site of a chemical vapor deposition process, includes fluid inlets (32a, 32b), fluid discharges (49), and a plurality of fluid (50) extending between them. The fluid passages (50) converge towards each other from the fluid inlets to the fluid discharges. One embodiment includes a manifold base (12), a pressure plate (14), and a burner manifold assembly (16) for assembling a micro-machined burner (58) thereto. The fluid passages (50) internal to the collector base are configured to symmetrically distribute the fluid for the collector burner assembly. The fluid is then channeled through fluid passages in the manifold burner assembly. The fluid passages converge, even though they remain fluidly isolated from each other, and the fluid passages create a linear series for producing linear fluid streams. Alternatively, the burner collector apparatus may include a plurality of collector elements in a stacked arrangement. In this embodiment, the collector elements are configured to produce a linear series of fluid passages at the top of the stack, increasing the number of fluid passages at each level of the stack near the top. As yet an additional alternative, the burner manifold can be produced by extruding a particulate compound through a matrix, to produce a manifold having fluid passages therein. The extruded collector generally has a tapered section to which a burner can be mounted.

BR9916203-2A 1998-12-17 1999-12-01 Burner collector apparatus for use in a chemical vapor deposition process BR9916203A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11276798P 1998-12-17 1998-12-17
PCT/US1999/028305 WO2000036340A1 (en) 1998-12-17 1999-12-01 Burner manifold apparatus for use in a chemical vapor deposition process

Publications (1)

Publication Number Publication Date
BR9916203A true BR9916203A (en) 2001-09-04

Family

ID=22345738

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9916203-2A BR9916203A (en) 1998-12-17 1999-12-01 Burner collector apparatus for use in a chemical vapor deposition process

Country Status (10)

Country Link
EP (1) EP1144913A4 (en)
JP (1) JP2002532632A (en)
KR (1) KR20010086107A (en)
CN (1) CN1330753A (en)
AU (1) AU3106100A (en)
BR (1) BR9916203A (en)
CA (1) CA2355941A1 (en)
ID (1) ID29926A (en)
TW (1) TW418303B (en)
WO (1) WO2000036340A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6743011B2 (en) * 2001-12-19 2004-06-01 Corning Incorporated Multi-layer burner module, adapter, and assembly therefor
US8857216B2 (en) * 2012-05-31 2014-10-14 Corning Incorporated Burner modules, methods of forming glass sheets, and glass sheets formed thereby
US9599333B2 (en) * 2013-11-08 2017-03-21 Air Products And Chemicals, Inc. Burner retraction system
CN109928612B (en) * 2017-02-24 2021-08-06 天津富通集团有限公司 Method for manufacturing optical fiber preform

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US192460A (en) * 1877-06-26 Joseph s
US2054601A (en) * 1934-07-21 1936-09-15 Alexander F Jenkins Tip for oxy-acetylene torches
US2496923A (en) * 1947-03-21 1950-02-07 John D Walters Tip structure for gas torches
FR2333628A1 (en) * 1975-12-01 1977-07-01 Vergnon Pierre Blank for drawing long optical fibres - made by flame hydrolysis of silicon- and metal dopant- cpds., using multichannel burner
US4136828A (en) * 1977-06-27 1979-01-30 Corning Glass Works Oxide depositing ribbon burner
FR2602309B1 (en) * 1986-07-30 1988-11-10 Soudure Autogene Francaise STEEL CUTTING NOZZLE WITH DOUBLE HEATER CROWN
TW359943B (en) * 1994-07-18 1999-06-01 Silicon Valley Group Thermal Single body injector and method for delivering gases to a surface
WO1998001705A1 (en) * 1996-07-08 1998-01-15 Corning Incorporated Gas-assisted atomizing device

Also Published As

Publication number Publication date
EP1144913A1 (en) 2001-10-17
EP1144913A4 (en) 2004-12-15
AU3106100A (en) 2000-07-03
WO2000036340A1 (en) 2000-06-22
CA2355941A1 (en) 2000-06-22
JP2002532632A (en) 2002-10-02
TW418303B (en) 2001-01-11
ID29926A (en) 2001-10-25
KR20010086107A (en) 2001-09-07
CN1330753A (en) 2002-01-09

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Legal Events

Date Code Title Description
B11A Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing
B11Y Definitive dismissal acc. article 33 of ipl - extension of time limit for request of examination expired