EP1144913A4 - Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur - Google Patents

Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur

Info

Publication number
EP1144913A4
EP1144913A4 EP99965064A EP99965064A EP1144913A4 EP 1144913 A4 EP1144913 A4 EP 1144913A4 EP 99965064 A EP99965064 A EP 99965064A EP 99965064 A EP99965064 A EP 99965064A EP 1144913 A4 EP1144913 A4 EP 1144913A4
Authority
EP
European Patent Office
Prior art keywords
manifold
burner
fluid
fluid passages
passages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99965064A
Other languages
German (de)
English (en)
Other versions
EP1144913A1 (fr
Inventor
David F Dawson-Elli
Xiaodong Fu
Daniel W Hawtof
William J Kiefer
John Stone Iii
John F Wight Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP1144913A1 publication Critical patent/EP1144913A1/fr
Publication of EP1144913A4 publication Critical patent/EP1144913A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/047—Re-forming tubes or rods by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/52—Nozzles for torches; for blow-pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/48—Nozzles
    • F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
    • F23D14/583—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration of elongated shape, e.g. slits
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/02—Elongated flat flame or slit-nozzle type
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/101—Flame diffusing means characterised by surface shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/104—Grids, e.g. honeycomb grids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/10—Burner material specifications ceramic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2213/00—Burner manufacture specifications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/14—Special features of gas burners
    • F23D2900/14001—Sealing or support of burner plate borders

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Gas Burners (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

Ce collecteur pour brûleur (10), destiné à alimenter en corps réagissants un site de combustion d'un équipement de dépôt chimique en phase vapeur, comprend des orifices d'entrée (32a, 32b) et de sortie (49) de fluides et plusieurs voies de passage pour fluide (50) s'étendant entre ces orifices. Ces voies de passage convergent les unes vers les autres à partir des orifices d'entrée et en direction des orifices de sortie. Dans une réalisation, ce collecteur comporte une assise (12), une plaque de pression (14) et un bloc de montage (16) de brûleur sur lequel monter un brûleur micro-usiné (58). Les voies de passage pour fluide (50), dans l'assise du collecteur, sont conçues pour alimenter systématiquement en fluide le bloc de montage du brûleur du collecteur. Le fluide est alors acheminé par ces voies de passage (50) à destination du bloc de montage du brûleur. Ces voies de passage pour fluide convergent, tout en restant isolées les unes des autres, et elles constituent un réseau linéaire destiné à produire des courants linéaires de fluide. Dans une variante, ce collecteur pour brûleur peut comporter plusieurs éléments de collecteur empilés. Dans cette variante, ces éléments de collecteur sont conçus pour constituer un réseau linéaire de voies de passage pour fluide au sommet de la pile, ce qui augmente le nombre de ces voies de passage à chaque niveau de la pile plus proche du sommet. Dans une autre réalisation, on fabrique le collecteur pour brûleur par extrusion de matériau particulaire composite à travers une filière, de manière à obtenir un collecteur renfermant des voies de passage pour fluide. Ce collecteur extrudé possède, généralement, une section conique sur laquelle peut être monté un brûleur.
EP99965064A 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur Withdrawn EP1144913A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11276798P 1998-12-17 1998-12-17
US112767P 1998-12-17
PCT/US1999/028305 WO2000036340A1 (fr) 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur

Publications (2)

Publication Number Publication Date
EP1144913A1 EP1144913A1 (fr) 2001-10-17
EP1144913A4 true EP1144913A4 (fr) 2004-12-15

Family

ID=22345738

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99965064A Withdrawn EP1144913A4 (fr) 1998-12-17 1999-12-01 Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur

Country Status (10)

Country Link
EP (1) EP1144913A4 (fr)
JP (1) JP2002532632A (fr)
KR (1) KR20010086107A (fr)
CN (1) CN1330753A (fr)
AU (1) AU3106100A (fr)
BR (1) BR9916203A (fr)
CA (1) CA2355941A1 (fr)
ID (1) ID29926A (fr)
TW (1) TW418303B (fr)
WO (1) WO2000036340A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6743011B2 (en) * 2001-12-19 2004-06-01 Corning Incorporated Multi-layer burner module, adapter, and assembly therefor
US8857216B2 (en) * 2012-05-31 2014-10-14 Corning Incorporated Burner modules, methods of forming glass sheets, and glass sheets formed thereby
US9599333B2 (en) * 2013-11-08 2017-03-21 Air Products And Chemicals, Inc. Burner retraction system
CN109928612B (zh) * 2017-02-24 2021-08-06 天津富通集团有限公司 一种光纤预制棒的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2333628A1 (fr) * 1975-12-01 1977-07-01 Vergnon Pierre Procede et equipement pour la production de preformes de fibres optiques
US4136828A (en) * 1977-06-27 1979-01-30 Corning Glass Works Oxide depositing ribbon burner
WO1998001705A1 (fr) * 1996-07-08 1998-01-15 Corning Incorporated Dispositif d'atomisation a l'aide de gaz

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US192460A (en) * 1877-06-26 Joseph s
US2054601A (en) * 1934-07-21 1936-09-15 Alexander F Jenkins Tip for oxy-acetylene torches
US2496923A (en) * 1947-03-21 1950-02-07 John D Walters Tip structure for gas torches
FR2602309B1 (fr) * 1986-07-30 1988-11-10 Soudure Autogene Francaise Buse de coupe siderurgique a double couronne de chauffe
TW359943B (en) * 1994-07-18 1999-06-01 Silicon Valley Group Thermal Single body injector and method for delivering gases to a surface

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2333628A1 (fr) * 1975-12-01 1977-07-01 Vergnon Pierre Procede et equipement pour la production de preformes de fibres optiques
US4136828A (en) * 1977-06-27 1979-01-30 Corning Glass Works Oxide depositing ribbon burner
WO1998001705A1 (fr) * 1996-07-08 1998-01-15 Corning Incorporated Dispositif d'atomisation a l'aide de gaz

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0036340A1 *

Also Published As

Publication number Publication date
AU3106100A (en) 2000-07-03
KR20010086107A (ko) 2001-09-07
EP1144913A1 (fr) 2001-10-17
WO2000036340A1 (fr) 2000-06-22
TW418303B (en) 2001-01-11
JP2002532632A (ja) 2002-10-02
CN1330753A (zh) 2002-01-09
ID29926A (id) 2001-10-25
BR9916203A (pt) 2001-09-04
CA2355941A1 (fr) 2000-06-22

Similar Documents

Publication Publication Date Title
US6736633B1 (en) Burner manifold apparatus for use in a chemical vapor deposition process
US6743011B2 (en) Multi-layer burner module, adapter, and assembly therefor
EP0128013B1 (fr) Appareil pour le filage
AU751971B2 (en) Method for producing metal oxide soot
CN101624722A (zh) 气体分配板及包含此气体分配板的基板处理设备
JPH0647090B2 (ja) フアイバ被覆方法および装置
WO2000036340A1 (fr) Collecteur pour bruleur utilisable dans le cadre d'un processus de depot chimique en phase vapeur
CN105453221A (zh) 外延反应器
JP6149311B2 (ja) バーナモジュール、ガラス板を形成する方法、及びこの方法により形成されたガラス板
MXPA01006311A (en) Burner manifold apparatus for use in a chemical vapor deposition process
US20020094352A1 (en) Bicomponent filament spin pack used in spunbond production
CN100458481C (zh) 光波导构造体、光波导型光组件及光纤阵列
KR101487411B1 (ko) 라이너 및 이를 포함하는 에피텍셜 반응기
CN1022336C (zh) 晶体生长设备
WO2002088792A1 (fr) Ensemble de fibres optiques avec preforme destinee au support des fibres
CN220509982U (zh) 晶舟及炉管设备
JP6542836B2 (ja) 光ファイバプリフォームを作製するための平行スリットトーチ
JP2006002973A (ja) ラインバーナー及びその製造方法
EP0434448B1 (fr) Procédé et dispositif pour le filage de filaments bicomposés et produits fabriqués avec ces filaments
JP2010159170A (ja) ガラス光学素子の製造方法
US20230366127A1 (en) Assembly comprising a center-fluid distributor and a multi-fiber spinneret
CN108535796A (zh) 一种分体式透镜阵列及其制作方法
EP0514084A2 (fr) Procédé et dispositif pour le filage de filaments bicomposés et produits fabriqués avec ces filaments
FI116381B (fi) Menetelmä ja valmistuslaitteisto kuituaihion valmistamiseksi
RU2001119988A (ru) Устройство коллектора горелки для использования в процессе химического осаждения из паровой фазы

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20010618

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RBV Designated contracting states (corrected)

Designated state(s): DE FI FR GB IT NL

A4 Supplementary search report drawn up and despatched

Effective date: 20041103

RIC1 Information provided on ipc code assigned before grant

Ipc: 7C 23C 16/453 B

Ipc: 7C 03B 37/014 B

Ipc: 7F 23D 14/14 A

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20050120