EP1144913A4 - Verteilervorrichtung für brenner zur verwendung in einem gasphasenabscheidungsverfahren - Google Patents
Verteilervorrichtung für brenner zur verwendung in einem gasphasenabscheidungsverfahrenInfo
- Publication number
- EP1144913A4 EP1144913A4 EP99965064A EP99965064A EP1144913A4 EP 1144913 A4 EP1144913 A4 EP 1144913A4 EP 99965064 A EP99965064 A EP 99965064A EP 99965064 A EP99965064 A EP 99965064A EP 1144913 A4 EP1144913 A4 EP 1144913A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- manifold
- burner
- fluid
- fluid passages
- passages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details, e.g. noise reduction means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/047—Re-forming tubes or rods by drawing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
- F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details, e.g. noise reduction means
- F23D14/48—Nozzles
- F23D14/52—Nozzles for torches; for blow-pipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details, e.g. noise reduction means
- F23D14/48—Nozzles
- F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
- F23D14/583—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration of elongated shape, e.g. slits
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/02—Elongated flat flame or slit-nozzle type
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2203/00—Gaseous fuel burners
- F23D2203/10—Flame diffusing means
- F23D2203/101—Flame diffusing means characterised by surface shape
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2203/00—Gaseous fuel burners
- F23D2203/10—Flame diffusing means
- F23D2203/104—Grids, e.g. honeycomb grids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2212/00—Burner material specifications
- F23D2212/10—Burner material specifications ceramic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2213/00—Burner manufacture specifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
- F23D2900/14—Special features of gas burners
- F23D2900/14001—Sealing or support of burner plate borders
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Metallurgy (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Dispersion Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Gas Burners (AREA)
- Chemical Vapour Deposition (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11276798P | 1998-12-17 | 1998-12-17 | |
US112767P | 1998-12-17 | ||
PCT/US1999/028305 WO2000036340A1 (en) | 1998-12-17 | 1999-12-01 | Burner manifold apparatus for use in a chemical vapor deposition process |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1144913A1 EP1144913A1 (de) | 2001-10-17 |
EP1144913A4 true EP1144913A4 (de) | 2004-12-15 |
Family
ID=22345738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99965064A Withdrawn EP1144913A4 (de) | 1998-12-17 | 1999-12-01 | Verteilervorrichtung für brenner zur verwendung in einem gasphasenabscheidungsverfahren |
Country Status (10)
Country | Link |
---|---|
EP (1) | EP1144913A4 (de) |
JP (1) | JP2002532632A (de) |
KR (1) | KR20010086107A (de) |
CN (1) | CN1330753A (de) |
AU (1) | AU3106100A (de) |
BR (1) | BR9916203A (de) |
CA (1) | CA2355941A1 (de) |
ID (1) | ID29926A (de) |
TW (1) | TW418303B (de) |
WO (1) | WO2000036340A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6743011B2 (en) * | 2001-12-19 | 2004-06-01 | Corning Incorporated | Multi-layer burner module, adapter, and assembly therefor |
US8857216B2 (en) * | 2012-05-31 | 2014-10-14 | Corning Incorporated | Burner modules, methods of forming glass sheets, and glass sheets formed thereby |
US9599333B2 (en) * | 2013-11-08 | 2017-03-21 | Air Products And Chemicals, Inc. | Burner retraction system |
CN109928612B (zh) * | 2017-02-24 | 2021-08-06 | 天津富通集团有限公司 | 一种光纤预制棒的制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2333628A1 (fr) * | 1975-12-01 | 1977-07-01 | Vergnon Pierre | Procede et equipement pour la production de preformes de fibres optiques |
US4136828A (en) * | 1977-06-27 | 1979-01-30 | Corning Glass Works | Oxide depositing ribbon burner |
WO1998001705A1 (en) * | 1996-07-08 | 1998-01-15 | Corning Incorporated | Gas-assisted atomizing device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US192460A (en) * | 1877-06-26 | Joseph s | ||
US2054601A (en) * | 1934-07-21 | 1936-09-15 | Alexander F Jenkins | Tip for oxy-acetylene torches |
US2496923A (en) * | 1947-03-21 | 1950-02-07 | John D Walters | Tip structure for gas torches |
FR2602309B1 (fr) * | 1986-07-30 | 1988-11-10 | Soudure Autogene Francaise | Buse de coupe siderurgique a double couronne de chauffe |
TW359943B (en) * | 1994-07-18 | 1999-06-01 | Silicon Valley Group Thermal | Single body injector and method for delivering gases to a surface |
-
1999
- 1999-12-01 EP EP99965064A patent/EP1144913A4/de not_active Withdrawn
- 1999-12-01 JP JP2000588546A patent/JP2002532632A/ja not_active Withdrawn
- 1999-12-01 CN CN99814570A patent/CN1330753A/zh active Pending
- 1999-12-01 BR BR9916203-2A patent/BR9916203A/pt not_active Application Discontinuation
- 1999-12-01 KR KR1020017007404A patent/KR20010086107A/ko not_active Application Discontinuation
- 1999-12-01 CA CA002355941A patent/CA2355941A1/en not_active Abandoned
- 1999-12-01 AU AU31061/00A patent/AU3106100A/en not_active Abandoned
- 1999-12-01 ID IDW00200101288A patent/ID29926A/id unknown
- 1999-12-01 WO PCT/US1999/028305 patent/WO2000036340A1/en not_active Application Discontinuation
- 1999-12-17 TW TW088122682A patent/TW418303B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2333628A1 (fr) * | 1975-12-01 | 1977-07-01 | Vergnon Pierre | Procede et equipement pour la production de preformes de fibres optiques |
US4136828A (en) * | 1977-06-27 | 1979-01-30 | Corning Glass Works | Oxide depositing ribbon burner |
WO1998001705A1 (en) * | 1996-07-08 | 1998-01-15 | Corning Incorporated | Gas-assisted atomizing device |
Non-Patent Citations (1)
Title |
---|
See also references of WO0036340A1 * |
Also Published As
Publication number | Publication date |
---|---|
AU3106100A (en) | 2000-07-03 |
KR20010086107A (ko) | 2001-09-07 |
EP1144913A1 (de) | 2001-10-17 |
WO2000036340A1 (en) | 2000-06-22 |
TW418303B (en) | 2001-01-11 |
JP2002532632A (ja) | 2002-10-02 |
CN1330753A (zh) | 2002-01-09 |
ID29926A (id) | 2001-10-25 |
BR9916203A (pt) | 2001-09-04 |
CA2355941A1 (en) | 2000-06-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20010618 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FI FR GB IT NL |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20041103 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7C 23C 16/453 B Ipc: 7C 03B 37/014 B Ipc: 7F 23D 14/14 A |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20050120 |